SENSIRION SFC5400 Mass Flow Controllers User Guide
- June 3, 2024
- SENSIRION
Table of Contents
SENSIRION SFC5400 Mass Flow Controllers
This selection guide will help you find the right Sensirion mass flow controller (MFC), depending on your requirements.
The heart of Sensirion mass flow controllers (MFCs) is a high-precision sensor element with state-of-the-art signal processing on a single chip. Thanks to this technology, Sensirion MFCs achieve unmatched ratings for speed, accuracy and dynamic range. Sensirion technology reaches superior accuracy and repeatability, especially at low flow rates. The devices show no drift and hence never require recalibration. All MFCs are also available in flow meter configurations (SFM series).
Performance line
Best performance and reconfigurability
- Highest accuracy
- Choice of interfaces and fittings
- Samples available via online distribution
OEM line
OEM applications
- Optimized OEM performance
- Digital and downmount (manifold)
- From 50 pcs/year
Full-scale flows available
Comparison Table
Evaluation kit EK-F5x for the SFX5xxx series
- Fastest and most convenient way to evaluate the SFC5XXX and SFM5XXX families
- Ideal for evaluation starting with SFC5500
- Available via distributors
- Kit contains a power supply and connection cable + plug-and-play SFC Viewer software
- RS485 USB interface
Additional information
| SFC5500 | SFC5400 | SFC5460 | SFC5300 | SFC5330 | |
|---|---|---|---|---|---|
| Size 1 W H L | 29 91 115 mm | 25 91 126 mm | 29 51 105 mm | ||
| 25 80 70 mm | 25 66 48 mm | ||||
| Weight | 270 g | 280 g | 255 g | 170 g | 95 g |
| Electrical connector | DB9 | DB9 | JST 4-pin | DB9 |
JST 4-pin
Communication interface
| ****
RS485
IO-Link DeviceNet
| RS485
Analog voltage Analog current IO-Link DeviceNet
| ****
RS485
Calibration gas 4| He, H2, Ar, O2, N2, air, CO2, N2O, CH4| non-
aggressive gases 2 3
Dynamic range| 1000:1 (100% to 0.1% of full-scale flow)
Pressure resistance| up to 10 bar
- Size depends on the fittings. See datasheet for exact dimensions.
- Configured with different gasses/flow ranges: see MOQ in datasheet.
- The gases used should be compatible with the wetted parts of the sensor. Typically, it should not be used with gases that attack silicon, or sealing materials. A detailed overview of wetted materials is available as a table in the datasheet.
- A software tool is provided to manually calibrate the MFC for non-standard gases.
Definitions
Pressure drop is generated when a gas passes through a mass flow
controller. It is important to verify that at the maximum required flow rate
for a given gas, the inlet pressure is higher than the pressure drop;
otherwise the desired maximum flow rate cannot be reached. Increasing the
valve size lowers the pressure drop, trading off against the low flow
accuracy/resolution. See the definition for valve size.
Valve size is selected by Sensirion based on the desired gas and flow
range. However, Sensirion can take into account specific customer wishes, e.g.
if a certain pressure drop has to be achieved. Valve size selection is a
trade-off between low-flow control, pressure resistance and pressure drop
across the MFC. A smaller valve allows for better flow control at low flow
rates, but induces a higher pressure drop across the MFC. On the other hand, a
large valve induces a lower pressure drop across the MFC, but has worse flow
control at low flow rates. In addition, smaller valves are more robust against
differential pressure across the MFC (inlet vs outlet pressure).
Calibration gases can have different accuracies. For example, the SFC5500
sensor is factory-calibrated with air/N2, He and CO2, while the calibration of
the remaining gases is derived from a gas property simulation (model). The
accuracy for the calibrated gases is higher than for those derived from a
model. More information can be found in the datasheet of each product or by
contacting your sensor expert. A software tool is also provided to manually
calibrate the MFC for gases that are not included in the library.