INFICON LDS3000 Modular Leak Detector User Manual

INFICON LDS3000 Modular Leak Detector

Product Information

Specifications

• Product Name: LDS3000, LDS3000 AQ Mass spectrometer module
• Catalog No.: 560-300, 560-600
• Software Version: MS-Modul 2.72
• Manufacturer: INFICON GmbH
• Address: Bonner Strasse 498, 50968 Cologne, Germany

About these Instructions

This document applies to the software version stated on the title page. Product names may occur in the document, which are added for identification purposes only and belong to the respective owner of the rights. This operating manual describes the installation and operation of the LDS3000 mass spectrometer module. It is available in two variants:

Other Associated Documents

• Operating Manual Control Unit CU1000 jina54
• Operating Instructions Bus Module jiqb10
• Operating Instructions I/O Module jiqc10
• Operating Instructions XL Sniffer Adapter jinxa54
• Interface Protocols jira54

Target Groups

These operating instructions are intended for the owner and for technically qualified personnel with experience in leak detection technology and integration of leak detection devices in leak detection systems. In addition, the installation and use of the device require knowledge of electronic interfaces.

Warnings

• DANGER: Imminent hazard resulting in death or serious injuries
• WARNING: Hazardous situation resulting in potential death or serious injuries
• CAUTION: Hazardous situation resulting in minor injuries
• NOTICE: Hazardous situation resulting in damage to property or the environment

Definition of Terms

Mention of helium in the manual: The device is a helium leak detector. If you want to use a forming gas instead of helium to detect the hydrogen contained therein, the information for helium also applies to hydrogen.

Accumulation: In connection with leak testing, it is about the enrichment of tracer gas over a definable period of time. This allows the detection of small leak rates without the use of a vacuum chamber. Helium or forming gas can be used. When you talk about AQ in this manual, it’s about accumulation mode. It is only available for devices in the AQ version.

Product Usage Instructions

Shipment, Transport, Storage

Ensure proper packaging and handling during shipment and transport to avoid any damage to the product. Store the product in a dry and safe environment to prevent any moisture or physical damage.

Resetting the Settings

To reset the settings of the LDS3000 or LDS3000 AQ, follow these steps:

1. Access the settings menu on the device.
2. Select the “Reset” option.
3. Confirm the reset action when prompted.

Warning and Error Messages

The LDS3000 and LDS3000 AQ may display warning and error messages during operation. Refer to the user manual for a detailed list of these messages and their corresponding actions to be taken.

Illustration of Error Codes with the Help of the Status LEDs

For a visual representation of error codes and their corresponding status LEDs, refer to the user manual. The manual provides detailed information on how to interpret the status LEDs and troubleshoot any issues.

FAQs

• Q: What is the software version supported by the LDS3000 mass spectrometer module?
  • A: The software version supported by the LDS3000 mass spectrometer module is MS-Modul 2.72.
• Q: What are the target groups for these operating instructions?
  • A: The target groups for these operating instructions are the owner and technically qualified personnel with experience in leak detection technology and integration of leak detection devices.

Translation of the original operating instructions
LDS3000, LDS3000 AQ
Mass spectrometer module
Catalog No. 560-300, 560-600 From software version MS-Modul 2.72

jiqa54en1-10-(1911)

INFICON GmbH Bonner Strasse 498 50968 Cologne, Germany

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About these instructions | 1

About these instructions

This document applies to the software version stated on the title page. Product names may occur in the document, which are added for identification purposes only and belong to the respective owner of the rights. This operating manual describes the installation and operation of the LDS3000 mass spectrometer module. It is available in two variants:
· LDS3000 · LDS3000 AQ (accumulation), switchable to all other operating modes.

1.1 Other associated documents

Operating Manual Control Unit CU1000 jina54

Operating instructions bus module

jiqb10

Operating instructions I/O module

jiqc10

Operating instructions XL sniffer adapter jinxa54

Interface protocols

jira54

1.2 Target groups
These operating instructions are intended for the owner and for technically qualified personnel with experience in leak detection technology and integration of leak detection devices in leak detection systems. In addition, the installation and use of the device require knowledge of electronic interfaces.
1.3 Warnings
DANGER Imminent hazard resulting in death or serious injuries

WARNING Hazardous situation resulting in potential death or serious injuries

CAUTION Hazardous situation resulting in minor injuries

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NOTICE Hazardous situation resulting in damage to property or the environment

1.4 Definition of terms
Mention of helium in the manual
The device is a helium leak detector. If you want to use a forming gas instead of helium to detect the hydrogen contained therein, the information for helium also applies to hydrogen.
Accumulation
In connection with leak testing, it is about the enrichment of tracer gas over a definable period of time. This allows the detection of small leak rates without the use of a vacuum chamber. Helium or forming gas can be used. When you talk about “AQ” in this manual, it’s about accumulation mode. It is only available for devices in the AQ version.
Automatic tuning / mass setting
This function adjusts the mass spectrometer so that a maximum leak rate indicator is achieved. In order to detect a maximum ion current with the ion detector, the control computer adjusts the voltage for accelerating the ions within the selected mass range accordingly. During each calibration, there is an automatic adjusted.
Operation mode
The leak detector distinguishes between the operation modes “vacuum” and “sniffing”. With the operation mode “vacuum”, generally the tracer gas flows into the test object. The pressure in the test object is less than the ambient pressure. In the operation mode “sniffing” the tracer gas flows out from the test object and is extracted with a sniffer probe. The pressure in the test object is greater than the ambient pressure.
FINE
FINE denotes the connection to the turbo molecular pump for inlet pressures up to 0.4 mbar. This is also used for the “sniffing” operation mode.
Forming gas
Forming gas is a collective term for gas mixtures of nitrogen and hydrogen.

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About these instructions | 1
GROSS
GROSS donates the connection to the turbo molecular pump with the lowest sensitivity. This allows high inlet pressures (up to 15 mbar).
Internal helium background
The measurement system of the leak detector also contains a residual amount of helium. This creates an internal measurement signal component (background signal), which overlaps the display of the leak right from the beginning and thus disturbs the search for leaks. So that this background signal can be suppressed, an internal “background suppression” can be activated with the factory settings.
Minimum detectable leak rate
The minimum detectable leak rate which can be detected by the leak detector under ideal conditions (< 5 x 10-12 mbar l/s).
ULTRA
ULTRA denotes the connection to the turbo molecular pump for the measurement range with the highest sensitivity at inlet pressures below 0.4 mbar (adjustable).
Background signal
Helium or hydrogen (as part of water) are natural components of air. Operation mode “Vacuum”: Before any leak detection, a certain amount of the adjusted tracer gas is already in the volume on the surfaces of the test chamber, supply lines, and even in the leak detector itself. This certain amount of tracer gas generates a measurement signal which is called the “Background signal”. The ongoing evacuation of the test chamber continuously reduces this background signal. Operation mode “Sniffing”: Ambient air is continuously fed into the leak detector via the sniffer line. The amount of helium or hydrogen occurring naturally in air creates a constant background signal.
Foreline pressure
Pressure of the backing pressure between the turbo molecular pump and the backing pump.
ZERO
There is helium that is weakly bound to the surfaces of a specimen as a natural part of the ambient air and is pumped bit by bit into the measurement system of the leak detector. It produces a slowly decreasing measurement signal.

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If you want to hide this background signal or the display of existing leaks, then use the ZERO function.

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2 Safety

Safety | 2

Improper use

2.1 Intended use
The device is a modular leak detector for installation in industrial leak testing unit systems. The tracer gases that can be measured with the device are helium and hydrogen (forming gas). The LDS3000 is suitable for overpressure and negative pressure testing, whereby in addition to the test in vacuum, a local test with a sniffer line is also possible. The LDS3000 AQ is intended for the measurement of test gases when enriched in an external measuring chamber, but can also be rebuilt for all other purposes. You must install, operate and service the device only in compliance with these operating instructions. Comply with application limits, see “Technical Data”. Avoid the following, non-intended uses:
· Use in radioactive areas · Pumping down of explosive, aggressive, corrosive, flammable, toxic or reactive
substances · Pumping down of condensible fluids and vapors · Aspiration of liquids into the device · Operation with excessive gas loads · Operation with excessive foreline pressure · Operation at too high ambient temperature · Flushing with excessive flushing rate · Usage of the pumps in plants where sudden loads and vibrations or periodic
forces act upon the pump

2.2 Owner requirements
The following notes are for companies or any person who is responsible for the safety and effective use of the product by the user, employee or third party.
Safety conscious operation
· Operate the device only if it is in perfect technical condition and has no damage. · Only operate the device in accordance with this instruction manual, in a safety and
risk conscious manner. · Adhere to the following regulations and observe their compliance:

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Safety

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­ Intended use ­ General applicable safety and accident prevention regulations ­ International, national and local standards and guidelines ­ Additional device-related provisions and regulations · Only use original parts or parts approved by the manufacturer. · Keep this instruction manual available on site.
Personnel qualifications
· Only instructed personnel should be permitted to work with and on the device. The instructed personnel must have received training on the device.
· Make sure that authorized personnel have read and understood the operating instructions and all other applicable documents.
2.3 Duties of the operator
· Read, observe, and follow the information in this manual and in the work instructions provided by the owner. This concerns in particular the safety and warning instructions.
· Always observe the complete operating instructions for all work. · If you have any questions about operation or maintenance that are not answered
in this manual, please contact Customer Service.

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Safety | 2

2.4 Dangers

Hazards due to liquids and chemicals
Permanent magnets Dangers from electric power
Kinetic energy
Injury from bursting objects

The measuring instrument was built according to the state-of-the-art and the recognized safety regulations. Nevertheless, improper use may result in risk to life and limb on the part of the user or third parties, or damage to the measuring instrument or other property may occur.
Liquids and chemical substances can damage the instrument.
· Comply with application limits, see “Technical Data”.
· Do not suck up liquids with the instrument.
· Avoid sniffing gases, such as hydrogen, above the lower explosion limit. The allowable composition of venal gas mixtures can be read in the safety data sheets of the respective manufacturers.
· Only use the device away from areas with a risk of explosions.
Permanent magnets in the device pose a hazard to health. Cardiac pacemaker may be affected in their function.
· Keep a sufficient distance from the device.
· Always comply with the distances recommended by the pacemaker manufacturer without fail.
The device is operated with electrical voltages of up to 24 V. Inside the device there are voltages that are considerably higher. There is a danger to life from the contact of conductive parts inside the device.
· Disconnect the device from the power supply prior to any installation and maintenance work. Make sure that the electric power supply cannot reconnected without authorization.
· Before starting the leak test, disconnect electrically operated test objects from the power supply.
The device contains electric components that can be damaged from high electric voltage.
· Make sure before connecting to the power supply that the supply voltage is 24 V +/- 5 %.
If the rotating parts in the turbo molecular pump are blocked because of some damage, high centrifugal forces must be absorbed. If this is not successful, the mass spectrometer module will breakaway and possibly cause damage to property or personal injury.
· Make sure the mount of the mass spectrometer module is able to absorb a braking torque of 820 Nm.
There is risk of injury from bursting objects causes by a test object notwithstanding the vacuum pressure when a test object is connected.
· Take appropriate precautions.

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Danger due to imploding measuring chamber

An external measuring chamber connected to an LDS3000 AQ is pumped off at approximately 60 sccm. Within normal measurement times (2 – 30 seconds) no dangerous negative pressure is generated.
If the measuring chamber is leak-proof, but not vacuum resistant, and continues to pump, it may implode. This can occur, for example, in a 1-liter measuring chamber after about 10 minutes.
· Do not continue pumping a measuring chamber after the measuring time has expired.
· Consider suitable protective measures!

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Shipment, Transport, Storage | 3

3

Shipment, Transport, Storage

Scope of delivery Transport

Item Mass spectrometer module1) Plug for 24V connection Pressure sensor PSG500 Self-locking nuts Plug for Output Plug for Gauges Exit Inlet module (LDS3000 AQ version only) Adapter DN16 with throttle2) (LDS3000 AQ version only) Instruction manual USB flash drive with instructions, 3D drawings and videos

Quantity 1 1 1 4 1 1 1 1 1 1

1.) Includes either 560-300 LDS3000 or 560-600 LDS3000 AQ (accumulation). 2.) See “Select components and connect [} 36]”.

Please check the delivery for completeness after receiving the device.

NOTICE Damage due to unsuitable packaging material
Transport in unsuitable packaging material can damage the device. Transport the device only in the original packaging material. Keep original packaging material.

Storage

NOTICE Damage to property due to missing attachment of the vibration damper
Secure the vibration damper with the transport screws to prevent damage due to vibration.
Always store the device in compliance with the technical data, see “Technical Data”.

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4 |

Description

4 Description

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4.1 Function

Objective Mode AQ (Accumulation)
Device Interfaces Other accessories

The mass spectrometer module is a detection device for the test gases helium and hydrogen. Integrated in test systems, the device is used to detect gas being emitted from a test object in order to indicate leaks.
The device can be used both as a vacuum leak detector and a sniffer leak detector. Sniffer lines with different lengths are available for the sniffer mode.
In order to be able to detect small leak rates without the use of a vacuum chamber, devices for the AQ mode are connected to an external measuring chamber. In the external measuring chamber, the tracer gas is enriched (accumulation). The test object filled with helium or forming gas under pressure is brought into the measuring chamber or pressurized in the measuring chamber. If there is a leak in the test object, the concentration of helium or forming gas in the measuring chamber will increase. This increase is measured and output as a leak rate.
The mass spectrometer module is part of the leak detection system LDS3000 and LDS3000 AQ. Es can be operated in a test system together with a bus module or I/O module and a data cable without additional INFICON accessories.
The MSB box outputs data on digital interfaces to the control unit CU1000, I/O module IO1000 or bus module BM1000.
With the available accessories XL sniffer adapter and sniffer line SL3000XL, it is possible to capture leaks at a larger distance from the expected leak if the detection limit is deteriorated (operation in “high flow” mode).

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4.2 Device setup

4.2.1 Entire device (LDS3000)

Description | 4

Fig. 1: Mass spectrometer module LDS3000
1 Connection block. Connections for test system, backing pump, pressure sensor PSG500, internal calibration leak and sniffer line, see also “Connection block [} 22]”.
2 Pressure sensor PSG500 for measuring the pressure of the backing pump 3 Preamplifier of the mass spectrometer module 4 Turbo molecular pump with cooling unit 5 MSB box. Interfaces to the mass spectrometer module (see “MSB box
[} 22]”) 6 Inverter for turbo-molecular pump 7 Fasteners for installing the mass spectrometer module in a test system 8 Rating plate containing mass spectrometer module specifications

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4.2.2 Entire device (LDS3000 AQ)
In the accumulation version, the mass spectrometer module is integrated into a special measurement setup by hardware and software.

5

12 3

4

1

6 7

10

49

48

Fig. 2: Accumulation: Overview of the structure
1 Measuring chamber with fan. Not included in delivery. 2 ISO-KF DN16 (Screw- in). Not included in delivery. You can obtain the screw-in via the INFICON
homepage under “Vacuum Components”. 3 Inlet module 4 Corrugated tube. Not included in delivery. You can obtain the corrugated hose via the INFICON
homepage under “Vacuum Components”. 5 Blank flange 6 Mass spectrometer module 7 Power supply 24 V 8 Dry backing pump with separate power supply. Not included in delivery. You can order the “Diaphragm
pump LDS AQ” from INFICON under the order number 560-630, furthermore the “DIN Rail Power supply 24 V, 10 A” under the order number 560-324. 9 GROSS throttle flange 10 Pressure sensor PSG500 for measuring the inlet pressure 11 Not illustrated: ISO-K centering rings and seals. Not included in delivery. You can get them from INFICON’s homepage under “Vacuum Components”.

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Description | 4
1

34
2
3
Fig. 3: Mass spectrometer module (execution accumulation) 1 Pressure sensor PSG500 for measuring the inlet pressure 2 GROSS throttle flange with connecting hose to backing pump 3 Corrugated hose to the measuring chamber 4 ULTRA connections blind flanged

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4 | Description

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1

2

Fig. 4: Inlet module
1 Electrical connection for the inlet module. The inlet module does not require an electrical connection for connection to a measuring chamber. When using a two-chamber system, the inlet module valve can be switched by applying 24V. Further information can be obtained from the INFICON Service if required.
2 Filter. A cleaning of the filter is not provided. Available as a replacement filter from INFICON under the order number 200009701 (10 pieces). Dirty filters replace with a socket wrench, 8 mm. Just unscrew the filter. Do not loosen any more screws. Calibrate after changing the filter.
The inlet module is connected to the measuring chamber with the filter side.

Accessories of the customer

To complete the measurement setup, missing parts can be provided by the customer.
If you want to use your own backing pump, make sure it is a dry backing pump with a gas flow greater than 60 sccm and a base pressure of less than 5 mbar. It should have its own power supply.
If you want to use your own control unit, please note that the wizard for performing the measurement settings, calibrating and setting the ZERO function is only located on the INFICON CU1000 control unit. See also “Select components and connect [} 36]”.

Optional accessories from INFICON

With the exception of the measuring chamber, the required parts are also offered by INFICON.
· Control unit CU1000 (including wizard for carrying out important settings)
· I/O1000 (The I/O module is a device interface between a leak detector and an external controller)

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Description | 4
· BM1000 (The bus module is a device interface between e.g. the MSB box of the mass spectrometer module LDS3000 and an external controller.)
· Corrugated hose, available on the homepage of INFICON under “Vacuum components”.
· ISO-KF connections (eg screw-in flange), available on the homepage of INFICON under “Vacuum components”.
· ISO-K centering rings and seals, available on the homepage of INFICON under “Vacuum components”.
· DIN rail power supply 24V, 10A from INFICON (catalog number 560-324) for the dry backing pump of INFICON
· Dry backing pump from INFICON (catalog number 560-630)
Connection for hose ID 10 mm Connection for silencer (optional)

Connection Plus (24 V) Fig. 5: INFICON backing pump

Connection minus

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4 | Description
4.2.3 Connection block

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Fig. 6: Connection block 1 Connection ULTRA 2 Connection FINE/SNIFFER
4.2.4 MSB box

3 Connection GROSS/FOREPUMP

Fig. 7: MSB box connections OUTPUT Connection for gas ballast and three valves
Connection plug arrangement 1 Valve 2 (gas ballast), 24 V, max.1 A 2 Valve 3 (not used, reserve) 3 Valve 4 (not used, reserve) 4 Valve 6 (not used, reserve) 5 GND SNIFFER Electrical connection for the sniffer line

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Description | 4

GAUGES, EXT Connection for optional external service gauges (0 – 10 V / 0 – 20 mA) for INFICON service
Connection plug arrangement 1 +24-V-Output, max. 200 mA 2 Input for P3 service gauge, 0 – 10 V 3 GND 4 Reference to input for P3 service gauge 5 20 mA input for P3 service gauge

1 (See also Figure MSB box)
Connection for pressure sensor PSG500, calibration leak and suppressor on the preamplifier (premounted, three-core cable)

24VDC
Connection for 24 V power supply pack used to supply mass spectrometer module, control unit, I/O module and bus module.

2 (See also Figure MSB box)
Connection for inverter turbo molecular pump and fan turbo molecular pump (premounted, two-core cable)

ION SOURCE Connection for ion source

3 (See also Figure MSB box) Connection for preamplifier Power LED / Status LED The Power LED and Status LED indicate the status of the device.

Power LED Off Green Green Green

Status LED Red Blue Orange Green

Meaning Device not ready for operation Turbo molecular pump is starting Emission is switched on Emission is stable

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Power LED Green

Status LED Violet

Green

Error codes of the status LED

Green, flashes slowly

Green, flashes fast

Green, flashes

Off

Green

Green, flashes

Meaning Rotation speed of the turbo molecular pump is not within the normal range Different activities of the unit
Supply voltage < 21.6 V Supply voltage > 26.4 V Software is being updated Software is being updated

SERVICE RS232 connection for INFICON Service

I/O / ANYBUS

CONTROL UNIT Connection for I/O or bus module or control unit The connections “I/O Anybus” and “Control Unit” have the same functions. You have the choice of connecting: ­ Control unit CU1000 + I/O module IO1000 ­ Control unit CU1000

• bus module BM1000

STATUS Status LED The Power LED and Status LED indicate the status of the unit.

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Description | 4
4.2.5 Markings on the device
DANGER Permanent magnets in the device pose a hazard to health. Cardiac pacemaker may be affected in their function.
Keep a sufficient distance from the device. Always comply with the distances recommended by the pacemaker manufacturer
without fail.

Device cannot be scrapped with the normal domestic waste.

4.3 Technical data

Mechanical data

Electrical data
Power input

560-300, 560-600 max. 10 A

Physical data
Response time in Sniffer mode Maximum inlet pressure Run-up time Detectable gases Minimum detectable leak rate vacuum mode Minimum detectable leak rate sniffer mode Detectable masses Ion source

560-300, 560-600 Gross: < 5 s, Fine/Ultra: < 1 s 0,2 mbar – 18 mbar 150 s Helium, hydrogen 5E-12 mbar l/s
1E-7 mbar l/s
4He, H2, mass 3 (e.g. H-D, 3He or H3) 2 longlife Iridium filaments, Yttrium- oxide coated

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Minimum detectable leak rate forming gas or helium Measurement range Pressure in test chamber Time constant of the leak rate signal

560-600 (AQ mode) 1 x 10-7 mbar l/s
6 decades 1 atm < 1 s

Ambient conditions

560-300, 560-600

Permissible ambient temperature (during 10 °C … 45 °C operation)

Max. altitude above sea level

2000 m

Permissible magnetic field max.

7 mT

Max. relative humidity above 40 °C

50%

Max. relative humidity from 31 °C to 40 °C

80% … 50% (decreasing linearly)

Max. relative humidity to 40 °C

80%

Storage temperature

-20 °C … 60 °C

Pollution degree

II

4.4 Factory settings

Parameter AO upper limit exp. Operation mode
AQ chamber volume AQ measurement time Zero time factor AQ Bus module address Clogged pressure capillary monitoring – with XL Sniffer Adapter (low flow) Broken pressure capillary monitoring – with XL Sniffer Adapter (low flow) Clogged pressure capillary monitoring – with XL Sniffer Adapter (High Flow) Broken pressure capillary monitoring – with XL Sniffer Adapter (High Flow)

Factory setting 1 x 10-5 Vacuum AQ 1) 1 l 1) 10 s 1) 4 1) 126 0.4 mbar 0.2 mbar 2 mbar 0.6 mbar
150 mbar
400 mbar

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Description | 4

Parameter Pressure unit (interface) Emission Filter leak rate threshold Filter ZERO time Filter mode Gas percentage in H2 (M3, He) Gas ballast I/O module log Calibration request Calibration factor VAC/SNIF Mx (for vacuum, sniffing and all masses) Cathode selection Compatibility mode Config. Analog output 1 Config. Analog output 2 Config. Analog output scaling Configuration of digital outputs
Configuration of digital Inputs
Leak rate unit SNIF, (display and interface)

Factory setting mbar On 1 x 10-10 5 s I·CAL 100 % 5 % H2 (-, 100 % He) 1) Off ASCII On 1.0
Auto Cat1 LDS3000 AQ 1) Leak rate mantissa Leak rate exponent 0.5 V / decade Pin 1: Trigger 1, inverted Pin 2: Trigger 2, inverted Pin 3: Trigger 3, inverted Pin 4: Trigger 4, inverted Pin 5: Ready Pin 6: Error, inverted Pin 7: CAL request, inverted Pin 8: Open, inverted Pin 1: Select dyn. / normal CAL Pin 2: Sniff Pin 3: Start/Stop, inverted Pin 4: ZERO Pin 5: External CAL Pin 6: Internal CAL Pin 7: Clear Pin 8: ZERO update Pin 9: ­ Pin 10: ­ mbar l/s

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4 | Description

Parameter Leak rate unit VAC, (display and interface) Leak rate upper limit VAC (interface) Leak rate lower limit VAC (interface) Leak rate upper limit SNIF (interface) Leak rate lower limit SNIF (interface) Fan mode Machine factor in standby Machine factor / Sniff factor Mass Module on the I/O connection Nominal state TMP calibration leak external SNIF calibration leak external VAC calibration leak internal Open calibration leak internal Sniffer line detection Sniffer key ZERO Language TMP rotation speed
Trigger level 1 (2, 3, 4)
Preamplifier test at CAL Maintenance warning ZERO with start ZERO mode 1) in AQ mode

Factory setting mbar l/s
1.0 x 10-1 1.0 x 10-12 1.0 x 10-1 1.0 x 10-8 Fan always on Off 1.0 (for all masses) 4 IO1000 On 9.9 x 10-2 9.9 x 10-2 9.9 x 10-2 Off On On English 1500 1000 1) 1 x 10-5 mbar l/s 5 x 10-5 (1 x 10-5) mbar l/s 1) On Off Off Suppress everything

INFICON

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5

Mounting LDS3000

Mounting LDS3000 | 5

5.1 Adjust the position of the connections to the
installation dimensions
Select location
Select the most helium-free environment possible for the measurement setup. For reliable measurements with the device, the helium content in the air must be less than 10 ppm. By nature, air contains 5 ppm (0.0005%) helium.
Mount MSB box
In order to ideally match the installation position space, the MSB box can be turned and rotated. The MSB box is seated in two guide rails and can be pushed into the housing from the left or from the right. It can also be rotated, if necessary, so that the labels are upside down. The locking washer must be released to pull out the MSB box. If the MSB box is to be pushed into housing from the other side, the locking washer must also be tightened on the other side of the housing. An appropriate threaded hole is available.

Fig. 8: Lock
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5 | Mounting LDS3000

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5.2 Installing the mass spectrometer module on the test system
The mass spectrometer module can be mounted in any position.

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Fig. 9: Components of a fastener

1 Hexagon socket head screw

5

M8 x 50

2 Washer

6

3 MO bearing

7

4 Test system

8

You will need:

– Self-locking nuts M8 – Open-end wrench, SW13

– Allen wrench SW6

– Holes for installation inside the test system

Nut M8 (self-locking)
Base frame Spring rubber MSB box guide

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Mounting LDS3000 | 5
In delivery condition, the bearings are attached to the base frame with the hexagon socket screws and transport nuts. Use the supplied self-locking nuts for the installation of the mass spectrometer module ­ not the transport nuts.
The background must be stable.

WARNING Severe injuries due to mass spectrometer module breaking out
If not screwed down properly, the mass spectrometer module can be caused to break out if the rotor of the turbo molecular pump suddenly locks up. This can result in injuries of the most severe kind. Make sure the mount of the mass spectrometer module is able to absorb a braking
torque of 820 Nm.
1 Drill through-holes: ­ X distance: 283 mm ­ Y-distance: 121,5 mm ­ Through hole in sheet: Ø 9 mm ­ Fixing screws: M8 x 50
2 Remove transport nuts. 3 Place the mass spectrometer module on top of the through-holes and screw it
down using the fasteners as shown in the upper figure .
5.3 Select connection ULTRA, FINE, or GROSS
The operation mode of the vacuum connection and the rotation speed of the turbo molecular pump define:
· Minimum detectable leak rate (MDLR) · Constantly permissible inlet pressure (pmax) · Pumping speed (S) The following information applies to the use of helium as a tracer gas. To reach the MDLR, the following conditions must be met: · The LDS3000 must be in operation for at least 20 minutes. · Ambient conditions must be steady (temperature, no vibrations/shocks, clean
environment) · The specimen must be operated with switched-off ZERO until to the background is
stable. The ZERO function may be switched on only after that.

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5 | Mounting LDS3000
Connection

ULTRA FINE GROSS

MDLR: pmax: pmax short-term (< 3 s): S: MDLR: pmax: pmax short-term (< 3 s): S: MDLR: pmax: S:

INFICON

Turbo molecular pump rotation speed

1000 Hz 5 x 10-12 mbar l/s

1500 Hz 1 x 10-11 mbar l/s

0.2 mbar

0.2 mbar

0.2 mbar

0.4 mbar

5 l/s 1 x 10-11 mbar l/s

6 l/s 5 x 10-11 mbar l/s

0.9 mbar

0.4 mbar

0.9 mbar

0.7 mbar

1.8 l/s 1 x 10-9 mbar l/s

2.5 l/s 2 x 10-8 mbar l/s

18 mbar

15 mbar

depends on the backing pump

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Exceedance of the constantly permissible inlet pressure generates the warning “TMP overheating”.
NOTICE Material damage due to pressure surges
Pressure surges exceeding the maximum inlet pressure will damage the mass spectrometer module. – Do not exceed the maximum inlet pressure.
1 Set the operation mode vacuum connection and the rotation speed turbo molecular pump in accordance with the physical vacuum conditions found in the test system.
2 Connect the mass spectrometer module to the “ULTRA”, “FINE” or “GROSS” connections on the vacuum system of the test system.
3 Set the rotation speed of the turbo molecular pump.
5.4 Establish component connection
1 Connect pressure sensor PSG500 to one of the GROSS/FOREPUMP connections.
2 Connect the backing pump to the second GROSS/FOREPUMP connection. 3 For sniffer mode, connect the sniffer line to one of the FINE-/SNIFFER
connections. 4 If available, connect internal calibration leak 560-323 to the second free flange
(FINE or ULTRA) of the vacuum connection.
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Mounting LDS3000 | 5
When using a sniffer valve: For the device to operate correctly upon opening of the sniffer valve, no additional line can be connected between the connection block and the sniffer valve or between the sniffer valve and the sniffer line.
5.5 Establish electrical connections
All electrical connections run from and to the MSB box.
NOTICE Material damage if power supply pack has the wrong specifications or is connected improperly
A power supply pack that has the wrong specifications or is connected improperly can destroy the unit. Use a suitable power supply pack: Use a power supply pack that supplies an output voltage with electrically protective separation, output voltage: 24 V +/- 5%, current capacity: min. 8 A If the short-circuit current of the power supply pack is > 10 A, connect a fuse between power supply pack and mass spectrometer module. Use a power cable with a large enough cross section.
1 Connect the 24 V power cable to the included plug (connections: +24 V on 1+ and GND on 1-).
2 Connect the power cable to the socket “24VDC”. 3 Connect the control unit to the socket “Control Unit”. 4 Connect the I/O or bus module to the Socket “I/O” . 5 Connect pressure sensor PSG500 and, if used, calibration leak 560-323 on the
cable of socket “1”. For socket 1 see “MSB box [} 22]”. 6 Connect the sniffer line to the socket “Sniffer” . 7 Connect gas ballast valve to the socket “Output”.

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6 Mounting LDS3000 AQ (Accumulation)

6.1 Adjust the position of the connections to the
installation dimensions
Select location
Select the most helium-free environment possible for the measurement setup. For reliable measurements with the device, the helium content in the air must be less than 10 ppm. By nature, air contains 5 ppm (0.0005%) helium.
Mount MSB box
In order to ideally match the installation position space, the MSB box can be turned and rotated. The MSB box is seated in two guide rails and can be pushed into the housing from the left or from the right. It can also be rotated, if necessary, so that the labels are upside down. The locking washer must be released to pull out the MSB box. If the MSB box is to be pushed into housing from the other side, the locking washer must also be tightened on the other side of the housing. An appropriate threaded hole is available.

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Fig. 10: Lock

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Mounting LDS3000 AQ (Accumulation) | 6
6.2 Installing the mass spectrometer module on the test system
The mass spectrometer module can be mounted in any position.

Fig. 11: Components of a fastener

1 Hexagon socket head screw

5

M8 x 50

2 Washer

6

3 MO bearing

7

4 Test system

8

You will need:

– Self-locking nuts M8 – Open-end wrench, SW13

– Allen wrench SW6

– Holes for installation inside the test system

Nut M8 (self-locking)
Base frame Spring rubber MSB box guide

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In delivery condition, the bearings are attached to the base frame with the hexagon socket screws and transport nuts. Use the supplied self-locking nuts for the installation of the mass spectrometer module ­ not the transport nuts.

The background must be stable.

WARNING
Severe injuries due to mass spectrometer module breaking out
If not screwed down properly, the mass spectrometer module can be caused to break out if the rotor of the turbo molecular pump suddenly locks up. This can result in injuries of the most severe kind.
Make sure the mount of the mass spectrometer module is able to absorb a braking torque of 820 Nm.
1 Drill through-holes: ­ X distance: 283 mm ­ Y-distance: 121,5 mm ­ Through hole in sheet: Ø 9 mm ­ Fixing screws: M8 x 50
2 Remove transport nuts. 3 Place the mass spectrometer module on top of the through-holes and screw it
down using the fasteners as shown in the upper figure .

6.3 Select components and connect

5

12 3

4

1

6 7

10

49

48

Fig. 12: Accumulation: Overview of the structure 1 Measuring chamber with fan. Not included in delivery.

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Mounting LDS3000 AQ (Accumulation) | 6

2 ISO-KF DN16 (Screw-in). You can obtain the screw-in via the INFICON homepage under “Vacuum Components”.
3 Inlet module 4 Corrugated tube. Not included in delivery. You can obtain the corrugated hose via the INFICON
homepage under “Vacuum Components”. 5 Blank flange 6 Mass spectrometer module 7 Power supply 24 V 8 Dry backing pump with separate power supply. Not included in delivery. You can order the “Diaphragm
pump LDS AQ” from INFICON under the order number 560-630, furthermore the “DIN Rail Power supply 24 V, 10 A” under the order number 560-324. 9 GROSS throttle flange 10 Pressure sensor PSG500 for measuring the inlet pressure 11 Not illustrated: ISO-K centering rings and seals. Not included in delivery. You can get them from INFICON’s homepage under “Vacuum Components”.

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INFICON

ü You have the INFICON mass spectrometer module (accumulation), a corrugated tube and the connections shown.
ü You have a dry backing pump with its own power supply. All dry vacuum pumps can be used with a gas flow of more than 60 sccm at a basic pressure of under 5 mbar. This manual describes how to use the dry INFICON backing pump (catalog number 560-630).
ü You have a suitable measuring chamber. Information about the measuring chamber can be obtained from INFICON. Note that a measuring chamber that is leak-proof but not vacuum-resistant can implode if it is pumped further out than usual measuring times. See also “Carrying out a measurement [} 82]”.
1 Connect the pressure sensor PSG500 to the FINE connector.
2 Connect a corrugated tube to the FINE port on the mass spectrometer module.
3 Connect the open end of the corrugated tube to the measuring chamber via the inlet module.
4 Install the GROSS throttle flange at the GROSS / FOREPUMP port of the mass spectrometer module.
5 Connect the open end of the GROSS throttle flange hose to the backing pump.
6 Establish the electrical connection of the backing pump. When using the INFICON backing pump (catalog number 560-630), proceed as follows: ð Determine if the plus and minus terminals on the terminal block are already connected to cables by the manufacturer.

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+ –
Fig. 13: Connection strip on the dry backing pump of INFICON ð If so, connect plus and minus cables to a DC power source, 24 V +/- 10%, 5 A. ð If not, insert the positive and negative cables with ferrules 8 mm AWG 18 with red insulation into the corresponding terminals and then connect the cables to a DC power source, 24 V +/- 10 %, 5 A.
The backing pump exhaust air opening should be as far as possible from the test chamber.
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See also 2 Entire device (LDS3000 AQ) [} 18]

Mounting LDS3000 AQ (Accumulation) | 6

6.4 Establish electrical connections
All electrical connections run from and to the MSB box.
NOTICE Material damage if power supply pack has the wrong specifications or is connected improperly
A power supply pack that has the wrong specifications or is connected improperly can destroy the unit. Use a suitable power supply pack: Use a power supply pack that supplies an output voltage with electrically protective separation, output voltage: 24 V +/- 5%, current capacity: min. 8 A If the short-circuit current of the power supply pack is > 10 A, connect a fuse between power supply pack and mass spectrometer module. Use a power cable with a large enough cross section.
1 Mount the 24 V power supply cable to the enclosed plug (connections: +24 V on 1+ and GND on 1-).
2 Connect the power supply cable to the “24VDC” socket. 3 Connect the operating unit to the “Control Unit” socket. 4 Connect the I/O or bus module to the “I/O” socket. 5 Connect the pressure sensor PSG500 to the cable of socket 1. For socket 1 see
“MSB box [} 22]”.

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7 |

Operation LDS3000

INFICON

7 Operation LDS3000
You can use the following accessories in combination with the mass spectrometer module:
· Control unit CU1000 · Bus module BM1000 · I/O module IO1000
With the available accessories XL sniffer adapter and sniffer line SL3000XL, it is possible to capture leaks at a larger distance from the expected leak if the detection limit is deteriorated (operation in “high flow” mode). LDS3000 AQ devices can also be used if they are not operated in AQ mode.
Additional information on the control unit, the modules and the XL sniffer adapter is included in the documents:
· Operating Manual Control Unit CU1000 · Operating instructions I/O module IO1000 · Operating instructions bus module BM1000 · Operating instructions XL sniffer adapter · Interface protocols LDS3000 The paths listed in the following sections refer to the operation of the mass spectrometer module with the control unit CU1000. If the bus module or the I/O module is used, the actions must be implemented within the scope of the protocol that is used. The path information for the control unit always starts in the main menu.
WARNING Danger to life and material damage due to unsuitable operating conditions
There is danger to life due to unsuitable operating conditions. The device can become damaged. Avoid changing the position of the device in an abrupt manner. Avoid extreme external vibrations and impact.

7.1 Switching the device on
1 Switch on the backing pump. 2 Establish the power supply to the mass spectrometer module. ð System starts up automatically.

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Operation LDS3000 | 7
ð If an XL Sniffer Adapter and the CU1000 are connected, your will be asked after run-up, whether the “XL Sniffer Adapter” operation mode should be set. This does not apply to devices in AQ mode.
Longer run-up time for devices in AQ mode
To counteract falsification of the measurement results by an increased background value, the warm-up time after switching on is about 10 minutes. Wait at least 60 minutes before determining the peak or before calibrating. See also “Carrying out a measurement [} 82]”.

7.2 Default settings

Language selection

Select the display language. The factory setting is English. (The display on the handle of the SL3000XL sniffer line shows messages in English instead of in Russian and Chinese.)
German, English, French, Italian, Spanish, Portuguese, Russian, Chinese, Japanese

Setting date and time

Control unit LD protocol ASCII protocol
Setting the date Format: DD.MM.YY

Settings > Set up > Control unit > Language Command 398 *CONFig:LANG

Control unit LD protocol ASCII protocol
Setting the time Format: hh: mm

Settings > Date/Time > Date Command 450 *HOUR:DATE

Control unit LD protocol ASCII protocol

Settings > Date/Time > Time Command 450 *HOUR:TIME

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7 | Operation LDS3000

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7.3 Selecting a unit for the leak rate

Leak rate unit display

Selecting the leak rate unit in the display for vacuum or sniff

0

mbar l/s (factory setting)

1

Pa m3/s

2

atm cc/s

3

Torr l/s

4

ppm (not VAC, not AQ)

5

g/a (not VAC, not AQ)

6

oz/yr (not VAC, not AQ)

7

sccm (AQ only)

Control unit LD protocol
ASCII protocol

Display > Units (display) > Leak rate device VAC (SNIF) Command 396 (vacuum) Command 396 (sniffing) Command CONFig:UNIT:VACDisplay Command CONFig:UNIT:SNDisplay

Leak rate unit interface

Selecting the leak rate unit of the interfaces for vacuum or sniff

0

mbar l/s (factory setting)

1

Pa m3/s

2

atm cc/s

3

Torr l/s

4

ppm (not VAC)

5

g/a (not VAC)

6

oz/yr (not VAC)

7

sccm (AQ only)

Control unit LD protocol ASCII protocol

Settings > Set up > Interfaces > Units (interface) > Leak rate device VAC (SNIF) Command 431 (vacuum) Command 432 (sniffing) Command CONFig:UNIT:LRVac Command CONFig:UNIT:LRSnif

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Operation LDS3000 | 7

Pressure unit interface

7.4 Select device for pressure

Selecting the pressure device of the interfaces

0

mbar (factory setting)

1

Pa

2

atm

3

Torr

Control unit LD protocol ASCII protocol

Settings > Set up > Interfaces > Units (interface) > Pressure unit Command 430 (Vacuum/Sniff) Command *CONFig:UNIT:Pressure

7.5 Select Compatibility Mode
To retrofit an existing leak detection system LDS1000 / LDS2010 with a LDS3000, activate the appropriate compatibility mode:
· Compatibility mode for LDS1000 or
· Compatibility mode for LDS2010
When changing to a compatibility mode all parameters are to be reset to factory settings and the device is to be restarted. The language is displayed according to the factory setting. To change the language, see “Default settings [} 41]”.
If you want to use the LDS3000 later in normal operation mode, make sure to save your parameters on a USB flash drive, see “Loading and saving parameters [} 59]”. You can load the saved parameters again after you have switched to normal operation.
Compatibility mode for LDS1000 Compatibility mode for LDS2010 Mode LDS3000 Mode XL Sniffer Adapter Mode AQ (This mode is only available for AQ devices. It is preset for AQ devices. Switching to other modes is possible.)

Control unit LD protocol ASCII protocol

Settings > Set up > Compatibility > Compatibility mode Command 2594 (dec) Command *CONFig:COMP

The following table shows the functional differences between and common features of LDS2010 and LDS3000:

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7 | Operation LDS3000

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LDS2010

LDS3000

Trigger outputs

without joint reference

with joint reference

other outputs

with joint reference

with joint reference

Trigger 1 (sniffer LED, relay exit, audio signal)

Control of sniffer LED, PWM audio Control of sniffer LED, audio

outputs an the control unit for active outputs an the control unit for active

speakers

speakers

Limit Low / High (serial interfaces, display, analogue output)

Limit Low affects all outputs, Limit High only the display

separately adjustable for interface protocols, display and analog outputs

Gas ballast (3 settings)

OFF: Switches the gas ballast valve 0 = Off

of the pump module off.

1 = on, but controllable via digital

ON: Switches the gas ballast valve input on IO1000

of the pump module on until the next mains-off.

2 = on, but not controllable via digital input on IO1000

If “CAL fashion” is unequal to 3

(menu item 26), the gas ballast

valve can be controlled with digital

input DynCAL.

F-ON: Fixed on enables switching the gas ballast valve on permanently (power failure-proof and independent of the digital inputs).

Control mode

LOCAL, RS232, RS485

None, control is also possible from all control locations.

LDS1000 compatibility mode 9.2 other functions

Default values and error messages (default values are output via interface, the touchscreen shows the original message – -> reason: new hardware can cause errors that did not exist with previous models)

Correcting the leak rate in Standby adjustable (yes/no) (machine factor)

adjustable (yes/no)

ZERO with start

starting with V1.02 like LDS2010

Opening the sniffer valve

in SNIF after start

in SNIF after start

Rotation speed of turbo molecular only 2 rotation speeds adjustable pump

Adjustable via serial interface from 750 Hz to 1500 Hz, via operator unit 1000 Hz and 1500 Hz

Address RS485

Yes, because bus capable

No, because not bus capable

Sniffer key on/off

selectable

selectable

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Operation LDS3000 | 7

LDS2010

LDS3000

Default value for int. calibration leak

1E-15 mbar l/s

9.9E2 mbar l/s

Default value ext. calibration leak VAC/SNIF mode

1E-7 mbar l/s

9.9E2 mbar l/s

Setting range for int. calibration leak

10E-7

1E-9 … 9.9E-1 mbar l/s

Machine factor adjustment

manually

manually/automatically

Machine / sniff factor value range

Machine factor: 1E-3…9.9E+3 Sniffer factor: 1E-3…9.9E+3

Machine factor: 1E-4…1E+5 Sniffer factor: 1E-4…1E+4

Pressure: Capillary surveillance 20

available, pressure adjustable

Analog output

fixed characteristics

freely configurable

Calibration request

Preamplifier temperature change 5 K or 30 min

Preamplifier temperature change 5 K or 30 min. or TMP rotation speed changed

Pressure / leak rates units (VAC/ yes SNIF) for all interfaces

Control unit and rest separated

User permissions

3 levels over PIN on the control unit 4 levels through control unit or

or key switch

optional key switch

Key-operated switch

permanently installed

can, if required, be connected externally, see “Assigning the digital inputs of the I/O module [} 95]” (Key switch)

7.6 Select operation mode
The device has the following operation modes: · Vacuum mode · Sniffer mode · XL Sniffer Adapter (sniffing mode with a high flow rate, XL Sniffer Adapter required). The device automatically switches over to the “XL Sniffer Adapter” if you connect an XL Sniffer Adapter.
The LDS3000 AQ is preset to “AQ”. If necessary, you can reset “AQ” under “Compatibility Mode”.

Select operation mode

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7 | Operation LDS3000
0 1 2

VAC (vacuum) SNIF (sniffing) Operation mode XL Sniffer Adapter

INFICON

Control unit
LD protocol ASCII protocol

Operation mode vacuum operation or sniffing mode: Main menu > Features > VAC / SNIF
Operation mode XL Sniffer Adapter: Settings > Set up > Accessories > XL Sniffer Adapter Command 401 Command *CONFig:MODE

7.7 Select gas type (mass)

The machine, calibration and sniff factor are dependent on the configured mass and are saved in the mass spectrometer module.

2

H2 (Hydrogen, forming gas)

3

3He or deuterated hydrogen (HD), not in AQ mode

4

4He (Helium) (factory setting)

Control unit LD protocol ASCII protocol

Settings > Mass Command 506 with value 2 (3, 4) Command *CONFig:MASS 2 (3, 4)

For devices with AQ mode: The easiest way to change the gas type is via the wizard.

7.8 Calibrating the device
7.8.1 Time and general preferences
NOTICE Incorrect calibration because of operating temperature that is too low
Calibrating the device in the cold state can deliver incorrect measurement results. For optimum accuracy the device should have been turned on at least 20 minutes previously.

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Operation LDS3000 | 7
It is recommended to calibrate the device once per shift in the desired operating modes and for the desired gases. Thereafter you can switch between the operation modes and gases without re-calibrating. Additionally applicable for operation with the XL Sniffer Adapter: The device should be calibrated once per shift in LOW FLOW and in HIGH FLOW. Thereafter you can switch between the different flows without re-calibrating. Calibration is also required after the following actions:
· Sniffer line replacement · Filter replacement · Prompt for calibration by the system

Switching off the preamplifier test

The device tests the installed preamplifier during calibration. You can switch off of the amplifier test. This increases the speed of the calibration, but reliability drops off.

0

OFF

1

ON

Control unit
LD protocol ASCII protocol

Settings > Set-up> MS-module > Preamplifier > Test > Preamplifier test with CAL Command 370 Command *CONFig:AMPTest (ON,OFF)

Enabling calibration request

If Calibration request is enabled, the device will prompt the operator to perform a calibration 30 minutes after it has been switched on and in case of temperature changes greater than 5°C.

0

OFF

1

ON

Control unit
LD protocol ASCII protocol

Functions > CAL > Settings > CAL request. > Calibration request or Settings > Set-up> CAL request. > Calibration request Command 419 *CONFig:CALREQ (ON,OFF)

Calibration warning Wrn650

The warning message Wrn650 “Calibration within the first 20 minutes is not recommended” can be allowed or suppressed.

0

OFF (suppressed)

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7 | Operation LDS3000
1

ON (allowed)

INFICON

Control unit
LD protocol ASCII protocol

Functions > CAL > Settings > CAL request. > Calibration warning W650 or Settings > Set-up> CAL request. > Calibration warning W650 Command 429 *CONFig:CALWarn ON (OFF)

Calibration Features

The device can be calibrated in all its operation modes. A distinction is made between internal and external calibration.
Internal calibration can be performed using the optional built-in test leak. A separate calibration leak is needed for external calibration.
External calibrations have the advantage that they can be performed under conditions such as pressure and measuring time, which are similar to the later measurement.

internal external external-dynamic

– with internal calibration leak – autotune (mass adjustment) – determine the calibration factor with the steady signal of the test leak – amplifier test – determination of the background. Adjust if necessary after calibrating the machine or sniffer factor, see “Setting machine and sniff factor [} 57] ” – Not with the XL Sniffer Adapter
– Vacuum operation: with external calibration leak in test equipment – Sniffing mode: with external calibration leak – Consideration of the characteristics of the testing equipment (pressure, partial flow ratio) – Amplifier test – Autotune (mass adjustment) – Determine the calibration factor after the signal of the calibration leak has settled – Determination of the background
– with external calibration leak in test equipment – Consideration of the characteristics of the testing equipment (pressure, partial flow ratio, measuring time) – Measuring time according to the dynamic waveform – Amplifier test

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Operation LDS3000 | 7
– Determine the calibration before the signal of the test leak has settled – Determination of the background

7.8.2 Internal Calibration Configuration and Start

Prerequisite for the calibration with the internal calibration leak is the one-time entry of the leak rate of the calibration leak.

Leak rate of internal calibration leak

Define the leak rate of the calibration leak you wish to use during calibration. Calibration will not be possible unless you enter the value here.
1E-9 … 9.9E-1 mbar l/s

Control unit
LD protocol ASCII protocol

Settings > Configuration> Operating Mode > Vacuum > Reference leak int. > Calibration leak internal or Features > CAL > Settings > Calibration leak int.
Command 394
Command *CONFig:CALleak:INT

Opening/closing the calibration leak

Opening/closing the calibration leak. This is automatically carried out with the internal calibration. If the calibration leak is opened using the control unit or the interface, then no internal calibration can take place. The calibration leak must first be closed again in this case.

0

close

1

Open

Control unit LD protocol ASCII protocol

Functions > Valves > Open internal calibration leak Command 12 Command *STATus:VALVE:TestLeak (ON, OFF)

Start calibration Operating unit: Features > CAL > Intern LD protocol: 4, Parameter 0 ASCII protocol: *CAL:INT IO1000: CAL internal, see “Settings for I/O module IO1000 [} 87]”
ð Calibration is performed automatically.

7.8.3 External Calibration Configuration and Start
Requirement for the calibration with the external calibration leak is the one- time entry of the leak rate of the calibration leak and an open calibration leak.

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In vacuum mode, the calibration leak is installed in or on the test system and opened before calibration.

In Sniffer mode, sniffing with the sniffer line is always performed on the open calibration leak.

Leak rate of external

Define the leak rate of the calibration leak you wish to use during calibration.

calibration leak vacuum Calibration will not be possible unless you enter the value here.

A specific leak rate must be set for each gas (mass).

1E-9 … 9.9E-2 mbar l/s

Leak rate of external calibration leak sniffing

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Vacuum > Ext. calibration leak > Mass 2 (3, 4) > external calibration leak VAC H2 (M3, He)
or
Functions > CAL > Settings > Ext. calibration leak (for current mass in selected unit) Command 390 Command *CONFig:CALleak:EXTVac (for current mass in selected unit)

Define the leak rate of the calibration leak you wish to use during calibration. Calibration will not be possible unless you enter the value here. A specific leak rate must be set for each gas (mass). 1E-9 … 9.9E-2 mbar l/s

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniffing > Ext. calibration leak > Mass 2 (3, 4) > external calibration leak SNIF H2 (M3, He)
or
Functions > CAL > Settings > Ext. calibration leak (for current mass in selected unit) Command 392 Command *CONFig:CALleak:EXTSniff (for current mass in device selected unit)

LD and ASCII protocol: The status must be queried via: Command 260 or *STATus:CAL
1 Open external calibration leak or hold sniffer line to calibration leak. 2 Start measurement. 3 Wait until leak rate signal is tuned and stable.

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Operation LDS3000 | 7
4 Start calibration: Control unit: Features > CAL > Extern LD protocol: 4, Parameter 1 ASCII protocol: CAL:EXT IO1000: see the figure below. ð Request to “close calibration leak”
5 Vacuum mode: Close calibration leak inside the test system. Sniffer mode: Remove sniffer line from calibration leak. ð Leak rate signal decreases.
6 Confirm measured background value is stable: Control unit: “OK” LD protocol: 11, Parameter 1 ASCII protocol: CAL:CLOSED IO1000 see the figure below.
ð Calibration is completed if: Control unit: Old and new calibration factor are displayed LD protocol LD instruction 260 provides 0 (READY) ASCII protocol: Command *STATus:CAL? provides IDLE IO1000 see the figure below.

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Fig. 14: External calibration with IO1000 using the example of sniffer line SL3000XL, description of PLC inputs and outputs: “Assigning inputs and outputs [} 88]”
7.8.4 Start external dynamic calibration
To taken into account the special time and pressure conditions of a test bench a dynamic calibration can be performed. No auto tuning takes place in the calibration mode. The time between opening the external calibration leak and activating the calibration can be selected so that it is optimally suited to the normal measurement sequence of the plant. Requirements: One-time input of the leak rate of the calibration leak and an open calibration leak, see “External Calibration Configuration and Start [} 49]”. LD and ASCII protocol: The status must be queried via: Command 260 or *STATus:CAL?
1 Open external calibration leak or hold sniffer line to calibration leak.
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Operation LDS3000 | 7
2 Start measurement.
3 Wait until the leak rate signal is optimally suited to the normal measurement sequence of the plant.
4 Start calibration: Control unit: Features > CAL > Dynamic LD protocol: 4, Parameter 2 ASCII protocol: CAL:DYN IO1000 see the figure below. ð Request to “close calibration leak”
5 Vacuum mode: Close calibration leak inside the test system. Sniffer mode: Remove sniffer line from calibration leak. ð Leak rate signal decreases.
6 Confirm measured background value: Control unit: “OK” LD protocol: 11, Parameter 1 ASCII protocol: CAL:CLOSED IO1000 see the figure below.
ð Calibration is completed if: Control unit: Old and new calibration factor are displayed LD protocol LD instruction 260 provides 0 (READY) ASCII protocol: Command *STATus:CAL? provides IDLE IO1000 see the figure below.

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Fig. 15: Fig. 7 External dynamic calibration with IO1000 using the example of sniffer line SL3000XL, description of PLC inputs and outputs:”Assigning inputs and outputs [} 88]”
7.8.5 External calibration with sniffer line SL3000XL
The procedure complies with that of external or external dynamic calibration in sniffer mode. Low flow and high flow must be calibrated separately. To ensure optimal calibration with hydrogen or forming gas for low flow and high flow, the calibration leak must meet the following requirements: ­ 100 % H2: LR > 1 x 10-4 ­ Forming gas (95/5): LR > 2 x 10-3 For calibration, we recommend our calibration leak with catalog number 12322.

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Operation LDS3000 | 7

7.8.6 Check the calibration
To check whether a re-calibration is necessary, check the already existing.

7.8.6.1 Calibration using the internal calibration leak test
The test is only possible with the setting “Mass 4”.
Start test: Control unit: Features > CAL > Test int. LD protocol: 4, Parameter 4 ASCII protocol: *CAL:PROOFINT IO1000: CAL test internal, see “Settings for I/O module IO1000 [} 87]”
ð Test is performed automatically.

7.8.6.2 Calibration using the external calibration leak test
LD and ASCII protocol: The status must be queried via: Command 260 or STATus:CAL
1 Open external calibration leak or hold sniffer line to calibration leak.
2 Wait until leak rate signal is tuned and stable.
3 Start test: Control unit: Functions > CAL > Test ext. LD protocol: 4, Parameter 5 ASCII protocol: CAL:PROOFEXT IO1000 compare figure in “External Calibration Configuration and Start [} 49]”.
ð Request to “close calibration leak”
4 Vacuum mode: Close calibration leak inside the test system. Sniffer mode: Remove sniffer line from calibration leak.
ð Leak rate signal decreases.
5 Confirm measured background value is stable: Control unit: “OK” LD protocol: 11, Parameter 1 ASCII protocol: *CAL:CLOSED IO1000 compare figure in “External Calibration Configuration and Start [} 49]”.
ð Test is completed if: Control unit: Result is displayed LD protocol: As with the other steps, the status must be queried ASCII protocol: As with the other steps, the status must be queried IO1000 compare figure in “External Calibration Configuration and Start [} 49]”.

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7.8.7 Entering the calibration factor
The calibration is usually determined by the appropriate calibration routine. Therefore, it is usually not necessary to adjust the calibration factor manually. An incorrectly set calibration inevitably leads to wrong leak rate indicator!

7.8.7.1 Calibration factor sniffing
Entry of the calibration factors for masses 2, 3, 4 in low flow and in high flow. The values will be overwritten during the next calibration. “High Flow-” or XL settings are available only in operation mode “XL Sniffer Adapter”. The calibration factor for low flow also applies to sniffer applications that are not carried out in the operation mode “XL sniffer adapter”. The calibration factors are managed separately to earth and to “High Flow” and “Low Flow”. 0.01 … 100

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniffing > Calibr. factor > mass 2 (3, 4, 2 XL, 3 XL, 4 XL) >calibration factor SNIF H2 (M3, He, XL H2, XL M3, XL He)
Commands 519, 521
Command FACtor:CALSniff or FACtor:CALSXL for the current mass

7.8.7.2 Calibration factor vacuum
Also applies to devices in AQ mode. Entry of calibration factors for masses 2, 3, 4. The values will be overwritten during the next calibration. 0.01 … 5000

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Vacuum > Calibr. factor > mass 2 (3, 4)

calibration factor VAC H2 (M3, He) Command 520 Command *FACtor:CALVac

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Operation LDS3000 | 7
7.8.8 Setting machine and sniff factor
The internal calibration will only calibrate the measurement system of a mass spectrometer module that is uncoupled from the test system. If the measurement system is operated in parallel to an additional pump system after an internal calibration though (following the partial flow principle), the measurement system will indicate a leak rate that is too low based on the partial flow ratio. With the help of a corrective machine factor for vacuum mode and a sniff factor for sniffer mode, the measurement system indicates the actual leak rate. The factors are taken into consideration along wit the ratio of effective pumping speed of the measurement system in a comparison to the pumping speed of the measurement system on the test system.

7.8.8.1 Setting machine and sniff factor manually

ü Mass spectrometer module calibrated internally.

1 Measure external calibration leak using the test system.

ð The device indicates a leak rate that is too low based on the partial flow ratio.

2 Setting machine or sniff factor, see below.

Setting the machine factor

ð The device indicates the actual leak rate.

Devices in AQ mode:
The machine factor “1” is preset. This setting should not be changed.

Corrects a possible deviation between internal and external calibration in vacuum mode.
Should be at value 1.00 without the option internal calibration leak. After the value is changed, the leak rate resulting from the change is displayed. This simplifies adjustment.
Value range 1E-4…1E+5

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Vacuum > Machine factor > Mass 2 (3, 4)

machine factor VAC H2 (M3, He) Command 522 Command *FACtor:FACMachine

Setting the sniff factor

Corrects a possible deviation between internal and external calibration in sniffer mode
Value range 1E-4…1E+4

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Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniffing > Sniff factor Mass 2 (3, 4) > Sniff factor H2 (M3, He) Command 523 Command *FACtor:FACSniff

7.8.8.2 Setting machine and sniff factor using machine calibration
ü Internal calibration leak connected. ü External calibration leak installed in or on the test system and closed. ü Leak rates of internal and external calibration leak are entered. ü LD and ASCII protocol: The status must be queried via: Command 260 or
STATus:CAL
1 Start machine calibration. Control unit: Functions > CAL > Machine (Sniffer) LD protocol 4, Parameter 3 ASCII protocol: CAL:FACtor_Machine, CAL:FACtor_Snif IO1000 see figure in “External Calibration Configuration and Start [} 49]” ð Internal calibration is performed automatically. ð Request “Open calibration leak” (external calibration leak).
2 Open external calibration leak and valve (if present) between the leak detector and the system.
3 Confirm tuned and stable leak rate signal. Control unit: “OK” LD protocol: 11, Parameter 1 ASCII protocol: CAL:ACKnowledge IO1000 see figure in “External Calibration Configuration and Start [} 49]” ð Request “Close calibration leak” (external calibration leak).
4 Close external calibration leak. Leave existing valve open.
5 Confirm tuned and stable leak rate signal. Control unit: “OK” LD protocol: 11, Parameter 1 ASCII protocol: *CAL:CLOSED IO1000 see figure in “External Calibration Configuration and Start [} 49]”
ð Machine or sniff factor is determined.

7.9 Starting and stopping the measurement
Switches between measuring and standby operation START = Standby –> Measuring

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STOP = Measuring –> Standby

Operation LDS3000 | 7

Enable/disable correction of the leak rate in Standby

Control unit LD protocol ASCII protocol

Functions > Start/Stop Commands 1, 2 Command STArt, STOp

During the measurement ZERO is possible. The trigger outputs switch depending on the leak rate and the trigger threshold. Sniff is possible. External calibration is started during the activation of digital input CAL.

During standby ZERO is not possible. The output at the trigger outputs is: Leak rate value exceeded threshold. Sniff is not possible. Internal calibration is started during the activation of digital input CAL.

In vacuum mode, the machine factor can be activated or deactivated during the correction of the leak rate for Standby. The sniffer valve is closed in Sniffer mode in Standby. The Sniff factor is therefore canceled in this setting.

0

OFF (machine factor is not considered in Standby.)

1

On (machine factor is considered in Standby.)

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > LR correction > Machine factor in standby Command 524 ­

7.10 Loading and saving parameters
You can use a USB flash drive on CU1000 to backup and restore the control unit and mass spectrometer module parameters. Save parameter: “Functions > Data > Parameter > Save > Save parameter” Loading parameters: ü The currently set compatibility mode must match the compatibility mode in the
parameter file. See also Select Compatibility Mode [} 43]. “Functions > Data > Parameter > Load > Load parameter”

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7.11 Copying measurement data, deleting measurement data
The measurement data can be saved to a USB flash drive with CU1000. · “Functions > Data > Recorder > Copy > Copy files”
The measurement data can be deleted on the CU1000. · “Functions > Data > Recorder > Delete > Delete files”

7.12 Suppressing gas backgrounds with “ZERO”

functions

“ZERO” can be used to suppress undesired helium backgrounds. If “ZERO” is enabled, the currently measured leak rate value will be interpreted as a helium background and subtracted from all subsequently measured values. The background value suppressed by “ZERO” is adjusted automatically if the background changes inside the device. The background value is automatically adjusted depending on the set ZERO time, except for filter setting I·CAL, see “Measurement result display with signal filters [} 61]”.

Activating and deactivating ZERO</ variable>

Activating/deactivating “ZERO”

0

ON

1

Off

Control unit LD protocol ASCII protocol

Function > ZERO > ZERO Command 6 Command *ZERO

Activating and deactivating “ZERO with start”

ZERO with Start suppresses the helium background automatically when a measurement is started.

0

ON

1

Off

Setting ZERO mode

Control unit LD protocol ASCII protocol

Settings > ZERO/Filter > ZERO > ZERO with start Command 409 Command *CONFig:ZEROSTART

Determines the degree of the helium background suppressed by ZERO (only with filter “fixed” and “2-stage”).

0

all decades

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Operation LDS3000 | 7

1

1 ­ 2 decades

2

2 ­ 3 decades

3

2 decades

4

3 ­ 4 decades

5

19/20 of the helium background are suppressed

Control unit LD protocol ASCII protocol

Settings > ZERO/Filter > ZERO > ZERO > mode Command 410 Command *CONFig:DECADEZero

Deactivating the ZERO key on the sniffer

Deactivation of the ZERO key (ZERO adjustment) prevents that the measurement is influenced inadvertently.

0

ON

1

Off

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniffing > Sniffer > Keys > ZERO key sniffer Command 412 Command *CONFig:BUTSniffer

7.13 Measurement result display with signal filters

Select signal filter

With the signal filters, the leak rate indicator regarding slope and noise behavior can be influenced.

­ Generally select signal filter I·CAL for the operation mode “Vacuum”.

­ Generally select signal filter I-Filter for the operation mode “Sniff”.

­ If the signal filter should simulate the time behavior of older units, then select filter “Fixed” or “2-Zone”.

I·CAL

The leak rates are averaged at time intervals that are optimized for the range of the leak rates. The algorithm used offers excellent sensitivity and response time. Use of this setting is strongly recommended.

fixed

The leak rates are averaged at fixed intervals of 0.2 seconds.

2-zone

The filter is compatible with LDS1000 and LDS2000. The averaging period is switched depending on the filter leak rate threshold.

I-Filter

Filter optimized for sniffer mode.

(Default with XL Sniffer Adapter set)

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I-Filter slope suppress.

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Same as I-Filter, but with additional slope suppression. The edge suppression corrects the measurement changes during the warm-up phase.

Setting the filter leak rate threshold

Control unit LD protocol ASCII protocol

Settings > ZERO/Filter > Filter > Filter mode Command 402 Command *CONFig:FILTER

Leak rate background in mbar l / s for the averaging period. The averaging period is 10.24 s below this value. Above this value, the averaging period is 160 ms. Setting applies only to filter “2-stage”.
1E-11 … 9.9E-3

Setting filter ZERO time

Control unit LD protocol ASCII protocol

Settings > ZERO/Filter > Settings > Filter 2-zone Command 403 Command *CONFig:LRFilter

Update interval for the offset value with negative leak rate signal (except for I·CAL filter).
Resolution 0.1 s (50 = 5.0 s)

Control unit LD protocol ASCII protocol

Settings > ZERO/Filter > Settings filter > ZERO time Command 411 Command *CONFig:ZEROTIME

7.14 Control of the Gas Ballast Valve of the Backing

Pump

Controlling the gas ballast valve

The mass spectrometer module can control an electric 24 V gas ballast valve of the backing pump via the “Output” connection.

Controlling the gas ballast valve using digital outputs.

0

Off

1

On

2

Continuously on

Control unit LD protocol ASCII protocol

Functions > Valves > Gas Ballast Command 228 ­

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7.15 Selecting display limits

Display range

Lowering and raising the display limits: If very small leak rates are not of interest for your application, raising the lower limit of the display can facilitate the assessment of the leak rate indicator. ­ up to 15 decades in VAC
­ up to 11 decades in SNIF
­ up to 8 decades in AQ mode
If an unsuitable setting causes the usable range to be less than the decade, the upper limit is shifted until a visible decade remains.
Note: The current display limits are shown in the control unit when setting between the two parameters. Using the command 399 with the LD protocol the current display limit can be read out.

Control unit LD protocol ASCII protocol

Display > Display limits Command 397 Command: CONFig:DISPL_LIM:HIGH Command: CONFig:DISPL_LIM:LOW

7.16 Setting trigger values
The mass spectrometer module has four independent trigger values. If the measured leak rate exceeds the set trigger values, the corresponding digital outputs of IO1000 are activated. In addition, exceeding the Trigger 1 on the control unit is highlighted. In the AQ mode, the calculation at the recommended measuring time refers to the trigger value 1. 1 / 2 / 3 / 4

Control unit LD protocol ASCII protocol

Setting > Trigger > Trigger 1 (2, 3, 4) > Trigger level Command 385 Command *CONFig:TRIGger1 (2, 3, 4)

7.17 Setting capillary surveillance

Pressure value capillary clogged

You set a minimum pressure value in order to detect if the 25/300-sccm capillaries are blocked. If the value is fallen short of, the system issues warning 540. Error message 541 is output with strong lower deviation.
1E-3 … 18 mbar

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Pressure value capillary broken

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Capillary > Blocked > Pressure capillary blocked Command 452 Command *CONFig:PRESSLow

You set a maximum pressure value in order to detect if the 25/300-sccm capillaries are blocked. If the value is exceeded, the system issues warning 542.
1E-3 … 18 mbar

Detection of a missing sniffer line

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Capillary > Broken > Pressure capillary broken Command 453 Command *CONFig:PRESSHigh

Automatic detection of a missing sniffer line. This function should be deactivated if a sniffer line that is not automatically detected is used.

0

ON

1

Off

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Sniffer > Messages > Sniffer line detection Command 529 ­

7.18 Set the rotation speed of the turbo molecular

pump

Rotation speed of turbo molecular pump

In some applications, it may be advisable to reduce the rotation speed of the turbomolecular pump, to increase the sensitivity of the device. As a result, however, the maximum allowable inlet pressure decreases at the GROSS, FINE and ULTRA connections. After changing the rotation speed recalibration is required!

For devices with AQ mode: Do not change the set 1000 Hz.

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Rotation speed of turbo molecular pump in Hertz 1000 1500
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Operation LDS3000 | 7

Control unit
LD protocol ASCII protocol

Settings > Set up > MS module > TMP > Settings > TMP rotational speed 501 *CONFig:SPEEDTMP

7.19 Cathode Selection

Selecting a cathode

The mass spectrometer includes two cathodes. In the factory setting the device uses cathode 1. If it is defective, the device automatically switches to the other cathode. With this setting it is possible to select a certain cathode.

0

CAT1

1

CAT2

2

Auto Cat1 (automatic switching to cathode 2, factory setting)

3

Auto Cat2 (automatic switching to cathode 1)

4

OFF

Control unit LD protocol ASCII protocol

Settings > Set up > MS module > Ion source > Cathode selection 530 CONFig:CAThode STATus:CAThode

7.20 Settings for the XL sniffer adapter

For operation with the XL Sniffer Adapter you have to use the

­ SL3000XL sniffer line, – Select the “XL Sniffer Adapter” operation mode, see “Select operation mode [} 45]”.

Function of right sniffer key

Activate or deactivating the right key of the SL3000XL sniffer line (switching between low flow and high flow). Deactivating the key prevents an inadvertent influencing of the measurement.

Search Function

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Sniffer > Keys > Sniffer flow key Command 415 Command *CONFig:HFButton

When the search function is activated, the alarm is automatically connected to Trigger 2 as soon as it is switched to High Flow.
· Switched-off Search Function: Alarm, when Trigger 1 is exceeded.

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· Switched-on Search Function and operation in Low Flow: Alarm, when Trigger 1 is exceeded.

· Switched-on Search Function and operation in High Flow: Alarm, when Trigger 2 is exceeded.

0

Off

1

ON

Sniffer LEDs: Brightness

Control unit LD protocol ASCII protocol

Setting > Trigger > Search Command 380 Command *CONFig:SEARch

In the SL3000XL the following are dependent on the trigger used; the leak rate bar, changing the background lighting, the beeper and changing the sniffer tip lighting.

Set the brightness of the LEDs designed to illuminate the spot under examination. This setting refers to the measurement process without LED alarm configuration, see below.
From “0” (off) to “6” (max.)

Sniffer LEDs: Alarm configuration

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Sniffer > LED > Sniffer LED brightness Command 414 Command *CONFig:BRIGHTness

Behavior of the LEDs on the sniffer, when trigger value 1 is exceeded.

Off

No response

Flashing

The LEDs are flashing

Brighter

The LEDs shine with maximum brightness.

Sniffer beep: Alarm configuration

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Sniffer > LED > Sniffer LED alarm config. Command 413 Command *CONFig:LIGHTAlarm

Response by the beep on the sniffer if the trigger value is exceeded.

Off

No response

Trigger

Acoustic signal / vibration alarm

Control unit LD protocol

Settings > Set up > Operation modes > Sniff > Sniffer > Beep > Sniffer Beep
Command 417

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Display of the hydrogen percentage

ASCII protocol Command *CONFig:BEEP
The sniffing with forming gas involves the use of hydrogen. The hydrogen percentage is taken into consideration with this specification. This will increase the displayed leak rate by the corresponding factor. You can also set the gas percentage for other gases (M3, He). 0 … 100%

Auto standby interval

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Gas percentage > Mass2 > Gas percentage H2 Command 416 Command *CONFig:PERcent

Defines the duration in minutes until standby is activated. If the device operates in high flow, the filters of the sniffer line will foul up more quickly. Auto standby switches to low flow for protection. Moving the sniffer line automatically switches the previously selected flow back on.
From “0” (off) to “60” (max.)

Pressure value XL capillary clogged (high flow)

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Auto standby > Interval auto standby Command 480 Command *CONFig:STANDBYDel

You set a minimum pressure value in order to detect if the XL capillary (high flow, 3000 sccm) is blocked. If the value is fallen short of, the system issues warning 550. Error message 551 is output with strong lower deviation.
100 … 300 mbar

Pressure value XL capillary broken (high flow)

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Capillary > Blocked XL > Pressure capillary blocked XL Command 455 Command *CONFig:PRESSXLLow

You set a maximum pressure value in order to detect a disruption in the XL capillary (high flow, 3000 sccm). If the value is exceeded, the system issues warning 552.
200 … 600 mbar

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniff > Capillary > Broken XL > Pressure capillary broken XL Command 456 Command *CONFig:PRESSXLHigh

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Select flow

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Select low flow or high flow. Comment: The selection can also be made with the right sniffer key or assigned to one of the favorite keys of the control unit. Small (low flow) Large (high flow)

Control unit
LD protocol ASCII protocol

Settings > Configuration> Operating Mode > Flow > Flow Control or Functions > Flow > Flow Control Command 229 Command *CONFig:Highflow

7.21 Resetting the settings

Mass spectrometer module

The settings of the mass spectrometer module can be reset to factory settings. 0 Load factory settings 10 Reset the settings for compatibility mode LDS1000 11 Reset the settings for compatibility mode LDS2010 12 Reset the settings for XL sniffer adapter mode

Control unit
LD protocol ASCII protocol

Functions > Data > Parameters > Reset > Control unit settings Functions > Data

Parameters > Reset > MSB settings Functions > Data > Parameters > Reset > Parameter access level Command 1161 Command RST:FACTORY
Command RST:SL3000

For devices with AQ mode: Loading AQ mode reloads the factory settings for the AQ mode, see also Select Compatibility Mode [} 43].

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Operation LDS3000 AQ

(Accumulation) | 8
8 Operation LDS3000 AQ (Accumulation)

8.1 Switching the device on
1 Switch on the backing pump. 2 Establish the power supply to the mass spectrometer module. ð System starts up automatically. ð If an XL Sniffer Adapter and the CU1000 are connected, your will be asked after
run-up, whether the “XL Sniffer Adapter” operation mode should be set. This does not apply to devices in AQ mode.
Longer run-up time for devices in AQ mode
To counteract falsification of the measurement results by an increased background value, the warm-up time after switching on is about 10 minutes. Wait at least 60 minutes before determining the peak or before calibrating. See also “Carrying out a measurement [} 82]”.

8.2 Default settings

Language selection

Select the display language. The factory setting is English. (The display on the handle of the SL3000XL sniffer line shows messages in English instead of in Russian and Chinese.)
German, English, French, Italian, Spanish, Portuguese, Russian, Chinese, Japanese

Setting date and time

Control unit LD protocol ASCII protocol
Setting the date Format: DD.MM.YY

Settings > Set up > Control unit > Language Command 398 *CONFig:LANG

Control unit LD protocol ASCII protocol
Setting the time Format: hh: mm

Settings > Date/Time > Date Command 450 *HOUR:DATE

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Control unit LD protocol ASCII protocol

Settings > Date/Time > Time Command 450 *HOUR:TIME

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8.3 Selecting a unit for the leak rate

Leak rate unit display

Selecting the leak rate unit in the display for vacuum or sniff

0

mbar l/s (factory setting)

1

Pa m3/s

2

atm cc/s

3

Torr l/s

4

ppm (not VAC, not AQ)

5

g/a (not VAC, not AQ)

6

oz/yr (not VAC, not AQ)

7

sccm (AQ only)

Control unit LD protocol
ASCII protocol

Display > Units (display) > Leak rate device VAC (SNIF) Command 396 (vacuum) Command 396 (sniffing) Command CONFig:UNIT:VACDisplay Command CONFig:UNIT:SNDisplay

Leak rate unit interface

Selecting the leak rate unit of the interfaces for vacuum or sniff

0

mbar l/s (factory setting)

1

Pa m3/s

2

atm cc/s

3

Torr l/s

4

ppm (not VAC)

5

g/a (not VAC)

6

oz/yr (not VAC)

7

sccm (AQ only)

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Control unit LD protocol ASCII protocol

Settings > Set up > Interfaces > Units (interface) > Leak rate device VAC (SNIF) Command 431 (vacuum) Command 432 (sniffing) Command CONFig:UNIT:LRVac Command CONFig:UNIT:LRSnif

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Operation LDS3000 AQ (Accumulation) | 8

Pressure unit interface

8.4 Select device for pressure

Selecting the pressure device of the interfaces

0

mbar (factory setting)

1

Pa

2

atm

3

Torr

Control unit LD protocol ASCII protocol

Settings > Set up > Interfaces > Units (interface) > Pressure unit Command 430 (Vacuum/Sniff) Command *CONFig:UNIT:Pressure

8.5 Select Compatibility Mode
To retrofit an existing leak detection system LDS1000 / LDS2010 with a LDS3000, activate the appropriate compatibility mode:
· Compatibility mode for LDS1000 or
· Compatibility mode for LDS2010
When changing to a compatibility mode all parameters are to be reset to factory settings and the device is to be restarted. The language is displayed according to the factory setting. To change the language, see “Default settings [} 69]”.
If you want to use the LDS3000 later in normal operation mode, make sure to save your parameters on a USB flash drive, see “Loading and saving parameters [} 83]”. You can load the saved parameters again after you have switched to normal operation.
Compatibility mode for LDS1000 Compatibility mode for LDS2010 Mode LDS3000 Mode XL Sniffer Adapter Mode AQ (This mode is only available for AQ devices. It is preset for AQ devices. Switching to other modes is possible.)

Control unit LD protocol ASCII protocol

Settings > Set up > Compatibility > Compatibility mode Command 2594 (dec) Command *CONFig:COMP

The following table shows the functional differences between and common features of LDS2010 and LDS3000:

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LDS2010

LDS3000

Trigger outputs

without joint reference

with joint reference

other outputs

with joint reference

with joint reference

Trigger 1 (sniffer LED, relay exit, audio signal)

Control of sniffer LED, PWM audio Control of sniffer LED, audio

outputs an the control unit for active outputs an the control unit for active

speakers

speakers

Limit Low / High (serial interfaces, display, analogue output)

Limit Low affects all outputs, Limit High only the display

separately adjustable for interface protocols, display and analog outputs

Gas ballast (3 settings)

OFF: Switches the gas ballast valve 0 = Off

of the pump module off.

1 = on, but controllable via digital

ON: Switches the gas ballast valve input on IO1000

of the pump module on until the next mains-off.

2 = on, but not controllable via digital input on IO1000

If “CAL fashion” is unequal to 3

(menu item 26), the gas ballast

valve can be controlled with digital

input DynCAL.

F-ON: Fixed on enables switching the gas ballast valve on permanently (power failure-proof and independent of the digital inputs).

Control mode

LOCAL, RS232, RS485

None, control is also possible from all control locations.

LDS1000 compatibility mode 9.2 other functions

Default values and error messages (default values are output via interface, the touchscreen shows the original message – -> reason: new hardware can cause errors that did not exist with previous models)

Correcting the leak rate in Standby adjustable (yes/no) (machine factor)

adjustable (yes/no)

ZERO with start

starting with V1.02 like LDS2010

Opening the sniffer valve

in SNIF after start

in SNIF after start

Rotation speed of turbo molecular only 2 rotation speeds adjustable pump

Adjustable via serial interface from 750 Hz to 1500 Hz, via operator unit 1000 Hz and 1500 Hz

Address RS485

Yes, because bus capable

No, because not bus capable

Sniffer key on/off

selectable

selectable

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Operation LDS3000 AQ (Accumulation) | 8

LDS2010

LDS3000

Default value for int. calibration leak

1E-15 mbar l/s

9.9E2 mbar l/s

Default value ext. calibration leak VAC/SNIF mode

1E-7 mbar l/s

9.9E2 mbar l/s

Setting range for int. calibration leak

10E-7

1E-9 … 9.9E-1 mbar l/s

Machine factor adjustment

manually

manually/automatically

Machine / sniff factor value range

Machine factor: 1E-3…9.9E+3 Sniffer factor: 1E-3…9.9E+3

Machine factor: 1E-4…1E+5 Sniffer factor: 1E-4…1E+4

Pressure: Capillary surveillance 20

available, pressure adjustable

Analog output

fixed characteristics

freely configurable

Calibration request

Preamplifier temperature change 5 K or 30 min

Preamplifier temperature change 5 K or 30 min. or TMP rotation speed changed

Pressure / leak rates units (VAC/ yes SNIF) for all interfaces

Control unit and rest separated

User permissions

3 levels over PIN on the control unit 4 levels through control unit or

or key switch

optional key switch

Key-operated switch

permanently installed

can, if required, be connected externally, see “Assigning the digital inputs of the I/O module [} 95]” (Key switch)

8.6 Making basic settings via the wizard
We recommend using the AQ Wizard for important settings and calibration. The following information refers to a CU1000 that has been adapted for use with the LDS3000 AQ. If you want to deviate from the standard settings or want to find out more about interface protocol commands, please refer to further chapters of this manual for details.
AQ Wizard
To start the AQ wizard, press on the display of the CU1000 Main menu > Functions > Assistant Alternatively press the word “Wizard” at the bottom of the display. Make your entries in the windows that are called one after the other.

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1. Chamber volume (net volume) The unit of volume can be selected under Main Menu > Settings > Set up > Op. modes > AQ > Volume unit. (LD protocol: Command 1763 ASCII protocol: CONFig:AQ:VOLume)
2. Trigger level 1 (LD/ASCII protocol: See “Setting trigger values [} 63]”)
3. Mass (selection between helium or forming gas) (LD/ASCII protocol: See “Select gas type (mass) [} 46]”
4. Percentage of gas (for example, the hydrogen content in forming gas) (LD/ASCII protocol: See display of hydrogen content in “Settings for the XL sniffer adapter [} 65]”
5. Measurement time (The time can be freely adjusted, but there is also a recommendation, depending on parameters.) (LD protocol: Command 1765 ASCII protocol: CONFig:AQ:TIME)

Alternatively, you can make your settings in the following places: Main menu > Settings > Set up > Operation modes > AQ Main menu > Settings > Mass

8.7 Determine peak
To obtain the most accurate measurement results, you should always determine the current “peak” before calibration. At the end of this process, the value for the old anode voltage is replaced by the value for the new anode voltage. The adjustment uses air-helium or air-hydrogen. An adjustment only with nitrogen is not possible. The following information about the display refers to a CU1000 that has been adapted for use with the LDS3000 AQ. ü To prevent falsification of measurement results due to an increased background
value, you have waited for at least 60 minutes to warm up. 1 Main menu > Functions > CAL > Peak. 2 Confirm with “OK”.
ð The “CAL peak” window opens. 3 Remove the calibration leak from the chamber.

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Operation LDS3000 AQ (Accumulation) | 8
4 Wait until the background signal is stable. 5 To confirm the stable background value and start the adjustment, confirm with
“OK”. ð (LD protocol: 4, Parameter 7 (peak adjust AQ)
ASCII protocol: CAL:PEAK) IO1000: “Peakfind” input ð (LD and ASCII protocol: The status must then be queried via command 260 (State Calibration) or STATus: CAL) ð After adjustment, the old and new anode voltage are displayed.
8.8 Store leak rate of calibration leaks
Enter the specifications for the used calibration leak once. A specific leak rate must be set for each gas (mass). Range: 1E-9 … 9.9E-2 mbar l/s
Minimum size for leak rate of the calibration leak
In order to perform a stable calibration, we recommend a minimum size for the leak rate of the used calibration leak. If the measurement time proposed by the AQ Wizard is maintained, the leak rate should not fall below the following value: – When using forming gas, the selected setpoint (Trigger 1) – When using helium 1/5 of the selected setpoint (Trigger 1) If the leak rate of the used calibration leak is too small, an error message will be issued to start or finish the calibration.
The following information refers to a CU1000 that has been adapted for use with the LDS3000 AQ. ü The desired unit in which you want to enter the leak rate is set. If the unit of leak
rate displayed in your system differs from the unit indicated on the calibration leak, at least temporarily set the unit as indicated on the calibration leak. See also “Selecting a unit for the leak rate [} 42]”. 1 Main menu > Functions > CAL > Settings > Ext. calibration leak 2 Enter the desired gas and the associated leak rate.
(LD protocol: Command 390 ASCII protocol: *CONFig:CALleak:EXTVac)

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8.9 Calibrating the device

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8.9.1 Time and general preferences
NOTICE Incorrect calibration because of operating temperature that is too low
Calibrating the device in the cold state can deliver incorrect measurement results. For optimum accuracy the device should have been turned on at least 60 minutes previously.
It is recommended to calibrate the device once per shift in the desired operating modes and for the desired gases. Thereafter you can switch between the operation modes and gases without re-calibrating. Further, calibration is required after a calibration prompt by the system.

Switching off the preamplifier test

The device tests the installed preamplifier during calibration. You can switch off of the amplifier test. This increases the speed of the calibration, but reliability drops off.

0

OFF

1

ON

Control unit
LD protocol ASCII protocol

Settings > Set-up> MS-module > Preamplifier > Test > Preamplifier test with CAL Command 370 Command *CONFig:AMPTest (ON,OFF)

Enabling calibration request

If Calibration request is enabled, the device will prompt the operator to perform a calibration 30 minutes after it has been switched on and in case of temperature changes greater than 5°C.

0

OFF

1

ON

Control unit
LD protocol ASCII protocol

Functions > CAL > Settings > CAL request. > Calibration request or Settings > Set-up> CAL request. > Calibration request Command 419 *CONFig:CALREQ (ON,OFF)

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Operation LDS3000 AQ (Accumulation) | 8

Calibration warning Wrn650

The warning message Wrn650 “Calibration within the first 20 minutes is not recommended” can be allowed or suppressed.

0

OFF (suppressed)

1

ON (allowed)

Control unit
LD protocol ASCII protocol

Functions > CAL > Settings > CAL request. > Calibration warning W650 or Settings > Set-up> CAL request. > Calibration warning W650 Command 429 *CONFig:CALWarn ON (OFF)

See also 2 Setting machine and sniff factor [} 81]

8.9.2 Entering the calibration factor
The calibration is usually determined by the appropriate calibration routine. Therefore, it is usually not necessary to adjust the calibration factor manually. An incorrectly set calibration inevitably leads to wrong leak rate indicator!

8.9.3 Calibration factor vacuum
Also applies to devices in AQ mode. Entry of calibration factors for masses 2, 3, 4. The values will be overwritten during the next calibration. 0.01 … 5000

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Vacuum > Calibr. factor > mass 2 (3, 4)

calibration factor VAC H2 (M3, He) Command 520 Command *FACtor:CALVac

8.9.4 Calibrating
Please also note the general instructions for calibration, see “Calibrating the device [} 46]”.

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Requirements for all procedures
· You have an external calibration leak. · The information on the calibration leak is entered, see also “Store leak rate of
calibration leaks [} 75]”. · To prevent falsification of measurement results due to an increased background
value, you have waited for at least 60 minutes to warm up. · The current “peak” was determined, see also “Determine peak [} 74]”.
Control unit CU1000
1 Place the open calibration leak in the measuring chamber and close the measuring chamber.
2 Main menu > Functions > CAL > external ð The leak rate of the calibration leak will be displayed and a question to start the calibration.
3 To start the calbration confirm with “OK”. 4 Follow the instructions on the screen.
LD or ASCII protocol, IO1000
1 Place the open calibration leak in the measuring chamber and close the measuring chamber.
2 For a stable leak rate signal, wait at least the duration of the set AQ measurement time.
3 Start the calibration LD protocol: Command 4, Parameter 1 ASCII protocol: CAL:EXT IO1000: Input “CAL external”, see also the following figure ð If helium is used, proceed to the last step (no. 8).
4 For a background determination of forming gas (hydrogen), then query the status: LD protocol: Command 260 (State Calibration) ASCII protocol: STATus:CAL ð Wait until it reaches the following state: LD protocol: Command 260 State 75 “WAIT_ZERO_AQ” ASCII protocol: *STATus:CAL? on “CLOSE” IO1000: Input “CAL stable”, see also the following figure
5 Remove the calibration leak from the measuring chamber and close the measuring chamber.
6 For a stable leak rate signal, wait at least the duration of the set AQ measurement time.

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Operation LDS3000 AQ (Accumulation) | 8
7 Start the background measurement. LD protocol: Command 11, Parameter 1 (Continue calibration) ASCII protocol: CAL:CLOSED IO1000: Input “CAL external”, see also the following figure
8 Then query the status: LD protocol: Command 260 (State Calibration) ASCII protocol: STATus:CAL ð Wait until it reaches the following state: LD protocol: Command 260 State 0 “READY” ASCII protocol: STATus:CAL? on “IDLE” IO1000: Output “CAL active”, see also the following figure ð The calibration is completed. ð In case of error: LD protocol: Command 260 State 51…59 (error conditions) ASCII protocol: STATus:CAL? on “FAIL” IO1000: Output “Error or Warning”

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Fig. 16: External calibration with IO1000 on a device for AQ mode. Description of the PLC inputs and outputs see “Assigning inputs and outputs [} 88]”
8.10 Perform ZERO
After the run-up of the LDS3000 AQ and the choice of forming gas as gas type, the existing hydrogen in the vacuum system initially ensures that a rising curve is visible on the display. This display can be misunderstood as a sign of leakage. To remove distorting traces of hydrogen, wait about 30 minutes after starting up the device to measure. To eliminate the residual offset, execute ZERO AQ. ZERO AQ is not used to suppress measurement signals.

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Operation LDS3000 AQ (Accumulation) | 8
ü Mass is hydrogen (forming gas). If no hydrogen (forming gas) is entered, you can set it under “Main menu > Settings > Mass” or via “Wizard” at the bottom of the measurement window display.
ü There is neither a test specimen nor a calibration leak in the measuring chamber. 1 Main menu > Functions > ZERO AQ 2 Follow the instructions on the screen. ð LD and ASCII protocol: After removing the test specimen or calibration leak, first wait for the measuring time. ð LD protocol: Command 6, Parameter 1; ASCII protocol: *ZERO:ON ð IO1000: Input ZERO

8.11 Setting machine and sniff factor
The internal calibration will only calibrate the measurement system of a mass spectrometer module that is uncoupled from the test system. If the measurement system is operated in parallel to an additional pump system after an internal calibration though (following the partial flow principle), the measurement system will indicate a leak rate that is too low based on the partial flow ratio. With the help of a corrective machine factor for vacuum mode and a sniff factor for sniffer mode, the measurement system indicates the actual leak rate. The factors are taken into consideration along wit the ratio of effective pumping speed of the measurement system in a comparison to the pumping speed of the measurement system on the test system.

8.11.1 Setting machine and sniff factor manually

Setting the machine factor

ü Mass spectrometer module calibrated internally. 1 Measure external calibration leak using the test system. ð The device indicates a leak rate that is too low based on the partial flow ratio. 2 Setting machine or sniff factor, see below. ð The device indicates the actual leak rate.

Devices in AQ mode:
The machine factor “1” is preset. This setting should not be changed.

Corrects a possible deviation between internal and external calibration in vacuum mode.

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Should be at value 1.00 without the option internal calibration leak. After the value is changed, the leak rate resulting from the change is displayed. This simplifies adjustment.
Value range 1E-4…1E+5

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Vacuum > Machine factor > Mass 2 (3, 4)

machine factor VAC H2 (M3, He) Command 522 Command *FACtor:FACMachine

Setting the sniff factor

Corrects a possible deviation between internal and external calibration in sniffer mode
Value range 1E-4…1E+4

Control unit
LD protocol ASCII protocol

Settings > Set up > Operation modes > Sniffing > Sniff factor Mass 2 (3, 4) > Sniff factor H2 (M3, He) Command 523 Command *FACtor:FACSniff

8.12 Carrying out a measurement
WARNING Danger due to imploding measuring chamber
An external measuring chamber connected to an LDS3000 AQ is pumped off at approximately 60 sccm. Within normal measurement times (2 – 30 seconds) no dangerous negative pressure is generated. If the measuring chamber is leak- proof, but not vacuum resistant, and continues to pump, it may implode. This can occur, for example, in a 1-liter measuring chamber after about 10 minutes. Do not continue pumping a measuring chamber after the measuring time has
expired. Consider suitable protective measures!

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ü The device is switched on. ü The peak has been determined, see “Determine peak [} 74]”. ü The calibration was done, see “Calibrating [} 77]”. ü AQ ZERO has been determined, see “Perform ZERO [} 80]”.
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Operation LDS3000 AQ (Accumulation) | 8
1 If you are measuring with forming gas, make sure that the device has been running for at least half an hour. This time is needed to perform stable measurements. ð If you measure with helium, this waiting time is about 10 minutes.
2 Place the test object in the measuring chamber and close the measuring chamber. The test object should not be placed on the areas that may be leaking. ð Either a test object filled with helium or forming gas under pressure is brought into the measuring chamber or pressurized in the measuring chamber. ð If the test object leaks, the display shows an increasing leak rate.
3 Wait for the set measuring time. ð The leak rate is calculated and displayed.
4 Remove the test object from the measuring chamber and continue the measurements with step 2. ð Start or stop buttons are not used.
8.13 Loading and saving parameters
You can use a USB flash drive on CU1000 to backup and restore the control unit and mass spectrometer module parameters. Save parameter: “Functions > Data > Parameter > Save > Save parameter” Loading parameters: ü The currently set compatibility mode must match the compatibility mode in the
parameter file. See also Select Compatibility Mode [} 71]. “Functions > Data > Parameter > Load > Load parameter”
8.14 Copying measurement data, deleting
measurement data
The measurement data can be saved to a USB flash drive with CU1000. · “Functions > Data > Recorder > Copy > Copy files”
The measurement data can be deleted on the CU1000. · “Functions > Data > Recorder > Delete > Delete files”

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8.15 Adjust “Zero time factor AQ”
In order to avoid apparently negative leak rates when measuring with forming gas, the leakage rate display is adjusted to 0 after a certain time (zero time factor AQ x measuring time). Zero time factor AQ can be set under: Main menu > Settings > Set up > Operation modes > AQ > Measurement time The default value is 4 and can be changed to 1…10 in integers. (LD protocol: Command 1767 ASCII protocol: *CONFig:AQ:ZEROTime)

8.16 Selecting display limits

Display range

Lowering and raising the display limits: If very small leak rates are not of interest for your application, raising the lower limit of the display can facilitate the assessment of the leak rate indicator. ­ up to 15 decades in VAC
­ up to 11 decades in SNIF
­ up to 8 decades in AQ mode
If an unsuitable setting causes the usable range to be less than the decade, the upper limit is shifted until a visible decade remains.
Note: The current display limits are shown in the control unit when setting between the two parameters. Using the command 399 with the LD protocol the current display limit can be read out.

Control unit LD protocol ASCII protocol

Display > Display limits Command 397 Command: CONFig:DISPL_LIM:HIGH Command: CONFig:DISPL_LIM:LOW

8.17 Set the rotation speed of the turbo molecular

pump

Rotation speed of turbo molecular pump

In some applications, it may be advisable to reduce the rotation speed of the turbomolecular pump, to increase the sensitivity of the device. As a result, however, the maximum allowable inlet pressure decreases at the GROSS, FINE and ULTRA connections. After changing the rotation speed recalibration is required!

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Operation LDS3000 AQ (Accumulation) | 8
For devices with AQ mode: Do not change the set 1000 Hz.

Rotation speed of turbo molecular pump in Hertz 1000 1500

Control unit
LD protocol ASCII protocol

Settings > Set up > MS module > TMP > Settings > TMP rotational speed 501 *CONFig:SPEEDTMP

8.18 Cathode Selection

Selecting a cathode

The mass spectrometer includes two cathodes. In the factory setting the device uses cathode 1. If it is defective, the device automatically switches to the other cathode. With this setting it is possible to select a certain cathode.

0

CAT1

1

CAT2

2

Auto Cat1 (automatic switching to cathode 2, factory setting)

3

Auto Cat2 (automatic switching to cathode 1)

4

OFF

Control unit LD protocol ASCII protocol

Settings > Se

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