jetec MF5000 Series MEMS Mass Flow Meters User Manual

: June 3, 2024
: JETEC

Table of Contents

MF5000 Series MEMS Mass Flow Meters
RESTRICTION ON USE
SAFETY PRECAUSION
Overview
Models and Selection
Product description
Specifications
Installation
Operation and Communication
Safety and Maintenance
References
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Download This Manual (PDF format)

MF5000 Series
MEMS Mass Flow Meters
User Manual (VC.4.a)

MF5000 Series MEMS Mass Flow Meters

RESTRICTION ON USE

This meter is manufactured for general purpose industrial applications for flow measurements. Do not alter any hardware and software of the product. Any modifications might cause damage and unexpected events.
All practices for electronic device safety should apply.
Do not use this product in any environments where human safety may be at risk.
Only a qualified person from Siargo or a person who is accredited by Siargo can perform troubleshooting services to the product, Siargo is otherwise not liable for any consequences thereafter.

SAFETY PRECAUSION

The product can be utilized to measure and/or monitor in-line mass flow rate of any clean, dry and preferably constant concentration gases in industrial applications. For other special gases or variable concentration gases, the product may not function properly or even can be damaged. Please contact Siargo for further information.
The operational environments of the product are illustrated in the section of product specifications. If the product is used for other circumstances, the product may not function properly or even can be damaged.
Operation, installation, storage, and maintenance of the product must strictly follow the instructions illustrated in this user manual. Otherwise, unpredicted damage and even injuries or other severe situations could be induced. All the installation, storage, and maintenance of the product must be performed by skilled workers. This user manual should be placed near the product for easy access.
Before using the product, the user should read this user manual completely and in details so that the user is well understand all the important instructions.
It is recommended that the product should be re – calibrated and serviced in every two years or at a time of desire.

Overview

MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control. The series can measure gas flow in a pipe diameter as small as 3 mm, but not over 19 mm. With the self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.5FS)% or better depending on the requests. The meters can work at an environment of -20 to 60 C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.
MF5000 Series MEMS Mass Flow Meters feature:

Highly sensitive, measuring as low as 8 mm/sec, and as high as 65 m/sec with a single assembly
Directly sense mass flow using thermal mass flow principle
Proprietary MEMS sensor package design for better reliability
Standard 12 – 24 Vdc power supply
Low pressure loss forreducing energy cost
Industrial standard Modbus protocol for easy networking and remote control

Working Principle and Package
The MEMS calorimetric sensor is installed at the flow channel wall forming a plate that serves as an additional flow conditioner from the boundary layer configuration resulting in a laminar flow. The mass flow measurement is established as the fluid carries heat away from the heater causing the redistribution of the temperature field. Accurate flow rate is obtained by calibration with the standard fluid at the preset conditions.
jetec MF5000 Series MEMS Mass Flow Meters - Figure 2

Models and Selection

In addition to the models listed, we can also provide customized products that will be tailored to customers’ very needs. For further information, please contact manufacturer. The meters are made by referencing to: IS014511.
jetec MF5000 Series MEMS Mass Flow Meters - Figure 3 ***** There is flow rate number only for unit SLPM. If other unit is selected, there must be flow rate number with unit together.
Typical flow range:

Model| ON
(mm)| Connection| **Flow range*
---|---|---|---
seem| SLPM| SCFM| NCMH**
MF5001| 1| 1/8″| 10-1000| 0.01-1| |
MF5003| 3| 1/8″| 150-15000| 0.15-15| |
MF5006| 6| 1/4″| | 0.5-50| 0.02-2| 0.03-3
MF5008| 8| 3/8″| | 1.2-120| 0.042-4.2| 0.072-7.2
MF5012| 12| 1/2″| | 3-300| 0.1-10| 0.18-18
MF5019| 19| 3/4″| | 8-800| 0.28-28| 0.48-48

***** For CO,, flow range are 0.01-0.7, 0.15-10, 0.5-40, 1.2-80, 3-200 and 8-600 SLPM.

Product description

The parts are illustrated as below:
jetec MF5000 Series MEMS Mass Flow Meters - Figure 4

Specifications

Accuracy	± (1.5+0.5FS)%;
Working Temperature	-20-65°C;
Working Pressure	<1.5 MPa;
Humidity	:-C.95%RH;
Power supply	12-24 VDC, 50mA (Without Ex proof model); 5-7 VDC, 20mA (With Ex

Installation

5.1 Physical Dimensions

Model| N
(mm)| D
(NPT-M)| L| H| H1| W| d| c
---|---|---|---|---|---|---|---|---
MF5001| 1.0| 1/8″| 118| 144| 28| 38| Ø3| 36
MF5003| 3.0| 1/8″| 118| 144| 28| 38| Ø3| 36
MF5006| 6.0| 1/4″| 124| 144| 28| 38| Ø6| 36
MF5008| 8.0| 3/8″| 124| 151| 35| 38| Ø8| 50
MF5012| 12.0| 1/2″| 150| 156| 40| 40| Ø12| 50
MF5019| 19.0| 3/4″| 182.5| 156| 40| 40| Ø19| 70

5.2 Installation Instructions
The product at the time of shipment is fully inspected for product quality and meets all safety requirements. Additional safety measures during the installation should be applied. This includes, but is not limited to leakage verification procedures, standard EDS (electrostatic discharge) precautions, DC voltage precautions, and heavy duty precautions. Other tasks such as calibration, part replacement, repair, and maintenance must only be performed by trained personnel. Upon requests, manufacturer will provide necessary technical support and/or training of the personnel.
Do not open the product cover or alter any part of the product. Any such actions will forfeit the terms of the warranty and cause the liability to any damages thereafter.
The product is preferably to be installed horizontally. Flow direction should be aligned with the arrow mark on the meter body. If the flow fluid may have particles or debris, a filter (e.g. 0.1p.m) is strongly recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product physical integrity should be inspected to ensure no visual damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other foreign materials are completed removed.
c) Cautions during installation:
(i) It is preferably to first install the inlet end of the meter and then the outlet end of the meter; To ensure the measurement accuracy, an upstream straight pipe of length no less than IODN and a downstream straight pipe of length no less than 5DN should be in place.
jetec MF5000 Series MEMS Mass Flow Meters - Figure 6 (ii) If there is requirement of different pipe size at either upstream or downstream, the size of the pipe diameters should be larger than that of the selected meters. Please see detailed as below:
(iii)During installation, please make sure no any foreign materials (such as water, oil, dirty, particles, etc.) falling into the pipe.
d) Connect electrical wires for LCD, and then electrical wires for inputs/outputs. Please pay special attention to power supply range (i.e., +12-+24 VDC) and power supply polarization (see the description on Electrical Interfaces in this manual).
e) When connect the communication wires, please make sure that the wires are correctly connected to the proper ports on your data device/equipment.
f) Turn on the power supply, and make sure that the LCD works correctly.
g) Slowly open the valves at the both ends of the pipeline, and the meter should then start to measure the flow in the pipeline
h) Completion of the installation.
5.3 Cautions
a) Welding the pipe while the meter is installed is prohibited;
b) Any foreign materials in the pipeline after installation may cause irreversible damage;
c) Seal gaskets must not block flow channel otherwise accuracy cannot be maintained;
d) The meter should be properly grounded via the electrical connection;
e) After installation, severe force applied to the meter may cause damage;
f) Severe vibration or very strong magnetic field may cause malfunction.

Operation and Communication

6.1 Cable Definition
The electrical interfaces are defined as Figure 6-1:

Pin	Definition	Color
1	4∼20mA output	Purple
2	RS485(B)	Brown
3	4∼20mA GND	Colorless
4	Pulse output	Yellow
5	Pulse GND	White
6	N.C.	Blue
7	RS485 (A)	Green
8	Ground (Common)	Black
9	Power supply (+)	Red

6.2 LCD Display
Normally, the LCD display looks as Figure 6-2: jetec MF5000 Series MEMS
Mass Flow Meters - Figure 10 A standard litre (SL) represents a litre of the measured gas at 20°C and 101.325 kPa.
Alarm code EI-E5 (Figure 6-3):

El: Sensor error
E2: ADC error
E3: RTC error
E4: EEPROM error
E5: Crystal error
6.3 RS485 Communication
For purposes of computer control and networking, the RS485 is used for communication with the following settings:
Baud rate (Bits per second): 57600(P0, Single-device communication)
9600(Pl & P2, Multi-device communications)
Date bits: 8;
Parity: None;
Stop bits: l;
Flow control: None.
6.4 4~20mA Output
For customers who use 4-20mA output. The connection of the loop load resistor is illustrated as Figure 6-4: R, (max) =8500 (24Vdc power supply)
jetec MF5000 Series MEMS Mass Flow Meters - Figure 12 6.5 Pulse Output
The pulse output is in the form of even square wave that is composed of 3.3V signal high and OV signal low (Figure 6-5), and each pulse can be programmed to 0.001 Nm³, 0.01 Nm³, 0.1 Nm³ or INtn³, respectively. (default is 1Nm³).
6.6 Setup via Buttons
6.6.1 Button definition
Three buttons:
: Scroll up the setup menu
: Selection/confirmation of a setting
: Scroll down the setup menu
6.6.2 Operation
(1) The user interface (Figure 6-6):
Button is used for function selection. After press it, the menu asks for password (authentication mode).
jetec MF5000 Series MEMS Mass Flow Meters - Figure 13 (2) Password interface (Figure 6- 7):
In the password menu, the flow measurement will not be interrupted, whereas the first line of the LCD display will show the password menu as Figure 6-8:

The password consists of six numeric digits. The blinking digit can be assigned a numeric
value, which can be selected from 0-9 through the up/down button .
After selecting a desirable value, press to confirm the selection, and the proceed to the next digit.
After the password is correctly set, the meter enters the function setup menu. Otherwise, the meter returns back to the user mode. ( NOTE: The default password is 11111)

(3) Function setup menu (Figure 6- 7):
Caution: If you want change any settings, please refer to the manual, otherwise the meter maybe work abnormally.
A exit from the setup mode (this is the default option).
B select accumulated flow units.

Press , the display will show the accumulated flow units menu; if the value is “–n3–“, the accumulated flow unit is Nm’; if the value is “–SL–“, the accumulated flow unit is SL.
Press to switch in two units.
After selection, press to confirm and exit.

C UITTyPE, select instant flow units.

Press , the display will show the instant flow units menu; if the value is “–n3–“, the instant flow unit is Nm³/h; if the value is”–SL–“, the instant flow unit is SLPM.
Press to switch in two units.
After selection, press to confirm and exit.

D InTErVAL”, set response time.

Press the display will show the response time ( default value is 125 ms).
Press to set as other response time, 250 ms, 500 ms, 1000 ms (1 s), 2000 ms (2 s), 4000 ms (4 s).
After selection, press to confirm and exit.

E “SETGCF” ,Set the gas correction factor. See detailed operation in Figure 6-11.
F “PrOTOCOL”, select communication protocols..

Press , the display will show the protocol menu;
P0–000 means mode 0, it is Single-device communication mode;
Pl–xxx (between 001 and 255) means mode 1, Mod bus mode, it is Multi-device communication mode.
P2–xxx (between 001 and 255) means mode 2, reserved, it is Multi-device communication mode.
( e.g, Pl–153 means the meter is working in Multi-device communication mode, protocol is Modbus, and the address is153.)
Press to switch in two communication modes.
After selection, press to confirm and exit.

G “SET Addr”, Set the address for Multi-device communication mode.
Notes: The default address is 255.
H “SET PAS”, Set the password.
Notes: Please remember the new password and placed it properly.
I “OFFSET”, reset the offset of the meter. See detailed operation in Figure 6-11.
J “CLEAr ACC”, reset the flow accumulation reading to zero.
See detailed operation in Figure 6-11.
( 4) Communication Modes switches ( Figure 6-9, Figure 6-10) A. From Single-device communication to Multi-device communication

Set the address of the meter( ) as (3).E. such as 255;
Set the meter to Multi-device communication mode (select value of to P1–255 0rP2–255) as (3).D;
After setting, the address will show on the LCD.

B. From Multi-device communication to Single-device communication

Set the meter to Single-device communication mode (select value of to P0–000) as (3).D;
After setting, no address will show on the LCD.

jetec MF5000 Series MEMS Mass Flow Meters - Figure 16

Safety and Maintenance

7.1 Wetted Materials and Compatibility
The meter body and pipe are made of 304 stainless steel. Sensors comprise of silicon, silicon nitride and silicon dioxide and the sensor surfaces are passivated with silicon nitride and silicon dioxide. The electronic sealing is provided by RTV (room temperature vulcanizing) silicone sealant WR- 704 composed of HOCH,(Si0),CH,H.
Maintenance
7 .2 Maintenance
Attention: without prior permission of the manufacturer, please do not attempt to alter any parts of the product as it may cause unrecoverable damages. If there are questions or doubts, please contact manufacturer immediately before further actions. Please ensure the DC power is off before disassembling the sensor.

TEL: +886-4-23729418
FAX: +886-4-23724011
(40349)
www.jetec.com.tw