jetec MF5000 Series MEMS Mass Flow Meters User Manual
- June 3, 2024
- JETEC
Table of Contents
MF5000 Series
MEMS Mass Flow Meters
User Manual (VC.4.a)
MF5000 Series MEMS Mass Flow Meters
RESTRICTION ON USE
- This meter is manufactured for general purpose industrial applications for flow measurements. Do not alter any hardware and software of the product. Any modifications might cause damage and unexpected events.
- All practices for electronic device safety should apply.
- Do not use this product in any environments where human safety may be at risk.
- Only a qualified person from Siargo or a person who is accredited by Siargo can perform troubleshooting services to the product, Siargo is otherwise not liable for any consequences thereafter.
SAFETY PRECAUSION
- The product can be utilized to measure and/or monitor in-line mass flow rate of any clean, dry and preferably constant concentration gases in industrial applications. For other special gases or variable concentration gases, the product may not function properly or even can be damaged. Please contact Siargo for further information.
- The operational environments of the product are illustrated in the section of product specifications. If the product is used for other circumstances, the product may not function properly or even can be damaged.
- Operation, installation, storage, and maintenance of the product must strictly follow the instructions illustrated in this user manual. Otherwise, unpredicted damage and even injuries or other severe situations could be induced. All the installation, storage, and maintenance of the product must be performed by skilled workers. This user manual should be placed near the product for easy access.
- Before using the product, the user should read this user manual completely and in details so that the user is well understand all the important instructions.
- It is recommended that the product should be re – calibrated and serviced in every two years or at a time of desire.
Overview
MF5000 series mass flow meters are specially designed for small pipe flow
monitoring and control. The series can measure gas flow in a pipe diameter as
small as 3 mm, but not over 19 mm. With the self-flow conditioning feature of
the MEMS sensor package, the meters feature an extremely low pressure loss
compared to the traditional by-pass thermal mass flow meters in this
application scope. The accuracy of the meters are generally ±(1.5+0.5FS)% or
better depending on the requests. The meters can work at an environment of -20
to 60 C and pressure up to 1.5 MPa. Applications include semiconductor gas
process monitoring and control, hospital oxygen gas monitoring, etc.
MF5000 Series MEMS Mass Flow Meters feature:
- Highly sensitive, measuring as low as 8 mm/sec, and as high as 65 m/sec with a single assembly
- Directly sense mass flow using thermal mass flow principle
- Proprietary MEMS sensor package design for better reliability
- Standard 12 – 24 Vdc power supply
- Low pressure loss forreducing energy cost
- Industrial standard Modbus protocol for easy networking and remote control
Working Principle and Package
The MEMS calorimetric sensor is installed at the flow channel wall forming
a plate that serves as an additional flow conditioner from the boundary layer
configuration resulting in a laminar flow. The mass flow measurement is
established as the fluid carries heat away from the heater causing the
redistribution of the temperature field. Accurate flow rate is obtained by
calibration with the standard fluid at the preset conditions.
Models and Selection
In addition to the models listed, we can also provide customized products that
will be tailored to customers’ very needs. For further information, please
contact manufacturer. The meters are made by referencing to: IS014511.
***** There is flow rate number only for unit SLPM. If other
unit is selected, there must be flow rate number with unit together.
Typical flow range:
Model| ON
(mm)| Connection| **Flow range*
---|---|---|---
seem| SLPM| SCFM| NCMH**
MF5001| 1| 1/8″| 10-1000| 0.01-1| |
MF5003| 3| 1/8″| 150-15000| 0.15-15| |
MF5006| 6| 1/4″| | 0.5-50| 0.02-2| 0.03-3
MF5008| 8| 3/8″| | 1.2-120| 0.042-4.2| 0.072-7.2
MF5012| 12| 1/2″| | 3-300| 0.1-10| 0.18-18
MF5019| 19| 3/4″| | 8-800| 0.28-28| 0.48-48
***** For CO,, flow range are 0.01-0.7, 0.15-10, 0.5-40, 1.2-80, 3-200 and 8-600 SLPM.
Product description
The parts are illustrated as below:
Specifications
| Accuracy | ± (1.5+0.5FS)%; |
|---|---|
| Working Temperature | -20-65°C; |
| Working Pressure | <1.5 MPa; |
| Humidity | :-C.95%RH; |
| Power supply | 12-24 VDC, 50mA (Without Ex proof model); 5-7 VDC, 20mA (With Ex |
proof model);
Interface| 4-20mA/RS485/Pulse;
Mechanical Connection| NPT (male);
Display| Mass flow, accumulated mass flow;
Calibration| Air@20°C, 101.325 kPa ( other gases upon request);
Ex Proof| Ex is IIC T4;
Protection| IP40.
Installation
5.1 Physical Dimensions
Model| N
(mm)| D
(NPT-M)| L| H| H1| W| d| c
---|---|---|---|---|---|---|---|---
MF5001| 1.0| 1/8″| 118| 144| 28| 38| Ø3| 36
MF5003| 3.0| 1/8″| 118| 144| 28| 38| Ø3| 36
MF5006| 6.0| 1/4″| 124| 144| 28| 38| Ø6| 36
MF5008| 8.0| 3/8″| 124| 151| 35| 38| Ø8| 50
MF5012| 12.0| 1/2″| 150| 156| 40| 40| Ø12| 50
MF5019| 19.0| 3/4″| 182.5| 156| 40| 40| Ø19| 70
5.2 Installation Instructions
The product at the time of shipment is fully inspected for product quality and
meets all safety requirements. Additional safety measures during the
installation should be applied. This includes, but is not limited to leakage
verification procedures, standard EDS (electrostatic discharge) precautions,
DC voltage precautions, and heavy duty precautions. Other tasks such as
calibration, part replacement, repair, and maintenance must only be performed
by trained personnel. Upon requests, manufacturer will provide necessary
technical support and/or training of the personnel.
Do not open the product cover or alter any part of the product. Any such
actions will forfeit the terms of the warranty and cause the liability to any
damages thereafter.
The product is preferably to be installed horizontally. Flow direction should
be aligned with the arrow mark on the meter body. If the flow fluid may have
particles or debris, a filter (e.g. 0.1p.m) is strongly recommended to be
installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product physical integrity should be
inspected to ensure no visual damage.
b) Before installation of the product, please ensure that the pipe debris or
particles or any other foreign materials are completed removed.
c) Cautions during installation:
(i) It is preferably to first install the inlet end of the meter and then the
outlet end of the meter; To ensure the measurement accuracy, an upstream
straight pipe of length no less than IODN and a downstream straight pipe of
length no less than 5DN should be in place.
(ii) If there is requirement of different pipe size at either
upstream or downstream, the size of the pipe diameters should be larger than
that of the selected meters. Please see detailed as below:
(iii)During installation, please make sure no any foreign
materials (such as water, oil, dirty, particles, etc.) falling into the pipe.
d) Connect electrical wires for LCD, and then electrical wires for
inputs/outputs. Please pay special attention to power supply range (i.e.,
+12-+24 VDC) and power supply polarization (see the description on Electrical
Interfaces in this manual).
e) When connect the communication wires, please make sure that the wires are
correctly connected to the proper ports on your data device/equipment.
f) Turn on the power supply, and make sure that the LCD works correctly.
g) Slowly open the valves at the both ends of the pipeline, and the meter
should then start to measure the flow in the pipeline
h) Completion of the installation.
5.3 Cautions
a) Welding the pipe while the meter is installed is prohibited;
b) Any foreign materials in the pipeline after installation may cause
irreversible damage;
c) Seal gaskets must not block flow channel otherwise accuracy cannot be
maintained;
d) The meter should be properly grounded via the electrical connection;
e) After installation, severe force applied to the meter may cause damage;
f) Severe vibration or very strong magnetic field may cause malfunction.
Operation and Communication
6.1 Cable Definition
The electrical interfaces are defined as Figure 6-1:
| Pin | Definition | Color |
|---|---|---|
| 1 | 4∼20mA output | Purple |
| 2 | RS485(B) | Brown |
| 3 | 4∼20mA GND | Colorless |
| 4 | Pulse output | Yellow |
| 5 | Pulse GND | White |
| 6 | N.C. | Blue |
| 7 | RS485 (A) | Green |
| 8 | Ground (Common) | Black |
| 9 | Power supply (+) | Red |
6.2 LCD Display
Normally, the LCD display looks as Figure 6-2:
A standard litre (SL)
represents a litre of the measured gas at 20°C and 101.325 kPa.
Alarm code EI-E5 (Figure 6-3):
El: Sensor error
E2: ADC error
E3: RTC error
E4: EEPROM error
E5: Crystal error
6.3 RS485 Communication
For purposes of computer control and networking, the RS485 is used for
communication with the following settings:
Baud rate (Bits per second): 57600(P0, Single-device communication)
9600(Pl & P2, Multi-device communications)
Date bits: 8;
Parity: None;
Stop bits: l;
Flow control: None.
6.4 4~20mA Output
For customers who use 4-20mA output. The connection of the loop load resistor
is illustrated as Figure 6-4: R, (max) =8500 (24Vdc power supply)
6.5 Pulse Output
The pulse output is in the form of even square wave that is composed of 3.3V
signal high and OV signal low (Figure 6-5), and each pulse can be programmed
to 0.001 Nm³, 0.01 Nm³, 0.1 Nm³ or INtn³, respectively. (default is 1Nm³).
6.6 Setup via Buttons
6.6.1 Button definition
Three buttons:
: Scroll up the setup menu
: Selection/confirmation of a setting
: Scroll down the setup menu
6.6.2 Operation
(1) The user interface (Figure 6-6):
Button is used for function selection. After press it, the menu asks for
password (authentication mode).
(2) Password interface (Figure 6- 7):
In the password menu, the flow measurement will not be interrupted, whereas
the first line of the LCD display will show the password menu as Figure 6-8:
-
The password consists of six numeric digits. The blinking digit can be assigned a numeric
value, which can be selected from 0-9 through the up/down button . -
After selecting a desirable value, press to confirm the selection, and the proceed to the next digit.
-
After the password is correctly set, the meter enters the function setup menu. Otherwise, the meter returns back to the user mode. ( NOTE: The default password is 11111)
(3) Function setup menu (Figure 6- 7):
Caution: If you want change any settings, please refer to the manual,
otherwise the meter maybe work abnormally.
A exit from the setup mode (this is the default option).
B select accumulated flow units.
- Press , the display will show the accumulated flow units menu; if the value is “–n3–“, the accumulated flow unit is Nm’; if the value is “–SL–“, the accumulated flow unit is SL.
- Press to switch in two units.
- After selection, press to confirm and exit.
C UITTyPE, select instant flow units.
- Press , the display will show the instant flow units menu; if the value is “–n3–“, the instant flow unit is Nm³/h; if the value is”–SL–“, the instant flow unit is SLPM.
- Press to switch in two units.
- After selection, press to confirm and exit.
D InTErVAL”, set response time.
- Press the display will show the response time ( default value is 125 ms).
- Press to set as other response time, 250 ms, 500 ms, 1000 ms (1 s), 2000 ms (2 s), 4000 ms (4 s).
- After selection, press to confirm and exit.
E “SETGCF” ,Set the gas correction factor. See detailed operation in
Figure 6-11.
F “PrOTOCOL”, select communication protocols..
-
Press , the display will show the protocol menu;
P0–000 means mode 0, it is Single-device communication mode;
Pl–xxx (between 001 and 255) means mode 1, Mod bus mode, it is Multi-device communication mode.
P2–xxx (between 001 and 255) means mode 2, reserved, it is Multi-device communication mode.
( e.g, Pl–153 means the meter is working in Multi-device communication mode, protocol is Modbus, and the address is153.) -
Press to switch in two communication modes.
-
After selection, press to confirm and exit.
G “SET Addr”, Set the address for Multi-device communication mode.
Notes: The default address is 255.
H “SET PAS”, Set the password.
Notes: Please remember the new password and placed it properly.
I “OFFSET”, reset the offset of the meter. See detailed operation in
Figure 6-11.
J “CLEAr ACC”, reset the flow accumulation reading to zero.
See detailed operation in Figure 6-11.
( 4) Communication Modes switches ( Figure 6-9, Figure 6-10) A. From
Single-device communication to Multi-device communication
- Set the address of the meter( ) as (3).E. such as 255;
- Set the meter to Multi-device communication mode (select value of to P1–255 0rP2–255) as (3).D;
- After setting, the address will show on the LCD.
B. From Multi-device communication to Single-device communication
- Set the meter to Single-device communication mode (select value of to P0–000) as (3).D;
- After setting, no address will show on the LCD.
Safety and Maintenance
7.1 Wetted Materials and Compatibility
The meter body and pipe are made of 304 stainless steel. Sensors comprise of
silicon, silicon nitride and silicon dioxide and the sensor surfaces are
passivated with silicon nitride and silicon dioxide. The electronic sealing
is provided by RTV (room temperature vulcanizing) silicone sealant WR- 704
composed of HOCH,(Si0),CH,H.
Maintenance
7 .2 Maintenance
Attention: without prior permission of the manufacturer, please do not attempt
to alter any parts of the product as it may cause unrecoverable damages. If
there are questions or doubts, please contact manufacturer immediately before
further actions. Please ensure the DC power is off before disassembling the
sensor.
TEL: +886-4-23729418
FAX: +886-4-23724011
(40349)
www.jetec.com.tw