SENSIRION SFC6000, SFM6000 Mass Flow Controller, Meter Instruction Manual

June 12, 2024
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SENSIRION SFC6000, SFM6000 Mass Flow Controller, Meter

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Product Information

The SFC6000 / SFM6000 is a Mass Flow Controller / Meter designed for precise measurement and control of gas flow. It comes with exchangeable fittings that can be easily modified.
Important Note: Most push-in fittings available on the market are not compatible with O2-enriched gasses. Please ensure material compatibility before using push-in fittings with O2-enriched gasses.

Exchangeable Fittings

To modify the fittings of SFC6000 and SFM6000, follow these steps:

  1. Remove the old fittings:
    • For the front fitting, pull out the metal ring from the top.
    • For the rear fitting, pull out the metal ring from beneath.
    • Remove both metal rings:
      • For the front fitting the metal ring it is to be pulled out from the top.
      • For the rear fitting it must be pulled out from beneath.
    • Remove the fittings by pulling them out. You can use any suitable tool as an aid (e.g. sharp tweezers) to help with the removal. SENSIRION-SFC6000-SFM6000-Mass-Flow-Controller-Meter-fig-1
  2. Remove the fittings:
    • Use a suitable tool (e.g. sharp tweezers) to help with the removal.
    • The metal ring for the rear fitting must be accessed from below.
    1. Insert the new fitting
    2. Insert the metal rings in the correct manner. From the top for the front fitting and from beneath for the back fitting.
  3. Insert the new fittings:
    • Use an appropriate tool to assist in pulling out the fitting.
    • Insert the new fitting.
    • Insert the metal rings in the correct manner: from the top for the front fitting and from beneath for the rear fitting.SENSIRION-SFC6000-SFM6000-Mass-Flow-Controller-Meter-fig-2
Compatible Fittings

The following table lists fittings compatible with SFC6000 and SFM6000:

The table below lists fittings compatible with SFC6000 and SFM6000.

They can be bought from: https://www.festo.com/

Cartridge Model
QSPK18… QSPK18-4
QSPK18-6
QSPK18-8
QSPK18-10
QSPKG18-8
QSPKG18-10
QSPLK18… QSPLK18-4
QSPLK18-6
QSPLK18-8
QSPLK18-10
QSPLKG18-8
QSPLKG18-10
QSPLLK18… QSPLLK18-4
QSPLLK18-6
QSPLLK18-8
QSPLLK18-10
QSPLLKG18-8
QSPLLKG18-10

SENSIRION-SFC6000-SFM6000-Mass-Flow-Controller-Meter-
fig-3 SENSIRION-
SFC6000-SFM6000-Mass-Flow-Controller-Meter-fig-4 SENSIRION-SFC6000-SFM6000-Mass-Flow-Controller-Meter-
fig-5 SENSIRION-
SFC6000-SFM6000-Mass-Flow-Controller-Meter-fig-6

You can purchase these compatible fittings from the official  website: https://www.festo.com/

References

Read User Manual Online (PDF format)

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Download This Manual (PDF format)

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