Newport IMS-V Series High-Performance Linear Stages for Vertical Use User Manual

Newport IMS-V Series High-Performance Linear Stages for Vertical Use

Definitions and Symbols

The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur.

General Warning or Caution

The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible.
The following are definitions of the Warnings, Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety, safety and preservation of the equipment, or important tips.

• WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death.
• CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment.
• NOTE Note indicates additional information that must be considered by the user or operator.

European Union CE Mark
The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations.

Warnings and Cautions

• ATTENTION This stage is a Class A device. In a residential environment, this device can cause electromagnetic interference. In this case, suitable measures must be taken by the user.

Warnings

• WARNING The motio of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved.
• WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state. Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous.
• WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. Nevertheless, if any liquid has entered the stage, switch off the motor power and then disconnect the electronics from power supply. Contact your Newport service facility and request repairs.
• WARNING Do not insert or drop objects into this stage, this may cause an electric shock, or lock the drive. Do not use this stage if any foreign objects have entered the stage. Switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility for repairs.
• WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface, where it may fall or tip over and cause injury. If this stage has been dropped or the case has been damaged, switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility and request repairs.
• WARNING Do not attempt to modify this stage; this may cause an electric shock or downgrade its performance.
• WARNING Do not exceed the usable depth indicated on the mounting holes (see section “Dimensions”). Longer screws can damage the mechanics or cause a short-circuit.

Caution

• CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment.
• CAUTION Do not place this stage in a location affected by dust, oil fumes, steam or high humidity. This may cause an electric shock.
• CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures. This may cause an electric shock.
  • Operating temperature: +10 to +35 °C
  • Storage temperature: -10 to +40 °C (in its original packaging)
• CAUTION Do not move this stage if its motor power is on. Make sure that the cable to the electronics is disconnected before moving the stage. Failure to do so may damage the cable and cause an electrical shock.
• CAUTION Be careful that the stage is not bumped when it is being carried. This may cause it to malfunction.
• CAUTION When handling this stage, always unplug the equipment from the power source for safety.
• CAUTION When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism.
• CAUTION Contact your Newport service facility to request cleaning and specification control every year.

Introduction

This manual provides operating instructions for the stage that you have purchased in the IMS-V Series:

RECOMMENDATION
We recommend you read carefully the chapter “Connection to electronics” before using the (M-)IMS-V stage.

Description

The IMS-V Series linear stage complements the (M-)IMS Series by providing linear travel ranging of 100 and 300 mm. The stages feature robust designs with high performance but without high cost, making them cost-effective solutions for precision industrial and laboratory applications. Using the same industry-proofed technology as the (M-)ILS Series, the IMS-V Series features a FEM optimized, aluminum extruded body that is highly stiff, while minimizing the bending effect caused by different thermal expansion coefficients of the aluminum body and the steel rails. Smooth running recirculating ball bearing slides with ball separators provide accurate linear motion and avoid ball cage migration found on linear ball bearings or crossed roller bearings. A highly- stiff, backlash-free, 3 mm pitch friction lead screw ensures vertical movement with capability to handle high payload. For more demanding precision positioning requirements, the IMS-V Series is equipped with a highly interpolated linear scale providing 0.1 µm resolution feedback. The completely closed design of the IMS-V Series with an upper rigid cover, underlining its robustness and long lasting values. IMS-V stages also feature a motor side mounted origin for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking. For optimal performance, we recommend the use of our motion controllers to choose in accordance with the payload. The IMS-V stages are supplied with a 5-meter cable for connection to our motion controllers.

Design Details

Characteristics

Definitions
Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”. This standard gives the definition of position uncertainty which depends on the 3 following parameters:

Absolute Accuracy
Difference between ideal position and real position.

Accuracy
Difference between ideal position and real position after the compensation of linear errors. Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effects. All Newport motion electronics can compensate for linear errors. The relation between absolute accuracy and on-axis accuracy is as follows: Absolute Accuracy = Accuracy + Correction Factor x Travel

Repeatability
Ability of a system to achieve a commanded position over many attempts.

Reversal Value (Hysteresis)
Difference between actual position values obtained for a given target position when approached from opposite directions. Minimum Incremental Motion (MIM or Sensitivity) The smallest increment of motion a device is capable of delivering consistently and reliably.

Resolution
The smallest increment that a motion device can theoretically move and/or detect. Resolution is not achievable, whereas MIM, is the real output of a motion system.

Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it moves. The testing of accuracy, repeatability, and reversal error are made systematically with test equipment in controlled environment (20 ±1 °C). A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 168 points.

Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport’s A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com.

Mechanical Specifications

CAUTION To reach specifications stated, stages must be fixed on a plane surface with a flatness of 5 µm.

Load Specification Definitions (Depends on the Controller)

CAUTION To go over the indicated speed in accordance with the payload may damage the stage mechanism.

Axial Load Capacity (±Cx)
Maximum load along the direction of the drive train.
Off-Centered Load (Q)
Maximum cantilever-load a stage can move: QV ≤1500 ÷ (1 + D/90), but not greater than Cx Max.

Load Characteristics and Stiffness

WARNING Because of the use of a friction lead screw and the stick-slip effect, the sensitivity of (M-)IMS-V stages at full load depends a lot on the controller/driver features and tuning. Back and forth motions of a few counts after settling are normal. The self locking of the lead screw allow to turn off the servo loop to stop these oscillations, without getting unwanted motion.
WARNING To reach the specifications stated for a (M-)IMS-V stage, the mounting bracket or the fastening support of the stage must have a minimum stiffness at the level of the load in top position, as indicated below:

Stage Weights
Weights indicated into the below table are average values for stages with a typical drive unit installed.

Drives and Motors

DC-Servo Drive Version
A DC-motor and a linear steel scale, 20 µm signal period, 0.1 µm resolution. DC-Motor Performance Specifications and Characteristics

 | Resolution| Speed| Nominal| Max RMS| Max. Peak| Resistance| Inductance| Tachometer
---|---|---|---|---|---|---|---|---
(µm)| (mm/s)| Voltage (V)| Current (A)| Current (A)| ( Ù )| (mH)| Const. (V/krpm)
IMS-V| 0.1| 20 (1)| 48| 1.5| 2.3| 5.1| 3.2| –

Command Signals for the DC-Motor

In the above drawings, + Motor signal is referred to – Motor signal.

1. When the stage moves in + Direction, the + Motor voltage is higher than – Motor voltage.
2. When the stage moves in – Direction, the + Motor voltage is lower than – Motor voltage.

Sensor Position

CAUTION “End-of-Run” and “Mechanical Zero” are active signals and should not be connected to any other source.

Feedback Signal Position

The incremental sensor consists of an optical scale and an encoder head. When the carriage moves, the encoder head generates square signals in quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25 connector.

“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486.

Pinouts
The pinout diagram for the IMS-V stages SUB-D25M connector is shown below .

MCAB-5 Cable
A 5-meter MCAB-5 cable is supplied with each IMS-V stage (see section 5.5: ”Cables”).

Connection to Newport Controllers

Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.

WARNING Disconnect the power plug under the following circumstances:

• If the power cord or any attached cables are frayed or damaged in any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.

CAUTION To protect the unit from damage, be sure to:

• Keep all air vents free of dirt and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.

WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized. Contact your electrician to check your receptacles.
WARNING This product is equipped with a 3-wire grounding type plug. Any interruption of the grounding connection can create an electric shock hazard. If you are unable to insert the plug into your wall plug receptacle, contact your electrician to perform the necessary alterations to ensure that the green (green-yellow) wire is attached to earth ground.
WARNING This product operates with voltages that can be lethal. Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts.

Connection to XPS Controller Connection to ESP301 Controller

WARNING With these controllers, the payload can’t be over than 100 N.

Connection
There is a label on every stage indicating its part and serial numbers.

WARNING Always turn the controller’s power OFF before connecting to a stage.

NOTE These stages are ESP compatible. Enhanced System Performance is Newport’s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters. This ensures that the user can operate the motion system quickly and safely.

Cables
All IMS-V stages are delivered with MCAB-5 5-meter cables with a SUB-D25M connector for direct connection to Newport Controllers.

WARNING IMS-V Series translation stages operate only with a 5-meter max. cable.
WARNING This cable is shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).
WARNING This cable is shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).

Connection to Non-Newport Electronics

Connections

WARNING Newport is not responsible for malfunction or damage of IMS-V stages when used with non-Newport controllers.
WARNING Newport guarantees “”compliance of IMS-V stages only if used with Newport cables and controllers. It is the customer’s responsibility to modify the cable and take care of sensor signal connections, when using the stage with non-Newport controllers. End-of-Runs and Mechanical Zero are open collector type with a 5.6 V protective Zener diode.

Dimensions

(M-)IMS-V Stages

Top Plate Interface

(M-)IMS-V Stages without Top Plate Interface
Sometimes, it is necessary to remove the top plate interface of a (M-)IMS-V stage. To do that, just unscrew the 4 CHc M6 x .63 (16) on sqr 5.91 (150) screws at the 4 corners of the plate with the wrench supplied with the stage. Both IMS-V and M-IMS-V stages will then have the same opposite interfaces .

Maintenance

• RECOMMENDATION Please contact Technical Sales Support team for recommendations on application specific maintenance.
• Maintenance The (M-)IMS-V stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution.
• PRECAUTIONS The (M-)IMS-V stage must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.
• RECOMMENDATION It is recommended to return the stage to Newport for re-lubrication after 2000 hours of use. If the IMS-V stage is mounted on a workstation and cannot be easily removed, please contact Newport’s After Sales Service for further instructions.

Repair

• CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual. To disassemble a non specified component can cause a malfunction of the stage.
• If you observe a malfunction in your stage, please contact us immediately to arrange for a repair.
• CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty.

Calibration

• CAUTION It is recommended to return your (M-)IMS-V stage to Newport once a year for recalibration to its original specifications.

Service Form

Visit MKS I Newport Online at: www.newport.com

Warranty

Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days.

Limitation of Warranty
This warranty does not apply to defects resulting from modification or misuse of any product or part.

CAUTION Warranty does not apply to damages resulting from:

• Incorrect usage:
  • Load on the stage greater than maximum specified load.
  • Carriage speed higher than specified speed.
  • Improper grounding.
  • Connectors must be properly secured.
  • When the load on the stage represents an electrical risk, it must be connected to ground.
  • Excessive or improper cantilever loads.
• Modification of the stage or any part thereof.

This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages.

© 2018 by Newport Corporation, Irvine, CA. All rights reserved. Original instructions.
No part of this document may be reproduced or copied without the prior written approval of Newport Corporation. This document is provided for information only, and product specifications are subject to change without notice. Any change will be reflected in future publishings.

EC Declaration of Conformity

North America & Asia
Newport Corporation
1791 Deere Ave.
Irvine, CA 92606, USA

Sales
Tel.: +1 (949)-863-3144
e-mail: [email protected]

Technical Support
Tel.: +1 (949)-863-3144
e-mail : [email protected]

Service, RMAs & Returns
Tel.: +1 (949)-863-3144
e-mail: [email protected]

Europe
MICRO-CONTROLE Spectra-Physics S.A.S
7 rue des Plantes 45340 Beaune-la-Rolande France

Sales Europe (EMEAI)
Tel.: +49 (0) 6151-708-0
e-mail: [email protected]

Sales France
Tel.: +33 (0)1 60 91 68 68
e-mail: [email protected]

Sales UK
Tel.: +44 (0)1235 432 710
e-mail: [email protected]

Technical Support
e-mail: [email protected]

Service & Returns
Tel.: +33 (0)2 38 40 51 55
DST-BEA-RMA-[email protected]

References

• Newport - Photonics Solutions for Extending the Frontiers of Science

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