CS210-C Beijing Sevenstar Flow Co User Manual

CS210-C Beijing Sevenstar Flow Co

Instruction of MFC/MFM

Declaration
The copyright of The user’s manual of the mass flow controller and mass flow meter is subject to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store distribute any part of this manual in the mean of electric, mechanical, photocopy, recording or another way without the permission of Sevenstar. This manual is not assured that there are no mistakes or missing which have been corrected strictly, and the publisher is under no obligation to the mistake or missing, meanwhile, the publisher is not in charge of any loss that this manual leads to.

Attention
Dear customer, thanks for using the CS mass flow controller and mass flow meter. This manual describes in detail important issues about correct and safe operations of the product. Users of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully.

The notice of safety
Please pay attention to the below notices when reading this manual. We are not responsible for any result without abiding by the below notices.

• Do not replace any components or disassemble the instrument.
  Do not replace any components, or disassemble the instrument without any authorization, and make sure that the label and/or seal of the product is not removed when returning for reworking, recalibration, and maintenance.

• Please contact a professional for technical service.
  Do not replace any components. Any technical support is provided by a professional who must be authorized by Sevenstar.

• Please pay more attention to the use of dangerous gas.
  The instrument should be purged completely and kept safe if dangerous gas is used. Meanwhile, make sure that moist gas does not react with the material of the seal and instrument.

• Please pay attention to the purging instrument.
  The whole system should be purged by dry gas after and before the instrument is installed.

• Please abide by the proper steps of purging.
  The product should be purged and handled with gloves.

• Do not use the instrument in an explosive environment.
  Do not use the instrument in an explosive environment, unless the safety certificate is available.

• Please use proper fitting s and keep the rules
  All fittings of the instrument must be matched according to the listing in the manual. Please read the manual carefully before screwing tightly.

• Please do a leakage check
  Please check carefully all of the vacuum parts and make sure that there is no leakage in the system

• Please make sure that instrument is working under safe pressure.
  Please make sure that the pressure of inlet gas is less than the maximum working pressure (referring to maximum working pressure in

• Please keep the whole system away from pollution.
  When the system running, do not use polluting gas such as particles of dust, dirt, fiber, glass, or scrap iron.

• Please do warm up an instrument before working
  Please warm up instruments, especially in using dangerous gas. Please close the valve completely to make sure that there is no error flow.

General
Mass flow controller (MFC) accurately measures and controls mass flow rates, which is widely applied in fields such as semiconductor and IC fabrication, special materials science, the chemical industry, the petrolic industry, the pharmaceutical industry, environmental protection, vacuum system research, etc. The typical applications include microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting, micro reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph, and other analytical instruments. The CS210 C MFC/MFM is the latest generation MFC for use in semiconductor applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required. The CS210-C MFC/MFM incorporates a dual interface RS-485 and EtherCAT digital interfaces. CS210-C series has a wide range of power supply(available for +20.4 ～ +26.4 VDC). In addition, auto-alarm, change of operating gas, and range are available through the digital interface. Customer Secondary Development of control and sample software is available through the open protocol.

CS210-C MFC default setting： MAC address：32； RS485 baud rate：19200； For more information, please refer to www.mfcsevenstar.cn. Path: Service >> Downloads>>Software download>>Communication Protocol .

Specification

0～1,2,3,5,10,20,30)SLM
Accuracy| ±1.0% S.P. (≥35% F.S.)                      ±0.35% F.S. (＜35% F.S.)
Linearity| ±0.5% F.S.
Repeatability| ±0.2% F.S.
Response Time| ≤ 0.8 sec (SEMI E17-0600)
Valve Rest Position| Normally Closed       or Normally Open| No Valve

Differential Pressure

| (0.05～0.35) MPa（≤10slm） (0.1～0.35) MPa（＞10slm）| ****

＜0.02MPa

Maximum

Operating Pressure

| ****

0.45MPa

Temperature Coefficient

| ****

Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃

Proof Pressure| 3MPa (435pisg)
Leak integrity| 1×10-10 atm· cc/sec He
Wetted Materials| Metal (Stainless Steel V/V, 5Ra)
Surface Chemistry| ——
Surface Finish| 10Ra
Operation| （0～50）℃
Temperature

Input Signal

| ****

Digital: RS485 or EtherCAT

| ****

N/A

Output Signal| Digital: RS485 or EtherCAT
Power Supply| +20.4 ~ +26.4 VDC
Electronic Connector| 9 pin male sub-D , EtherCAT

Fittings

| VCR1/4” M;Compression FittingΦ6, Compression FittingΦ3, Compression Fitting1/4”，W-seal，

C-seal

Weight| 1.2kg| 1kg

Notes

• MFC/MFM is calibrated by N2 as a standard gas.
• Units
  • SCCM (Standard Cubic Centimeter/
  • SLM (Standard Liter/Min)
• Standard Situation: Tem 273.15K ( 0 ºC ); Air Pressure 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to mL/min, 0 ºC,1atm ”, and the unit of SLM is identical to L/min, 0 ºC,1atm
• F.S : Full Scale

Calibration Features

Normally, the MFC is calibrated close to the customer’s requirement ( the requirement should be accord ed with the specification) specification). Without the customer’s information, the MFC are calibrated under standard conditions.

Standard conditions
Without special conditions specified by the customer, the MFC is calibrated under the following standard conditions:

• Pressure Outlet : Atmospheric

Normally gas mass flow rate is transferred to gas volume flow rate at standard state.

Mass flow rate unit

• SCCM standard cubic centimeter per minute
• SLM standard liter per minute.
• Standard state Temperature 0ºC (273.15K)
• Pressure 101325Pa (760mmHg)

At standard state, the gas density will be constant. The multiplication of density and volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume flow rate can represent the mass flow rate. The standard mounting position is horizontal, And other positions such as vertical inlet up or down flatwise or customized position are optional. The mounting position should be specified by the customer to ensure the best accuracy.

Manufacturing Environment

The MFC are assembled in a class 100 clean room calibrated, packaged, and controlled in a class 1000 environment. The temperature is 2 2 ±2

Precision Adjustment
Each MFC is accurately controlled for 24 hours after manufacturing on a different calibration bench. The accuracy, the dynamic response, and the stability to pressure variations are checked, and only qualified products available for

INSTALLATION

General

• WARNING: Toxic, corrosive or explosive gases must be handled with extreme care. After installing the MFC, the system should be thoroughly checked to ensure it is leak free. Purge the MFC with a dry inert gas for one hour before using corrosive gases.
• IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit in the same direction as the gas flow.

Unpacking
The CS210 C MFC /MFM are assembled ed calibrated and cleanly packaged under clean room conditions These series products are packaged in two separately sealed plastic bags. The outside is a common plastic bag, the inside is a clean bag. The outside bag should be removed in the entrance to the clean room. To minimize the contamination, the second clean bag should be removed in the clean room when MFC is installed in the system.

Mechanical Installation

General
Most applications will require a positive shutoff valve in line with the e-MFC. Pressurized gas trapped between the two devices can cause purge effects, and consideration must be given to the sitting of the shutoff valve (upstream or downstream) concerning the process sequencing. I t is recommended that you install an inline filter upstream to the controller to prevent MFC from contamination.CS210C should be mounted in the position according to the requirement in the purchase order. The gas should be clean and dry. The mounting should be free from shock or vibration. The pictures of the product are shown in Figure 1 and Figure 3, and the dimensions of the product are shown in Figure 2, and Figure 4. Different fittings( Compression Fittingφ6, Compression Fittingφ3, Compression Fitting1/4， Compression Fitting 1/8 8, VCR1/4 M, Compression Fitting 3/8 1.5〞W-seal，1.5〞C-seal) are optional for customer, The length of the product L are shown in Table 2 1. Do not remove the protective end caps of the fittings until installation.

Table 2-1 The length of the product with different fittings

Fitting|

Compression Fittingφ6; Compression Fittingφ3 Compression Fitting1/4; Compression Fittingφ10

|

Ф4(inner)×1hose

| VCR1/4〞 M VCO1/4〞 M| 1.5〞

W-seal

---|---|---|---|---
Length
 | Compression Fitting1/8; Compression Fitting3/8|  | Ф6(inner)×1hose| 1.5〞C-seal
 |  |  | Ф5(inner)×1.5hose| A-seal

L（mm）

|

112.8

|

117.6

|

124

|

105.2

Attention
The height (which is showing in Figure 2-2 and Figure 2-4 ) of 1 32 mm are height without electric connectors of cable. It should be added around 50mm more after adding th e electric connector.

Installation
Place MFC according to the flow direction.

1/4VCR Connection
Refer to figure 2-6 and figure 2-7. Check the gland-to-gland space, including the gaskets. Remove the plastic gland protector caps. When using loose VCR original style gaskets, insert ing the gasket into the female nut. For VCR retainer gaskets, snap the gasket onto the male coupling. Tighten the nuts finger tight. Scribe both nut and body to mark the position of the nut. While holding the body with a wrench, tighten the nut: 1/8 turn past finger tight for 316L stainless steel and nickel gaskets.

Two-ferrule (Compression Fitting) Connection
Refer to figure 2-8. Check the gland-to-gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in Figure 2-8. Tighten the nuts finger tight. Use two spanners, one spanner locking the fitting stable, wrench another one to tighten in 1.25 turns to prove it’s not blow-by after installing the front ferrule, back ferrule, and nut.

Attention
When installing the fitting, you should manually use a spanner to wrench it tighten by 1/2 turn pulling up, (imported Compression Fitting should use a spanner to be tightened in 1,25 turns) to prove it’s not blow after yo ur installing the front ferrule 、 back ferrule and nut. Please note you should use two spanners to operate, one spanner for locking the fitting stable and another one for revolving the nut. Especially when you dismantle the tube, you should operate bhe two spanners other the fitting will become flexible which will affect its airproof function.

Electrical Installation

General
The 9-pin male Sub D connector, RS485 connector, RS232 RS485 connector, and EtherCAT connector of RJ45 are shown in figure2 8, figure2 9, figure 2 10, figure 2 1 1, figure 2 1 2, figure 2 1 3.

Table of Selecting Type of Cable and its Illustration of Connection

Table 2-2 Table of Selecting Type of Cable

 | D08- 2B/3B/4B

2E/3E/4E

|

D08- 1/2/4 2F/3F/4F

D08-1F/1FM/1FS/8C/8CM/1G/1GM

|

Input

+24V

| To Serial of PC| To USB

of Computer

---|---|---|---|---|---
MFC

(DB9 pin)

| QCX-20/ QCX-P20 QCX-49| QCX-18/QCX-P18 QCX-47|  |

QCX-34

|

QCX-50

---|---|---|---|---|---
MFC

（EtherCAT）

|  |  |  |

QCX-34

|

QCX-50

Sevenstar manufactures all standard cables, RS485 adaptors, customized cables, and some accessories. For more details, contact Sevenstar or its local agent

Checking Before Operation
Before operating the MFC the follo wing checks should be completed

1. Check that the tubing is leak-free.
2. Check the process sequence and proper function of all other gas components involved.
3. Check the voltage of command signals and power supply to the MFC/MFM.
4. Check that the appropriate type of gas is being supplied at the rated pressure.
5. Allow the MFC to warm up for 20 minutes, and then check the zero-level output. 2.5.6 Use dry inert gas for test runs.
6. Before using the MFC for extremely corrosive gases, purge the MFC with a dry inert gas for one hour.

FUNCTIONS

General
Based on new sensor driver technology, zero balance technology, and VCP technology, CS210-C MFC/MFM presents high performance and reliability. And more digital functions are developed in CS210-Cproducts.

Control Mode
CS210-C MFC/MFM is available for digital，0-5V voltage, and 4-20mA or 0-20mA current control mode and output. When a customer chooses one of the three control modes, the others will be screened. The analog output will be available at all times. The flow output of the CS210-C MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS210-C MFC/MFM can be provided to the MFC through one of three sources, in digital or analog mode. For more information, please refer to www.mfcsevenstar.cn.Path: Service >> Downloads>>Software download>>Communication Protocol.

Zero
The Zero function can be commanded through the digital interface or the zero button. Before zero MFC, please make sure that no gas flows through MFC. Then zero MFC by the digital interface or zero-button. The zero button must be pressed continuously for 0.5 seconds to start the zero process. The green LED will blink during the zero process. After zero is finished, the green LED will be on constantly.

Soft-Start
The CS210-C MFC/MFM supports the soft-start function. Soft-start allows customers to change the setting of MFC with a definite rate. For more information, please refer to www.mfcsevenstar.cn.Path:Service>> Downloads>>Software download>>Communication Protocol.

Delay
Delay is used to postpone the start of flow from zero flow to the received set-point. It is programmed in milliseconds but the MFC internally rounds up any value to 100ms. For example, when the delay value is 200, MFC will de200 and nd  then receiveoperatingerate command. When the set point is less than the min control rate, the valve will shut off, and when larger than the min control rate, MFC will start after the set delay time.
Special default: Values from 1 to 49 ms will be programmed as 100 ms. The delay applies to digital and analog set points.

Valve Command Mode
CS210-C MFC/MFM are available for valve-close or valve-open by inputting digital signal directly. The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command. For more information, please refer to www.mfcsevenstar.cn.

• Path: Service>>Downloads>>Software .download>>Communication Protocol .

Valve Type

CS210-C MFC /MFM have two types of valve: Normally ope n(NO) or Normally closed(NC) . When MFC do not have a power supply, the NO-type valve is open and gas can flow through the MFC; the NC-type valve is closed and gas can not flow through. Please mention the valve type when you order the MFC.

Multi-Gas and Multi-Flow
The multi-gas and multi-range technology has been developed in the CS210 C series MFC /MFM. Customers can change the gas convert factor, and full scale of MFC via a digital interface. The full scale of CS210 C series MFC /MFM can be re-ranged from 30 % to110 %F S For example, an MFC with 100SCCM full scale, the new full scale can be re-ranged between from 30SCCM to 110SCCM. CS210 C MFC /MFM support customer offset by the target null value. The target null value is a customer-programmed constant used to offset the flow output independently of all other sensor offset constants, including the zero processes. For example, set Target NullValue 20%F S then when no flow through MFC /MFM the reading is 20%F S with gas flow 20%F S through MFC /MFM the reading is 0%F S 。 O set range is from 100%F S to 100%F S 。 For more information, please refer to www.mfcsevenstar.cn.Path: Service >> Downloads>>Software download>>Communication Protocol.

Total Flow Accumulator
The Total Flow accumulator will record the amount of gas (in SCC ) that has been delivered by CS210 C MFC /MFM. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, which means the amount of gas delivered by MFC is 3000SCC For more information, please refer to www.mfcsevenstar.cn.Path:Service >> Downloads>>Software download>>Communication Protocol.

Alarm
The CS210 C MFC /MFM will monitor and store certain abnormal conditions as described below. These conditions can be read and reset from the RS485 interface. Provisions will be made for masking (disabling) the alarms or warnings on an individual basis.

• Warning and Alarms:
• Sensor Zero Output Out of Bounds
• EE PROM Failure
• Valve Coil Failure or Valve Disconnected
• Temperature Out of Operating Range

After powering up the LED on the top of the CS210 C MFC /MFM is turned GREEN. A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED. For more information, please ref er to www.mfcsevenstar.cn.Path:Service >> Downloads>>Software download>>Communication Protocol.

LED
There is a green-red LED located on the top of the MFC. The cons tant green LED indicates the power on. Green blinking indicates that the MFC is zeroing. A blinking red LED indicates a warning condition. Constant red indicates serror condition. CS210 A EtherCAT communication product has an MFC LED indicator light and an ECAT _ERR LED indicator light on the top. When EtherCAT communication is normal, the ECAT_ERR LED indicator light is always off B right indicating that EtherCAT communication is faulty. The status of the white indicator light refers to 485 communication products.

MAINTENANCE

General
No routine maintenance is required to be performed on the MFM or MFC, Other than occasional cleaning and re-calibration: It can be used for about 3 or 4 years with an ultra-clean and noncorrosive gas. It can be used for about 1 or 2 years with a low-purity gas or a corrosive gas.

For any other problems, contact Sevenstar.

Caution

Medium Forbidden
The used gas should be purified without dust liquid and oil stain. If necessary, the filter should be added to the gas system for purification. If the outlet of the MFC is connect ed to liquid sources, a way valve should be added to avoid the liquid back to destroy MFC.

Attention
For the cases where the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system and purge the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to purge the controller could cause a fire or explosion resulting in death.

Seal of Valves
The Solenoid Valve of MFC is only for adjustment, and can not be used for shut off. Generally, shut-off valves should be added upstream and downstream of MFC for protection. Normally leakage of the MFC valve is not more than 1% F.S

TROUBLESHOOTING

Initial Check

1. Check the gas supply pressure and check the flow path to the MFC/MFM has been opened.
2. Ensure that the power supply and command signals are correctly transmitted to the D connector pins and RS485
3. Check that the output signal matches the external reading.

Troubleshooting
Use the following table to locate the fault.

1

| Output reading, without gas flow, is not zero| Gas flow is actually

present

| Check closure of series shutoff valve
Zero drift| Zero MFC
other| *Contact Sevenstar

2

|

MFC will not control

| Gas connection incorrect| Check gas connection
Pressure incorrect| Check pressure condition
Wrong control mode| Change the control mode by the

software

Power failure| Check Power and pin position
Setpoint incorrect| Check setpoint signal
Contamination| Contact Sevenstar
Defective sensor| Contact Sevenstar
PCB problems| Contact Sevenstar
Defective Mechanics| Contact Sevenstar

3

|

MFC will not communicate with PC

| Power failure| Check the Power and pin position
Cable problems| Check cable and connector
Address conflict| Check the address of MFC
Baud rate error| Check the baud rate of MFC
PCB problems| *Contact Sevenstar

Attention

• Mark indicates that reparation and adjustment must be dealt with under specialist advice For any other problems, contact Sevenstar.

WARRANTY AND SERVICES

6.1 G
Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are no flaws of the material and quality of the product within 12 months from the date of the product is purchased by you. The customer compensation is only limited to invalid parts for substitution, installation, and processing flaws. It is guaranteed that all parts chosen by customers are suitable to the relative manufacturer. Other relative statements, guarantees, and obligations of status and usage of the product, whether direct or indirect, are definitely to be excluded d. In any circumstance, Sevenstar and its authorized distributors are not charged of any obligation of direct or indirect loss for customers or others.

Product Warranty

1. Sevenstar products are guaranteed against defects in materials and workmanship if used under specifications and not subject to physical damage, contamination, alteration or retrofit. Warranty periods: One year
2. Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.
3. During the warranty period, products must only be repaired by authorized Sevenstar service centers; Otherwise, the Sevenstar product warranty will be invalidated.
4. Repairs will be performed free of charge during the one-year warranty period. If MFC is out of warranty, Sevenstar will notify the owner of replacement or repair costs before proceeding. Factory service and repairs are guaranteed 90 days. The warranty excludes consumable materials and wears parts (in Teflon, Viton, etc.).
5. No MFC will be accepted for repair or warranty without a decontamination and purge certificate.
6. Each MFC is individually checked (visual inspection of fittings, helium leak test, and flow calibration). Sevenstar shall not be responsible for any damage caused by gas leakage or the use of dangerous gas. Users are responsible le for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.

Specific warranty requirements ar e as follows :

• A Gas must be clean and particle-free, which means a filter must be fitted in the gas line upstream of the MFC.
• B Gas must comply with the following pressure specifications:
  1. G as pressure must never exceed 3MPa
  2. Differential pressure must be more than 0.0 5 MPa for full-scale flow through the MFC valve unless another value is specified in the user’s manual.
  3. Differential pressure must be less than 0. 3 5MPa for the MFC valve to regulate without gas flow oscillation unless another value is specified in the user’s manual.
  4. Pressure at the mass flow inlet must be regulated by an accurate pressure regulator to prevent gas flow oscillation.
• C Electrical connection requirements are as follows: The system must be wired carefully: nonobservance of the pin out may irreversibly damage the electronic board inside the MFC, in which case the warranty will be invalidated.
• D Gas connections: The fittings must be handled carefully. Sevenstar guarantees that all fittings have been individually inspected and are scratch-free.
• E Fitting procedure: The fitting procedure set out in the manual must be followed meticulously. Specifically, the purge procedure is very important if corrosive gases or toxic gases are used.
• F The mass flow must not be dismounted: The MFC warranty will be invalidated if the seal between the MFC block and cover is torn.

Services
Sevenstar can provide services like start-up service, software development, gas system design, training, etc. Please visit www.mfcsevenstar.cn for more information and find your nearest service and calibration centre

Disclaimer
Beijing Sevenstar Flow Co., Ltd is not responsible for loss as the following situation:

1. Nature disaster and calamity;
2. Unsuitable operation and unreasonable usage;
3. Operating and storing in inappropriate or execrable circumstances;
4. Usage of instrument beyond users manual;
5. Unauthorized change or replacement of product.

For example
It is whether that gas path is not cleared before using corrodible gas or whether MFC is contaminated or blocked by particles such as dust.

-[-]: Default Value The letters on cover and tag In English

Differential Pressure

• (0.05 ~ 0.35) MPa (7.3~50.8 paid) ( FLO W 10SLM)
• (0.1 ~ 0.35) MPa (14.5~50.8 paid) (10SLM FLOW 3 0SLM )
• (0.2 ~ 4 5) MPa ( 29 0 65.3 psi) ( 3 0SLM FLOW)

CS200A 、 CS210 C 、 CS200 D XXXN 0.02MPa (2.9psid)

• Proof pressure 3 MPa (435.1 psig)
• Calibration temperature:(22±
• Valve command mode 2
• Power Supply: +24V

-[ S ] Customized Requirement

For Example: I/O sign:4~20mA

• The proportion of mixture gases should be indicated: N2 (60%) + CO2(
• Customer Differential Pressure: (0.05 ~ 0.3) MPa Customer
• Calibration Temperature: 40 The letters
• on cover and tag: in Chinese
• Valve command mode :0 and other customized requirements.

APPENDIX II CONVERSION FACTOR

GAS| GAS CODE

(SEMIE52-0302)

| SPECIFIC HEAT

( Cal/g ℃)

| DENSITY

(g/l 0℃)

| CONVERSION

FACTOR

---|---|---|---|---
Air| 008| 0.2400| 1.2930| 1.001
Ar| 004| 0.1250| 1.7837| 1.420
AsH3| 035| 0.1168| 3.4780| 0.673
BBr3| 079| 0.0647| 11.1800| 0.378
BCl3| 070| 0.1217| 5.2270| 0.450
BF3| 048| 0.1779| 3.0250| 0.508
B2H6| 058| 0.5020| 1.2350| 0.441
CCl4| 101| 0.1297| 6.8600| 0.306
CF4| 063| 0.1659| 3.9636| 0.420
CH4| 028| 0.5318| 0.7150| 0.722
C2H2| 042| 0.4049| 1.1620| 0.596
C2H4| 038| 0.3658| 1.2510| 0.597
C2H6| 054| 0.4241| 1.3420| 0.482
C3H4| 068| 0.3633| 1.7870| 0.421
C3H6| 069| 0.3659| 1.8770| 0.411
C3H8| 089| 0.3990| 1.9670| 0.358
C4H6| 093| 0.3515| 2.4130| 0.322
C4H8| 104| 0.3723| 2.5030| 0.299
C4H10| 117| 0.4040| 2.6500| 0.261
C5H12| 240| 0.3916| 3.2190| 0.217
CH3OH| 176| 0.3277| 1.4300| 0.584
C2H6O| 136| 0.3398| 2.0550| 0.392
C2H3Cl3| 112| 0.1654| 5.9500| 0.278
CO| 009| 0.2488| 1.2500| 1.000
CO2| 025| 0.2017| 1.9640| 0.739
C2N2| 059| 0.2608| 2.3220| 0.451
Cl2| 019| 0.1145| 3.1630| 0.858
D2| 014| 1.7325| 0.1798| 0.997
F2| 018| 0.1970| 1.6950| 0.931
GeCl4| 113| 0.1072| 9.5650| 0.267
GAS| GAS CODE (SEMIE52-0302)| SPECIFIC HEAT

( Cal/g ℃)

| DENSITY

(g/l 0℃)

| CONVERSION FACTOR
---|---|---|---|---
GeH4| 043| 0.1405| 3.4180| 0.570
H2| 007| 3.4224| 0.0899| 1.010
HBr| 010| 0.0861| 3.6100| 0.999
HCl| 011| 0.1911| 1.6270| 0.988
HF| 012| 0.3482| 0.8930| 1.001
HI| 017| 0.0545| 5.707| 1.000
H2S| 022| 0.2278| 1.5200| 0.802
He| 001| 1.2418| 0.1786| 1.420
Kr| 005| 0.0593| 3.7390| 1.431
N2| 013| 0.2486| 1.2500| 1.000
Ne| 002| 0.2464| 0.9000| 1.431
NH3| 029| 0.5005| 0.7600| 0.719
NO| 016| 0.2378| 1.3390| 0.978
NO2| 026| 0.1923| 2.0520| 0.737
N2O| 027| 0.2098| 1.9640| 0.710
O2| 015| 0.2196| 1.4270| 0.981
PCl3| 193| 0.1247| 6.1270| 0.358
PH3| 031| 0.2610| 1.5170| 0.690
PF5| 143| 0.1611| 5.6200| 0.302
POCl3| 102| 0.1324| 6.8450| 0.302
SiCl4| 108| 0.1270| 7.5847| 0.284
SiF4| 088| 0.1692| 4.6430| 0.348
SiH4| 039| 0.3189| 1.4330| 0.600
SiH2Cl2| 067| 0.1472| 4.5060| 0.416
SiHCl3| 147| 0.1332| 6.0430| 0.340
SF6| 110| 0.1588| 6.5160| 0.258
SO2| 032| 0.14890| 2.8580| 0.687
TiCl4| 114| 0.1572| 8.4650| 0.206
WF6| 121| 0.0956| 13.2900| 0.217
Xe| 006| 0.0379| 5.8580| 1.431

Conversion Factors Instruction:
MFC and MFM are standard calibrated by N2 while it’s out of the factory. Other gas calibrations can be approximated by converting conversion factors of our instruction While using other gas operating:

One single gas: The conversion factors could be out in the user’s specification instructions.

A mixture of two or more gases: Assume there are n sorts of gases, could calculate the conversion factors C by the following formula:
Basic Formula C=0.3106 N / ρ (CP)

• ρ Density of the gas
• C p Specific heat of the gas
• N Structure factors of the gas molecule (See the following table

Table. G as Molecule Composing factors

Software Download Address:

• en.mfcsevenstar.com

Please register first and then download software.

Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn or mfcoversea@sevenstar.com.cn

CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd.

• Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area
• Postcode 100 176
• Tel (+ 10 56178088
• Fax (+ 10 56178099
• Homepage www.mfcsevenstar.cn
• E-Mail:mfc sales@sevenstar.com.cn
• Shanghai Office: Room 51 1 B ui ld in g.29 No.368, Zhangjiang R oa d, Pudong New District Shanghai
• Tel ((+ 21 63532370
• Fax (+ 21 63533265
• Shenzhen Office: Room 202, Section B, No. 1 Chuang j in, No. 125 Chuangye Erlu , 28th Section, Baoan District, Shenzhen
• Tel ((+ 755 8 8290258
• Fax (+ 755 88294770
• The description may be changed following improvements to the product. The information contained in this document is subject to change without notice
• If there is any mistake in this use manual, please feel free to contact us.

References

• Beijing Sevenstar Flow Co., LTD._Mass flowmeter_Flow Control
• 北京华丞电子有限公司-mfc流量计-国产质量流量计-流量显示仪
• 北京华丞电子有限公司-mfc流量计-国产质量流量计-流量显示仪

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