Sevenstar CS200-C High Purity Mass Flow Controller Gas Flowmeter User Manual
- June 9, 2024
- Sevenstar
Table of Contents
- CS200-C High Purity Mass Flow Controller Gas Flowmeter
- Specifications
- Product Information
- Introduction
- Installation
- Functions
- Maintenance
- Troubleshooting
- Warranty and Services
- 1. Declaration
- 2. Attention
- 3. Notice of Safety
- Q: What should I do if I encounter a leakage issue?
- Q: How can I troubleshoot operational issues with the CS200-C
CS200-C High Purity Mass Flow Controller Gas Flowmeter
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Specifications
- Product Model: CS200-C MFC/MFM
- Security Level: Unclassified
- Release Date: December 2023
Product Information
Introduction
The CS200-C MFC/MFM is a mass flow controller and mass flow
meter designed by Beijing Sevenstar Flow Co. Ltd. This user manual
provides detailed information on the correct and safe operation of
the product.
Installation
Proper installation of the CS200-C MFC/MFM is crucial for
optimal performance. Follow the guidelines outlined in Section 2 of
the manual for a successful installation process.
Functions
-
General: Section 3 provides an overview of the
general functions of the device. -
Control Mode: Learn how to operate the device
in different control modes in Section 3.2. -
Zero: Understand how to zero the device for
accurate measurements in Section 3.3.
Maintenance
Regular maintenance is essential to ensure the longevity of the
CS200-C MFC/MFM. Refer to Section 4 for maintenance tips and
guidelines.
Troubleshooting
If you encounter any issues with the device, Section 5 provides
a step-by-step guide for initial checks and troubleshooting
procedures.
Warranty and Services
Learn about the guarantee, warranty, and services provided by
Sevenstar in Section 6 of the manual.
Product Usage Instructions
1. Declaration
The user must comply with the instructions outlined in the user
manual to ensure correct and safe operation of the product.
2. Attention
Read and understand the manual thoroughly before using the
CS200-C MFC/MFM. Pay close attention to labels and notices for safe
operation.
3. Notice of Safety
Follow these safety notices to prevent any mishaps during
product usage:
-
a) Do not replace or disassemble any
components of the instrument. -
g) Use proper fittings according to the manual
guidelines. -
h) Conduct a leakage check to ensure system
integrity. -
i) Operate the instrument under safe pressure
limits. -
j) Keep the system free from pollution during
operation. -
k) Perform warm-up procedures before using the
instrument, especially with hazardous gases.
FAQ
Q: What should I do if I encounter a leakage issue?
A: Conduct a thorough check on all vacuum parts and ensure there
are no leaks in the system. Refer to Section 1.3 for detailed
instructions on leakage checks.
Q: How can I troubleshoot operational issues with the CS200-C
MFC/MFM?
A: Section 5 of the manual provides a comprehensive guide on
initial checks and troubleshooting procedures to address
operational issues effectively.
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CS200-C MFC/MFM
User’s Manual
Security: Unclassified
Dec, 2023
Contents
SECTION 1 INTRODUCTION
1.1 Declaration …………………………………………… 1 1.2 Attention………………………………………………. 2 1.3 The
notice of safety ……………………………….. 2 1.4 General ………………………………………………… 3 1.5
Specification …………………………………………. 5 1.6 Calibration features ………………………………. 6
SECTION 2 INSTALLATION
2.1 General ………………………………………………… 7 2.2 Unpacking…………………………………………….. 7 2.3
Mechanical Installation …………………………. 8 2.3.1 General……………………………………………….. 8
2.3.2 Installation ………………………………………….. 15 2.3.2.1 1/4VCR Installation
…………………………… 15 2.3.2.2 Compression Fitting Installation ………….. 16 2.4
Electrical Installation…………………………….. 17 2.5 Checking Before Operation…………………..
23
SECTION3 FUNCTIONS
3.1 General………………………………………………….. 23 3.2 Control Mode ……………………………………….. 23 3.3
Zero ……………………………………………………… 24
3.4 Soft-Start ………………………………………………… 24 3.5 Delay ………………………………………………………. 24 3.6
Valve Command Mode …………………………….. 24 3.7 Valve Type……………………………………………….. 24 3.8
Multi-Gas and Multi-Flow ……………………….. 25 3.9 Total Flow Accumulator ……………………………
25 3.10 Alarm ……………………………………………………. 25 3.11 LED ………………………………………………………. 26
SECTION 4 MAINTENANCE
4.1 General …………………………………………………… 27 4.2 Caution …………………………………………………… 27
SECTION 5 TROUBLESHOOTING
5.1 Initial check …………………………………………….. 28 5.2 Troubleshooting ……………………………………….
28
SECTION 6 WARRANTY AND SERVICES
6.1 Guarantee of Sevenstar ……………………………. 29 6.2 Product Warranty…………………………… 29
6.3 Services …………………………………………………… 31 6.4 Disclaimer……………………………………………….. 31
APPENDIX I ………………………………………………… 32 APPENDIX ………………………………………………. 35 APPENDIX
………………………………………………. 38
Instruction of MFC/MFM 1.1 Declaration
The copy right of The user’s manual of mass flow controller and mass flow
meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr.
Sevenstar), which is not allowed to duplicate, store and distribute any part
of this manual in mean of electric, mechanical, photocopy, recording or other
way without permission of Sevenstar. This manual is not assured that there is
no mistake and missing in which have been corrected strictly, and the
publisher is under no obligation to the mistake or missing, meanwhile the
publisher is not in charge of any loss that this manual leads to.
Beijing Sevenstar Flow Co. , Ltd
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1.2 Attention
Dear customer, thanks for using CS mass flow controller and mass flow meter. This
manual describes in detail important issues about correct and safe operations of the
product.
User of the product should read and comprehend this manual and pay attention to the
text with labels
and notices.
Sevenstar assumes no liability for the customer’s failure to comply with this manual.
This manual is necessary for your installation and maintenance, please keep it carefully.
1.3 The notice of safety
Please pay attention to the below notices when reading this manual. We are not
responsible for any result without abiding by the below notices. a) Do not
replace any components or disassemble instrument.
Do not replace any components, or disassemble the instrument without any
authorized and make sure that the label or/and seal of product is not removed
when returning for reworking, recalibration and maintenance. b) Please contact
professional for technical service. Do not replace any components. Any
technical support is provided by professional who must be authorized by
Sevenstar. c) Please pay more attention to use dangerous gas. Instrument
should be purged completely and keep safety if dangerous gas is used.
Meanwhile make sure that moist gas must not react with material of seal and
instrument. d) Please pay attention to purging instrument. The whole system
should be purged by dry gas after and before the instrument is installed. e)
Please abide by proper steps of purging. Product should be purged and handled
with gloves. f) Do not use the instrument in explosive environment. Do not use
the instrument in explosive environment, unless the safety certificate is
available.
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g) Please use proper fittings and keep the rules. All fittings of instrument
must be matched according to the listing in manual. Please read manual
carefully before screwing tightly.
h) Please do leakage check. Please check carefully all of vacuum parts and
make sure that there is not leakage in the system.
i) Please make sure that instrument is working under safe pressure. Please
make sure that the pressure of inlet gas is less than maximum working pressure
(referring to maximum working pressure in manual).
j) Please keep the whole system away from pollution. When system running, do
not use polluting gas, such as particle of dust, dirt, fibre, glass or scrap
iron.
k) Please do warm-up instrument before working. Please do warm-up instrument,
especially in using dangerous gas. Please close valve completely to make sure
that there is not error flow.
1.4 General
Mass flow controller (MFC) accurately measures and controls mass flow rates,
which is widely applied in the fields as: semiconductor and IC fabrication,
special materials science, chemical industry, petrolic industry,
pharmaceutical industry, environmental protecting and vacuum system
researching, etc.. The typical applications include: microelectronic process
equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching,
sputtering, ion implantation, vacuum deposition equipment, optical fiber
melting, micro-reaction equipment, mixing & matching gas system, capillary
flow control system, gas chromatograph and other analytical instruments.
The CS200-C MFC/MFM are a latest generation MFC for use in semiconductor
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applications and demanding industrial uses where its high accuracy and
flexibility in interfacing are required.
The CS200-C MFC/MFM incorporate a dual interface, voltage and current as well
as RS-485DeviceNet and ProfiBus digital interfaces. It is possible to operate
the instrument completely digitally or it can be operated in analog mode with
digital monitoring. CS200-C series have wide range of power supply(available
for ±8 ±16 VDC or +14 +28 VDC).
In addition, auto-alarm, change of operating gas and range available through
the digital interface. Customer Secondary Development of control and sample
software is available through the open protocol.
CS200-C MFC default setting MAC address32 RS485 baud rate19200 Control mold
0-5V analog signal control. For more information, please refer to
www.mfcsevenstar.cn.Path: Service >> Downloads>>Software
download>>Communication Protocol .
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1.5 Specification
Type Full scale range (N2) Accuracy Linearity Repeatability Response Time
Valve Rest Position
Differential Pressure
Maximum Operating Pressure
Temperature Coefficient
Proof Pressure Leak integrity Wetted Materials Surface Chemistry Surface
Finish Operation Temperature
Input Signal
Output Signal
Power Supply Electronic Connector
Fittings
Weight
CS200C
( 02,3,5,10,20,30,50,100,200,300,500)SCCM ( 01,2,3,5,10,20,30)SLM
±1.0% S.P. (35% F.S.)
±0.35% F.S. (35% F.S.)
±0.5% F.S.
±0.2% F.S.
0.8 sec (SEMI E17-0600)
Normally Closed or Normally Open
No Valve
(0.050.35) MPa10slm (0.10.35) MPa10slm
0.02MPa
0.45MPa
Zero:±0.02% F.S./; Span:±0.05% F.S./
3MPa (435pisg) 1×10-10 atm·cc / sec He Metal (Stainless Steel V/V, 5Ra)
—- 10Ra
050
Digital: RS485 or ProfiBus or EtherCAT or DeviceNetTM
N/A
Analog:(05)VDC or (420)mA or (020)mA
Digital: RS485 or DeviceNetTM or ProfiBus or EtherCAT Analog:(05)VDC or
(420)mA or (020)mA
±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) or +20.4 ~ +26.4 VDC
9 pin male sub-D 15 pin male sub-D DeviceNetTM ProfiBus Analog , EtherCAT
1.2kg
VCR1/4″ M;Compression Fitting6, Compression Fitting3,
Compression Fitting1/4″W-seal C-seal
1kg
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Notes :
MFC/MFM is calibrated by N2 as a standard gas.
Units:
SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem — 273.15K ( 0 ºC );
Air Pressure — 101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM
is identical to “L/min, 0 ºC ,1atm”.
F.S. :
Full Scale
1.6 Calibration Features
Normally, the MFC are calibrated close to customer’s requirement ( the
requirement should be accorded with the specification). Without customer’s
information, the MFC are calibrated under standard conditions.
1.6.1 Standard conditions
Without special conditions specified by the customer, the MFC is calibrated
under the following standard conditions:
Pressure Outlet: Atmospheric. Normally gas mass flow rate is transferred to
gas volume flow rate at standard state. Mass flow rate unit: SCCM—-standard
cubic centimeter per minute. SLM—-standard liter per minute. Standard
stateTemperature —- 0ºC (273.15K) Pressure —- 101325Pa (760mmHg) At standard
state, the gas density will be constant. The multiplication of density and
volume flow rate is equal to the mass flow rate. Therefore at the standard
state, the volume flow rate can represent mass flow rate. The standard
mounting position is horizontal, And other positions such as
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vertical(inlet up or down)flatwise or customized position are optional. The
mounting position should be specified by the customer to ensure the best
accuracy.
1.6.2 Manufacturing Environment
The MFC are assembled in a class 100 clean room, calibrated, packaged and
controlled in class 1000 environment. The temperature is 22±2.
1.6.3 Precision Adjustment
Each MFC is accurately controlled for 24 hours after manufacturing on a
different calibration bench. The accuracy, the dynamic response, the stability
to pressure variations is double checked, only qualified product available for
sale.
2.1 General
SECTION 2 INSTALLATION
WARNING: Toxic, corrosive or explosive gases must be handled with extreme
care. After installing the MFC, the system should be thoroughly checked to
ensure it is leak-free. Purge the MFC with a dry inert gas for one hour before
using corrosive gases.
IMPORTANT: When installing the MFC, ensure that the arrow on the back of the
unit in the same direction as the gas flow.
2.2 Unpacking
The CS200-C MFC/MFM are assembledcalibrated and clean packaged under clean
room conditions. These series products are packaged with two separately sealed
plastic bags. The outside is common plastic bag, the inside is clean bag. The
outside bag should be removed in the entrance to the clean room. In order to
minimize the contamination, the
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second clean bag should be removed in the clean room when MFC installed in the
system.
2.3 Mechanical Installation 2.3.1 General
Most applications will require a positive shutoff valve in line with the MFC.
Pressurized gas trapped between the two devices can cause purge effects, and
consideration must be given to the sitting of the shutoff valve (upstream or
downstream) in relation to the process sequencing. It is recommended that you
install an in-line filter upstream to the controller in order to prevent MFC
from contamination.
CS200-C should be mounted in the position accord with the requirement in the
purchase order. The gas should be clean and dry. The mounting should be free
from shock or vibration. The pictures of the product are shown in
figure2-1,the dimensions of the product are shown in figure2-2, figure2-3a,
figure2-4 and figure2-5. Different fittings(Compression Fitting6, Compression
Fitting3,Compression Fitting1/4 Compression Fitting1/8,VCR1/4 M, Compression
Fitting3/81.5W-seal1.5C-seal) are optional for customer, The length of the
product L are shown in Table 2-1. Do not remove the protective end caps of the
fittings until installation.
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Figure 2-1 CS200-C MFC/MFM
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Figure 2-2 Product dimensions
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Figure 2-3a Product with C-seal dimensions
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Figure 2-3b Product with W-seal dimensions
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Figure 2-4 Product dimensions
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Figure 2-5 Product with EtherCAT dimensions
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Length
Table 2-1 The length of the product with different fittings
Fitting
Compression Fitting6; Compression Fitting3 Compression Fitting1/4; Compression Fitting10 Compression Fitting1/8; Compression Fitting3/8
4(inner)×1hose
VCR1/4 M VCO1/4 M 6(inner)×1hose 5(inner)×1.5hose
1.5W-seal 1.5C-seal A-seal
Lmm
112.8
117.6
124
105.2
Attention :
The height (which is showing in figure 2-2 and figure 2-4 ) of 132mm are
height without electric connectors of cable. It should be added around 50mm
more after adding the electric connector.
2.3.2 Installation
Place MFC according to the flow direction.
2.3.2.1 1/4VCR Connection
Refer to figure 2-6 and figure 2-7. Check the gland to gland space, including
the gaskets. Remove the plastic gland protector caps. When using loose VCR
original style gaskets, inserting the gasket into the female nut. For VCR
retainer gaskets, snap the gasket onto the male coupling. Tighten the nuts
finger tight. Scribe both nut and body in order to mark the position of the
nut. While holding the body with a wrench, tighten the nut: 1/8 turn past
finger tight for 316L stainless steel and nickel gaskets.
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Figure 2-6 VCR original style gasket
Figure 2-7 VCR retainer gasket
2.3.2.2 Two-ferrule (Compression Fitting) Connection
Refer to figure 2-8. Check the gland to gland space. Remove the gland
protector caps. Insert the tubing to the shoulder inside the fitting, and
check that the ferrules are positioned as shown in figure2-8. Tighten the nuts
finger tight. Use two spanners, one spanner locking the fitting stable, wrench
another one to tighten in 1.25 turns to prove it’s not blow-by after
installing the front ferrule, back ferrule and nut.
Gland
Nut Back ferrule Front ferrule Fitting
Figure 2-8 Compression Fitting Connector Installation
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Attention :
When installing the fitting, you should manually use spanner to wrench it
tighten by 1/2 turn pulling up, (imported Compression Fitting should use
spanner to be tighten in 1,25 turns) to prove its not blow-by after your
installing the front ferrule back ferrule and nut. Please note you should use
two spanners to operating, one spanner for locking the fitting stable and
another one for revolving the nut. Especially when you dismantle the tube, you
should operate by the two spanners otherwise fitting will become flexible
which will affect its airproof function.
2.4 Electrical Installation
2.4.1 General
With simple switching power supply, CS200-C MFC/MFM are available for ±8 to
±16 VDC (dual-ending) and +14 to +28 VDC (single-ending). Customer can choose
as need.
Customer can choose 9 pin male Sub-D or 15 pin male sub-D connector. 9 pin
male Sub-D connector is the SEMI Standard compatible, only 0-5V analog signal
control and output available. 15 pin male sub-D connector, both 4-20mA or
0-20mA and 0-5V analog signal control and output available.
CS200-C MFC/MFM can communicate with PC via RS485 DeviceNet or ProfiBus or
EtherCAT.
2.4.2 Connections
The 9 pin male Sub-D connector, 15 pin male sub-D connector, RS485 connector
,DeviceNet connector ,Analog Signal Interface RS232-RS485 connector ProfiBus
connector of 9-pin female sub-D, ProfiBus connector of 15-pin male sub-D and
EtherCAT connector of RJ45 are shown in figure2-8, figure2-9 , figure 2-10
,figure 2-11, figure 2-12 , figure2-13figure2-14 , figure2-15 , figure2-16 and
figure2-17.
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Attention :
Although sharing with the same appearance of CS200-C MFC, the 0~5V Setpoint
Input, the 4~20mA or 020mA Setpoint Input and the valve Over-ride are not
available. That means pin1 and pin6 of D-sub 9 and pin1, pin7, pin8 and pin12
of D-sub 15 are not available.
Figure 2-9 9 pin male D-sub connector
Figure 2-10 15 pin male D-sub connector
Figure 2-11 RS485 connector
Figure 2-12 DeviceNet connector
Figure 2-13 Analog Signal Interface
Figure 2-14 RS232-RS485 connector
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Figure 2-15 ProfiBus connector of 9-pin female sub-D
Figure 2-16 ProfiBus connector of 15-pin male sub-D connector
1TX+ 2TX- 3RX+ 6RXFigure 2-17 EtherCAT connector of RJ45 interface
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2.4.3 Table of Selecting Type of Cable and its Illustration of Connection
D082B/3B/4B 2E/3E/4E
D08- 1/2/4 2F/3F/4F D08-1F/1FM/1FS/8C/8CM/1G/1GM
Input ±15V
Input +24V
To
To USB
Serial of
of
PC Computer
MFC (DB15 Pin)
MFC (DB9 pin)
QCX-19/ QCX-P19 QCX-48
QCX-20/ QCX-P20 QCX-49
QCX-17/QCX-P17 QCX-46
QCX-18/QCX-P18 QCX-47
QCX-41 QCX-43 QCX-34 QCX-50
QCX-42
QCX-34 QCX-50
MFC EtherCAT
Table 2-2 Table of Selecting Type of Cable
QCX-34 QCX-50
Figure 2-17 CS Product and Illustration of Connecting Power D08-1D/1F
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Figure 2-18 CS Product and Illustration of Connecting Power
Figure 2-19 CS Product and Illustration of Connecting Power
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Figure 2-20 Illustration of Connecting CS Product
Sevenstar manufactures all standard cables, RS485 adaptor, customized cables
and some accessories. For more details, contact Sevenstar or its local agent.
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2.5 Checking Before Operation
Before operating the MFC the following checks should be completed: 2.5.1 Check
that tubing is leak free. 2.5.2 Check the process sequence and proper function
of all other gas components involved. 2.5.3 Check the voltage of command
signals and power supply to the MFC/MFM. 2.5.4 Check that the appropriate type
of gas is being supplied at the rated pressure. 2.5.5 Allow the MFC to warm up
for 20 minutes, and then check the zero level output. 2.5.6 Use dry inert gas
for test runs. 2.5.7 Prior to using the MFC for extremely corrosive gases,
purge MFC with a dry inert gas for one hour.
SECTION3 FUNCTIONS
3.1 General
Based on new sensor driver technology, zero balance technology and VCP
technology, CS200-C MFC/MFM presents high performance and reliability. And
more digital functions are developed in CS200-Cproducts.
3.2 Control Mode
CS200-C MFC/MFM are available for digital0-5V voltage and 4-20mA or 0-20mA
current control mode and output. When customer chooses one of the three
control modes, the others will be screened. The analog output will be
available at all times. The flow output of the CS200-C MFC/MFM will be
available through the RS485 interface, even in the analog control mode. The
setting of the CS200-C MFC/MFM can be provided to the MFC through one of three
sources, in digital or analog mode.
For more information, please refer to www.mfcsevenstar.cn.Path: Service >>
Downloads>>Software download>>Communication Protocol .
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3.3 Zero
The Zero function can be commanded through the digital interface or zero-
button. Before zero MFC, please make sure that no gas flow through MFC. Then
zero MFC by the digital interface or zero-button. The zero-button must be
pressed continuously for 0.5 seconds in order to start zero process. The green
LED will blink during the zero process. After zero finished, the green LED
will be on constantly.
3.4 Soft-Start
The CS200-C MFC/MFM support soft-start function. Soft-start allows customer
change the setting of MFC with definite rate. For more information, please
refer to www.mfcsevenstar.cn.Path:Service>> Downloads>>Software
download>>Communication Protocol .
3.5 Delay
Delay is used to postpone the start of flow from zero flow to the received
set-point. It is programmed in millisecond but the MFC internally rounds up
any value to 100ms. For example, when the delay value is 200, MFC will delay
200ms then receiving the operate command. When the set point is less than the
min control rate, the valve will shut off, and when larger than the min
control rate, MFC will start after the set delay time.
Special default: Values from 1 to 49 ms will be programmed as 100ms. Delay
applies to digital and analog set-points.
3.6 Valve Command Mode
CS200-C MFC/MFM are available for valve-close or valve-open by input digital
signal or analog voltage directly. The Valve Command Mode is used to select
one of three ways to interpret the analog signal of Valve Command. For more
information, please refer
towww.mfcsevenstar.cn.Path:Service>>Downloads>>Software .download>>Communicati
on Protocol .
3.7 Valve Type
CS200-C MFC/MFM have two types of valve: Normally open(NO) or Normally
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closed(NC) . When MFC do not have power supply, the “NO” type valve is open
and gas can flow through the MFC; the “NC” type valve is closed and gas can
not flow through. Please mention the valve type when you order the MFC.
3.8 Multi-Gas and Multi-Flow
The multi-gas and multi-range technology has been developed in the CS200-C
series MFC/MFM. Customer can change gas convert factor, full scale of MFC via
digital interface. Full scale of CS200-C series MFC/MFM can be re-ranged from
30% to 110%F.S.. For example, an MFC with 100SCCM full scale, the new full
scale can be re-ranged between from 30SCCM to 110SCCM.
CS200-C MFC/MFM support customer offset by the target null value. The target
null value is a customer-programmed constant used to offset the flow output
independently of all other sensor offset constants, including the zero
process. For example, set Target Null Value: -20%F.S.then when no flow through
MFC/MFMthe reading is -20%F.S.with gas flow 20%F.S. through MFC/MFMthe reading
is 0%F.S.Offset range is from -100%F.S. to100%F.S.For more information, please
refer to www.mfcsevenstar.cn.Path: Service >> Downloads>>Software
download>>Communication Protocol .
3.9 Total Flow Accumulator
The Total Flow accumulator will record the amount of gas (in SCC) that has
been delivered by CS200-C MFC/MFM. The amount of purge will not be accumulated
in the total flow amount. For example, the total reading is 3000, means the
amount of gas delivered by MFC is 3000SCC.For more information, please refer
to www.mfcsevenstar.cn.Path:Service>> Downloads>>Software
download>>Communication Protocol .
3.10 Alarm
The CS200-C MFC/MFM will monitor and store certain abnormal conditions as
described below. These conditions can be read and reset from the RS485
interface.
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Provisions will be made for masking (disabling) the alarms or warnings on an
individual basis.
Warning and Alarms: Sensor Zero Output Out of Bounds EEPROM Failure Valve Coil
Failure or Valve Disconnected Temperature Out of Operating Range After power
up the LED on the top of the CS200-C MFC/MFM is turned GREEN. A warning
condition will be announced by a blinking RED and whenever an alarm condition
is detected it will be set continuously to RED.For more information, please
refer to www.mfcsevenstar.cn.Path:Service>> Downloads>>Software
download>>Communication Protocol .
3.11 LED
There is a green-red LED located on the top of the MFC. The constant green LED
indicates the power on. Green blinking indicates that the MFC is zeroing. A
blinking red LED indicates warning condition. Constant red indicates error
condition.
In DeviceNet connection, there will be 2 LED on the top of CS200-C, refer to
CS200MFC(CS220)_DnetSpecification_V1.01 for more details.
CS200-C ProfiBus communication product has two LED indicator lights on the
top.When ProfiBus communication is normal, the green indicator light is always
on.Not bright indicates that ProfiBus communication is faulty.The status of
the white indicator light refer to 485 communication products.
Attention :
When the valve of MFC is fully opened , it can be functioned as a MFM. In that
case, the maximum flow testing voltage could reach beyond +10V, please be
careful, while flow is beyond F.S. +5V(Full Scale), the real flow will have no
linearity corresponding with flow testing voltage. While it’s purging, flow
display will be inaccurate, even showing “reduce” while the real flow is
enhanced, please be sure it’ll be no damaged to device itself.
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SECTION 4 MAINTENANCE 4.1 General
No routine maintenance is required to be performed on the MFM or MFC, Other
than occasional cleaning and re-calibration:
It can be used about 3 or 4 years with an ultra-clean and non corrosive gas.
It can be used about 1 or 2 years with a low purity gas or a corrosive gas.
For any other problems, contact Sevenstar.
4.2 Caution 4.2.1 Medium Forbidden
The used gas should be purified without dustliquid and oil stain. If
necessary, the filter should be added to gas system for purification. If the
outlet of MFC is connected to liquid sources, a One-way valve should be added
to avoid the liquid back to destroy MFC.
Attention :
For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or
corrosive gas, you should ensure that the fixing and fitting are airtight. It
becomes necessary to remove the controller from the system, purge the
controller thoroughly with a dry inert gas such as nitrogen, before
disconnecting the gas connections. Failure to purge the controller could cause
a fire or explosion resulting in death.
4.2.2 Seal of Valves
The Solenoid Valve of MFC is only for adjustment, can not be used for shut-
off. Generally, shut-off valves should be added in upstream and downstream of
MFC for protection. Normally leakage of MFC valve is not more than 1% F.S..
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SECTION 5 TROUBLESHOOTING
5.1 Initial Check
5.1.1 Check the gas supply pressure and check the flow-path to the MFC/MFM has
been opened. 5.1.2 Ensure that the power supply and command signals are
correctly transmitted to the D-connector pins and RS485. 5.1.3 Check that the
output signal matches the external reading.
5.2 Troubleshooting
Use the following table to locate the fault.
SYMPTOMS
Possible cause
Action
Gas flow is actually
Output reading,
present
1
without gas flow, is not zero
Zero drift
other
Check closure of series shutoff valve
Zero MFC *Contact Sevenstar
Gas connection incorrect Check gas connection
Pressure incorrect
Check pressure condition
Wrong control mode
Change the control mode by the software
2
MFC will not control
Power failure Setpoint incorrect
Check Power and pin position Check setpoint signal
Contamination
*Contact Sevenstar
Defective sensor
*Contact Sevenstar
PCB problems
*Contact Sevenstar
Defective Mechanics
*Contact Sevenstar
Power failure
Check Power and pin position
MFC will not
Cable problems
Check cable and connector
3 communicate with Address conflict
Check address of MFC
PC
Baud rate error
Check baud rate of MFC
PCB problems
*Contact Sevenstar
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Attention :
- Mark indicates that reparation and adjustment must be dealt under specialist advicesFor any other problems, contact Sevenstar.
SECTION 6 WARRANTY AND SERVICES
6.1 Guarantee of Sevenstar
Sevenstar and its authorized distributors assure that there are not flaw of the material and quality of product within 12 months since the date of the product purchased by you.
The compensation for customer is only limited to invalid part for substitution, installation and processing flaw.
It is guaranteed that all part chose by customers are suitable to relative manufacturer. Other relative statements, guarantee and obligation of status and usage of product, whether direct or indirect, are definite to be excluded. In any circumstance, Sevenstar and its authorized distributors are not charged of any obligation of direct or indirect loss for customers or others.
6.2 Product Warranty
6.2.1 Sevenstar products are guaranteed against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage, contamination, alteration or retrofit. Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods. 6.2.3 During the warranty period, products must only be repaired by authorized Sevenstar service centers; Otherwise, the Sevenstar product warranty will be invalidated. 6.2.4 Repairs will be performed free of charge during the one-year warranty period. If MFC are out of warranty, Sevenstar will notify the owner of replacement or repair costs
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before proceeding. Factory service and repairs are guaranteed 90 days. The
warranty excludes consumable materials and wear parts (in teflon, viton,
etc.). 6.2.5 No MFC will be accepted for repair or warranty without a
decontamination and purge certificate. 6.2.6 Each MFC is individually checked
(visual inspection of fittings, helium leak test and flow calibration).
Sevenstar shall not be responsible for any damage caused by gas leakage or the
use of a dangerous gas. Users are responsible for following the safety rules
applicable to each gas they use. Improper use of a Sevenstar MFC will void the
warranty, and MFC that have been damaged as a result of improper use will not
be replaced by Sevenstar. 6.2.7 Specific warranty requirements are as follows
:
AGas must be clean and particle-free, which means a filter must be fitted in
the gas line upstream of the MFC.
BGas must comply with the following pressure specifications: 1. Gas pressure
must never exceed 3MPa. 2. Differential pressure must be more than 0.05MPa for
full-scale flow through the MFC valve unless another value is specified in the
user’s manual. 3. Differential pressure must be less than 0.35MPa for the MFC
valve to regulate without gas-flow oscillation unless another value is
specified in the user’s manual. 4. Pressure at the mass-flow inlet must be
regulated by an accurate pressure regulator to prevent gas-flow oscillation.
CElectrical connection requirements are as follows: The system must be wired
carefully: non-observance of the pin-out may irreversibly damage the
electronic board inside the MFC, in which case the warranty will be
invalidated. DGas connections: The fittings must be handled carefully.
Sevenstar guarantees that
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all fittings have been individually inspected and are scratch-free. EFitting
procedure: The fitting procedure set out in the manual must be followed
meticulously. Specifically, the purge procedure is very important if corrosive
gases or toxic gases are used.
FThe mass-flow must not be dismounted: The MFC warranty will be invalidated if
the seal between the MFC block and cover is torn.
6.3 Services
Sevenstar can provide services like start-up service, software development,
gas system design, training, etc.
Please visit www.mfcsevenstar.cn for more information and find your nearest
service and calibration centre.
6.4 Disclaimer
Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following
situation: 1. Nature disaster and calamity; 2. Unsuitable operation and
unreasonable usage; 3. Operating and storing in inappropriate or execrable
circumstance; 4. Usage of instrument beyond user’s manual; 5. Unauthorized
change or replacement of product. For example: It is whether that gas path is
not cleared before using corrodible gas or MFC is contaminated or blocked by
particle such as dust.
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Appendix CS200 Selection Guide
CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] [t] Type
– [C] Metal type, stainless steel VV, 10Ra Input Output Signal 05V
[g,g,g] Gas
Standard: SEMI52-0302Note:029 NH3 available to
type C For example
-[ 013 ] N2
-[ 007 ] H2
-[ 000 ] Mixture Gases (please consult [d] for details)
[v] Type of Valve
– [ O ] Normally open (unavailable to MFM)
– [ C ] Normally closed (unavailable to MFM)
– [ N ] No Valve (available to MFM only)
[r,r,r,r] Full Scale
– [ 002C] 2SCCM
– [ 003C] 3SCCM
– [ 005C] 5SCCM
– [ 010C] 10SCCM
– [ 001L] 1SLM
– [ 020C] 20SCCM
– [ 002L] 2SLM
– [ 030C] 30SCCM
– [ 003L] 3SLM
– [ 050C] 50SCCM
– [ 005L] 5SLM
– [ 100C] 100SCCM
– [ 010L] 10SLM
– [ 200C] 200SCCM
– [ 020L] 20SLM
– [ 300C] 300SCCM
– [ 030L] 30SLM
– [ 000C] customized Full scale, please consult [d] for details
[a] Electronic connector
– [ R ] DB 9 pin6 pin RJ11
– [ D ] DB15 pin6 pin RJ11
– [ X ] DeviceNetTM
– [ Y ] DeviceNetTM +Analog
– [ F ] ProfiBus
[f,f] Fittings
– [ J ] DB 9 pin8 pin RJ45 – [ A ] EtherCAT
-[AA] Compression Fitting3mm(FLOW5SLM)
-[GG] Compression Fitting6mm(FLOW30SLM)
-[CC] Compression Fitting 1/4″(FLOW30SLM)
-[SC] IGS C seal (available to type C,FLOW30SLM)
-[MM] VCR 1/4″
-[SW] IGS W seal (available to type C,FLOW30SLM)
-[XX ] customized fittings please consult [d] for details
[s] Seal Materials
-[ M ] Metal
[m] Mounting Position
-[ H ] Horizontal
-[ E ] HESD(Horizontal Edge Side Down)
-[ U ] Vertical Inlet Up
-[ D ] Vertical Inlet Down
[d] Description
-[ – ]Default Value
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The letters on cover and tagIn English
Differential Pressure:
(0.05 ~ 0.35) MPa (7.3~50.8 psid) (0.1 ~ 0.35) MPa (14.5~50.8 psid) (0.2 ~ 0.45) MPa (29.0~65.3 psid)
(FLOW10SLM)
(10SLMFLOW30SLM ) (30SLMFLOW)
CS200-ACS200-CCS200-D XXXN0.02MPa (2.9psid)
Proof pressure :3 MPa (435.1 psig)
Calibration temperature :(22±2)
Valve command mode :2
Power Supply: +24V
Command type:DeviceNet default digital mode; Profibus default mode for Profibus; other analog voltage
-[ S ] Customized Requirement For Example: I/O sign:4~20mA The proportion of mixture gases should be indicated: N2 (60%) + CO2(40%) Customer Differential Pressure: (0.05 ~ 0.3) MPa Customer Calibration Temperature: 40 The letters on cover and tag: in Chinese Valve command mode:0 Power Supply: ±15V Command type:Profibus default mode for analog voltage and other customized requirements.
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Take CS200-C013C500CDGGVHS as the example
CS200 – C
013
C 500C D GG M H S
ModelCS200
Type: Metal type
Gas: N2
Type of Valve: Normally closed
Full range
Electronic connectorDB15
FittingsCompression Fitting6mm
Seal material: Metal type
Mounting position
For example
Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40
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GAS
Air Ar AsH3 BBr3 BCl3 BF3 B2H6 CCl4 CF4 CH4 C2H2 C2H4 C2H6 C3H4 C3H6 C3H8 C4H6
C4H8 C4H10 C5H12 CH3OH C2H6O C2H3Cl3 CO CO2 C2N2 Cl2 D2 F2 GeCl4
APPENDIX II CONVERSION FACTOR
GAS CODE (SEMIE52-0302)
008 004 035 079 070 048 058 101 063 028 042 038 054 068 069 089 093 104 117
240 176 136 112 009 025 059 019 014 018 113
SPECIFIC HEAT ( Cal/g ) 0.2400 0.1250 0.1168 0.0647 0.1217 0.1779 0.5020 0.1297 0.1659 0.5318 0.4049 0.3658 0.4241 0.3633 0.3659 0.3990 0.3515 0.3723 0.4040 0.3916 0.3277 0.3398 0.1654 0.2488 0.2017 0.2608 0.1145 1.7325 0.1970 0.1072
DENSITY (g/l 0) 1.2930 1.7837 3.4780 11.1800 5.2270 3.0250 1.2350 6.8600 3.9636 0.7150 1.1620 1.2510 1.3420 1.7870 1.8770 1.9670 2.4130 2.5030 2.6500 3.2190 1.4300 2.0550 5.9500 1.2500 1.9640 2.3220 3.1630 0.1798 1.6950 9.5650
CONVERSION FACTOR
1.001 1.420 0.673 0.378 0.450 0.508 0.441 0.306 0.420 0.722 0.596 0.597 0.482
0.421 0.411 0.358 0.322 0.299 0.261 0.217 0.584 0.392 0.278 1.000 0.739 0.451
0.858 0.997 0.931 0.267
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GAS
GeH4 H2 HBr HCl HF HI H2S He Kr N2 Ne NH3 NO NO2 N2O O2 PCl3 PH3 PF5 POCl3
SiCl4 SiF4 SiH4 SiH2Cl2 SiHCl3 SF6 SO2 TiCl4 WF6 Xe
GAS CODE (SEMIE52-0302)
043 007 010 011 012 017 022 001 005 013 002 029 016 026 027 015 193 031 143
102 108 088 039 067 147 110 032 114 121 006
SPECIFIC HEAT ( Cal/g ) 0.1405 3.4224 0.0861 0.1911 0.3482 0.0545 0.2278 1.2418 0.0593 0.2486 0.2464 0.5005 0.2378 0.1923 0.2098 0.2196 0.1247 0.2610 0.1611 0.1324 0.1270 0.1692 0.3189 0.1472 0.1332 0.1588 0.14890 0.1572 0.0956 0.0379
DENSITY (g/l 0) 3.4180 0.0899 3.6100 1.6270 0.8930
5.707 1.5200 0.1786 3.7390 1.2500 0.9000 0.7600 1.3390 2.0520 1.9640 1.4270
6.1270 1.5170 5.6200 6.8450 7.5847 4.6430 1.4330 4.5060 6.0430 6.5160 2.8580
8.4650 13.2900 5.8580
CONVERSION FACTOR
0.570 1.010 0.999 0.988 1.001 1.000 0.802 1.420 1.431 1.000 1.431 0.719 0.978
0.737 0.710 0.981 0.358 0.690 0.302 0.302 0.284 0.348 0.600 0.416 0.340 0.258
0.687 0.206 0.217 1.431
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Conversion Factors Instruction
MFC and MFM are standard calibrated by N2 while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating:
One single gas: The conversion factors could find out in the users specification instruction.
A mixture of two or more gases: Assume there is “n” sorts of gases, could
calculate the conversion factors C by the following formula:
Basic Formula C=0.3106 N /(Cp)
— Density of the gas Cp — Specific heat of the gas
N — Structure factors of gas-molecule (See the following table)
Table . Gas-Molecule Composing factors
COMPOSITION
EXAMPLE
Single atom numerator
Ar
He
Double atom numerator Tree atom numerator Multi-atom numerator
CO CO2 NH3
N2 NO2 C4H8
For mixture gases N = N1 (1/T )+N2 (2/T ) + ··· + Nn (n/T ) Then
0.3106 [N1 (1/T )+N2 (2/T ) + ··· + Nn (n/T )] C = ————————————————
1Cp1 (1/T )+ 2Cp2 (2/T )+ ··· + nCpn (n/T)
N VALUE 1.01 1.00 0.94 0.88
1 …n — The flow of single gas
T
— The flow of mixture gas
1…n — The density of single gas
CP1…CPn –Specific heat of the single gas
N1…Nn –Structure factors of gas-molecule (See Table 6.)
Attention :
1 StandardTemperature 273.15K (0 ºC ); Air Pressure– 101325 Pa (760mm Hg) 2
Please feel free to contact us if the request gas conversion factors could not
be found in our appendix.
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Software Download Address:
APPENDIX
en.mfcsevenstar.com
Please register first and then download software. Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn or mfcoversea@sevenstar.com.cn .
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Beijing Sevenstar Flow Co., Ltd.
CS Series
Mass Flow Controller
Beijing Sevenstar Flow Co., Ltd.
Address:
No.8 Wenchang Avenue Beijing Economic-Technological Development Area
Post code Tel Fax Homepage
E-Mail:
100176 (+86)-10-56178088 (+86)-10-56178099 www.mfcsevenstar.cn mfcsales@sevenstar.com.cn
Shanghai Office: Room802-803, Building 3, No. 88 Shengrong Road, Pudong
New District, Shanghai
Tel
(+86)-21-63532370
Shenzhen Office: Room 202, Section B, No. 1 Chuangjin, No.125 Chuangye Erlu,
28th Section, Baoan District, Shenzhen
Tel
(+86)-755-88290258
Fax
(+86)-755-88294770
Description may be changed following improvements to product. The information contained in this document is subject to change without notice. If there is any mistake in this uses manual, please feel free to contact us.
References
- Beijing Sevenstar Flow Co., LTD._Mass flowmeter_Flow Control
- 北京华丞电子有限公司-mfc流量计-国产质量流量计-流量显示仪
- 北京华丞电子有限公司-mfc流量计-国产质量流量计-流量显示仪
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