Tektronix Broadest Choice Of SMU Instruments User Guide
- June 7, 2024
- Tektronix
Table of Contents
Broadest Choice Of SMU Instruments
SOURCE MEASURE UNITS
The Broadest Choice of SMU Instruments Available
Selector Guide
MAKE MULTIPLE MEASUREMENTS ACCURATELY
USING A SINGLE INSTRUMENT
A source measure unit (SMU) instrument is a
Source Measure Unit (SMU) SourceMeter®
Precision DMM
Precision Power Supply
five-in-one tool. It combines the useful features of
a digital multimeter (DMM), power supply, current source, electronic load and pulse generator,
True Current Source
L
Electronic
Load
all in a compact form factor. This empowers you to:
· Precisely source and measure voltage and/or current at the same time
Pulse Generator
· Measure resistance vs. current/voltage directly or indirectly
· Source and measure across a very broad range of current (100 aA to 50 A) and voltage (100 nV to 3 kV) with 6½ digits of measurement resolution
· Run production tests 60% faster and gain up to 10X more throughput · Save time, maximize speed and get jobs done quickly.
WHY A KEITHLEY SOURCE MEASURE UNIT?
For more than 70 years, Tektronix — the manufacturer of Keithley SMUs — has
been designing, manufacturing and marketing advanced electrical test
instruments and systems for the specialized needs of electronics manufacturers
in high performance production testing, process monitoring, product
development and research.
· Repeatability Guaranteed · High Accuracy and Sensitivity · Fast and Precise
· Broadest Choices
2 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
KEITHLEY’S WIDE SELECTION OF SOURCE MEASURE UNIT SMU INSTRUMENTS
Touch, Test, InventTM with a Graphical Touchscreen SMU
2450 SourceMeter® SMU Instrument …………………………………………………………………..4 2460 High
Current SourceMeter® SMU Instrument ………………………………………………….. 4 2461 High Current
Pulse SourceMeter® SMU Instrument………………………………………….. 4 2470 High Voltage
SourceMeter® SMU Instrument…………………………………………………… 4
Standard Performance SMUs for the Most Basic Needs
2400 SourceMeter® SMU Instrument …………………………………………………………………….. 5 2401 Low Cost
SourceMeter® SMU Instrument ………………………………………………………. 5 2410 High Voltage
SourceMeter® SMU Instrument ………………………………………………….. 5 2420 3 Amp SourceMeter®
SMU Instrument…………………………………………………………… 5 2440 5 Amp SourceMeter® SMU
Instrument…………………………………………………………… 5
High Speed System SMUs for Demanding Applications
2601B/2602B/2604B Single/Dual Channel System SourceMeter® SMU Instrument……… 6
2611B/2612B/2614B Single/Dual Channel System SourceMeter® SMU Instrument ……… 6
2634B/2635B/2636B Low Current Single/Dual Channel System SourceMeter®
SMU Instrument ………………………………………………………………… 6 2601B-PULSE System SourceMeter 10 s
Pulser/SMU Instrument …………………………… 7
High Power SMUs with Unprecedented Power, Precision, and Speed
2651A 50 Amp High Power System SourceMeter® SMU Instrument …………………………… 8 2657A
3000 Volt High Power System SourceMeter® SMU Instrument ………………………… 8
High Density, More Channels in a Smaller Form Factor
2606B 4-Channel System SourceMeter® SMU Instrument……………………………………….. 9
Specialty SMUs for Very Low Current and Optoelectronics Testing
6430 Sub-femtoamp Remote SourceMeter® SMU Instrument……………………………………10 2510 TEC
SourceMeter® SMU Instrument………………………………………………………………10 2510-AT Autotuning TEC
SourceMeter® SMU Instrument …………………………………………10 2520 Pulsed Laser Diode Test
System…………………………………………………………………..10
Determine which Keithley SMU Is Right For You…………………………………. 11
TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS | 3
TOUCH, TEST, INVENT WITH A GRAPHICAL TOUCHSCREEN SMU
2450, 2460, 2461, and 2470 SourceMeter SMU Instruments
· Five-inch, high resolution capacitive touchscreen GUI · 0.012% basic measure
accuracy with 6½-digit resolution · Wide coverage up to 1100 V, 7 A DC, 10 A
pulse, 1000 W max. · Source and sink (4-quadrant) operation · Dual 1 MS/s
digitizers for fast sampling measurements (2461 only) · Enhanced sensitivity
with 20 mV and 10 nA source/measure ranges (2450 only)
· Built-in, context-sensitive front panel help · SCPI and Test Script
Processor (TSP®) programming modes · Front-panel USB 2.0 memory I/O port for
transferring data, test scripts, or test configurations
Model Max Current Source/Measure Range Max Voltage Source/Measure Range
Measurement Resolution (Current / Voltage)
Max Output Power
2450 1 A 200 V 10 fA / 10 nV 20 W
2450 LEARN MORE
2460 7 A 100 V 10 pA / 100 nV 100 W
2460 LEARN MORE
2461 10 A 100 V 1 pA / 100 nV 1000 W
2461 LEARN MORE
2470 1 A 1000 V 10 fA / 100 nV 20 W
2470 LEARN MORE
Save Time, Maximize Speed, and Get Jobs Done Quickly
SMU models that use familiar graphical interfaces, like icon-based menu
structures, are easier to use for all experience levels. You’ll make
measurements faster by reducing the learning curve and configuration steps,
enabling you to learn faster, work smarter, and invent easier.
4 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
STANDARD PERFORMANCE SMUS FOR THE MOST BASIC NEEDS
Series 2400 SourceMeter SMU Instruments
· Five models: 20100 W DC, 1100 V to 1 V; single channel · Source and sink
(4-quadrant) operation · 0.012% basic measure accuracy with 6½-digit
resolution · 2-, 4-, and 6-wire remote V-source and measure sensing · 1700
readings/second at 4½ digits via GPIB · Pass/Fail comparator for fast
sorting/binning · Programmable DIO port for automation/handler/
prober control (except 2401) · Standard SCPI GPIB, RS-232 and
Keithley Trigger Link interfaces
2400 LEARN MORE
Model
2400
2401
2410
2420*
2440*
Max Current Source/Measure Range
1 A
1 A
1 A
3 A
5 A
Max Voltage Source/Measure Range
200 V
20 V
1100 V
60 V
40 V
Measurement Resolution (Current/Voltage)
1 pA / 100 nV
1 pA / 100 nV
1 pA / 100 nV
10 pA / 100 nV
10 pA / 100 nV
Max Output Power
20 W
20 W
20 W
60 W
50 W
- Limited Supply Available until August 31, 2022 or when supplies are exhausted. Consider using the newer 2460 or 2461 Graphical High Current SourceMeter in your application or design for a longer return on your investment.
MORE USEFUL THAN THE COMBINATION OF INDIVIDUAL INSTRUMENTS
SMU VS. POWER SUPPLIES
· SMUs can automatically sweep voltage or current to and from negative and
positive outputs when the source crosses zero.
· During these operations, there is no need to change test leads.
· Output of a SMU can settle to within 0.01% of the specified accuracy in as
little as 50 ms.
· SMU has higher precision and wider operating ranges.
· SMU is a more flexible option
SMU VS. THE DMM AND POWER SUPPLY COMBO
· SMU tightly integrates the source and measure capability into one
instrument, eliminating the need for a separate DMM and power supply.
· Improves test times, simplifies overall test system design and increases
usability
· SMUs can outperform the DMM and Power Supply Combo on current vs. voltage
(IV) measurements for a variety of applications.
VS.
VS.
TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS | 5
HIGH SPEED SYSTEM SMUS FOR DEMANDING APPLICATIONS
Series 2600B System SourceMeter SMU Instruments
· Tightly integrated, 4-quadrant voltage/current source and measure
instruments offer best-in-class performance with 6½-digit resolution
· Family of models offers industry’s widest dynamic range: · 10 A pulse to 0.1
fA and 200 V to 100 nV · TSP technology embeds complete test programs inside
the instrument
for best-in-class system-level throughput · TSP-Link® expansion technology for
multi-channel parallel test without a mainframe · Complete production test
without sacrificing footprint · USB 2.0, LXI-C, GPIB, RS-232, and digital I/O
interfaces 2600B LEARN MORE
Model
Channels
Max Current Source/Measure Range
Max Voltage Source/Measure Range
Measurement Resolution (Current/Voltage)
2601B 1
3 A DC / 10 A Pulse
2602B 2
3 A DC / 10 A Pulse
2604B 2
3 A DC / 10 A Pulse
2611B 1
1.5A DC / 10 A Pulse
2612B 2
1.5A DC / 10 A Pulse
2614B 2
1.5A DC / 10 A Pulse
2634B 2
1.5A DC / 10 A Pulse
2635B 1
1.5A DC / 10 A Pulse
2636B 2
1.5A DC / 10 A Pulse
40 V
40 V
40 V
200 V
200 V
200 V
200 V
200 V
200 V
100 fA / 100 nV
100 fA / 100 nV
100 fA / 100 nV
100 fA / 100 nV
100 fA / 100 nV
100 fA / 100 nV
1 fA / 100 nV
0.1 fA / 100 nV
0.1 fA / 100 nV
Max Output Power
40 W DC / 40 W DC / 40 W DC / 30 W DC / 30 W DC / 30 WDC / 30 W DC / 30 W DC / 30 W DC / 200 W Pulse 200 W Pulse 200 W Pulse 200 W Pulse 200 W Pulse 200 W Pulse 200 W Pulse 200 W Pulse 200 W Pulse
Run Production Tests 60% Faster and Gain Up to 10× More Throughput SMUs
streamline production testing. The instruments source voltage or current
while making measurements — without needing to change connections. SMUs are
designed for
reliable operation in non-stop production environments.
· Conditional branching · Advanced calculations
and flow control · Variables · Pass/Fail test · Prober/Handler control ·
Datalogging/
Formatting
Test Script
To provide the throughput demanded by production applications, embedded test scripts can be uploaded into the SMU, enabling them to run complex test sequences without computer control or communications slowing things down.
DUT
Avg. time per part (ms)
Three-Point Diode Test
80
60
40
20
0 Without Scripting
With Scripting
6 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
10 A AT 10 V @ 10 s CURRENT PULSING FOR TESTING NEXT GENERATION DEVICES
Pulse with Confidence, No Overshoot or Ringing
2601B-PULSE System SourceMeter 10 s Pulser/SMU Instrument
2601B-PULSE LEARN MORE
· Industry leading 10 A @ 10 V, 10 microsecond pulse output
· No tuning required for inductive loads up to 3 H
· Dual 1 Megasample/second digitizers for high speed I/V pulse measurements
(pulser function only)
· DC capability up to ±40 V @ ±1.0 A, 40 Watt
· TSP technology embeds complete test programs inside the instrument for best-
in-class system-level throughput
· TSP-Link expansion technology for multi-channel parallel test without a
mainframe
Feature Minimum Pulse Width Max Pulse I Max DC I Max DC Voltage Source/Measure Range Max DC Source/Sink Power Min DC Current Range Pulse Tuning Required
· USB 2.0, LXI-C, GPIB, RS-232, and digital I/O interfaces
· Supported in the Keithley KickStart non-programming software tool
Performance 10 µs 10 A 3 A
40 V
40 W 100 nA
No
No Tuning of Output Required up to 3 H. Saves Time and Money
When outputting current pulses, cabling and inductance can be a problem. Inductance can have a limiting effect and could even be damaging. Quite often, the inductance can be different from device to device, even when testing laser diodes on a wafer. The effect of inductance on a current source is that inductance resists changes in current. This can cause the current source to increase the output voltage. The result is overshoot and ringing as the pulse settles. This may not be acceptable in your test. Some solutions require tuning to compensate for these behaviors, which can be time consuming. The 2601B-PULSE’s control loop system eliminates the need to tune for load changes up to 3 µH so that your pulse has no overshoot and ringing when outputting pulses from 10 µs up to 500 µs at a current up to 10 amps. This ensures a fast rise time, so your devices are sourced with a current pulse to properly characterize the device or circuit. The images to the right show the performance of a competitive modular SMU outputting a 5 A, 50 µs pulse on a device with an impedance of 3 µH compared to the 2601B-PULSE with PulseMeter technology.
Typical pulse output from a competitive SMU with overshoot and 6.47 s rise
time.
2601B-PULSE output without overshoot and 1.4 µs rise time.
TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS | 7
HIGH POWER SMUS WITH UNPRECEDENTED POWER, PRECISION, AND SPEED
2651A 50 Amp High Power System SourceMeter SMU Instrument
· Source or sink: – 2,000 W of pulsed power (±40 V, ±50 A) – 200 W of DC power
(±10 V @ ±20 A, ±20 V@ ± 10 A, ±40 V @ ±5 A)
· Easily connect two units (in series or parallel) to create solutions up to
±100 A or ±80 V · 1 pA resolution enables precise measurement of very low
leakage currents · 1 s per point (1 MHz), 18-bit sampling, accurately
characterizes transient behavior · 1% to 100% pulse duty cycle for pulse width
modulated (PWM) drive schemes and device specific
drive stimulus
2651A LEARN MORE
2657A 3000 Volt High Power System SourceMeter SMU Instrument
· Source or sink up to 180 W of DC or pulsed power, (±3000 V @ 20 mA, ±1500 V
@ 120 mA) · 1 fA low current resolution · Dual 22-bit precision ADCs and dual
18-bit 1 s per point digitizers for high accuracy
and high speed transient capture · Fully TSP® compliant for easy system
integration with Series 2600B System SourceMeter models
and 24XX Graphical SMUs
2657A LEARN MORE
Current (A)
25 20 15 10
5 0
0
Measuring at the Top of the Pulse
Digitized Current (A) Spot Mean of Current Digitized Voltage (V) Spot Mean of Voltage
50
100
150
200
250
Time (µs)
3.0 2.5 2.0 1.5 1.0 0.5 0.0 300
Measurement Interval
Measure Delay
Measurement Trigger
Source Action EndPulse
Trigger
Action Trigger
Time
Voltage (V)
Achieving Fast Pulse Measurements for Today’s High-Power Devices
Green initiatives and energy efficiency standards worldwide have motivated
engineers to find ways to design more efficient semiconductor devices and
integrated circuits, and measuring the true state of these devices without
the effects of self-heating is critical. Pulsed characterization is a solution
to this issue. The use of a pulsed stimulus demands faster measurements. For
high-speed digitization or waveform capture applications that require these
capabilities, Keithley’s High Power SourceMeter® Instrument also includes two
high-speed ADCs for measuring current and voltage simultaneously. These ADCs
use sampling technology like an oscilloscope and take snapshots of the signal
over time. Each high-speed ADC samples at a rate of up to 1 MHz with 18-bit
resolution, which is much higher than the typical 8-bit resolution of an
oscilloscope, resulting in more precise transient characterization in
comparable bandwidths. Coupled with the ability to measure asynchronously from
the source, this feature makes the 2651A and 2657A ideal for many waveform
capture and
transient characterization applications.
8 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
HIGH DENSITY, MORE CHANNELS, SMALLER FORM FACTOR
2606B System SourceMeter SMU Instrument
· Incorporates the capabilities of two industry-leading Keithley 2602B SMUs.
· Four-channel SMU instrument in a single 1U full-rack chassis · Stackable; no
1U spacing requirements between units · Tightly integrated voltage/current
source and
measure instruments offer best-in-class performance with 6½-digit resolution ·
20 V @ 1 A and 6 V @ 3 A power envelopes, 20 watts · 0.015% DCV basic accuracy
2606B LEARN MORE
Lean Factories Are Critical to Manufacturers’ Success
Today, manufacturers need to speed products to market, reduce costs, and keep
customers happy. That means manufacturers must build lean factories that
create seamless flows of people, material and information, and prevent the
build-up of inventory and excess equipment.
The Challenge
Yet as demand grows, manufacturers need to increase test capacity for
products,
TRIPLE THE DENSITY OF A TEST RACK
The Model 2606B form factor (only 1U high) is a perfect fit and improves
density by 3×, because there is no need for an additional 1U thermal spacer
between units (for air flow).
Most bench source measure units on the market today are 2U high
which requires placing additional racks of test equipment on the plant floor.
TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS | 9
SPECIALTY SMUS FOR VERY LOW CURRENT AND OPTOELECTRONICS TESTING
6430 Sub-femtoamp Remote SourceMeter SMU Instrument
· 0.4 fA p-p (4E16A) noise (typical) · >1016 input resistance on voltage
measurements · High speed — up to 2000 readings/second · Up to 6½-digit
resolution · 0.012% basic voltage accuracy; 0.025% basic
current accuracy
6430 LEARN MORE
2510 and 2510-AT TEC and Autotuning TEC SourceMeter SMU Instruments
· 50 W TEC Controller combined with DC measurement functions · Fully digital
P-I-D control; Autotuning capability
for the thermal control loop (2510-AT) · Designed to control temperature
during laser diode
module testing · Wide temperature setpoint range (50°C to +225°C) and high
setpoint resolution (±0.001°C) and stability (±0.005°C) · Compatible with a
variety of temperature sensor
inputs: thermistors, RTDs, and IC sensors
2510 LEARN MORE
2520 Pulsed Laser Diode Test System
· Integrated solution for in-process LIV production testing of laser diodes at
the chip or bar level
· Combines high accuracy source and measure capabilities or pulsed and DC
testing
· Synchronized DSP-based measurement channels ensure highly accurate light
intensity and voltage measurements
· Programmable pulse on time from 500 ns to 5 ms up to 4% duty cycle
· Pulse capability up to 5 A, DC capability up to 1 A · 14-bit measurement
accuracy on three measurement channels
(V , front photodiode, back photodiode) F
· Up to 1000-point sweep stored in buffer memory eliminates GPIB traffic
during test, increasing throughput
2520 LEARN MORE
10 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
Remote Electrical Test Head included
DETERMINE WHICH KEITHLEY SMU IS RIGHT FOR YOU
Need help selecting the SMU that’s right for your needs? Let these selector
tables be your guide!
Keithley 24xx Standard and Graphical SMUs
MODEL
2400
2401
Keithley 24xx Standard and Graphical SMUs
2410
2420
2440
2450
2460
2461
2470
Display
VFD, 2 line
VFD, 2 line
VFD, 2 line
VFD, 2 line
VFD, 2 line
Touchscreen 5 in. (12.7 cm)
Touchscreen 5 in. (12.7 cm)
Touchscreen 5 in. (12.7 cm)
Touchscreen 5 in. (12.7 cm)
Channels
1
1
1
1
1
1
1
1
1
Digits
6½
6½
6½
6½
6½
6½
6½
6½
6½
Quadrants of Operation
4
4
4
4
4
4
4
4
4
Max Output Power
20 W
20 W
20 W
60 W
50 W
20 W
100 W
1000 W Pulse, 100 W DC
20 W
SOURCE / MEASURE
min ±1 pA
±1 pA
±1 pA ±10 pA ±10 pA
±10 fA
±10 pA
±1 pA
±10 fA
I
max ±1 A
±1 A
±1 A
±3 A
±5 A
±1 A
±7 A
±10 A Pulse, ±7 A DC
±1 A
min ±100 nV ±100 nV ±100 nV ±100 nV ±100 nV
±10 nV
±100 nV
±100 nV
±100 nV
V
max ±200 V ±20 V ±1100 V ±60 V
±40 V
±200 V
±100 V
±100 V
±1100 V
Basic Accuracy
I 0.025% 0.025% 0.025% 0.025% 0.025% V 0.012% 0.012% 0.012% 0.012% 0.012%
0.020% 0.012%
0.020% 0.012%
0.020% 0.012%
0.020% 0.012%
GENERAL FEATURES
Digitizers
No
No
No
No
No
No
Dual 18-bit
No
1 MS/s
No
Digitizers
Reading Speed
2,000 rdgs/s
2,000 rdgs/s
2,000 rdgs/s
2,000 rdgs/s
2,000 rdgs/s
3,000 rdgs/s, 3,000 rdgs/s 3,000 rdgs/s 1 MS/s with 3,000 rdgs/s
Digitizer
3 Plus
SCPI
3
Programming
3
3
3
3
3 Plus 2400 Emulation
3
2420, 2425, 2430, 2440
3
Emulation
TSP
3
3
3
3
TSP-Link
No
No
No
No
No
Yes
Yes
Yes
Yes
Digital I/O
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Contact Check
No
No
No
No
No
No
No
Yes
No
Computer Interface
IEEE-488 RS-232
IEEE-488 IEEE-488 IEEE-488 RS-232 RS-232 RS-232
IEEE-488 RS-232
USB 2.0 LAN/LXI 1.4
IEEE-488
USB 2.0 LAN/LXI 1.4
IEEE-488
USB 2.0 LAN/LXI 1.4
IEEE-488
USB 2.0 LAN/LXI 1.4
IEEE-488
Compliance
CE, UL CE, UL
CE
CE
CE
CE, NRTL listed
CE, NRTL listed
CE, NRTL listed
CE, NRTL listed
TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS | 11
SMU SELECTOR TABLE
Keithley 26xxB Series High Speed System SMUs for Demanding Applications
MODEL Display Channels Digits Quadrants of Operation
Max Output Power
SOURCE / MEASURE min
I max
min V
max I
Basic Accuracy V
2601B
2602B
VFD, 2 line VFD, 2 line
1
2
6½
6½
4
4
200 W Pulse, 40 W
DC
200 W Pulse, 40 W DC / Channel
Keithley 26xxB Series High Speed System SMUs
2604B
2611B
2612B
2614B
2634B
2635B
2636B
VFD, 2 line VFD, 2 line VFD, 2 line VFD, 2 line VFD, 2 line VFD, 2 line VFD, 2 line
2
1
2
2
2
1
2
6½
6½
6½
6½
6½
6½
6½
4
4
4
4
4
4
4
200 W Pulse, 40 W DC / Channel
200 W Pulse, 30 W
DC
200 W Pulse, 30 W DC / Channel
200 W Pulse, 30 W DC / Channel
200 W Pulse, 30 W DC / Channel
200 W Pulse, 30 W
DC
200 W Pulse, 30 W DC / Channel
±100 fA ±100 fA ±100 fA ±100 fA ±100 fA ±100 fA
±0.1 fA
±0.1 fA
±0.1 fA
±10 A
±10 A
±10 A
±10 A
Pulse, ±3 A Pulse, ±3 A Pulse, ±3 A Pulse,
DC
DC
DC
±1.5 A DC
±100 nV ±40 V 0.020%
±100 nV ±40 V 0.020%
±100 nV ±40 V 0.020%
±100 nV ±200 V 0.020%
0.015% 0.015% 0.015% 0.015%
±10 A Pulse, ±1.5 A DC
±100 nV ±200 V 0.020%
0.015%
±10 A Pulse, ±1.5 A DC
±100 nV ±200 V 0.020%
0.015%
±10 A Pulse, ±1.5 A DC
±100 nV ±200 V 0.020%
0.015%
±10 A Pulse, ±1.5 A DC
±100 nV ±200 V 0.020%
0.015%
±10 A Pulse, ±1.5 A DC
±100 nV ±200 V 0.020%
0.015%
GENERAL FEATURES
Digitizers
Reading Speed
Programming TSP-Link
SCPI TSP
Digital I/O Contact Check
Computer Interface
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
No
20,000 rdgs/s
3
3
3
3
3
3
3
3
3
Yes
Yes
No
Yes
Yes
No
No
Yes
Yes
Yes
Yes
No
Yes
Yes
No
No
Yes
Yes
Yes
Yes
No
Yes
Yes
No
No
Yes
Yes
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
Compliance
CE, UL
CE, UL
CE, UL
CE, UL
CE, UL
CE, UL
CE, UL
CE, UL
CE, UL
12 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
SMU SELECTOR TABLE
Keithley Specialty SMUs
Very Low Current
Fast Pulser/ SMU
High Density SMUs
High Power SMUs
Optical SMUs
MODEL 6430
2601B-PULSE
2606B
2651A
2657A
2510 2510-AT 2520
Display
VFD, 2 line
VFD, 2 line
no display
VFD, 2 line
VFD, 2 line VFD, 2 line VFD, 2 line VFD, 2 line
Channels
1
1
4
1
1
1
1
1
Digits
6½
6½
6½
6½
6½
5½
5½
4½
Quadrants of Operation
4
4
2
4
4
2
2
1
Max Output Power
SMU Function: 200 W
2 W
Pulse, 40 W DC Fast Pulser Function:
20 W / Channel
2000 W Pulse, 200 W DC
180 W DC
50 W DC
50 W DC
50 W Pulse, 10
W DC
3 W
SOURCE / MEASURE
SMU Function: ±100 fA
min ±1 aA
±100 fA
Pulser Function: 10 µA
±1 pA
±1 fA
±200 A ±200 A 10 A
I
SMU Function: ±10 A
max ±100 mA
Pulse, ±3 A DC
±3 A Pulse, ±50 A Pulse,
±3 A DC
±20 A DC
±120 mA
± 5 A
± 5 A
5 A Pulse, 1 A DC
Pulser Function: ±10 A
SMU Function: ±100 nV
min ±100 nV
±100 nV
Pulser Function: 10 µV
V
SMU Function: ±40 V
max ±200 V
±20 V
Pulser Function: ±10 V
±1 V ±40 V
±100 A ±500 V ±500 V 330 V
±3000 V
±10 V
±10 V
10 V
Basic Accuracy
SMU Function: 0.02%
I
0.025%
0.020%
Pulser Function: 0.12%
SMU Function: 0.015%
V 0.012%
0.015%
Pulser Function: 0.05%
0.020% 0.020%
0.020% 0.400% 0.400% 0.200% 0.025% 0.100% 0.100% 0.300%
GENERAL FEATURES
Digitizers
No
Dual 18-bit 1 MS/s Digitizers (Pulser Function Only)
No
Dual 18-bit 1 MS/s Digitizers
Dual 18-bit 1 MS/s Digitizers
No
Dual 14-bit
No
10 MS/s
Digitizers
Reading Speed
2,000 rdgs/s
SMU Function: 20,000 rdgs/s
Pulser Function: 1 µs on Digitizers
20,000 rdgs/s
20,000 rdgs/s, 1 MS/s with Digitizer
20,000 rdgs/s, 1 MS/s with Digitizer
60 rdgs/s
60 rdgs/s
188 rdgs/s (to memory)
SCPI
3
3
3
3
Programming
TSP
3
3
3
3
TSP-Link
No
Yes
Yes
Yes
Yes
No
No
No
Digital I/O
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Contact Check
No
Yes
Yes
Yes
Yes
No
No
No
Computer Interface
IEEE-488 RS-232
USB 2.0 LAN/LXI-C IEEE-488
RS-232
USB 2.0 LAN/LXI-C
only
LAN/LXI-C IEEE-488 RS-232
LAN/LXI-C IEEE-488 RS-232
IEEE-488 RS-230
IEEE-488 RS-231
IEEE-488 RS-232
Compliance
CE
CE, NRTL listed
CE, NRTL listed
CE, NRTL listed
CE, NRTL listed
CE
CE
CE
TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS | 13
WE ARE HERE TO HELP YOU
All Keithley SMUs are backed by a 1-year warranty. Keithley’s Service
Department is ISO9001 registered and only uses factory-approved components
when servicing your SMU. Keithley also offers ISO17025 Accredited Calibration
services on the SMU. An ISO17025 calibration assures you that the calibration
is traceable to national
standards (important for legal metrology) and the uncertainties in the
calibration are correct.
If you have a question on what is presented here, or want to explore more
about which source measure unit is right for you, our technical support center
ready to answer your questions. For more information about Source Measure
Units, visit our Source Measure Unit Tutorial page to review additional
literature, and view product demos and webinars. tek.com/learning/what-is-a
-source-measure-unit
14 | TEK.COM/KEITHLEY-SOURCE-MEASURE-UNITS
Contact Information:
Australia 1 800 709 465 Austria 00800 2255 4835 Balkans, Israel, South Africa
and other ISE Countries +41 52 675 3777 Belgium 00800 2255 4835 Brazil +55
(11) 3759 7627
Canada 1 800 833 9200 Central East Europe / Baltics +41 52 675 3777
Central Europe / Greece +41 52 675 3777 Denmark +45 80 88 1401 Finland +41 52
675 3777 France 00800 2255 4835
Germany 00800 2255 4835 Hong Kong 400 820 5835 India 000 800 650 1835
Indonesia 007 803 601 5249 Italy 00800 2255 4835
Japan 81 (3) 6714 3086 Luxembourg +41 52 675 3777
Malaysia 1 800 22 55835 Mexico, Central/South America and Caribbean 52 (55) 56
04 50 90
Middle East, Asia, and North Africa +41 52 675 3777 The Netherlands 00800
2255 4835 New Zealand 0800 800 238 Norway 800 16098
People’s Republic of China 400 820 5835 Philippines 1 800 1601 0077 Poland +41
52 675 3777 Portugal 80 08 12370
Republic of Korea +82 2 565 1455 Russia / CIS +7 (495) 6647564 Singapore 800
6011 473 South Africa +41 52 675 3777 Spain 00800 2255 4835 Sweden 00800
2255 4835 Switzerland 00800 2255 4835 Taiwan 886 (2) 2656 6688 Thailand 1 800
011 931
United Kingdom / Ireland* 00800 2255 4835 USA 1 800 833 9200 Vietnam 12060128
- European toll-free number. If not accessible, call: +41 52 675 3777
Rev. 02.2018
Find more valuable resources at TEK.COM
Copyright © Tektronix. All rights reserved. Tektronix products are covered by U.S. and foreign patents, issued and pending. Information in this publication supersedes that in all previously published material. Specification and price change privileges reserved. TEKTRONIX and TEK are registered trademarks of Tektronix, Inc. All other trade names referenced are the service marks, trademarks or registered trademarks of their respective companies. 082321 SBG 1KW-61458-2
References
- Test and Measurement Equipment | Tektronix
- Keithley Source Measure Units | Tektronix
- Source Measure Units - Learning Center | Tektronix
Read User Manual Online (PDF format)
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