SEMIPROBE 150 mm Double Sided Probing DSP System Instructions

SEMIPROBE 150 mm Double Sided Probing DSP System

Product Information

Specifications

• Product Name: Optoelectronics – 0118
• Stage Size: 150 mm manual X, Y, Z, and theta stage
• Additional Equipment: Vibration isolation table
• Manufacturer: Semiprobe Inc.
• Address: 276 East Allen Street, Winooski, VT 05404, US
• Website: www.semiprobe.com

Product Usage Instructions

1. Setting Up the Optoelectronics – 0118
   Place the optoelectronics unit on a stable surface. Ensure that the vibration isolation table is properly set up to minimize external vibrations.

2. Adjusting the X, Y, Z, and Theta Stage
   Use the manual controls provided to adjust the stage in the X, Y, Z, and Theta directions as needed for your application. Take care not to force any adjustments beyond the specified limits.

3. Operating the Optoelectronics – 0118
   Refer to the user manual for specific instructions on operating the optoelectronics unit. Follow all safety guidelines provided to prevent damage to the equipment and ensure personal safety.

4. Maintenance and Care
   Regularly clean the optoelectronics unit and stage to prevent dust build- up. Check for any loose components and tighten them if necessary. Lubricate moving parts as recommended by the manufacturer.

Frequently Asked Questions (FAQ):

• Q: How do I calibrate the theta stage?
  A: Please refer to the user manual for detailed instructions on calibrating the theta stage. It usually involves aligning it with a reference point using specific tools provided.

• Q: Can I use the optoelectronics unit without the vibration isolation table?
  A: While it is recommended to use the vibration isolation table for optimal performance, you can still operate the unit without it. However, be aware that external vibrations may affect the accuracy of your measurements.

• Q: What should I do if the X or Y stage becomes stiff during operation?
  A: If you experience stiffness in the X or Y stage, stop operation immediately. Check for any obstructions or misalignments that may be causing the issue. Contact customer support if the problem persists.

Specific Requirements

The customer wanted a manual double-sided probing (DSP) system to test silicon photonic chips and wafers using probe cards and manipulators. The top side of the device would be biased, and the backside of the device had a light output that was captured by a detector. The detector was mounted on a manual X, Y, Z and theta stage. The devices tested had a variety of dimensions, so a universal mechanically clamping chip carrier was designed to hold the devices. Carriers for different size wafers were also required.

SemiProbe Solution

• M-6 Manual 150 mm probe system:
  • 150 mm manual X, Y, Z and theta stage
  • Vibration isolation table
• Yoke assembly with individual and removable carriers for wafers and individual die
• Probe card holder with coarse and fine theta adjust
• Manipulators with DC probe arms, cables and probe tips
• Optical detector mounted to a manual manipulator with X, Y, Z and theta movement
• Stereo zoom optics with CCTV System

276 East Allen Street Winooski, VT 05404, US – www.semiprobe.com

References

• Semiprobe - Semiconductor Testing Solutions - Probe Systems
• Semiprobe - Semiconductor Testing Solutions - Probe Systems

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