SEMIPROBE MEMS-0515 Wafer Probe Station Owner’s Manual
- June 1, 2024
- SemiProbe
Table of Contents
SEMIPROBE MEMS-0515 Wafer Probe Station
Specific Requirements
The customer wanted to test 200 mm silicon MEMS wafers using a manual probe system integrated with a Polytec MSA-500 MEMS Motion Analyzer. The motion analyzer would measure a variety of MEMS devices while in-plane and out-of- plane. The wafer chuck would need to be tilted in a variety of directions. The devices would be contacted with a probe card as well as individual manipulators with coaxial probe arms and DCprobe needles.
SemiProbe Solution
- M-8 Manual 200 mm probe system:
- 200 mm of X, Y, Z and theta stage
- Rapid Align Stage provides both coarse and fine stage movement
- Vibration isolation table
- Integrated with a Polytec MSA-500 motion analyzer
- 200 mm wafer chuck (non-thermal) with X and Y in-plane and out-of-plane adjustability for the MSA-500
- Compound microscope:
- movement of 50 mm of X and Y
- pneumatic microscope lift (MSA 500)
- Six manual three-axis manipulators with coaxial probe arms, cables and DC probes
- Probe card holder
Customer Support
276 East Allen Street Winooski, VT 05404, US – www.semiprobe.com
References
- Semiprobe - Semiconductor Testing Solutions - Probe Systems
- Semiprobe - Semiconductor Testing Solutions - Probe Systems
Read User Manual Online (PDF format)
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