SEMIPROBE MA-9100 Wafer Probe System Instruction Manual

SEMIPROBE MA-9100 Wafer Probe System

Product Information

Specifications:

• Rapid Align manual wafer stage with coarse and fine stage travel
• 200 mm HF chuck with vacuum holes
• Two auxiliary chucks for calibration substrates
• Large platen with stainless steel skin
• Removable front wedge and linear lift
• Microscope post with 100 mm of linear X, Y microscope movement
• Stereo zoom microscope with a long working distance and field of view
• CCTV system
• Two MA-9100 manual manipulators with west/east HF arms
• Two MA-9000 manual manipulators with adjustable probe arm faceplate, coaxial arms
• Variety of tungsten probe tips for DC bias, HF probe tips, GGB Industries calibration substrates, Junkosha high-frequency cables

Product Usage Instructions

1. Wafer Stage Alignment:
   Use the Rapid Align manual wafer stage to align the wafer with coarse and fine stage travel for precise positioning.

2. Chuck Setup:
   Place the 200 mm HF chuck with vacuum holes on the stage and use the auxiliary chucks for calibration substrates when needed.

3. Microscope and Manipulators:
   Utilize the microscope post with linear X, and Y movement for detailed inspection. Use the stereo zoom microscope and CCTV system for enhanced visualization. Operate the manual manipulators for precise handling of components.

4. Probe Tips and Cables:
   Select the appropriate tungsten probe tips for DC bias or HF applications. Ensure proper calibration using GGB Industries calibration substrates and Junkosha high-frequency cables.

FAQ:

Q: Where can I find more information about the company?
A: You can visit our website at www.semiprobe.com or contact us at 276 East Allen Street, Winooski, VT 05404, US for further details.

Specific Requirements

The customer was looking for a general-purpose 200 mm manual high frequency (HF) wafer probe system that allowed for the measurement of whole wafers up to 200 mm and individual parts mounted on tape over a variety of frequency ranges. They wanted to use individual manual manipulators with standard west/east HF probe arms that could handle GS, SG, GSG, differential, and multi-contact wedges operating from DC to 40 GHz. In addition, they needed the ability to add manual manipulators for DC bias and a probe card holder for probe cards.

SemiProbe Solution

• PS4L M-8 manual 200 mm probe system:
  • Rapid Align manual wafer stage with coarse and fine stage travel
  • 200 mm HF chuck with vacuum holes, two auxiliary chucks for calibration substrates
  • Large platen with stainless steel skin, removable front wedge, and linear lift
• Microscope:
  • Microscope post with 100 mm of linear X, Y microscope movement
  • Stereo zoom microscope with a long working distance and field of view
  • CCTV system
• Manipulators with magnetic bases:
  • Two MA-9100 manual manipulators with west/east HF arms
  • Two MA-9000 manual manipulators with adjustable probe arm faceplate, coaxial arms
  • Variety of tungsten probe tips for DC bias, HF probe tips, GGB Industries calibration substrates, Junkosha high-frequency cables
• 4.5” probe card holder

Contact Information

• 276 East Allen Street Winooski, VT 05404, US
• www.semiprobe.com.

References

• Semiprobe - Semiconductor Testing Solutions - Probe Systems
• Semiprobe - Semiconductor Testing Solutions - Probe Systems

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