SemiProbe 1220 High Voltage Vacuum User Manual

SemiProbe 1220 High Voltage Vacuum

Product Information

HIGH VOLTAGE VACUUM – 1220

Specifications:

• Flexible, multi-purpose 300 mm manual vacuum probing system
• Designed for device characterization in open air and under vacuum applications up to 10 kV
• Capable of testing lateral and vertical devices
• Universal mechanical clamping mechanism for single die, partial wafers, and whole wafers up to 300 mm
• Large chamber door for easy wafer loading and unloading
• Removable chamber top plate for open-air device characterization applications
• Agilent vacuum pump and MKS control system allowing a vacuum level of 10-5 torr
• Large travel gantry
• Programmable long working distance optics with 300 mm working distance
• CCTV system for monitoring and analysis
• Small footprint for space efficiency

Product Usage Instructions:

Chamber Setup:
Before using the HIGH VOLTAGE VACUUM – 1220, ensure that the chamber is properly set up:

1. Ensure the chamber door is open.
2. If necessary, remove the chamber top plate for open-air device characterization.
3. Place the wafer or device on the universal mechanical clamping mechanism.
4. Close the chamber door securely.
5. If using under vacuum applications, ensure the Agilent vacuum pump is connected and functioning properly.

Device Testing:
Follow these steps to test your devices using the HIGH VOLTAGE VACUUM – 1220:

1. Power on the system and ensure all components are functioning properly.
2. Adjust the gantry to position the optics at the desired working distance (up to 300 mm).
3. Use the CCTV system to monitor the device during testing.
4. Apply the desired high voltage or high current settings using the MKS control system.
5. Perform the necessary tests on the device, such as optoelectronic measurements or frequency analysis.

Wafer Unloading:
After completing the device testing, follow these steps to unload the wafer:

1. Power off the system and ensure all components are safely turned off.
2. Open the chamber door.
3. Remove the wafer from the clamping mechanism carefully.
4. If necessary, reinstall the chamber top plate for future open-air device characterization applications.

Specific Requirements

Thecustomerneededahighlyflexible,multi- purpose300mmmanualvacuumprobingsystemthatwouldgetusedfordevicecharacterizationinopenairandundervacuumapplicationsupto10kV.Itwouldbeusedtotestlateralandverticaldevices.

SemiProbe Solution:

• PS4L M-8 manual 300 mm probe system:
  • Triaxial 300 mm gold plated chuck –can be used in triaxial mode up to 3 kV or in coaxial mode up to 10 kV. It supports both lateral and vertical devices.
  • Universal mechanical clamping mechanism for single die, partial wafers, and whole wafers up to 300 mm.
  • PILOT Software Suite –Navigator, Wafer Map and Autoalign
  • TMV vibration isolation table
• Vacuum chamber:
  • Large chamber door for easy wafer loading and unloading
  • Removable chamber top plate for open-air device characterization applications
  • Agilent vacuum pump and MKS control system allowing a vacuum level of 10-5torr
• Microscope:
  • Large travel gantry
  • Programmable long working distance optics with 300 mm working distance
  • CCTV system
• Four programmable manipulators with coaxial, triaxial and high voltage (10 kV) probe arms:
  • Manipulators can be controlled remotely via software or the joystick controller
  • Designed to be used in an open air as well as in a vacuum environment
  • Designed to accommodate a variety of probe arms –coaxial, triaxial, kelvin, high frequency, high power (high voltage, high current), optoelectronic and more
  • Small footprint

Frequently Asked Questions (FAQ)

What is the maximum voltage this system can handle?

The HIGH VOLTAGE VACUUM - 1220 is designed to handle applications up to 10 kV.

Can this system test both lateral and vertical devices?

Yes, the system is capable of testing both lateral and vertical devices.

What is the vacuum level achievable with this system?

The Agilent vacuum pump and MKS control system allow a vacuum level of 10-5 torr.

Is the CCTV system included with the system?

Yes, the HIGH VOLTAGE VACUUM - 1220 comes with a CCTV system for monitoring the device during testing.

References

• Semiprobe - Semiconductor Testing Solutions - Probe Systems
• Semiprobe - Semiconductor Testing Solutions - Probe Systems

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