HORIBA IR-400 Series Gas Monitor Instruction Manual
- June 12, 2024
- HORIBA
Table of Contents
HORIBA IR-400 Series Gas Monitor Instruction Manual
Safety Instruction
Chamber cleaning end point monitoring for deposition process.
- Reduce time for chamber cleans
- Reduce usage of cleaning gases
- Repeatable and predictable clean process
- Longer lifetime of chamber components
Features
- Multi gas monitoring
- High sensitivity
- Gas cell heating function
- Analog/Digital communication
- Multi-display
Product Specifications
| Model | IR-422 | IR-432 |
|---|---|---|
| Measurement gas and full scale | SiF4: 100 mTorr, CF4: 100 mTorr | WF6: 200 |
| mTorr, NF3: 200 mTorr | SiF4: 3800 mTorr | |
| Cell length | 200 mm | 30 mm |
| Cell set temperature | 180 ℃ | |
| Heater jacket | Temperature sensor: Thermocouple K-type, |
Thermostat: Manual reset
Repeatability 1| ± 0.5 %F.S.
Linearity 1| ±1 %F.S.
Zero noise 1| ± 0.5 %F.S. (3σ)
Ambient temperature| 20 -35 ℃| 20 -50 ℃
Storage temperature| 0 -70 ℃
Warm-up time| ≥ 120 min
Wetted material| SUS316L, BaF2, FFKM| SUS316L, ZnSe, FFKM| SUS316L (Clean S®
treatment AF type 2), BaF2, FFKM
Fitting| NW25
Leak rate| ≤ 1 × 10-6 Pa · m3/s (He)
Proof pressure| 300 kPa (A)
Analog communication| Analog output: 0 -5 VDC
Contact output: Error, High Low alarm, Warm-up status
Contact input: Zero calibration| Analog output: 4-20 mA
Contact output: Error, High Low alarm, Warm-up status
Contact input: Zero calibration
Digital communication| RS- 485 (F-Net Protocol)
Power supply| Sensor| 24 VDC, 1.5 A
Heater jacket| 208 V, 84 VA| 115 V, 132 VA
Dimensions (mm)| W433 × H117.5 × D83| W259 × H130 × D86
Weight| 3.2 kg| 2.8 kg
- The specifications are guaranteed under HORIBA STEC’s inspection conditions using calibration gas.
- Clean S is a registered trademark of Resonance Corporation.
| Model | IR-427 | IR-437 |
|---|---|---|
| Measurement gas and full scale | SiF4: 100 mTorr, CF4: 100 mTorr | WF6: 200 |
| mTorr, NF3: 200 mTorr | SiF4: 3800 mTorr | |
| Cell length | 200 mm | 30 mm |
| Cell set temperature | 180 ℃ | |
| Heater jacket | Temperature sensor: Thermocouple K-type, |
Thermostat: Manual reset
Repeatability 1| ± 0.5 %F.S.
Linearity 1| ±1 %F.S.
Zero noise 1| ± 0.5 %F.S. (3σ)
Ambient temperature| 20 -35 ℃| 20 -50 ℃
Storage temperature| 0 -70 ℃
Warm-up time| ≥ 120 min
Wetted material| SUS316L, BaF2, FFKM| SUS316L, ZnSe, FFKM| SUS316L (Clean S®
treatment AF type 2), BaF2, FFKM
Fitting| NW25
Leak rate| ≤ 1 × 10-6 Pa · m3/s (He)
Proof pressure| 300 kPa (A)
Digital communication| Ether CAT® Protocol
Power supply| Sensor| 24 VDC, 1.5 A
Heater jacket| 208 V, 84 VA| 115 V, 132 VA
Dimensions (mm)| W433 × H117.5 × D83| W259 × H130 × D86
Weight| 3.2 kg| 2.8 kg
- The specifications are guaranteed under HORIBA STEC’s inspection conditions using calibration gas.
- Clean S is a registered trademark of Resonac Corporation.
Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)
The infrared absorptiometry method employed by the IR-300 Series uses the
principle of the absorption by gas molecules of the infrared light emitted
from an infrared light source.
The sample output from a sample that has absorbed the gas being measured is
compared to a reference output with no absorbance, and the result is converted
into a gas
concentration.
The use of this double beam method enables long-term, stable measurement
results to be obtained.
The optical system is made up of a light source, gas cell and double beam
detectors.
The stability of the double beam detector has been proven over a period of
more than 40 years.
Application Examples
Support products of exhaust line.
[Gas and vacuum monitoring]
- IR-400 Series: Chamber cleaning end point monitoring for deposition process
- VG Series: Pressure monitoring of exhaust line
[Pressure control]
- PV Series: Chamber pressure control by N2 ballast control.
Disposal
| The HORIBA Group adopts IMS (Integrated Management System) which integrates
Quality Management System ISO9001, Environmental Management System ISO14001,
and Occupational Health and Safety Management System ISO45001.
We have now integrated Business Continuity Management System ISO22301 in order
to provide our products and services in a stable manner, even in emergencies.
---|---
| Applying to the EU RoHS Directive: This products is compliant with the
restriction of the designated 10 hazardous substances(*). (I’) lead , cadmium
, mercury , hexavalent chromium , polybrominated biphenyls (PBB) ,
polybrominated diphenyl ethers (PBDE) bis (2-ethylhexyl) phthalate (DEHP) ,
butyl benzyl phthalate (BBP) dibutyl phthalate (DBP) and isobutyl phthalate
(DIBP).
Using lead-free soldering: Lead-free soldering is used for mounting
components of printed circuit boards. – Many countries consider the
reinforcement of regulations concerning the risk caused by lead to human body
and the environment
- The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company.
- It is strictly forbidden to copy the content of this catalog in part or in full.
- All brand names, product names and service names in this catalog are trademarks or registered trademarks of their respective companies.
Please read the operation manual before using this product to ensure safe and proper handling of the product
CUSTOMER SUPPORT
HEAD OFFICE
11-5, Hokotate-cho, Kamitoba, Minami-ku, Kyoto, 601-8116 Japan
Phone: (81) 75-693-2300 Fax: (81) 75-693-2350
U.S.A.
HORIBA Instruments Incorporated
Sunnyvale Office
Phone: (1) 408-730-4772 Fax:
(1) 408-730-8975
Austin Office
Phone: (1) 512-836-9560 Fax:
(1) 512-836-8054
Portland Office
Phone: (1) 503-624-9767 Fax:
(1) 503-968-3236
HORIBA Reno Technology Center
Phone: (1) 775-358-2332 Fax:
(1) 775-358-0434
horiba.com/semiconductor
References
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