mks MTN-BLHS Series Mid Travel Steel Linear Stages with Brushless Motor User Manual

mks MTN-BLHS Series Mid Travel Steel Linear Stages with Brushless Motor

Product Information

Specifications

• Model: MTN-BLHS Series
• Type: Mid-Travel Steel Linear Stages with Brushless Motor
• Warranty: 1 year from the date of shipment
• Manufacturer: Newport Corporation
• Location: Irvine, California

Product Usage Instructions

Introduction
Welcome to the user manual for the MTN-BLHS Series Mid-Travel Steel Linear Stages with Brushless Motor.

Description
The MTN-BLHS Series features a durable steel construction and a brushless motor for smooth linear motion.

Design Details
The design includes precision components for accurate positioning and reliable performance.

Characteristics

• Mid-travel range for versatile applications
• Brushless motor for efficient operation
• Steel construction for durability

Drive and Motor
The brushless motor provides precise control over the linear motion of the stage.

Connection to Newport Controllers
Follow the instructions provided in the user manual for proper connection to Newport controllers.

Warnings on Controllers
Ensure to adhere to all safety warnings and precautions when connecting to controllers.

Connection
Use the recommended cables and connectors for a secure and reliable connection.

Cables
Select appropriate cables to ensure proper communication between the stage and controllers.

Connection to Non-Newport Electronics
Refer to the user manual for detailed instructions on connecting the stage to non-Newport electronics.

Connections
Follow the provided guidelines for safe and effective connections to non- Newport electronics.

Dimensions
Refer to the specifications section for detailed dimensions of the MTN-BLHS Series linear stage.

Accessories
Explore optional accessories like the EQ160 Bracket, MTN-BP Base Plate, and MTN-TP Top Plate for enhanced functionality.

EQ160 Bracket
This bracket allows for secure mounting of the linear stage in various setups.

MTN-BP Base Plate
The base plate provides a stable foundation for the linear stage assembly.

MTN-TP Top Plate
The top plate offers additional mounting options for compatible accessories.

FAQ

1. Q: What is the warranty period for the MTN-BLHS Series?
   A: The warranty period is 1 year from the date of shipment.

2. Q: How should I connect the stage to Newport controllers?
   A: Follow the detailed instructions provided in the user manual under the “Connection to Newport Controllers” section.

Warranty

Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days.

Limitation of Warranty
This warranty does not apply to defects resulting from modification or misuse of any product or part.

CAUTION
Please return equipment in the original (or equivalent) packing.
You will be responsible for damage incurred from inadequate packaging if the original packaging is not used.

CAUTION
Warranty does not apply to damages resulting from:

• Incorrect usage:
  • Load on the stage greater than maximum specified load.
  • Carriage speed higher than specified speed.
  • Improper grounding.
  • Connectors must be properly secured.
  • When the load on the stage represents an electrical risk, it must be connected to ground.
  • Excessive or improper cantilever loads.
• Modification of the stage or any part thereof.

This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages.
© 2018 by Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document may be reproduced or copied without the prior written approval of Newport Corporation. This document is provided for information only, and product specifications are subject to change without notice. Any change will be reflected in future publishings.

EC Declaration of Conformity

2 Tech Drive
Andover, MA 01810
Website: www.mksinst.com

EU27 Declaration of Conformity
Application of Council Directive(s):

• Electromagnetic Compatibility Directive (EMCD) -2014/30/EU
• Machinery Directive – 2006/42/EC
• Restriction of Hazardous Substances Directive (RoHS3)- (EU) 2015/863(7)
• Waste Electrical and Electronic Equipment – Directive 2012/19/EU

Standard(s) to which conformity is declared:

• EN 61326-1:2013 -(EMC)
• EN ISO 12100:2010 Safety of Machinery- General Principles of Design -Risk Assessment and Risk Reduction

Emissions:
IXIEN 55011: 2016 +Al :2017 C4l Industrial, scientific and medical equipment – Radio-frequency disturbance characteristics – Limits and methods of measurement

Immunity:

• EN 61000-4-2:2009 EMC/Electrostatic Discharge Immunity Test
• EN 61000-4-3:2006+A2:2010 EMC/Radiated Radio Frequency Electromagnetic Field Immunity Test
• EN 61000-4-4:2012 EMC/Electrical Fast Transient/Burst Immunity Test
• EN 61000-4-5:2014+Al :2017 EMC/Surge Immunity Test
• EN 61000-4-6:2014 EMC/Conducted Disturbances induced by Radio Frequency Fields Immunity Test

Manufacturers Name: MKS Instruments, Inc., 2 Tech Drive, Andover, MA 01810 USA
Authorized Representatives Name & Location: ____ _
Equipment Type/Description: Mid-Travel Steel Linear Stages with Brushless Drive
Model Number(s) : (6) MTN100BLHS; MTN200BLHS; MTN300BLHS
The object of the declaration described above is in conformity with the relevant Community harmonization legislation. MKS product conforms to the above Directive(s) and Standard(s) only when installed in accordance with manufacturer’s specifications. This declaration has been issued under the sole responsibility of the manufacturer.
Date: 8/23/2023

• Class A, Group 2
• Compliance of the above model numbers requires the use of a braided shielded cable properly terminated at both ends – if so noted in the MKS Instruction Manual.
• RoHS Directive has to be checked for in scope products; cannot CE mark without compliance to RoHS. RoHS Directive can be unchecked only for systems which MKS sells which qualify for “Large Scale Industrial Tool” exclusion.

UK Declaration of Conformity
Application of Council Directive(s):

• Electromagnetic Compatibility Directive (EMCD) – 2014/30/EU
• Machinery Directive – 2006/42/EC
• Restriction of Hazardous Substances Directive (RoHS3)- (EU) 2015/863(7)
• Waste Electrical and Electronic Equipment – Directive 2012/19/EU

Standard(s) to which conformity is declared:

• BS EN 61326-1 :2013 -(EMC)
• BS EN ISO 12100:2010 Safety of Machinery – General Principles of Design -Risk Assessment and Risk Reduction

Emissions:

• EN 55011: 2016 +Al :2017 C4l Industrial, scientific and medical equipment – Radio-frequency disturbance characteristics – Limits and methods of measuremen

Immunity:

• BS EN 61000-4-2:2009 EMC/Electrostatic Discharge Immunity Test
• BS EN 61000-4-3:2006+A2:2010 EMC/Radiated Radio Frequency Electromagnetic Field Immunity Test
• BS EN 61000-4-4:2012 EMC/Electrical Fast Transient/Burst Immunity Test
• BS EN 61000-4-5:2014+Al:2017 EMC/Surge Immunity Test
• BS EN 61000-4-6:2014 EMC/Conducted Disturbances induced by Radio Frequency Fields Immunity Test

Manufacturers Name: MKS Instruments, Inc., 2 Tech Drive, Andover, MA 01810 USA
Authorized Representatives Name & Location: —-‘—————————
Equipment Type/Description: Mid-Travel Steel Linear Stages with Brushless Drive
Model Number(s) : (6) MTN100BLHS; MTN200BLHS; MTN300BLHS
The object of the declaration described above is in conformity with the relevant Community harmonization legislation. MKS product conforms to the above Directive(s) and Standard(s) only when installed in accordance with manufacturer’s specifications. This declaration has been issued under the sole responsibility of the manufacturer.
Date: 8/23/2023

Definitions and Symbols

The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur.

General Warning or Caution
The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible.
The following are definitions of the Warnings, Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety, safety and preservation of the equipment, or important tips.

WARNING
Warning indicates a potentially dangerous situation which can result in bodily harm or death.

CAUTION
Caution indicates a potentially hazardous situation which can result in damage to product or equipment.

NOTE
Note indicates additional information that must be considered by the user or operator.

European Union CE Mark
The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations.

Warnings and Cautions
ATTENTION
This stage is a Class A device. In a residential environment, this device can cause electromagnetic interference. In this case, suitable measures must be taken by the user.

WARNING
The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved.

• Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state.
  Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous.

• Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. Nevertheless, if any liquid has entered the stage, switch off the motor power and then disconnect the electronics from power supply. Contact your Newport service facility and request repairs.

• Do not insert or drop objects into this stage, this may cause an electric shock, or lock the drive. Do not use this stage if any foreign objects have entered the stage. Switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility for repairs.

• Do not place this stage in unstable locations such as on a wobbly table or sloping surface, where it may fall or tip over and cause injury. If this stage has been dropped or the case has been damaged, switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility and request repairs.

• Do not attempt to modify this stage; this may cause an electric shock or downgrade its performance.

• Do not exceed the usable depth indicated on the mounting holes (see section “Dimensions”). Longer screws can damage the mechanics or cause a short-circuit.

CAUTION
Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment (except vacuum compatible versions).

• Do not place this stage in a location affected by dust, oil fumes, steam or high humidity. This may cause an electric shock.

CAUTION
Do not leave this stage in places subject to extremely high temperatures or low temperatures. This may cause an electric shock.

• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original packaging)
• Vacuum compatible versions can be steamed at +60 °C

CAUTION
Do not move this stage if its motor power is on. Make sure that the cable to the electronics is disconnected before moving the stage. Failure to do so may damage the cable and cause an electrical shock.

• Be careful that the stage is not bumped when it is being carried. This may cause it to malfunction.
• When handling this stage, always unplug the equipment from the power source for safety.
• When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism.
• Contact your Newport service facility to request cleaning and specification control every year.

Mid-Travel Steel Linear Stages with Brushless Motor MTN-BLHS Series

Introduction
This manual provides operating instructions for the MTN-BLHS stage that you have purchased.

MTN-BLHS Series linear stages.

RECOMMENDATION
We recommend you read carefully the chapter “Connection to electronics” before using the MTN-BLHS stage.

Description

MTN-BLHS are reliable all-steel construction stages with excellent stiffness, load capacity and thermal stability. They are ideal for applications that require moving heavy loads at high-speed with very fine repeatability. Available in 100, 200 and 300 mm travel versions, the MTNBLHS stages can bear up to 100 kg centered load, when mounted horizontally. The ball screw drive along with linear guides guarantee fast, smooth and accurate motion trajectory, while the non migrating ball cage design prevents from drift.

Design Details

• Base Material Stainless Steel
• Bearings  Linear ball bearings with anti- cage migration
• Drive Mechanism Ballscrew drive
• Drive Screw Pitch 4 mm
• Feedback 40,000 cts/rev.
• Limit Switches Optical
• Origin Optical, centered
• Cable 3 m

Characteristics

Definitions
Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”.

This standard gives the definition of position uncertainty which depends on the 3 following parameters:
Absolute Accuracy
Difference between ideal position and real position.

Accuracy
Difference between ideal position and real position after the compensation of linear errors. Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effects. All Newport motion electronics can compensate for linear errors.

The relation between absolute accuracy and on-axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor x Travel

Repeatability
Ability of a system to achieve a commanded position over many attempts.

Reversal Value (Hysteresis)
Difference between actual position values obtained for a given target position when approached from opposite directions.

Minimum Incremental Motion (MIM or Sensitivity)
The smallest increment of motion a device is capable of delivering consistently and reliably.

Resolution
The smallest increment that a motion device can theoretically move and/or detect. Resolution is not achievable, whereas MIM, is the real output of a motion system.

Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it moves. The testing of accuracy, repeatability, and reversal error are made systematically with test equipment in controlled environment (20 ±1 °C). A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 168 points.

Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport’s A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com

Mechanical Specifications

• Travel Range (mm) 100; 200; 300
• MIM (μm) 0.3
• Uni-directional Repeatability, Typical (Guaranteed) (1) (μm) ±0.2 (±0.25)
• Bi-directional Repeatability, Typical (Guaranteed) (1) (μm) ±0.3 (±0.5)
• Accuracy, Typical (Guaranteed) (1) (μm) ±2.0 (±4.0)
• Maximum Speed (mm/s) 250
• Pitch, Typical (Guaranteed) (1) (2) (μrad) (3)
  • MTN100BLHS: ±10 (±20)
  • MTN200BLHS: ±20 (±40)
  • MTN300BLHS: ±30 (±60)
• Yaw, Typical (Guaranteed) (1) (2) (μrad) (3)
  • MTN100BLHS: ±10 (±17)
  • MTN200BLHS: ±17 (±35)
  • MTN300BLHS: ±30 (±53)

For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com Over 100 mm travel. To obtain arcsec units, divide mrad value by 4.8.

CAUTION
To reach specifications stated, stages must be fixed on a plane surface with a flatness of 5 µm.

Load Specification Definitions

Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications. This value is given with speed and acceleration specified for each stage, and with a load perpendicular to bearings.

Axial Load Capacity (±Cx)
Maximum load along the direction of the drive train.

Off-Centered Load (Q)
Maximum cantilever-load the bearing can move: Q ≤Cz ÷ (1 + D/100)
D: Cantilever distance.

Load Characteristics and Stiffness

• Cz, Normal centered load capacity on bearings 1000 N
• Cx, Direct load capacity on X axis 200 N
• -Cx, Inverse load capacity on X axis 200 N
• kax, Compliance in roll 4 μrad/Nm
• kay, Compliance in pitch 6 μrad/Nm
• kaz, Compliance in yaw 5 μrad/Nm
• Q, Off-center load Q ≤Cz ÷ (1 + D/100)
• where: D = Cantilever distance in mm

CAUTION
To achieve maximum speed and acceleration performance with the set of parameters provided by default, it is recommended not to exceed 35 kg load on a single-axis and 20 kg on an XY configuration.

Stage Weights
Weights indicated in the table below are average values.

• Weight [lb (kg)]
• MTN100BLHS 23.15 (10.5)
• MTN200BLHS 28.44 (12.9)
• MTN300BLHS 33.95 (15.4)
• MCAB-3-B 3-meter Cable 1.54 (0.7)

Drive and Motor

Brushless Motor Characteristics

• Number of poles 4
• Number of phases 3
• Rated voltage 36 V
• Rated speed 4,000 rpm
• Rated torque 0.32 Nm
• Peak torque 1 Nm
• Peak current 16.5 A
• Resistance per phase 0.45 Ω
• Inductance per phase 1.4 mH
• Torque constant 0.063 Nm/A
• Electromotive force 6.6 V/krpm

CAUTION
High RMS current will generate motor heating which will degrade characteristics of the stage, such as repeatability, accuracy, etc…

Command Signals

NOTE
The values above indicate voltage induced by energized coil of one phase on next phase coil. A positive value for L-M would indicate a higher voltage on L relative to M.

NOTE
Motor phases and Hall signals are shifted in phase by 30°.

Sensor Position

End-of-Run and Mechanical Zero are 5 V open collector type. The Index Pulse provides a repeatable Home Position at ±1 step.

CAUTION
“End-of-Run” and “Mechanical Zero” are active signals and should not be connected to any other source.

Feedback Signal Position

The incremental sensor consists of an optical scale and an encoder head. When the carriage moves, the encoder head generates square signals in quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25 connector.

“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486.

Pinouts
The pinout diagram for the MTN-BLHS stage SUB-D25M connector is shown below.

MCAB-3-B Cable
A 3-meter MCAB-3-B cable is supplied with each stage (see section 5.3: ”Cables”).

Connection to Newport Controllers

Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.

WARNING
Disconnect the power plug under the following circumstances:

• If the power cord or any attached cables are frayed or damaged in any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.

CAUTION
To protect the unit from damage, be sure to:

• Keep all air vents free of dirt and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.

WARNING
All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized. Contact your electrician to check your receptacles.

• This product is equipped with a 3-wire grounding type plug. Any interruption of the grounding connection can create an electric shock hazard. If you are unable to insert the plug into your wall plug receptacle, contact your electrician to perform the necessary alterations to ensure that the green (green-yellow) wire is attached to earth ground.
• This product operates with voltages that can be lethal. Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts.

Connection
There is a label on every stage indicating its part and serial numbers.

WARNING
Always turn the controller’s power OFF before connecting to a stage.

NOTE
These stages are ESP compatible. Enhanced System Performance is Newport’s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters. This ensures that the user can operate the motion system quickly and safely.

Cables
All MTN-BLHS stages are delivered with MCAB-3-B 3-meter cables with a SUB-D25M connector for direct connection to Newport Controllers.

WARNING
This cable is shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).

• Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk.

Connection to Non-Newport Electronics

Connections
WARNING
Newport is not responsible for malfunction or damage of MTN-BLHS stages when used with non-Newport controllers.

• Newport guarantees “”compliance of MTN-BLHS stages only if used with Newport cables and controllers.

It is the customer’s responsibility to modify the cable and take care of sensor signal connections, when using the stage with non-Newport controllers. End-of-Runs and Mechanical Zero are open collector type with a 5.6 V protective Zener diode.

Dimensions

Accessories

EQ160 Bracket
The EQ160 right-angle brackets (to order separately) can be used for vertical mounting configurations of a MTN-BLHS stage.

NOTE
The carriage can drift once power is turned off.

MTN-BP Base Plate
The MTN-BP base plate must be to ordered separately.

NOTE
For an XY assembly, the lower stage must be equipped with a MTN-BP base plate.
It also allows to fasten the stage to an interface with an imperial hole pat- tern.

MTN-TP Top Plate
This MTN-TP top plate is necessary if you need an interface with an imperial hole pattern (to be to ordered separately).

Maintenance

RECOMMENDATION
Please contact Technical Sales Support team for recommendations on application specific maintenance.

Maintenance
The MTN-BLHS stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution.

PRECAUTIONS
The MTN-BLHS stage must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.

RECOMMENDATION
It is recommended to return the stage to Newport for re-lubrication after 2000 hours of use. If the MTN-BLHS stage is mounted on a workstation and cannot be easily removed, please contact Newport’s After Sales Service for further instructions.

Repair
CAUTION
Never attempt to disassemble a component of the stage that has not been covered in this manual.
To disassemble a non specified component can cause a malfunction of the stage. If you observe a malfunction in your stage, please contact us immediately to arrange for a repair.

• Any attempt to disassemble or repair a stage without prior authorization will void your warranty.

Calibration
CAUTION
It is recommended to return your MTN-BLHS stage to Newport once a year for recalibration to its original specifications.

Service Form
Your Local Representative

• Tel.:

• Fax:

• Name:

• Company:

• Address:

• Country:

• P.O. Number:

• Item(s) Being Returned:

• Model #:

• Return authorization #:
  (Please obtain prior to return of item)

• Date:

• Phone Number:

• Fax Number:

• Serial #:

• Description:

• Reasons of return of goods (please list any specific problems):

Visit MKS I Newport Online at: www.newport.com

North America & Asia
Newport Corporation
1791 Deere Ave.
Irvine, CA 92606, USA

Sales
Tel.: +1 (949)-863-3144
e-mail: [email protected]

Technical Support
Tel.: +1 (949)-863-3144
e-mail: [email protected]

Service, RMAs & Returns
Tel.: +1 (949)-863-3144
e-mail: [email protected]

Europe
MICRO-CONTROLE Spectra-Physics S.A.S 7 rue des Plantes
45340 Beaune-la-Rolande
France

Sales Europe (EMEAI)
Tel.: +49 (0) 6151-708-0
e-mail: [email protected]

Sales France
Tel.: +33 (0)1 60 91 68 68
e-mail: [email protected]

Sales UK
Tel.: +44 (0)1235 432 710
e-mail: [email protected]

Technical Support
e-mail: [email protected]

Service & Returns
Tel.: +33 (0)2 38 40 51 55
[email protected]

References

• Newport - Photonics Solutions for Extending the Frontiers of Science

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