mks XM-S Ultra Precision Linear Motor Stages User Manual

mks XM-S Ultra Precision Linear Motor Stages

Warranty

Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days.
Limitation of Warranty
This warranty does not apply to defects resulting from modification or misuse of any product or part.

CAUTION

• Please return equipment in the original (or equivalent) packing.
• You will be responsible for damage incurred from inadequate packaging if the original packaging is not used.

CAUTION

• Warranty does not apply to damages resulting from:
• Incorrect usage:
• Load on the stage greater than the maximum specified load.
• Carriage speed higher than specified speed.
• Improper grounding.
• Connectors must be properly secured.
• When the load on the stage represents an electrical risk, it must be connected to the ground.
• Excessive or improper cantilever loads.
• Modification of the stage or any part thereof.
• This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages.
• © 2019 by Newport Corporation, Irvine, CA. All rights reserved.

Original instructions.

• No part of this document may be reproduced or copied without the prior written approval of Newport Corporation. This document is provided for information only, and product specifications are subject to change without notice. Any change will be reflected in future publishings.

EC Declaration of Conformity

UK Declaration of Conformity

Definitions and Symbols

The following terms and symbols are used in this document and also appear on the product where safety-related issues occur.
General Warning or Caution

• The exclamation symbol may appear in warning and caution tables in this document.

• This symbol designates an area where personal injury or damage to the equipment is possible.

• The following are definitions of the Warnings, Cautions, and Notes that may be used in this manual to call attention to important information regarding personal safety, safety, and preservation of the equipment, or important tips.

• WARNING
  Warning indicates a potentially dangerous situation which can result in bodily harm or death.

• CAUTION
  Caution indicates a potentially hazardous situation which can result in damage to product or equipment.

• NOTE
  Note indicates additional information that must be considered by the user or operator.

European Union CE Mark

• The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations.

Warnings and Cautions

ATTENTION

• This stage is a Class A device. In a residential environment, this device can cause electromagnetic interference. In this case, suitable measures must be taken by the user.

WARNING

• The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved.
• The magnetic channel included in this device has the potential to disrupt pacemakers. Consequently, it is recommended that individuals maintain a distance of 1 meter or more from the stage as a precautionary measure.
• Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state.
• Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply.
• After checking that smoke is no longer being emitted contact your
• Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous.
• Make sure that this stage is not exposed to moisture and that liquid does not get into the stage.
• Nevertheless, if any liquid has entered the stage, switch off the motor
• power and then disconnect the electronics from power supply.
• Contact your Newport service facility and request repairs.
• Do not insert or drop objects into this stage, this may cause an electric shock, or lock the drive.
• Do not use this stage if any foreign objects have entered the stage.
• Switch off the motor power and then disconnect the electronics power supply.
• Contact your Newport service facility for repairs.
• Do not place this stage in unstable locations such as on a wobbly table or sloping surface, where it may fall or tip over and cause injury.
• If this stage has been dropped or the case has been damaged, switch off the motor power and then disconnect the electronics power supply.
• Contact your Newport service facility and request repairs.
• Do not attempt to modify this stage; this may cause an electric shock or downgrade its performance.
• Do not exceed the usable depth indicated on the mounting holes (see section “Dimensions”). Longer screws can damage the mechanics or cause a short circuit.
• Do not exceed the speed and load limitations as specified in chapter 3.3.

CAUTION

• Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment.
• Do not place this stage in a location affected by dust, oil fumes, steam or high humidity. This may cause an electric shock.
• Do not leave this stage in places subject to extremely high temperatures or low temperatures. This may cause an electric shock.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original packaging)
• Do not move this stage if its motor power is on.
• Make sure that the cable to the electronics is disconnected before moving the stage. Failure to do so may damage the cable and cause an electrical shock.
• Be careful that the stage is not bumped when it is being carried. This may cause it to malfunction.
• When handling this stage, always unplug the equipment from the power source for safety.
• When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism.
• Contact your Newport service facility to request cleaning and specification control every year.
• You may have unfortunately put your fingers on the optical scale. This can cause failures while the stage is operating. In order to obtain an optimal operation, we advise to clean this optical scale with isopropylic alcohol.

Introduction

This manual provides operating instructions for the stage that you have purchased in the XM-S Series.

RECOMMENDATION
We recommend you read carefully chapters 4.0 and 5.0 for the connection to an electronics, before using a XM-S stage.

Description

The XM-S Series is the ultimate solution for the most demanding manufacturing and test & measurement applications. It meets ultra-precision motion requirements with high dynamics and reliability for 24/7 production environments. Typical applications include semiconductor wafer inspection, direct laser lithography, sensor test-and calibration and ultra-precision assembly. Unlike screw driven stages, the XM-S stages employ a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra-smooth velocity control at all speeds and provides a higher efficiency compared to alternative stage designs. This results in significant less heat dissipation which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM-S stages take also benefit of a sophisticated length decoupling of the magnetic track from the stage carriage. XM-S stages are machined from stress-relieved 7075 aluminum ensuring long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control, to further improve overall performance and accuracy. The T-shape carriage used on the XM-S stages provides the optimum solution for precision XY assemblies without impacting the stage preload. It also supplies a higher robustness and is more tolerant to non-ideal mounting conditions than stages with a C-shape carriage. To ensure the most accurate trajectory control, XM-S stages feature high-class matched pairs of anti-creep crossed roller bearings. The lack of any re-circulating elements in the XM-S stages lead to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers on these bearings prevent from bearing cage migration, which can occur with other linear bearings. Precision position feedback is supplied by a high accuracy LIF 481 Heidenhain linear scale. The precision alignment and mounting of this low thermal expansion scale in the center of the stage minimizes the impact of temperature changes on stage repeatability and accuracy. The encoder signals are interpolated by Newport’s XPS motion controller with sub-nm resolution and less than 10 nm noise for outstanding position sensitivity and stability. Absolute home position and limit signals are incorporated on the same scale without any further electronics or mechanics for improved reliability and accuracy. In general, all electronics are attached to the stationary base. So there are no moving cables inside the stage resulting in an extremely compact design with exceptional reliability and safety.

Design Details

Characteristics

Definitions

Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”.
This standard gives the definition of position uncertainty which depends on the 3 following parameters:
Absolute Accuracy
Difference between ideal position and real position.
Accuracy

• Difference between ideal position and real position after the compensation of linear errors.

• Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effects. All

• Newport motion electronics can compensate for linear errors.

• The relation between absolute accuracy and on-axis accuracy is as follows:

• Absolute Accuracy = Accuracy + Correction Factor x Travel

• Repeatability
  Ability of a system to achieve a commanded position over many attempts.

• Reversal Value (Hysteresis)
  Difference between actual position values obtained for a given target position when approached from opposite directions.

• Minimum Incremental Motion (MIM or Sensitivity)
  The smallest increment of motion a device is capable of delivering consistently and reliably.

• Resolution
  The smallest increment that a motion device can theoretically move
  and/or detect. Resolution is not achievable, whereas MIM, is the real output of a motion system.

• Yaw, Pitch
  Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it moves.
  The testing of accuracy, repeatability, and reversal error are made systematically with test equipment in controlled environment (20 ±1 °C).
  A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 168 points.

• Guaranteed and Typical Specifications
  Guaranteed maximum performance values are verified per Newport’s A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com

Mechanical Specifications

1. For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com
2. Middle 80% of travel.
3. To obtain arcsec units, divide µrad value by 4.8.
4. Requires operation in a controlled environment to achieve specification.

CAUTION
To reach specifications stated, stages must be fixed on a plane surface with a flatness of 5 µm.

Load Characteristics and Stiffness
Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.

| XMS50| XMS100| XMS160| XML210| XML350
---|---|---|---|---|---
Cz, Normal centered load capacity (N)| 100| 100| 100| 300| 300
kax, Compliance in roll (µrad/Nm)| 3.5| 2.0| 1.5| 0.5| 0.1
kay, Compliance in pitch (µrad/Nm)| 6,0| 2,5| 2.0| 2.0| 0.7
kaz, Compliance in yaw (µrad/Nm)| 8.0| 3.5| 2.0| 1.0| 0.2
a, Construction parameter (mm)| 109| 109| 109| 155| 155
Q, Off-center load

where D = Cantilever distance in mm

| | | Q £ Cz ÷ (1 + D/a)| |

Stage Weights
The stage weights indicated below do not include the cables.

Mass [lb (kg)]

| Stage| Carriage McNair
---|---|---
XMS50-S| 5.5 (2.5)| 2.6 (1.2)
XMS100-S| 7.7 (3.5)| 4.0 (1.8)
XMS160-S| 9.9 (4.5)| 5.1 (2.3)
XML210-S| 28.7 (13.0)| 16.8 (7.6)
XML350-S| 48.5 (22.0)| 26.0 (11.8)

Example of Parameters “ScalingAcceleration” & “AccelerationLimit”

• This example is based on Newport XPS controller and XPS-DRV02 driver.

• Two parameters have to be updated in the parameter file, according to the payload put onto the XM-S stage:

• The parameter “ScalingAcceleration” is used by the controller to scale the output voltage sent to the driver.

• It indicates the theoretical maximum acceleration (friction not taken in account) of the XM-S carriage when the maximum voltage (10 volts) is applied to the driver.

• The parameter “AccelerationLimit” indicates the theoretical maximum acceleration that the controller will be able to require from the
  XM-S carriage. It correspond to the XM-S peak force.

• For XPS controller and XPS-DRV02 driver, these parameters can be calculated using the following formulas, where the payload must be entered in kg:

XMS160-S Examples:

• ScalingAcceleration(0) = 30590 mm/s2
• ScalingAcceleration(10) = 5720 mm/s2
• AccelerationLimit(Payload) =1.1
• ScalingAcceleration(Payload)

XMS160-S Examples:

• AccelerationLimit(0) = 27809 mm/s2
• AccelerationLimit(10) = 5200 mm/s2
• These formulas are explained below:
• Inputs from the system

Motor:

• Motor force constant:
• XMS-S: MotorForceConstant = 19.9 N/Amp. RMS
• XMS-S: MotorForceConstant = 27.5 N/Amp. RMS

Motor thermal resistance:

• XMS-S: MotorRth = 1.8 [ K ] Watt
• XMS-S: MotorRth = 1.3[ K ] Watt

Motor constant at 300 K:

• XMS-S: Motor K = 24 Newton2 Watt
  XMS-S: Motor K = 97 Newton2 Watt

Driver:

• XPS-DRV02 driver is using sine/cosine commutation on its input. Its maximum current of 5 A is obtained for a 10 V input, so:
• MaxDriverCurrent = 5 Amp.
• TransImpedenceDriver = 0.5 Amp./V

Mechanics:

• XM-S carriage mass: See chapter: “Stage Weights” below.

System:

• XM-S RMS force is defined to keep motor heating below 20 °C:
• XM-S peak force is defined to allow two time the rms force. This value is lower than the theoretical peak force of the motor:
• XMS-S_PeakForce = 32 Newtons
• XML-S_PeakForce = 74 Newtons
• The RMS current limitation of the driver is set according to XM-S RMS force:
• The peak current limitation of the driver is set according to the XM-S peak force:
• XMS-S DriverMaximumPeakCurrent = 2.5 Amp.
• XML-S DriverMaximumPeakCurrent = 4.2 Amp.
• The integration time of the driver I2t limitation is set to allow to apply the peak current for 4 seconds. This is obtained with an integration time of 15 s, which is lower than the motor thermal time constant.
• DriverRMSIntegrationTime = 15 s
• Example for an XML210-S stage with a 3 kg load Inputs from the user
• Load on the carriage: Load = 3 kg

Calculation

MovingMass:

• MovingMass =Mcar + Load

ScalingAcceleration:

• ScalingAcceleration = 9172 mm/s2

LimitAcceleration:

Estimated Moving Mass for XM-S Stages

CAUTION
Stages with linear motor such as those of the XM-S Series, are sensitive to the load variation and its stiffness. The typical example below shows the behavior of the displacement in accordance with the underestimated/overestimated moving mass.

Driving in force requires a good adjustment of the controller/driver theoretical acceleration parameter (ScalingAcceleration) which depends on the moving mass.

• Moving mass too high vs adjustment
• Moving mass too low vs adjustment
• Moving mass good vs adjustment

Drives and Motors

Motor Characteristics
XM-S stages are equipped with a brushless DC motor (3-phase synchronous ironless linear motor) and a Heidenhain scale.

| Motor

Constant

| Magnet

Pitch

| Nominal

Voltage

| Max. RMS

Current

| Max. Peak

Current

| Resistance

per Phase

| Inductance

per Phase

---|---|---|---|---|---|---|---
(N2/W)| (mm)| (V)| (A)| (A)| (W)| (mH)
XMS-S| 24| 30| 48| 1.1| 2.5| 5.5| 1.6
XML-S| 97| 42| 48| 1.9| 4.2| 2.6| 2

Position Feedback Signals

Pinouts
The XMS-S stage connectors are located at the end of short cables while they are fixed on the body for the XML-S stages.

The pinout diagrams for XM-S stage connectors are shown below.

• Encoder Connector
• Thermistor Connector

Cables

• The XM-S stages are supplied without cables.
• The appropriate cable kit must be ordered separately, in accordance with the XPS controller configuration used. Please refer to our website for ordering information.

WARNING

• The XM-S Series stages operate only with 5-meter max. cables.
• WARNING
• Cables of the kits are shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).
• WARNING
• Keep these cables at a safe distance from other electrical cables in your environment to avoid potential cross-talk.

Stage Installation

Unpacking

• The XM-S stages are delivered in packaging designed for safe transport.
• The XMS-S stages are equipped with 1 plate to lock the carriage during transportation.

CAUTION

• Remove the locking plate before using a XMS-S stage. An Allen key is supplied for CHc M6 screws.
• The XML-S stages are equipped 1 handle on each side whick lock the carriage during transportation and safe removal from packaging. It is recommended to carefully lift the stage from packaging using these han-dles.

CAUTION

• Remove both locking handles before using a XML-S stage. An Allen key is supplied for CHc M6 screws.

Connection to Newport Controllers

Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.

WARNING

Disconnect the power plug under the following circumstances:

• If the power cord or any attached cables are frayed or damaged in any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.

CAUTION

• To protect the unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.

WARNING

• All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized.
• Contact your electrician to check your receptacles.

WARNING

• This product operates with voltages that can be lethal.
• Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts.

Connection

• There is a label on every stage indicating its part and serial numbers.

WARNING

• Always turn the controller’s power OFF before connecting to a stage.

NOTE

• These stages are ESP compatible. Enhanced System Performance is Newport’s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters. This ensures that the user can operate the motion system quickly and safely.

Wiring

• The XM-S stages are supplied without cables (see chapter 4.4: “Cables”).

Connection to Non-Newport Electronics

Connections

• WARNING
• Newport is not responsible for malfunction or damage of XM-S stages when used with non-Newport controllers.
• Newport guarantees “”compliance of XM-S stages only if used with the appropriate Newport cable kit and a XPS series controller.
• It is the customer’s responsibility to modify the cables and take care of sensor signal connections, when using the stage with non-Newport controllers.

WARNING

• + End-of-Run and – End-of-Run signals are not directly supplied by XM-S Series stages.
• They must be restored using “Limit” and “Home” signals which are generated.

Dimensions

CAUTION
Mounting screws of XM-S stage magnetic channels are accessible via the external side of the top plate. They mustn’t be unscrewed; this may damage stage specifications.

Granite Base for Ultra Surface Flatness

The flatness of the surface is a major factor in the positioning accuracy and repeatability of a motion system. Polished granite plates are among the flattest, commercially available surfaces. Granite’s tight flatness tolerance and extreme hardness make it logical option to complement Newport’s Ultra- Precision Linear Motor XM-S Series stage.
The GB series granite base plates (to order separately) feature 3 point mounting, to make-up for non-flat tables. Edge handles facilitate handling and locating the base plate on the work surface.

Maintenance

• RECOMMENDATION
  Please contact Technical Sales Support team for recommendations on application specific maintenance.

• Maintenance
  The XM-S stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution.

• PRECAUTIONS
  The XM-S stage must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.

• RECOMMENDATION

• It is recommended to return the stage to Newport for re-lubriaction after 2000 hours of use.

• If the XM-S stage is mounted on a workstation and cannot be easily removed, please contact Newport’s After Sales Service for further instructions.

Repair

CAUTION

• Never attempt to disassemble a component of the stage that has not been covered in this manual.
• To disassemble a non specified component can cause a malfunction of the stage.
• If you observe a malfunction in your stage, please contact us immediately to arrange for a repair.

CAUTION

• Any attempt to disassemble or repair a stage without prior authorization will void your warranty.

Calibration

CAUTION

• It is recommended to return your XM-S stage to Newport once a year for recalibration to its original specifications.

Service Form

• Your Local Representative

• Tel.:————————————

• Fax:————————————-

• Name:———————–

• Company:—————————

• Address:————————–

• Country:—————————————–

• P.O. Number:—————————————

• Item(s) Being Returned:——————————————————–

• Model #:————————————

• Description:———————————————————————

• Reasons of return of goods (please list any specific problems):———————————————

• Return authorization #:——————————————————

  • (Please obtain prior to return of item)

• Date:——————————————————————————

• Phone Number:———————————————————-

• Fax Number:—————————————————–

• Serial #:—————————————————-

• North America & Asia
  

• Newport Corporation
  

• 1791 Deere Ave.
  

• Irvine, CA 92606, USA
  

• Sales
  

• Tel.: +1 (949)-863-3144
  

• e-mail: [email protected]
  

• Technical Support
  

• Tel.: +1 (949)-863-3144
  

• e-mail: [email protected]
  

• Service, RMAs & Returns
  

• Tel.: +1 (949)-863-3144
  

• e-mail:[email protected]

• Europe
  

• MICRO-CONTROLE Spectra-Physics S.A.S
  

• 7 rue des Plantes
  

• 45340 Beaune-la-Rolande
  

• France
  

• Sales Europe (EMEAI)
  

• Tel.: +49 (0) 6151-708-0
  

• e-mail:[email protected]
  

• Sales France
  

• Tel.: +33 (0)1 60 91 68 68
  

• e-mail:[email protected]
  

• Sales UK
  

• Tel.: +44 (0)1235 432 710
  

• e-mail:[email protected]
  

• Technical Support
  

• e-mail: tech_[email protected]
  

• Service & Returns
  

• Tel.: +33 (0)2 38 40 51 55
  

• DST-BEA-RMA-[email protected]

References

• Newport - Photonics Solutions for Extending the Frontiers of Science

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