mks SAG Stages CONEX Controller User Manual
- June 16, 2024
- MKS
Table of Contents
- SAG Stages CONEX Controller
- Product Information: Super Agilis Series
- Specifications:
- Product Usage Instructions:
- 1.0 Introduction
- 2.0 System Overview
- Q: What should I do if I need to repair or modify the
- Q: What is the warranty coverage for the Super Agilis
- Q: What are the security features of the CONEX-SAG
SAG Stages CONEX Controller
Product Information: Super Agilis Series
Specifications:
- Controller: CONEX-SAG
- Stages: SAG-xxxx
- Version: V1.1.x
Product Usage Instructions:
1.0 Introduction
The Super Agilis Series is a high-performance motion control
system designed to provide precise and accurate positioning. This
user manual provides detailed information on the CONEX-SAG
Controller with SAG-xxxx Stages.
1.1 Definitions and Symbols
1.1.1 General Warning or Caution: This symbol indicates
important safety information that must be followed to prevent
injury or damage to the product.
1.1.2 Electric Shock: This symbol indicates a potential electric
shock hazard. Exercise caution when working with electrical
components.
1.1.3 European Union CE Mark: This symbol indicates compliance
with European Union safety standards.
1.2 Warnings and Cautions
Read and understand all warnings and cautions before operating
the Super Agilis Series. Failure to follow these instructions may
result in injury or damage to the product.
1.3 General Warnings and Cautions
-
Do not modify or repair the product without written approval
from Newport. -
Avoid subjecting the product to unusual physical, thermal, or
electrical stress. -
Ensure proper installation and avoid misuse, abuse, accidents,
or negligence in use, storage, transportation, or handling. -
This warranty is in lieu of all other warranties, expressed or
implied. -
Newport Corporation shall not be liable for any indirect,
special, or consequential damages resulting from the purchase or
use of its products.
2.0 System Overview
2.1 General Description
The Super Agilis Series utilizes piezo motion operation and
closed-loop technology to provide precise and efficient motion
control. It also incorporates an encoder for accurate position
feedback.
2.1.1 Piezo Motion Operation
The Super Agilis Series employs piezo actuators to achieve fast
and precise motion control. These actuators offer high-resolution
positioning and low power consumption.
2.1.2 Encoder Theory of Operation
The encoder integrated into the system provides real-time
position feedback, allowing for accurate and reliable positioning.
It works by converting the linear or rotary motion of the stage
into electrical signals.
2.1.3 Closed Loop Technology
The closed-loop technology in the Super Agilis Series ensures
accurate positioning by continuously comparing the desired position
with the actual position feedback from the encoder. It makes
real-time adjustments to minimize errors and improve overall
performance.
2.2 Security Features
2.2.1 Temperature Sensor
The CONEX-SAG Controller is equipped with a temperature sensor
to monitor the operating temperature of the system. It helps
prevent overheating and ensures optimal performance and longevity
of the product.
2.2.2 Motion Timeout
The motion timeout feature automatically stops the motion if no
commands are received within a specified time period. This helps
prevent unnecessary wear and tear on the system and ensures safe
operation.
2.2.3 Hard Stop Detection
The Super Agilis Series incorporates a hard stop detection
mechanism that detects any sudden impact or collision during
motion. It immediately stops the motion to prevent damage to the
system and ensures user safety.
FAQ:
Q: What should I do if I need to repair or modify the
product?
A: Before making any repairs or modifications, it is essential
to obtain written approval from Newport. Unauthorized repairs or
modifications may void the warranty and compromise the performance
and safety of the product.
Q: What is the warranty coverage for the Super Agilis
Series?
A: The warranty provided by Newport does not apply to products
that have been repaired or modified without written approval, or
products subjected to unusual stress, improper installation,
misuse, abuse, accidents, or negligence. Refer to the warranty
terms and conditions for more details.
Q: What are the security features of the CONEX-SAG
Controller?
A: The CONEX-SAG Controller is equipped with a temperature
sensor to monitor operating temperature, a motion timeout feature
to prevent unnecessary wear and tear, and a hard stop detection
mechanism to ensure user safety and protect the system from
damage.
Super Agilis Series
CONEX-SAG Controller with SAG-xxxx Stages
User’s Manual
V1.1.x
Super Agilis Series
Warranty
CONEX-SAG Controller
Newport Corporation warrants that this product will be free from defects in
material and workmanship and will comply with Newport’s published
specifications at the time of sale for a period of one year from date of
shipment. If found to be defective during the warranty period, the product
will either be repaired or replaced at Newport’s option. To exercise this
warranty, write or call your local Newport office or representative, or
contact Newport headquarters in Irvine, California. You will be given prompt
assistance and return instructions. Send the product, freight prepaid, to the
indicated service facility. Repairs will be made and the instrument returned
freight prepaid. Repaired products are warranted for the remainder of the
original warranty period or 90 days, whichever occurs last.
Limitation of Warranty The above warranties do not apply to products which
have been repaired or modified without Newport’s written approval, or products
subjected to unusual physical, thermal or electrical stress, improper
installation, misuse, abuse, accident or negligence in use, storage,
transportation or handling.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED,
INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
USE. NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT, SPECIAL, OR
CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS.
©2022 by Newport Corporation, Irvine, CA. All rights reserved. Original
instructions. No part of this document may be reproduced or copied without the
prior written approval of Newport Corporation. This document is provided for
information only, and product specifications are subject to change without
notice. Any change will be reflected in future publishing.
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Super Agilis Series
Table of Contents
CONEX-SAG Controller
Waranty………………………………………………………………………………………………………. ii EU Declaration of
Conformity………………………………………………………………………..vi UK Declaration of Conformity
…………………………………………………………………….. vii Preface
…………………………………………………………………………………………………….. viii
1.0 Introduction ………………………………………………………………………………… 1
1.1 Definitions and Symbols…………………………………………………………………………………1 1.1.1 General
Warning or Caution…………………………………………………………………….1 1.1.2 Electric
Shock………………………………………………………………………………………..1 1.1.3 European Union CE Mark
……………………………………………………………………….1
1.2 Warnings and Cautions …………………………………………………………………………………..2 1.3 General
Warnings and Cautions……………………………………………………………………….2
2.0 System Overview …………………………………………………………………………. 3
2.1 General Description ……………………………………………………………………………………….3 2.1.1 Piezo motion
operation……………………………………………………………………………3 2.1.2 Encoder Theory of Operation
…………………………………………………………………..3 2.1.3 Closed Loop
technology………………………………………………………………………….4
2.2 Security features…………………………………………………………………………………………….6 2.2.1 Temperature
sensor…………………………………………………………………………………6 2.2.2 Motion
Timeout……………………………………………………………………………………..6 2.2.3 Hard stop
detection…………………………………………………………………………………7
2.3 Part Numbers ………………………………………………………………………………………………..7 2.4 Contents of
Delivery ………………………………………………………………………………………7 2.5 Super Agilis CONEX-SAG
Controller ……………………………………………………………..8
2.5.1 Specifications ………………………………………………………………………………………..8 2.5.2 USB
Communication Settings………………………………………………………………….8 2.5.3 Dimensions
……………………………………………………………………………………………9 2.6 SAG-LSxx and SAG-LSxxP Stages
……………………………………………………………….10 2.6.1 Mechanical
specifications………………………………………………………………………10 2.6.2 Dimensions (same for LSxx
and LSxxP stages)………………………………………..11 2.7 CONEX-PS
…………………………………………………………………………………………………12 2.7.1 Specifications
………………………………………………………………………………………12 2.7.2 Dimensions
………………………………………………………………………………………….12 2.8 Environmental Specifications
………………………………………………………………………..12 2.9 Connector Identification
……………………………………………………………………………….13
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3.0 Getting Started ………………………………………………………………………….. 14
3.1 Connections ………………………………………………………………………………………………..14 3.2 Communication
Settings ……………………………………………………………………………….14
3.2.1 Requirements……………………………………………………………………………………….14 3.2.2 PC USB
Communication……………………………………………………………………….14 3.3 Configuring the
Controller…………………………………………………………………………….15 3.3.1 Standard
procedure……………………………………………………………………………….15 3.3.2 Modified payload or Z axis
utilization …………………………………………………….16
4.0 Programming …………………………………………………………………………….. 24
4.1 State Diagram………………………………………………………………………………………………24 4.2 Command
Syntax…………………………………………………………………………………………26 4.3 Command Execution Time
……………………………………………………………………………26 4.4 Command
Set………………………………………………………………………………………………27
AC — Set/Get Acceleration…………………………………………………………………………..29 DB — Set
deadband……………………………………………………………………………………..30 DD — Set deadband entry/exit
conditions……………………………………………………….31 ID –Get stage
identifier……………………………………………………………………………….32 IF — Get interpolation
factor…………………………………………………………………………33 FS — Factory settings
modification/restoration ……………………………………………….34 HD — Enter/Exit Holding state
……………………………………………………………………..35 HT — Set/Get referencing
configuration…………………………………………………………36 JA — Move
jogging……………………………………………………………………………………..37 KF — Set feed-forward
gain………………………………………………………………………….38 KI — Set integral gain
………………………………………………………………………………….39 KP — Set proportional
gain…………………………………………………………………………..40 KS — Set integral saturation
…………………………………………………………………………41 KO — Set/Get offset friction
…………………………………………………………………………42 MM — Enter/Leave DISABLE state
………………………………………………………………43 MS — Get motion
status……………………………………………………………………………….44 MT — Set/Get motion timeout
………………………………………………………………………45 OL — Go to READY OPEN LOOP
state………………………………………………………..46 OR — Go to READY CLOSED LOOP state
…………………………………………………..47 PA — Move absolute……………………………………………………………………………………48
PR — Move relative …………………………………………………………………………………….49 PW — Enter/Leave
configuration state …………………………………………………………..50 RA — Referencing jogging
velocity……………………………………………………………….51 RF — Execute the referencing sequence
…………………………………………………………52 RS — Reset controller
………………………………………………………………………………….53 RT — Tell temperature
…………………………………………………………………………………54 SA — Set/Get axis number
……………………………………………………………………………55 SL — Set/Get stage left travel
range……………………………………………………………….56 SR — Set/Get stage right travel range
…………………………………………………………….57
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SS — Set/Get scanning settings ……………………………………………………………………..58 ST — Stop motion
……………………………………………………………………………………….60 SU — Set/Get encoder pitch
………………………………………………………………………….61 TB — Tell error string
………………………………………………………………………………….62 TE — Tell last error
……………………………………………………………………………………..63 TH — Tell target position
……………………………………………………………………………..64 TO — Set/Get motor stall timeout
………………………………………………………………….65 TP — Tell current position
……………………………………………………………………………66 TS Get positioner error and controller state
…………………………………………………67 VA — Set/Get Velocity ………………………………………………………………………………..68
VE — Tell controller revision information………………………………………………………69 XF — Set/Get
stepping frequency ………………………………………………………………….70 XN — Set/Get scanning command
…………………………………………………………………71 XR — Move stepping
…………………………………………………………………………………..72 XS — Go to SCANNING
state………………………………………………………………………73 XU — Set/Get Open Loop step size
……………………………………………………………….74 ZT — List all configuration
parameters…………………………………………………………..75
5.0 Connector Pinout……………………………………………………………………….. 76
5.1 Power Connectors (Female Ø 2.1 x Ø 5.5 x 11 mm) …………………………………………76 5.2 USB
Connector (USB Mini-B Receptacle)………………………………………………………76
6.0 Troubleshooting…………………………………………………………………………. 77
7.0 Maintenance and Service ……………………………………………………………. 78
7.1 Enclosure Cleaning ………………………………………………………………………………………78 7.2 Obtaining
Service…………………………………………………………………………………………78
Service Form ………………………………………………………………………………………….. 79
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EU Declaration of Conformity
CONEX-SAG Controller
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Super Agilis Series
UK Declaration of Conformity
CONEX-SAG Controller
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Super Agilis Series
Preface
CONEX-SAG Controller
Confidentiality & Proprietary Rights
Reservation of Title The Newport Programs and all materials furnished or
produced in connection with them (“Related Materials”) contain trade secrets
of Newport and are for use only in the manner expressly permitted. Newport
claims and reserves all rights and benefits afforded under law in the Programs
provided by Newport Corporation. Newport shall retain full ownership of
Intellectual Property Rights in and to all development, process, align or
assembly technologies developed and other derivative work that may be
developed by Newport. Customer shall not challenge, or cause any third party
to challenge, the rights of Newport.
Preservation of Secrecy and Confidentiality and Restrictions to Access
Customer shall protect the Newport Programs and Related Materials as trade
secrets of Newport, and shall devote its best efforts to ensure that all its
personnel protect the Newport Programs as trade secrets of Newport
Corporation. Customer shall not at any time disclose Newport’s trade secrets
to any other person, firm, organization, or employee that does not need
(consistent with Customer’s right of use hereunder) to obtain access to the
Newport Programs and Related Materials. These restrictions shall not apply to
information (1) generally known to the public or obtainable from public
sources; (2) readily apparent from the keyboard operations, visual display, or
output reports of the Programs; (3) previously in the possession of Customer
or subsequently developed or acquired without reliance on the Newport
Programs; or (4) approved by Newport for release without restriction.
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CONEX-SAG Controller
Service Information
The user should not attempt any maintenance or service of the Super Agilis
Controller/Driver and its accessories beyond the procedures outlined in this
manual. Any problem that cannot be resolved should be referred to Newport
Corporation. When calling Newport regarding a problem, please provide the Tech
Support representative with the following information: · Your contact
information. · System serial number or original order number. · Description of
problem. · Environment in which the system is used. · State of the system
before the problem. · Frequency and repeatability of problem. · Can the
product continue to operate with this problem? · Can you identify anything
that may have caused the problem?
Newport Corporation RMA Procedures
Any Super Agilis Controller being returned to Newport must have been assigned
an RMA number by Newport. Assignment of the RMA requires the item serial
number.
Packaging
The Super Agilis Controller being returned under an RMA must be securely
packaged for shipment. If possible, reuse the original factory packaging.
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CONEX-SAG Controller
CONEX-SAG Controller with SAG-xxxx Stages Super Agilis Series
1.0 Introduction
1.1 Definitions and Symbols
The following terms and symbols are used in this documentation and also appear
on the Super Agilis Controller/Driver where safety-related issues occur.
1.1.1 General Warning or Caution
1.1.2
Figure 1: General Warning or Caution Symbol. The Exclamation Symbol in Figure
1 may appear in Warning and Caution tables in this document. This symbol
designates an area where personal injury or damage to the equipment is
possible.
Electric Shock
1.1.3
Figure 2: Electrical Shock Symbol.
The Electrical Shock Symbol in Figure 2 may appear on labels affixed to the
Super Agilis Controller/Driver. This symbol indicates a hazard arising from
dangerous voltage. Any mishandling could result in irreparable damage to the
equipment, in personal injury, or death.
European Union CE Mark
Figure 3: CE Mark.
The presence of the CE Mark on Newport Corporation equipment means that it has
been designed, tested and certified as complying with all applicable European
Union (CE) regulations and recommendations.
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1.2 Warnings and Cautions
The following are definitions of the Warnings, Cautions and Notes that may be
used in this manual to call attention to important information regarding
personal safety, safety and preservation of the equipment, or important tips.
WARNING Situation has the potential to cause bodily harm or death.
CAUTION Situation has the potential to cause damage to property or equipment.
NOTE Additional information the user or operator should consider.
1.3 General Warnings and Cautions
The following general safety precautions must be observed during all phases of
operation of this equipment. Failure to comply with these precautions or with
specific warnings elsewhere in this manual violates safety standards of
design, manufacture, and intended use of the equipment. · Heed all warnings on
the unit and in the operating instructions. · To prevent damage to the
equipment, read the instructions in this manual. · Only plug the power supply
to a grounded power outlet. · Assure that the power supply is properly
grounded to earth ground through the
grounding lead of the AC power connector · Route power cords and cables where
they are not likely to be damaged. · Disconnect or do not plug in the AC power
cord in the following circumstances:
If the AC power cord or any other attached cables are frayed or damaged.
If the power plug or receptacle is damaged. If the unit is exposed to rain
or excessive moisture, or liquids are spilled on it. If the unit has been
dropped or the case is damaged. If the user suspects service or repair is
required. · Keep air vents free of dirt and dust. · Keep liquids away from
unit. · Do not expose equipment to excessive moisture (>85% humidity). · Do
not operate this equipment in an explosive atmosphere. · Disconnect power
before cleaning the Controller/Driver unit. Do not use liquid or aerosol
cleaners. · Do not open the CONEX-SAG controller. There are no user-
serviceable parts inside. · Return equipment to Newport Corporation for
service and repair. · Dangerous voltages associated with the 100-240 VAC power
supply are present inside the power supply. To avoid injury, do not touch
exposed connections or components while power is on. · Follow precautions for
static-sensitive devices when handling electronic circuits.
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Super Agilis Series
CONEX-SAG Controller
2.0 System Overview
2.1
2.1.1
General Description
The CONEX-SAG is a single axis motion controller/driver for piezo actuator
with encoder feedback. It provides a very compact and low-cost solution for
driving a variety of Newport Agilis-type piezo stages from a PC. The SAG-LSxxP
stages are closed loop versions with encoder feedback when SAG-LSxx stages are
open loop versions.
Communication with the CONEX-SAG is achieved via an USB port (requires
WindowsTM operating system). A WindowsTM based software enables basic motion.
Advanced application programming is simplified by an ASCII command interface
and a set of two letter mnemonic commands.
Piezo motion operation
The Piezo motion is obtained using the reverse piezoelectric effect: by
powering the piezo it expends and the carriage contact point slides and sticks
on the carriage bottom to move it by steps in Jogging phase, or with great
sensivity and without sliding in the range of less than a full extension in
Shifting and Scanning phases (refer to Closed Loop technology ).
The succession of sliding and moving phases generates the moves. The direction
of individual moves (steps) are determined by the signal shape and voltage
applied to the piezo motor:
The step’s size is determined by the pulse’s voltage applied to the piezo motor relative to each setup conditions (stage orientation, loading, …).
2.1.2
Velocity and acceleration parameters are respectively determining the
frequency and change in frequency of the pulses applied to the piezo motor.
Encoder Theory of Operation The SAG-LSxxP stages use a Sine/Cosine encoder
which is interpolated to give high resolution position information with low
noise. It also presents high positioning repeatability.
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CONEX-SAG Controller
2.1.3 2.1.3.1
2.1.3.2 2.1.3.3
Closed Loop technology
The Conex closed loop algorithm for SAG-LSxxP stages is a simplified version
of the typical DC servo loop algorithm.
For firmware versions inferior to v.0.17.0, although a motion profile is not
generated in the algorithm, the Conex controller still closes a loop based on
the error.
For further firmware versions, a motion profiler is used to enhance the
displacement’s acceleration and velocity control.
The closed loop motions are divided into 3 phases: jogging, shifting and
scanning.
The parameters of the different phases, transitions and motion profile are
configurable, refer to relevant commands (Command Set) and section Configuring
the Controller.
Closed Loop Jogging phase
When a new target is requested or when the position error is larger than the
output deadband (DB and DDS commands), the motion enters in the jogging phase
to move the stage to a shifted target position (SSD command).
· For firmware version inferior to v.0.17.0:
The larger the error, the faster the stage is commanded to move to reduce the
error. The stage could start at the full system speed of 10KHz if the stage is
far from the desired position.
· For firmware version superior or equal to v.0.17.0:
The stage follows a trapezoid motion profile according to VA (velocity) and AC
(acceleration) commands.
The Jogging phase ends when the stage is within a specified range around the
shifted target position. This range is called the shift deadband and is set by
SSP and SSN commands.
When the position in within the shift deadband for SST×10 ms, the closed-loop
motion enters in shifting phase.
Closed Loop Shifting phase
During this phase, the stage moves towards the commanded target position by
increasing and adjusting the piezo voltage.
The Shifting phase ends when the stage position remains within a specified
range around the commanded target position. This range is called the deadband
and is set by DBP and DBN commands.
If the stage position remains inside the deadband within DDT×10 ms, the
closed-loop motion enters in scanning phase and the controller state is set to
ready-closed-loop.
Closed Loop Scanning phase
In this phase the motion is considered as ended but the position error is
continuously corrected by adjusting the piezo voltage with an integral servo
coefficient (SSK).
If a position error superior to output deadband (DB and DDS commands) is
detected, the controller switches back to the jogging phase.
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CONEX-SAG Controller
Entry Deadband + Entry Deadband Exit Deadband + Exit Deadband –
Entry Deadband + Entry Deadband Exit Deadband + Exit Deadband –
2.1.3.4
Closed Loop Deadband
As described in the different motion phases, deadbands are either set directly
or calculated by the profiler according to parameters stored in the controller
nonvolatile memory.
The different phase’s deadbands input and output conditions are determined by
the parameter’s values described in the following tables:
· With scanning mode enabled (SSK > 0)
JOGGING
SHIFTING
SCANNING
= SSD + SSP
= DBp
= DBp
= SSD + SSN
= DBn
= DBn
= DBp × DDSp
= DBp × DDSp
N/A
= SSD (SSN × DDSn)
= DBn × DDSn
(p = positive value, n = negative value, refer to relevant command description)
· With scanning mode disabled (SSK = 0)
JOGGING = DBp = DBn
= DBp × DDSp = DBn × DDSn
SHIFTING N/A N/A
SCANNING N/A N/A
2.1.3.5
Example
The motion in this example responds to the following:
Command:
PA0
Parameters:
DB-1e-05, 1e-05
DDT5
DDS-5,5
SSD-0.000200
SSP0.000150
SSN-0.000200
SST4
DBpIN = SSD+SSP SSP
SSN
SSD
DBnIN = SSD+SSN
DBNout = SSD – ( SSN × DDSn)
DBpOUT = DBp×DDSp DBpIN DBnIN DBnOUT = DBn×DDSn
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2.1.3.6
Holding state
For firmware versions starting from v1.1.4, a holding state is implemented
allowing to open the control loop after a move and keep the piezo voltage as
it was during the scanning phase.
In this way it is guaranteed that no motion will be generated by the
controller.
For more detail refers to HD command description.
2.2
2.2.1
2.2.2
Security features
Temperature sensor The controller has an embedded sensor to monitor the
temperature. If the temperature exceeds 85°C, the motion is stopped and an
error flag is set. All motion requests will be refused by the controller until
the temperature falls below 85°C. The current temperature of the controller
can be read with the RT command.
Motion Timeout If a motion lasts more than the motion timeout set with the MT
command, it is stopped and an error flag is set. All motion requests will be
refused by the controller until the error flag is read with the TS command. An
update of the velocity (JA) or target position (PA/PR) during the motion will
reset the timeout counter.
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CONEX-SAG Controller
2.2.3
Hard stop detection
This security feature is available only for closed loop stages.
During a motion, if an obstacle is blocking the stage, the controller will
detect it by monitoring the current stage velocity.
If the velocity is below the minimum velocity (configured with TOD command)
during more than the motor stall timeout (configured with TOT command), the
motion is stopped and an error flag is set.
All motion requests will be refused by the controller until the error flag is
read with the TS command.
During the referencing the same logic is used to detect the hard stop, but TOR
is used instead of TOD.
2.3 Part Numbers
Product CONEX-SAG
CONEX-PS CONEX-USB CONEX-BP
Description Super Agilis Motion Controller/Driver for SAG-LSxx and SAG-LSxxP
stages. 40 W power supply for SA Controller.
USB cable, 1.8 m length
Base plate to attach up to 6 CONEX controllers
2.4 Contents of Delivery
· Super Agilis Controller box integrated with piezo motor linear stage.
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2.5 Super Agilis CONEX-SAG Controller
CONEX-SAG Controller
2.5.1
Specifications General Description Control Capability Piezo Output
Control loop
Motion Computer interface Programming Communication rate Status display Power
Supply
Super Agilis controller
Piezo motors, closed loop 48Vpeak 10 kHz max Digital PI loop 100 Hz servo rate
for firmware versions inferior to v0.17.0 1 kHz servo rate for firmware
versions superior to v0.17.0 Absolute and relative motion
USB Virtual COM port
25+ intuitive, 2 or 3 letter ASCII commands
50 Hz Max. (USB)
Two color LED +5V (USB):
Consumption : < 0.3 Arms Operating voltage : 4.75V to 5.25V
+24V (DRIVE POWER) : Consumption : < 1.5 Arms Operating voltage : 23V to 25V
Both power (+5V and +24V need to be supplied. It is mandatory to keep the +5V and +24V power supplies independent one to the other to insure the voltages are kept into the recommended operating values during hot plugging phases.
2.5.2
USB Communication Settings
Communication parameters are preset in the CONEX-SAG controller and do not
require any configuration:
Bits per second
57,600
Data bits
8
Parity
None
Stop bits
1
Flow control
None
Terminator
CRLF
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Super Agilis Series
2.5.3 Dimensions
CONEX-SAG Controller
CAUTION
DO NOT EXCEED M3 THD depth 4mm for the screws fixing the CONEX plastic body
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Super Agilis Series
2.6 SAG-LSxx and SAG-LSxxP Stages
CONEX-SAG Controller
2.6.1 Mechanical specifications
Open loop stage (without encoder) + controller
Travel range (mm) Maximum speed (mm/s) Material Centered Load Capacity (N)
Maximum axial force (N) Holding Force (N) Minimum Incremental Motion (nm)
Pitch/Yaw (µrad) Cable Length (m) Limit Switches Operating Temperature (°C)
Weight, Without Cable (g)
CONEXSAG-LS16
16 20
65
CONEXSAG-LS32
32 10 Stainless Steel 30 2 3 100 150 1.5 Not Available 10 to 35 93
CONEXSAG-LS48
48 30
127
Closed loop stage (with encoder) + controller
Travel range (mm) Maximum speed (mm/s) Material Centered Load Capacity (N)
Maximum axial force (N) Holding Force (N) Bi-directional Repeatability (nm)
Minimum Incremental Motion (nm) Pitch/Yaw (µrad) Cable Length (m) Limit
Switches Operating Temperature (°C) Weight, Without Cable (g)
CONEX-
CONEX-
CONEX-
SAG-LS16P SAG-LS32P SAG-LS48P
16
32
48
10
Stainless Steel
20
30
30
2
3
120 (full stroke) / 25 (scanning mode)*
25
150
1.5
Not Available
10 to 35
65
93
127
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Super Agilis Series
2.6.2 Dimensions (same for LSxx and LSxxP stages)
CONEX-SAG Controller
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Super Agilis Series
2.7 CONEX-PS
CONEX-SAG Controller
2.7.1
Specifications
AC Input DC Output Connector
2.7.2 Dimensions
100240 VAC, 4763 Hz, 1.9 A 24 V, 40 W max Male: Ø 2.1 x Ø 5.5 x 11 mm
2.8 Environmental Specifications
Operating temperature 5 °C to 40 °C
Operating humidity <85% relative humidity, non-condensing
Storage temperature Installation category
0 °C to 60 °C RH <85% relative humidity, non-condensing
II
Pollution degree
2
Use location
Indoor use only
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Super Agilis Series
2.9 Connector Identification
CONEX-SAG Controller
USB LED POWER IN POWER OUT STAGE Cable retainer
mini USB connector Status LED 24V supply input 24V supply out Stage entry cable 2 x M3 threaded hole (4 mm max inner length) to attach cable retainer (not provided)
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3.0 Getting Started
This section guides the user through the proper set-up of the Super Agilis
Controller motion control system.
Carefully unpack and visually inspect the Agilis Stage, Super Agilis
Controller and CONEX-PS power supply for any damage. Place all components on a
flat and clean surface.
3.1 Connections
To power the system, follow the sequence below: 1. Connect the CONEX-PS to the
Super Agilis Controller (DC IN connector). 2. Connect the CONEX-PS to power.
3. Connect the CONEX-USB to the Super Agilis Controller. 4. Connect the CONEX-
USB to a PC. The Super Agilis Controller is automatically powered on. Wait for
the boot time (few seconds). Super Agilis Controller LED should turn solid
orange
3.2
3.2.1
3.2.2
Communication Settings
Requirements CONEX-SAG GUI and Dll are designed for Personal Computers running
Windows 7, 8.1 and 10 platforms (32 bit & 64 bit).
PC USB Communication Use the provided USB cable to connect the Super Agilis
Controller (USB connector) to your PC. If not already installed Windows will
ask for the compatible driver. Follow the procedure below to install it.
NOTE
To install the USB driver, consult the USB Driver Installation Manual of our
DL Controller on our website and proceed in the same way.
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3.3 Configuring the Controller
All Super Agilis Controller parameters have been set in the factory for most
current usage and can be adjusted for single use.
Consult the Super Agilis Controller GUI Manual for general description and
exploitation of the GUI.
NOTE Beware to make a backup of the factory settings before making any changes. The ZT command lists the current settings which can then be printed.
3.3.1
Standard procedure
The standard parameters of the Super Agilis Controller can be modified with
the Newport CONEX-SAG Applet or in a Terminal window.
NOTE
Use PW1/PW0 commands to save new parameters in the nonvolatile memory of the
controller if permanent changes have to be made, or changes will be reset to
factory settings on the next reboot of the controller.
Newport CONEX-SAG Applet 1. Install the stage in desired condition of use. 2.
Connect the controller to the Newport CONEX-SAG Applet and power on. 3.
Perform tests of parameters values in the Open Loop or Closed Loop window if
adjustments are needed. 4. In the Diagnostic window of the Newport CONEX-SAG
Applet enter new
parameters values with relevant commands (see Command Set table and Command
Syntax section).
Terminal window
Connect the controller to the USB port and power on.
Open a Terminal window and enter directly new parameters values with relevant
commands (see Command Set table and Command Syntax section)
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3.3.2
Modified payload or Z axis utilization
All Super Agilis Controller parameters have been set in the factory per the
associated stage without any payload or Z axis utilization.
In case of significant load added to the stage or Z axis use, parameters must
be adjusted.
Velocity and acceleration could influence the motion process by inducing
unwanted sliding due to the piezo motion and, in some cases, generate closed
loop system instability, they both should be adjusted with the load or angle
of inclination.
NOTE
Z axis utilization is possible but not recommended. In case of z axis use, it
is mandatory to: – set the stage with its positive motion upward (direction of
cable output).
– limit the load to 0.1 kg. – perform specific calibration and configuration
using the Newport CONEX-SAG Applet.
For open loop operations
The Parameters to be adjusted are: · The XU parameters to set the appropriate
voltage values to generate the desired
step’s length · The XF parameter to limit the possible sliding due to a too
high steps frequency
relative to the loading.
3.3.2.1
For closed loop operations
The Parameters to be adjusted and configured in order of priority are: · The
KO parameters to set the minimum voltage values to generate motion. · The KP
parameter to set the proportional gain of the PI control loop. · The KI
parameter to set the integral gain of the PI control loop. · The VA parameter
to set the velocity used by the profiler during closed loop motion. · The AC
parameter to set the acceleration used by the profiler during closed loop
motion · The RA parameter to set the velocity used by the profiler during
referencing jogging
mode. · The SSK parameters to set the Shifting and the Scanning integral
coefficients. · The SST parameter to set the Scanning shift deadband timer.
KO parameters configuration
The KO parameters are the most effective parameters to be adjusted as they
determine the minimum voltage value to generate the lower in length carriage
negative and positive steps for closed loop motions. This is particularly
important to adjust KO in case a constant force is applied on the carriage
(for example with a Z axis mounting).
They must be tested and adjusted manually in real condition of use with the
open loop mode of the Newport CONEX-SAG Applet.
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Procedure 1. Install the stage in desired condition of use. 2. Connect the
controller to the Newport CONEX-SAG Applet and power on. 3. In the Open Loop
of Main X window:
o Set the XF value to 1 Hz by sliding the XF bar to the left. o Set the step
number to 1. o Set the left XU- value to the minimum value for generating a
constant negative
motion: Decrease progressively the left XU- value and command a simple
motion using left arrow. Repeat until each individual displacement becomes
at least 4 times lower than the shifted target deadband size. Use the
indication of the encoder feedback to measure each individual moves. Once
determined, verify the behavior on different used portions of the stage range.
Adapt it if required.
o Set the right XU+ value to the minimum value for generating a constant
positive motion. Decrease progressively the right XU+ value and command a
simple motion using right arrow. Repeat until each individual displacement
becomes, at least 4 times lower than the shifted target deadband size. Use the
indication of the encoder feedback to measure each individual moves. Once
determined, verify the behavior on different used portions of the stage range.
Adapt it if required.
4. When left and right XU values are determined, set the KO parameters with
these new XU values (KO command) and save them in the Controller’s nonvolatile
memory:
In the terminal window, or in the Diagnostic window of the Newport CONEX-SAG
Applet, enter :
PW1
KOnn,pp
PW0
Where nn = new left (negative) XU- value, pp = new right (positive) XU+ value
Example:
PW1
KO-15, 30
PW0
The KO parameters for the working range of the stage are now configured and
saved in the Controller’s nonvolatile memory.
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3.3.2.2
KP and KI parameters configuration
The KP and KI parameters set the proportional and integral gains of the PI
control loop and define the closed loop counter action reactivity during
closed loop jogging phases. Both could be adjusted to improve the motion
stability and dynamic.
Excessive dynamic may generate instability and oscillations, too weak dynamic
may affect the settling time.
Decrease KP and KI parameters from the standard factory set should help to
improve motion stability in case of modified payload or Z axis use.
Procedure 1. Install the stage in desired condition of use. 2. Connect the
controller to the Newport CONEX-SAG Applet and power on. 3. Enter the new KP
and/or KI values in the Terminal window, or in the Diagnostic
window of the Newport CONEX-SAG Applet, using KP and/or KI commands. 4. Test
changes by commanding displacement in Closed loop window. 5. Repeat changes
until correct displacements are established. 6. Once KI and KP values are
determined, verify the behavior on different used
portions of the stage range. Adapt it if required. 7. When KI and KP values
are correctly adjusted to generate stable displacements, set
the KI and KP parameters with these new values and save them in the
Controller’s nonvolatile memory:
In the command window, or in the Diagnostic window of the Newport CONEX-SAG
Applet, enter :
PW1
KInn
KPnn
PW0
Where nn = new values of KI/KP parameters
Example:
PW1
KI4000
KP150
PW0
The KI/KP parameters for stable motions of the stage are now configured and
saved in the Controller’s nonvolatile memory.
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CONEX-SAG Controller
3.3.2.3
VA parameter configuration
The VA parameter sets the velocity used by the profiler during closed loop
motion.
Excessive velocity may generate unwanted slides due to system inertia, too
weak velocity may affect the displacement time.
VA acts as a motor pulses frequency limiter.
Decrease VA parameter from the standard factory set should help to improve
motion efficiency in case of modified payload or Z axis use.
Procedure 1. Install the stage in desired condition of use. 2. Connect the
controller to the Newport CONEX-SAG Applet and power on. 3. Enter the new VA
value in the Terminal window, or in the Diagnostic window of
the Newport CONEX-SAG Applet, using VA command. 4. Test changes by commanding
motion in Closed loop window. 5. Once correct value is determined, verify the
behavior on different used portions of
the stage range. Adapt it if required. 6. When VA value is correctly adjusted
to generate stable motions, set the VA
parameter with this new value and save it in the Controller’s nonvolatile
memory:
In the command window, or in the Diagnostic window of the Newport CONEX-SAG
Applet, enter :
PW1
VAnn
PW0
Where nn = new value of VA parameter
Example:
PW1
VA5.000000
PW0
The VA parameter for stable motions of the stage is now configured and saved
in the Controller’s nonvolatile memory.
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3.3.2.4
AC parameter configuration
The AC parameter sets the acceleration used by the profiler during closed loop
motion.
Excessive acceleration may generate unwanted slides due to system inertia, too
weak acceleration may affect the displacement time.
Decrease AC parameter from the standard factory set should help to improve
motion efficiency in case of modified payload or Z axis use.
Procedure 7. Install the stage in desired condition of use. 8. Connect the
controller to the Newport CONEX-SAG Applet and power on. 9. Enter the new AC
value in the Terminal window, or in the Diagnostic window of
the Newport CONEX-SAG Applet, using AC command. 10. Test changes by commanding
motion in Closed loop window. 11. Once correct value is determined, verify the
behavior on different used portions of
the stage range. Adapt it if required. 12. When AC value is correctly adjusted
to generate stable motions, set the AC
parameter with this new value, save it in the Controller’s nonvolatile memory:
In the command window, or in the Diagnostic window of the Newport CONEX-SAG
Applet, enter :
PW1
ACnn
PW0
Where nn = new value of AC parameter
Example:
PW1
AC1
PW0
The AC parameter for stable motions of the stage is now configured and saved
in the Controller’s nonvolatile memory.
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3.3.2.5
RA parameter configuration
The RA parameter sets the velocity used by the profiler during referencing
jogging phases.
Excessive velocity may generate unwanted slides due to system inertia, too
weak velocity may affect the stage referencing moves efficiency .
Decrease RA parameter from the standard factory set should help to improve
referencing efficiency in case of modified payload or Z axis use.
Procedure 1. Install the stage in desired condition of use. 2. Connect the
controller to the Newport CONEX-SAG Applet and power on. 3. Enter the new RA
value in the Terminal window, or in the Diagnostic window of
the Newport CONEX-SAG Applet, using RA command. 4. Test changes by executing
referencing in Closed loop mode. 5. Repeat changes until correct referencing
is established. 6. Once correct values are determined, verify the behavior on
different used portions
of the stage range. Adapt it if required. 7. When RA value is correctly
adjusted to generate stable referencing, set the RA
parameter with this new value and save it in the Controller’s nonvolatile
memory:
In the command window, or the Diagnostic window of the Newport CONEXSAG
Applet, enter :
PW1
RAnn
PW0
Where nn = new value of RA parameter
Example:
PW1
RA1
PW0
The RA parameter for stable referencing of the stage is now configured and
saved in the Controller’s nonvolatile memory.
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CONEX-SAG Controller
3.3.2.6
SSK parameters configuration
The SSK parameters set the Shifting and the Scanning integral coefficients
during shifting and scanning phases, they define the sensitivity of the
control loop, both could be adjusted to improve motion stability.
Excessive sensitivity may generate instability and oscillation, too weak
sensitivity may affect settling time and accuracy.
Decrease SSK parameters from the standard factory set should help to improve
motion stability in case of modified payload or Z axis use, during shifting
and scanning phases.
Procedure 1. Install the stage in desired condition of use. 2. Connect the
controller to the Newport CONEX-SAG Applet and power on. 3. Enter the new SSK
values in the Terminal window, or in the Diagnostic window of
the Newport CONEX-SAG Applet, using SSK command. 4. Test changes by commanding
motion in Closed loop mode. 5. Repeat changes until correct displacements are
established. 6. Once correct values are determined, verify the behavior on
different used portions
of the stage range. Adapt it if required. 7. When SSK values are correctly
adjusted to generate stable motions, set the SSK
parameters with these new values and save them in the Controller’s nonvolatile
memory:
In the command window, or in the Diagnostic window of the Newport CONEXSAG
Applet, enter :
PW1
SSKnn,mm
PW0
Where nn = new value of shifting integral coefficient parameter mm = new value
of scanning integral coefficient parameter
Example:
PW1
SSK100000,50000
PW0
The SSK parameters for stable motions of the stage in shifting and scanning
phases are now configured and saved in the Controller’s nonvolatile memory.
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CONEX-SAG Controller
3.3.2.7
SST parameter configuration
The SST parameter sets the shift deadband timer used by the profiler during
scanning phases.
Excessive Shift deadband timer may affect the settling time.
Decrease SST parameter from the standard factory set should help to improve
motion efficiency in case of modified payload or Z axis use during scanning
phases.
Procedure 1. Install the stage in desired condition of use. 2. Connect the
controller to the Newport CONEX-SAG Applet and power on. 3. Enter the new SST
value in the Terminal window, or in the Diagnostic window of
the Newport CONEX-SAG Applet, using SST command. 4. Test changes by commanding
motion in Closed loop mode. 5. Repeat changes until correct displacement is
established. 6. Once correct values are determined, verify the behavior on
different used portions
of the stage range. Adapt it if required. 7. When SST value is correctly
adjusted to generate stable displacements, set the SST
parameter with this new value and save it in the Controller’s nonvolatile
memory:
In the command window, or in the Diagnostic window of the Newport CONEX-SAG
Applet, enter :
PW1
SSTnn
PW0
Where nn = new value of SST parameter
Example:
PW1
SST1
PW0
The SST parameter for stable motions of the stage is now configured and saved
in the Controller’s nonvolatile memory.
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4.0 Programming
4.1 State Diagram
For a safe and consistent operation, the Agilis Controller uses 10 different
operation states: Configuration, Ready Open Loop, Stepping, Scanning, Jogging,
Homing, Ready Closed Loop, Disable, Moving and Referencing. In each state,
only specific commands are accepted by the Agilis Controller. Therefore, it is
important to understand the state diagram below and which commands and actions
cause transition between the different states. Also see section 4.4 for
command/state information.
LED display:
SOLID SLOW BLINK
RED READY OPEN LOOP
with FAULT or ERROR CONFIG
CONFIG
FAST BLINK
–
ORANGE
READY OPEN LOOP
HOMING
STEPPING JOGGING SCANNING
GREEN
READY CLOSED LOOP
DISABLE HOLDING
MOVING REFERENCING
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Super Agilis Series
CONEX-SAG Controller
READY OPEN LOOP : If hardware faults or wrong parameters then SOLID RED.
READY OPEN LOOP : If everything is OK then SOLID ORANGE.
CONFIGURATION
: SLOW BLINK RED.
READY CLOSED LOOP : SOLID GREEN.
DISABLE
: SLOW BLINK GREEN.
HOLDING
: SLOW BLINK GREEN.
HOMING
: SLOW BLINK ORANGE.
MOVING
: FAST BLINK GREEN.
STEPPING
: FAST BLINK ORANGE.
SCANNING
: FAST BLINK ORANGE.
JOGGING
: FAST BLINK ORANGE.
When connecting the Super Agilis Controller to power, it starts in READY OPEN
LOOP state. From this state, the Controller can go to the CONFIGURATION state
with the PW1 command.
In CONFIGURATION state, the Super Agilis Controller allows changing all stage
configuration parameters like proportional gain of the closed loop (for
SAGxx-P only).
The PW0 command saves all changes to the Controller’s memory and returns the
Controller back to the READY OPEN LOOP state.
In READY OPEN LOOP state, the controller can make open loop motion. The
motions are executed with the commands (XR, JA, XS).
To execute move commands (PA, PR) in closed loop, the Controller must be in
READY CLOSED LOOP state. To get from the READY OPEN LOOP state to the READY
CLOSED LOOP state, the positioner must homed with the OR command. During
homing (OR command execution), the Controller is in HOMING state. When the
homing is successful, the Controller automatically gets to the READY CLOSED
LOOP state. The position after homing is either the position related to the
current phase angle of the encoder signal when the OR0 is used, or, if the
ORMxx is used, the current position is given by xx (xx in mm). The stage
adjusts its position, if necessary, by making a motion to match the phase of
the encoder.
The process for referencing, and which mechanical ends of runs are looked for
during referencing, can be defined with the HT command.
The referencing can either go to a mechanical limit (RFH), measure the current
position by going to a limit and returning to the original position (RFP).
This is useful if the power was removed and the current position information
was lost. The command RFMnn moves to a hard stop and goes to the position
indicated by the parameter nn.
To get from READY CLOSED LOOP state to READY OPEN LOOP state, for instance to
make some further parameter change in CONFIGURATION state, you can either
reboot the Controller with the RS command (working parameters are restore to
default) or use the OL command (working parameters are maintained).
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4.2 Command Syntax
The Super Agilis Controller is a command driven Controller. The general format
of a command is a two letter ASCII character preceded and followed by
parameters specific to the command:
Command format:
nn AA or AAA xx
nn
— Axis number (optional).
AA or AAA
— Command name.
xx
— Optional or required value or “?” to query current value.
Both, upper and lower case characters are accepted.
Most commands can be used to set a value (in that case the command name is followed by the value “xx”) or to query the current value (in that case the command name is followed by a “?”). When querying a value, the Controller responds with the command it received followed by the queried value. For example, 1KP300 sets the proportional gain of the axis #1 to 300 units. 1KP? sends the response 1KP300.
Not every command can be executed in all states of the Agilis Controller and some commands have different meaning in different states. It is therefore important to understand the State Diagram of the Controller.
Blank spaces
Blanks are allowed and ignored in any position, including inside a numerical
value. The following two commands are equivalent, but the first example might
be confusing and uses more memory:
PA1.43 6
PA1.436
Decimal separator A dot (“.”) is used as decimal separator for all numerical values.
Command terminator
Commands are executed as the command terminator CR or LF (carriage-return
line-feed, ASCII 13 and ASCII 10) is received. The Controller will analyze the
received string. If the command is valid and its parameters are in the
specified range, it will be executed. Otherwise it will memorize an error.
After the execution of the command, all remaining characters in the input
string, if any, will be ignored. In particular, it is not possible to
concatenate several commands on a single string from the PC to the Super
Agilis Controller.
Each command will handle properly the memorization of related errors that can
be accessed with the TE command. Please refer to the section Command Set for
details.
4.3 Command Execution Time
The Agilis Controller interprets commands continuously as received. The
typical execution time for a “tell position command” (TP?) is inferior to 10
ms. Here, command execution time means the time from sending the command until
receive of the answer.
It is important to note that a move command, which may last for several
seconds, will not suspend the Controller from further command execution. So,
for an efficient process flow with many move commands it is to query the
Controller status (TS command) or the current position (TP command) before any
further motion command is sent.
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4.4 Command Set
This section describes the supported two-letter ASCII commands used to
configure and operate the Agilis Controller.
CONF RDY OL RDY CL STEP. JOG SCAN MOV. REF. HOLD. DIS. OL/CL
Description
AC
BOTH
Set/Get Acceleration
DB
CL
Set/Get deadband
DD
CL
Set/Get deadband entry/exit conditions
ID
BOTH
Get stage identifier
IF
CL
Get interpolation factor
FS
BOTH
Restore/Set factory setting
HD
CL
Enter/Exit Holding state
HT
CL
Set/Get referencing config
JA
BOTH
Move jogging
KF
CL
Set/Get feedforward gain
KI
CL
Set/Get integral gain
KP
CL
Set/Get proportional gain
KS
CL
Set/Get integral saturation
KO
CL
Set/Get offset friction
MM
CL
Enter/leave DISABLE state
MS
BOTH
Get motion status
MT
BOTH
Set/Get motion timeout
OL
CL
Go to READY OL state
OR
CL
Go to READY CL state
PA
CL
Move absolute
PR
CL
Move relative
PW
BOTH
Enter /Leave CONFIG state
RA
CL Set/Get Referencing jogging velocity
RF
CL
Execute REFERENCING
RS
BOTH
Reset Controller
RT
BOTH
Read controller temperature
SA
BOTH
Set/Get axis number
SL
CL
Set/Get stage left travel range
SR
CL
Set/Get stage right travel range
SS
CL
Set/Get scanning setting
ST
BOTH
Stop motion
SU
CL
Set/Get encoder pitch
TB
BOTH
Get error string
TE
BOTH
Get last error
TH
CL
Get target position
TO
CL
Set/Get motor stall timeout
TP
BOTH
Get current position
TS
BOTH
Get Controller status
VA
BOTH
Set/Get Velocity
VE
BOTH
Get Controller version
XF
BOTH
Set/Get OL step frequency
XN
BOTH
Set/Get scanning command
XR
BOTH
Move stepping
XS
BOTH
Go to SCANNING state
XU
BOTH
Set/Get OL step amplitude
ZT
BOTH
Get all axis parameters
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Super Agilis Series
: : : Blank:
CONEX-SAG Controller
Changes configuration parameters. Those changes will be stored in the
Controller’s memory with the PW1 command and remain available after switching
off the Controller. Changes working parameters only. Those changes will get
lost when switching off the Controller. Accepted command. Not accepted command
(will return an error).
NOTE Use ZT command to get all actual parameters value.
Command read is accepted in all states.
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AC — Set/Get Acceleration
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description
Returns Errors
Rel. Commands
Example
ACnn
or AC?
nn [float] — Acceleration.
nn
— 1.5 and 1500
nn
— mm/s²
nn Missing: Error.
Out of range: Error.
The AC command set the acceleration used by the profiler during closed loop motion.
This command is not available for firmware version inferior to v0.17.0.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Execution not allowed.
VA
— Set/Get Velocity.
PA
— Move absolute.
PR
— Move relative.
AC500
| set acceleration to 500mm/s²
AC?
| Get acceleration.
| Controller returns : AC500
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DB — Set deadband
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description
Returns Errors
Rel. Commands
Example
DBnn,pp
or DB?
nn [float] — Negative deadband.
pp [float] — Positive deadband.
nn
— -0.05 and <0
pp
— >0 and +0.05
nn
— Preset unit.
pp
— Preset unit.
nn Missing: Error.
pp Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets deadband of the PI control loop which can be saved in the controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for deadband. This value is not saved in the controller’s memory and will be lost after reboot.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
DD
— Set deadband entry/exit conditions.
KI
— Set integral gain.
KP
— Set proportional gain.
DB-0.000015, 0.00001 |
Set negative deadband to 15e-6 units.
|
Set positive deadband to 10e-6 units.
DB?
|
Get deadband.
Controller returns “DB-1.5e-5, 1e-5”
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DD — Set deadband entry/exit conditions
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
DDSnn,pp DDTqq DDXrr
or DDS? or DDT? or DDX?
nn [int] — Deadband exit negative coefficient.
pp [int] — Deadband exit positive coefficient.
qq [int] — Deadband entry timer.
rr [int] — Deadband exit timer.
nn-rr — >0 and 100
nn-rr — Preset unit.
nn-rr Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets deadband entry/exit conditions which can be saved in the controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
The entry timer value defines how many successive positions have to be detected in the deadband before validating the end of motion.
The exit coefficients define how much the position error has to be superior to deadband to trig a motion.
The exit timer value defines how many successive positions have to be detected outside the deadband to trig a motion (available from firmware version v0.17.0).
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for deadband entry/exit conditions. This value is not saved in the controller’s memory and will be lost after reboot.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
DB
— Set deadband.
KI
— Set integral gain.
KP
— Set proportional gain.
DDT4 | position has to be in deadband during 4 corrector period to validate motion.
DDS-3, 4 | position error superior to 4×deadband+ generates a move.
| position error inferior to 3×deadband- generates a move.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
ID –Get stage identifier
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Defaults
Description Returns Errors
Rel. Commands Example
ID?
nn [string] — Stage identifier.
nn
— 1 to 31 ASCII characters.
nn Missing: Error.
Out of range: Error.
The ID? command return the stage identifier. This is the Newport product name.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
ZT
— Get memory configuration.
ID?
| Get stage identifier.
| Controller returns “Super Agilis V1.0.0”
EDH0415En1040 11/23
32
Super Agilis Series
CONEX-SAG Controller
IF — Get interpolation factor
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Description
Errors
Rel. Commands Example
IF?
The IF? command return the interpolation factor.
The encoder position resolution is : 0.25 × SU ÷ IF
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
ZT
— Get memory configuration.
SU
— Set/Get encoder pitch.
IF?
| Get interpolation factor.
| Controller returns 7987
SU?
| Get encoder pitch.
| Controller returns 0.0798742
| encoder resolution = 0.25 × 0.0798742 ÷ 7987 = 2.5nm
33
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
FS — Factory settings modification/restoration
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax
Parameters Description
Range Units Defaults
FSMnn, or FSM? FSR
nn [string] —
nn
—
nn
—
nn Missing:
Out of range:
Password for factory settings modification. Unique password. None. Error. Error.
Description
Returns Errors
Rel. Commands Example
FSM: This command sends the password to allow factory settings modifications. If the password is correct, all parameters modification in CONFIGURATION state changes the factory settings of the Controller. The factory settings modifications rights are lost after leaving the CONFIGURATION state.
FSR: This command restores all parameters to factory settings.
If the sign ? takes place of nn, this command returns 1 if the Controller have the factory settings modifications rights, else it returns 0.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
PW
— Enter/Leave CONFIGURATION state.
FSR | Restore all parameters to factory settings.
EDH0415En1040 11/23
34
Super Agilis Series
CONEX-SAG Controller
HD — Enter/Exit Holding state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
HD, or HDnn
nn [int] — Exit mode.
nn
— 1 exit holding state and return to previous target position.
2 exit holding state with target set to current position (no motion).
nn
— None.
nn Missing: Error.
Out of range: Error.
In ready closed loop state, the HD command can be used to enter to HOLDING state.
In HOLDING state the piezo voltage is fixed at the current scanning command and the control loop is opened.
The XN Command can be used to query the piezo command and adjust it for manual position adjustment.
The HOLDING state can be exited with HD1 or HD2 commands.
HD1 will return to ready closed loop and set the setpoint position to its value before entering the state. This can produce motion in case of position derivation during the HOLDING state.
HD2 will return to ready closed loop and set the setpoint position to the current position without any motion. But the control loop is now closed and perturbations can now produce a motion.
This command is not available for firmware version inferior to v1.1.4
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
XN
— Set scanning command.
HD
| Enter Holding state.
XN?
| Get scanning command.
| Controller returns 22.3
XN22.4
| Set scanning command to 22.4%
HD2
| return to ready closed loop and keep current position as target.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
HT — Set/Get referencing configuration
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range
Units Defaults
Description Returns Errors
Rel. Commands Example
HTnn, or HT?
nn [int] — Home type value.
nn
— 3 use positive mechanical end of run.
4 use negative mechanical end of run.
nn
— None.
nn Missing: Error.
Out of range: Error.
This command sets the HOME type that will be used when RF command will be executed.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
RF
— Execute referencing.
HT3 | Use OR- switch for HOME.
EDH0415En1040 11/23
36
Super Agilis Series
CONEX-SAG Controller
JA — Move jogging
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
JAnn, or JA?
nn [int] — Jogging mode.
nn
— -4 and 4.
nn
— Mode.
nn Missing: Error.
Out of range: Error.
The JA command initiates a motion in Jogging mode.
-4 — Negative direction, 10 000 steps/s at max. step amplitude.
-3 — Negative direction, 5 000 steps/s at max. step amplitude.
-2 — Negative direction, 1 000 step/s at max. step amplitude.
-1 — Negative direction, 50 steps/s at defined step amplitude.
0 — No move, stay in JOGGING state (use ST command to go to READY OL state).
1 — Positive direction, 50 steps/s at defined step amplitude.
2 — Positive direction, 1 000 steps/s at max. step amplitude.
3 — Positive direction, 5 000 steps/s at max. step amplitude.
4 — Positive direction, 10 000 steps/s at max. step amplitude.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
ST
— Stop the current motion.
JA4 | Set jogging mode to 4.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
KF — Set feed-forward gain
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
KFnn1,nn2,nn3,nn4
or KF?
nn1 [float] — Feedforward gain value for -12mm/s velocity.
nn2 [float] — Feedforward gain value for -6mm/s velocity.
nn3 [float] — Feedforward gain value for +6mm/s velocity.
nn4 [float] — Feedforward gain value for +12mm/s velocity.
nn
— 0 and <10.
nn
— None.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the integral gain of the feedforward control loop which can be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for the feedforward gain. This value is not saved in the Controller’s memory and will be lost after reboot.
This command is not available for firmware version inferior to v0.17.0
The Feedforward KF gain is variable and can be set with 4 points (-12, -6, 6 and 12 mm/s)
· KF is constant at nn1 for setpoint velocity from -15 to -12mm/s
· KF is interpolated between nn1 and nn2 for setpoint velocity from -12 to -6mm/s
· KF is constant at nn2 for setpoint velocity from -6 to 0mm/s
· KF is constant at nn3 for setpoint velocity from 0 to 6mm/s
· KF is interpolated between nn3 and nn4 for setpoint velocity from 6 to 12mm/s
· KF is constant at nn4 for setpoint velocity from 12 to 15mm/s
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
DB
— Set/Get deadband.
KP
— Set/Get proportional gain.
Example
KF1,1,1,1
|
Set feedforward gain to 1 (constant).
KF 0.7,1.4,1.0,0.7
|
Set feedforward gain to be
attenuated at 0.7 at high velocity
boosted at 1.4 at low negative velocity.
EDH0415En1040 11/23
38
Super Agilis Series
CONEX-SAG Controller
KI — Set integral gain
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
KInn, or KI?
nn [float] — Integral gain value.
nn
— 0 and <1012.
nn
— None.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the integral gain of the PI control loop which can be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for the integral gain. This value is not saved in the Controller’s memory and will be lost after reboot.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
DB
— Set/Get deadband.
KP
— Set/Get proportional gain.
KI7800 | Set integral gain to 7800.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
KP — Set proportional gain
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
KPnn, or KP?
nn [float] — Proportional gain value.
nn
— 0 and <1012.
nn
— None.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the proportional gain of the PI control loop which can then be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for the proportional gain. This value is not saved in the Controller’s memory and will be lost after reboot.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
DB
— Set/Get deadband.
KI
— Set/Get integral gain.
KP356 | Set proportional gain to 356.
EDH0415En1040 11/23
40
Super Agilis Series
CONEX-SAG Controller
KS — Set integral saturation
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
KSnn, or KS?
nn [float] — Integral saturation value.
nn
— 0 and <14.7.
nn
— mm/s.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the integral saturation of the PI control loop which can then be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for the saturation value. This value is not saved in the Controller’s memory and will be lost after reboot.
This command is not available for firmware version inferior to v0.17.0
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
DB
— Set/Get deadband.
KI
— Set/Get integral gain.
KS1.5 | Set integral saturation to 1.5mm/s
41
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
KO — Set/Get offset friction
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
KOnn,pp
or KO?
nn [int] — Offset negative friction.
pp [int] — Offset positive friction.
nn
— >-100 and <0
pp
— >0 and <100
nn
— %
pp
— %
nn Missing: Error.
pp Missing: Error.
Out of range: Error.
The Agilis controller produces pulses on the piezo, to generate motion, which scale from 0V to maximum pulse voltage as defined in the specification table. The KO command is used to configure the offset of the pulse generated in closed loop motion: i.e.: the minimum voltage of the pulse to be generated.
In CONFIGURATION state, this command sets the offset of the output pulse which can then be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for the offset. This value is not saved in the Controller’s memory and will be lost after reboot.
If the sign ? takes place of nn, this command returns the current programmed value in the form KO negative value, positive value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
KI
— Set integral gain.
KP
— Set proportional gain.
KO-5,10 | Set the positive offset friction to 10% of full scale pulse.
| Set the negative offset friction to 5% of full scale pulse.
KO? | Get offset friction.
Controller returns “KO-5, 10”.
EDH0415En1040 11/23
42
Super Agilis Series
CONEX-SAG Controller
MM — Enter/Leave DISABLE state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
MMnn, or MM?
nn [int] — Direction.
nn
— 0 change from READY CLOSED LOOP to DISABLE state.
1 change from DISABLE to READY CLOSED LOOP state.
nn
— None.
nn Missing: Error.
Out of range: Error.
MM0 changes the Controller’s state from READY to DISABLE. In DISABLE state the control loop is open. The encoder, though, is still read and the current position gets updated.
MM1 changes the Controller’s state from DISABLE to READY CLOSED LOOP. The Controller’s set point position is set equal to its current position and the control loop gets closed. The residual following error gets cleared from the buffer.
If the sign ? takes place of nn, this command returns the current state.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
PW
— Enter/leave CONFIGURATION state.
MM0 | Controllers goes to DISABLE state.
43
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
MS — Get motion status
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Description
Errors Rel. Commands
Example
MS?
The MS? command returns 1 if the stage is moving, else it returns 0.
— Unknown message code.
— Execution not allowed.
JA
— Move jogging.
PA
— Move absolute.
PR
— Move relative.
XR
— Move stepping.
JA4
| start jogging.
MS?
| Get motion status.
| Controller returns : MS1
JA0
| Stop jogging.
MS?
| Get motion status.
| Controller returns : MS0
EDH0415En1040 11/23
44
Super Agilis Series
CONEX-SAG Controller
MT — Set/Get motion timeout
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
Example
MTnn
or MT?
nn [float] — Timeout value.
nn
— >0 and <200
nn
— Seconds.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the motion timeout which can then be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OPEN LOOP states, this command allows setting a new working parameter for the motion timeout. This value is not saved in the Controller’s memory and will be lost after reboot.
Motion timeout is applied in MOVING and JOGGING states.
In JOGGING state the motion timeout is:
· 1 × MT for JA4/JA-4
· 3 × MT for JA3/JA-3
· 10 × MT for JA2/JA-2
· 500 × MT for JA1/JA-1
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
JA
— Move jogging.
PA
— Move absolute.
PR
— Move relative.
XR
— Move stepping
MT10 | Set the motion timeout to 10 seconds.
45
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
OL — Go to READY OPEN LOOP state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors
Rel. Commands Example
OL.
None.
This command changes the current state from READY CLOSED LOOP to the state READY OPEN LOOP.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
OR
— Execute HOME search sequence.
OL | Go to READY OL state.
EDH0415En1040 11/23
46
Super Agilis Series
CONEX-SAG Controller
OR — Go to READY CLOSED LOOP state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Description
Range Units Defaults Description
Errors
Rel. Commands Example
OR
ORMnn
nn [float] — Preset position.
nn
— SL to SR.
nn
— Units.
nn Missing: Error.
Out of range: Error.
This command goes from READY OPEN LOOP to READY CLOSED LOOP.
The OR command closes the control loop without modification of current position.
The ORM command sets the position specified by nn. If the requested position do not match the current phase of the stage, a motion is initiated so that the current phase of the encoder matches the requested position.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
OL
— Go to READY OL state.
OR | Go to READY CLOSED LOOP state.
47
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
PA — Move absolute
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
Example
PAnn, or PA?
nn [float] — New target position.
nn
— SL to SR.
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
The PA command initiates an absolute move. When received, the positioner will move to the new target position specified by nn.
The PA command is only accepted in READY CLOSED LOOP or MOVING states.
To avoid any mismatch, the Controller always rounds the new target position to the closest encoder position.
If the sign ? takes place of nn, this command returns the target position value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Target position out of limits.
— Execution not allowed in XXXX state.
PR
— Move relative.
TH
— Tell set point position.
TP
— Tell current position.
PA2.2 | Move to 2.2 units absolute position.
EDH0415En1040 11/23
48
Super Agilis Series
CONEX-SAG Controller
PR — Move relative
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
Example
PRnn, or PR?
nn [float] — Displacement.
nn
— SL to SR
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
The PR command initiates a relative move. When received, the positioner will move to a new target position nn units away from the current target position.
The PR command is only accepted in READY CLOSED LOOP or MOVING states.
To avoid any mismatch, the Controller always rounds the new target position to the closest encoder position.
If the sign ? takes place of nn, this command returns the target position value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Target position out of limits.
— Execution not allowed in XXXX state.
PA
— Move absolute.
TH
— Tell set point position.
TP
— Tell current position.
PR2.2 | Move 2.2 units from target position.
49
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
PW — Enter/Leave configuration state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
PWnn, or PW?
nn [int] — Configuration mode.
nn
— 1 change from READY OPEN LOOP to CONFIGURATION.
0 change from CONFIGURATION to READY OPEN LOOP.
nn
— None.
nn Missing: Error.
Out of range: Error.
PW1 changes the Controller’s state from READY OPEN LOOP to CONFIGURATION. In Configuration state all parameter settings are saved in the Controller’s memory and remain available after switching off the Controller. In addition, some settings are only possible in CONFIGURATION state (e.g. set controller address, etc.).
PW0 checks all stage parameters, and if they are acceptable, saves them in the flash memory of the Controller. After that, it changes the Controller’s state from CONFIGURATION to READY OPEN LOOP.
The execution of a PW0 command may take up to 10 seconds. During that time the Controller will not respond to any other command.
If the sign ? takes place of nn, this command returns the current state.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
MM
— Enter/Leave Disable state.
PW1 | Enters CONFIGURATION state.
EDH0415En1040 11/23
50
Super Agilis Series
CONEX-SAG Controller
RA — Referencing jogging velocity
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
RAnn, or RA?
nn [int] — Referencing Jogging mode.
nn
— 1 and 4.
nn
— Mode.
nn Missing: Error.
Out of range: Error.
The RA command change the jogging step configuration used during referencing mode.
1 –50 steps/s at defined step amplitude (SU).
2 –1 000 steps/s at max. step amplitude.
3 –5 000 steps/s at max. step amplitude.
4 –10 000 steps/s at max. step amplitude.
This command is not available for firmware version inferior to v1.1.4
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
RF
— Execute the referencing sequence.
RA2 | Set referencing jogging mode to 2.
51
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
RF — Execute the referencing sequence
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax
Parameters Description
Range Units Defaults Description
Errors
Example
RFH RFP RFMnn RFS?
nn [float] — Reference position.
nn
— SL to SR.
nn
— Preset Unit.
nn Missing: Error.
Out of range: Error.
The RF command executes the referencing sequence:
RFH: Move to mechanical end of run defined by HT, and take this position as reference.
After the sequence current position equals SR or SL according to HT value.
RFP: Move to mechanical end of run defined by HT, take this position as reference, and move back to previous position.
After the physical position is the same than before the sequence, but the current position is referenced to SR or SL according to HT value.
RFM: Move to mechanical end of run defined by HT, take this position as reference, and move to position indicated by the parameter nn.
RFS?: Returns 1 if the stage is referenced and 0 otherwise.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
RFS? | Controller returns 0
RFH | Move to the reference position to the mechanical limit defined by HT.
RFS? | Controller returns 1
EDH0415En1040 11/23
52
Super Agilis Series
CONEX-SAG Controller
RS — Reset controller
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors
Example
RS. None. The RS command issues a hardware reset of the Controller, equivalent
to a power-up.
— Unknown message code. — Execution not allowed. RS | Reset Controller.
53
EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
RT — Tell temperature
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors
Example
RT None. The RT command returns the current temperature of the processor in
°C.
— Unknown message code. — Execution not allowed. RT | Tell temperature RT50 |
Controller returns 50 °C.
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Super Agilis Series
CONEX-SAG Controller
SA — Set/Get axis number
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
SAnn, or SA?
nn [int] — Axis number.
nn
— 1 to 31
nn
— None.
nn Missing: Error.
Out of range: Error.
Obsolete command kept for backward compatibility.
For firmware versions inferior to v1.0.0, The controller responds only to commands sent with this address.
For firmware version starting from v1.0.0, this command have no effect, the controller responds to all addresses. SA can still be used to store axis number information even if it has no effect in firmware.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
RF
— Execute the referencing sequence.
Example (v0.x.x) Example (v1.x.x)
SA2 | 1TP? | 2TP? |
SA2 | 1TP? | 2TP? |
Set the axis number to 2 Controller doesn’t respond Controller responds with
position
Set the axis number to 2 Controller responds with position Controller responds
with position
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
SL — Set/Get stage left travel range
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description Returns Errors
Rel. Commands
Example
SLnn, or SL?
nn [float] — Stage left travel range.
nn
— 0 and >-1012
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the stage left travel range which can then be saved in the Controller’s nonvolatile memory using the PW command.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
RF
— Execute the referencing sequence.
SR
— Set/get stage right travel range
SL-16 | Set stage left travel range to -16 units.
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Super Agilis Series
CONEX-SAG Controller
SR — Set/Get stage right travel range
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description Returns Errors
Rel. Commands
Example
SRnn, or SR?
nn [float] — Stage right travel range.
nn
— 0 and <1012
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the stage right travel range which can then be saved in the Controller’s nonvolatile memory using the PW command.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
RF
— Execute the referencing sequence.
SL
— Set/get stage left travel range
SR16 | Set stage left travel range to 16 units.
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Super Agilis Series
CONEX-SAG Controller
SS — Set/Get scanning settings
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax
Parameters Description
Range
Units Defaults Description
SSDnn1 SSInn2 SSKnn3,mm3 SSPnn4 SSNnn5 SSTnn6
or SSD? or SSI? or SSK? or SSP? or SSN? or SST?
nn1 [float] — Scanning shift distance.
nn2 [float] — Scanning integral initialization gain.
nn3 [float] — Shifting integral coefficient.
mm3 [float]– Scanning integral coefficient.
nn4 [float] — Scanning shift positive deadband.
nn5 [float] — Scanning shift negative deadband.
nn6 [int] — Scanning shift deadband timer.
nn1
— 0 and -0.0005
nn2
— 0 and 2
nn3,mm3 — 0 and <50000
nn4,nn5 — <0 and >-0.0005
nn6
— >0 and <100
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
In closed-loop, motions are separated in 3 phases:
JOGGING:
The stage move to the target position shifted by SSD distance.
Once the position is detected SST times in the shift deadband defined by SSP/SSN, the controller switch to SHIFTING phase.
SHIFTING:
In this phase the stage moves slowly to the target position by increasing the piezo voltage with SSK integral servo coefficient (1st parameter). The integral is initialized to a value that is multiplied by SSI.
Once the position is detected DDT times in the deadband defined by DB, the controller switch to SCANNING phase, and the motion is ended (go back to ready CL state). The servo integral coefficient is also switched to 2nd SSK parameter.
SCANNING:
In this phase the piezo voltage is continuously controlled with the servo integral coefficient (SSK 2nd parameter).
If the position is detected outside the exit deadband (see DDS) the controller go back to JOGGING state with shifted target.
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Super Agilis Series
CONEX-SAG Controller
For firmware version inferior to v0.17.0, SSK have only one parameter and the same integral coefficient is used for SHIFTING and SCANNING.
Returns If the sign ? takes place of nn, this command returns the current programmed value.
Errors
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
Rel. Commands DB
— Set/Get deadband.
DD
— Set/Get deadband entry/exit conditions.
Example SSD-0.0002 | Set shift distance to -0.0002 preset units.
SSP0.00015 | Set positive shift deadband to 0.00015 preset units.
SSN-0.0002 | Set negative shift deadband to -0.0002 preset units.
SSK3000 | Set scanning KI to 3000.
SSI0.9 | Set scanning integral initialization gain to 0.9.
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Super Agilis Series
CONEX-SAG Controller
ST — Stop motion
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors
Example
ST. None. The ST command is a safety feature. It stops a move in progress by
decelerating the positioner immediately with the acceleration defined by the
AC command until it stops.
— Unknown message code. — Execution not allowed. — Execution not allowed in
XXXX state. ST | Stop motion.
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Super Agilis Series
CONEX-SAG Controller
SU — Set/Get encoder pitch
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description
Returns Errors
Rel. Commands Example
SUnn or SU?
nn [float] — Encoder scale pitch.
nn
— 0 and <1012
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the encoder pitch which can then be saved in the Controller’s nonvolatile memory using the PW command.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
IF
— Get the interpolation factor.
SU0.079 | Set encoder scale pitch to 0.079 units.
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Super Agilis Series
CONEX-SAG Controller
TB — Tell error string
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax TBnn.
Parameters
Description nn [int] — Error code.
Range nn
— 0 to ERROR CODE.
Units nn
— None.
Defaults nn Missing: Error.
Out of range: Error.
Description The TB command returns a string that explains the meaning of the error code nn (see TE command for complete list).
Errors
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
Rel. Commands TE
— Tell error code.
Example
TB@ | Tell explanation of error code @.
TB@ No error | Controller returns No error.
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Super Agilis Series
CONEX-SAG Controller
TE — Tell last error
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors Example
TE. None. The TE command returns the currently memorized error. When a command
is not executable, it memorizes an error. This error can be read with the TE
command. After the execution of a TE command, the error buffer gets erased and
another TE command will return @, means no error. When a new command error is
generated before the previous command error is read, the new command error
will overwrite the current memorized error. For a safe program flow it is
recommended to always query the command error after each command execution.
— Unknown message code. — Execution not allowed. TE | Tell last error code.
TE@ | Controller returns @. List of errors codes :. A : Unknown Message Code.
B : Axis Number not correct. C : Parameter out of Limits. D : Function
Execution not Allowed. E : Voltage ERROR. F : Function Execution not Allowed
in SCANNING mode. G : Function Execution not Allowed in JOGGING mode. H :
Function Execution not Allowed in READY OPEN LOOP mode. I : Function Execution
not Allowed in CONFIGURATION mode. J : Function Execution not Allowed in
DISABLE mode. K : Function Execution not Allowed in READY CLOSED LOOP mode. L
: Function Execution not Allowed in HOMING/REFERENCING mode. M : Function
Execution not Allowed in MOVING mode. N : Function Execution not Allowed in
STEPPING mode. O : Function Execution not Allowed in NO ENCODER mode. P :
Function Execution not Allowed in ENCODER mode. S : Communication ERROR. U :
Error during EEPROM access.
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Super Agilis Series
CONEX-SAG Controller
TH — Tell target position
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors
Rel. Commands Example
TH.
None.
The TH command returns the value of the target position.
— Unknown message code.
— Execution not allowed.
TP
— Tell current position.
TH | Tell target position.
TH0 | Controller returns 0.
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Super Agilis Series
CONEX-SAG Controller
TO — Set/Get motor stall timeout
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands Example
TOTnn1 TODnn2 TORnn3
or TOT? or TOD? or TOR? (not available for firmware version inferior to v1.1.4)
nn1 [float]
—
Timeout value.
nn2 [float]
—
Min velocity value for MOVING/JOGGING.
nn3 [float]
—
Min velocity value for REFERENCING.
nn1
—
0 and <200
nn2
—
0.001 to 0.015
nn3
—
0.001 to 0.015
nn1
—
Seconds.
nn2
—
Preset units / seconds.
nn3
—
Preset units / seconds.
nn Missing: Error.
Out of range: Error.
In CONFIGURATION state, this command sets the motor stall timeout which can then be saved in the Controller’s nonvolatile memory using the PW command. It is also the default value that will be used unless a different value is set in DISABLE or READY OPEN LOOP states.
In DISABLE or READY OL states, this command allows setting a new working parameter for the motor stall timeout. This value is not saved in the Controller’s memory and will be lost after reboot.
For motion during MOVING and JOGGING states (except for JA1/-1), motor stall timeout stops the motion when velocity is under TOD during TOT seconds.
The purpose of this timeout is to stop automatically the motion when end of run is reached.
For referencing, end of run is detected when velocity is under TOR during TOT seconds.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
JA
— Move jogging.
PA
— Move absolute.
PR
— Move relative.
XR
— Move stepping.
MT1 | Set the motion timeout to 1 seconds.
TOD0.005 | Set the velocity threshold to 5µm/s.
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Super Agilis Series
CONEX-SAG Controller
TP — Tell current position
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors Rel. Commands
Example
TP.
None.
The TP command returns the value of the current position. This is the position where the positioner is actually according to his encoder value. In MOVING state, this value always changes. In READY CLOSED LOOP state, this value should be equal or very close to the set-point and target position.
Together with the TS command, the TP command helps evaluating whether a motion is completed.
If the stage doesn’t have an encoder, TP return a step counter instead of the position.
— Unknown message code.
— Execution not allowed.
TH
— Tell set point position.
TP | Tell current position.
TP0 | Controller returns 0.
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Super Agilis Series
CONEX-SAG Controller
TS Get positioner error and controller state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Returns
TS. None. The TS command returns the error bits and the current Controller state. The TS command returns 8 characters (1TSabcdef). The first 4 characters (abcd) represent the error bits in Hexadecimal. The last two characters (ef) represent the Controller state in Hexadecimal.
0001 0002 0004 0008 0010 0020 0040 0080 0100 0200 0400 0800
Error bits Not used Not used Not used Not used Bit motor stall timeout Bit time out motion Bit time out homing Bit bad memory parameters Bit supply voltage too low Bit internal error Bit memory problem Bit over temperature
Controller state 0A READY OPEN LOOP: after reset 0B READY OPEN LOOP: after HOMING state 0C READY OPEN LOOP: after STEPPING state 0D READY OPEN LOOP: after CONFIGURATION state 0E READY OPEN LOOP: after with no parameters 0F READY OPEN LOOP: after JOGGING state 10 READY OPEN LOOP: after SCANNING state 11 READY OPEN LOOP: after READY CLOSED LOOP state 14 CONFIGURATION 1E HOMING 1F REFERENCING 28 MOVING OPEN LOOP (OL) 29 MOVING CLOSED LOOP (CL) 32 READY CLOSED LOOP: after HOMING state 33 READY CLOSED LOOP: after MOVING CL state 34 READY CLOSED LOOP: after DISABLE state 35 READY CLOSED LOOP: after REFERENCING state 36 READY CLOSED LOOP: after HOLDING state 3C DISABLE: after READY CLOSED LOOP state 3D DISABLE: after MOVING CL state 46 JOGGING 50 SCANNING 5A HOLDING
Errors Rel. Commands
Example
—
TE
—
TS |
TS000033 |
Unknown message code. Tell last error. Tell current status & errors.
Controller returns :
READY CLOSED LOOP: after MOVING CL state.
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Super Agilis Series
CONEX-SAG Controller
VA — Set/Get Velocity
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description
Returns Errors
Rel. Commands
Example
VAnn
or VA?
nn [float] — Velocity.
nn
— 0.6 and 15
nn
— mm/s
nn Missing: Error.
Out of range: Error.
The VA command set the velocity used by the profiler during closed loop motion.
This command is not available for firmware version inferior to v0.17.0.
If the sign ? takes place of nn, this command returns the current programmed value.
— Unknown message code.
— Execution not allowed.
AC
— Set/Get Acceleration.
PA
— Move absolute.
PR
— Move relative.
VA5
| Set velocity to 5mm/s.
VA?
| Get velocity.
| Controller returns : VA5.
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Super Agilis Series
CONEX-SAG Controller
VE — Tell controller revision information
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors Rel. Commands
Example
VE or VE?.
None.
This command returns the Controller’s revision information.
–Unknown message code.
TP
— Tell current position.
VE | Get Controller revision information.
| Controller returns VE Super Agilis Controller version 1.0.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
XF — Set/Get stepping frequency
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description Returns Errors
Rel. Commands
Example
XFnn, or XF?
nn [float] — Stepping frequency.
nn
— 1 and 10 000.
nn
— Hertz (Hz).
nn Missing: Error.
Out of range: Error.
The XF command is used to read or modify the stepping frequency.
If the sign ? takes place of nn, this command returns the current frequency value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
XR
— Move stepping.
XU
— Set/Get Open Loop step size.
TP
— Tell current position.
XF3000 | Set the stepping frequency to 3000 Hz.
XU-60,50 | Set the stepping negative amplitude to 60%.
| Set the stepping positive amplitude to 50%.
XR1000 | Generate 1000 positive pulses.
XR-1000 | Generate 1000 negative pulses.
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Super Agilis Series
CONEX-SAG Controller
XN — Set/Get scanning command
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults
Description
Returns Errors
Rel. Commands
Example
XNnn or XN?
nn [float] — Scanning command.
nn [float] — 0 to 96.
nn
— Percent (%).
nn Missing: Error.
Out of range: Error.
The XN command set the piezo voltage command in the SCANNING/HOLDING state.
The XN parameter is a percentage of the maximum voltage (48V).
If the sign ? takes place of nn, this command returns the target position value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
XS
— Go to scanning state.
HD
— Go to holding state.
ST
— Stop motion.
XS | Go to SCANNING state.
XN20 | Set scanning command to 20%.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
XR — Move stepping
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
Example
XRnn
nn [int] — Step count.
nn [int] — Int32.
nn
— Preset units.
nn Missing: Error.
Out of range: Error.
The XR command initiates a stepping motion. When received, the positioner will generate a number of pulses specified by nn.
The XR command gets only accepted in READY OPEN LOOP state.
If the sign ? takes place of nn, this command returns the target position value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
XF
— Set/Get stepping frequency.
XU
— Set/Get Open Loop step size.
TP
— Tell current position.
XF3000 | Set the stepping frequency to 3000 Hz.
XU-60,50 | Set the stepping negative amplitude to 60%.
| Set the stepping positive amplitude to 50%.
XR1000 | Generate 1000 positive pulses.
XR-1000 | Generate 1000 negative pulses.
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Super Agilis Series
CONEX-SAG Controller
XS — Go to SCANNING state
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Returns Errors
Rel. Commands Example
XS
None.
The XS command changes the Controller’s state from READY OPEN LOOP to SCANNING. The scanning command can then be changed with XN command to drive directly the piezo voltage at a constant value between 0V and 48V, allowing fine positioning in the piezo travel range (approx.. 1.5µm).
The XS command is only accepted in READY OPEN LOOP state.
If the sign ? takes place of nn, this command returns the target position value.
— Unknown message code.
— Execution not allowed.
— Execution not allowed in XXXX state.
XN
— Set/Get scanning command.
ST
— Stop motion.
XS | Enter scanning mode.
XN15 | Set the scanning command to 15%.
XN85 | Set the scanning command to 85%.
ST | Leave scanning mode.
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Super Agilis Series
CONEX-SAG Controller
XU — Set/Get Open Loop step size
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Range Units Defaults Description
Returns Errors
Rel. Commands
Example
XUnn,pp or XU?
nn [int] — Negative Step size.
pp [int] — Positive Step size.
nn
— >-100 and <0 for negative pulses.
pp
— >0 and <100 for positive pulses.
nn
— %
nn Missing: Error.
Out of range: Error.
The XU command enables to change the current open loop step size.
The variable step size is available only for XF frequencies up to 1 kHz. For higher frequencies the step size is always 100%.
Warning: if the step size is too small, the stage may not move or move in the wrong direction.
If the sign ? takes place of nn, this command returns the target position value.
— Unknown message code.
— Parameter missing or out of range.
— Execution not allowed.
— Execution not allowed in XXXX state.
XR
— Move stepping.
XF
— Set/Get stepping frequency.
TP
— Tell current position.
XF3000 | Set the stepping frequency to 3000 Hz.
XU-60,50 | Set the stepping negative amplitude to 60%.
| Set the stepping positive amplitude to 50%.
XR1000 | Generate 1000 positive pulses.
XR-1000 | Generate 1000 negative pulses.
XU? | Get open loop step size.
Controller returns “XU-60, 50”
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Super Agilis Series
CONEX-SAG Controller
ZT — List all configuration parameters
Usage Compatibility
Config
Ready OL
Ready CL
Holding
Open-Loop
Closed-Loop
Stepping Jogging Referencing Moving
Scanning Disable
Syntax Parameters Description
Errors
Rel. Commands Example
ZT.
None.
The ZT command returns the list of all current configuration parameters.
— Unknown message code.
— Execution not allowed in XXXX state.
TE
— Tell error code.
ZT |
Tell configuration parameters. PW1 … SR32 … … PW0.
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
5.0 Connector Pinout
5.1 Power Connectors (Female Ø 2.1 x Ø 5.5 x 11 mm)
Pin # Center Outer
Description +24 VDC GND
5.2 USB Connector (USB Mini-B Receptacle)
Pin
Description
1
N.C.
2
USBDM
3
USBDP
4
N.C.
5
Ground
22
Ground
23
N.C.
24
N.C.
25
N.C.
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Super Agilis Series
CONEX-SAG Controller
6.0 Troubleshooting
Here is a list of possible errors and the recommended corresponding actions to be taken prior to contact Newport.
“TS” Error
Description
Actions
00001
00002 00004 00008
Not implemented in SAG series stages
00010 The stage has reached a hard limit
00020
The requested motion didn’t end after MT seconds
00040 00080
00100
00200 00400 00800
Bit time out homing Bit bad memory parameters Power supply voltage lower than 24V or defective power supply Bit internal error Bit memory problem Bit over temperature
· Check that the stage is referenced
· Check software limits (SR/SL) · Increase MO · Restore Factory settings ·
Increase MT · Increase deadband for quicker
stabilization (but lower accuracy) · Restore Factory settings · Restore
Factory settings · Restore Factory settings
· Check power supply
· Add time between moves
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EDH0415En1040 11/23
Super Agilis Series
CONEX-SAG Controller
7.0 Maintenance and Service
7.1 Enclosure Cleaning
The Super Agilis Controller/Driver should only be cleaned with a lightly
damped cloth or sponge with a soapy water solution. Do not use an acetone or
alcohol solution, this will damage the finish of the enclosure.
7.2 Obtaining Service
The Super Agilis Controller/Driver contains no user serviceable parts. To
obtain information regarding factory service, contact Newport Corporation or
your Newport representative. Please have the following information available:
· Instrument model number. · Description of the problem. If the instrument is
to be returned to Newport Corporation, you will be given a Return Number,
which you should reference in your shipping documents. Complete a copy of the
Service Form as represented on the next page and include it with your
shipment.
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Super Agilis Series
Service Form
CONEX-SAG Controller
Your Local Representative Tel.: __ Fax:___
Name: __ Company: Address: ____ Country: ____ P.O. Number: ____ Item(s) Being Returned:____ Model#:
Return authorization #: ____
(Please obtain prior to return of item)
Date: __ Phone Number:
__ Fax Number:
Serial #: ____
Description:
Reasons of return of goods (please list any specific problems):
79
EDH0415En1040 11/23
Visit MKS I Newport Online at: www.newport.com
North America & Asia Newport Corporation 1791 Deere Ave. Irvine, CA 92606, USA
Sales Tel.: +1 (949)-863-3144 e-mail: sales@newport.com Technical Support
Tel.: +1 (949)-863-3144 e-mail: tech@newport.com
Service, RMAs & Returns Tel.: +1 (949)-863-3144 e-mail: service@newport.com
Europe MICRO-CONTROLE Spectra-Physics S.A.S 7 rue des Plantes 45340 Beaune-la-
Rolande France
Sales Europe (EMEAI) Tel.: +49 (0) 6151-708-0 e-mail: germany@newport.com
Sales France Tel.: +33 (0)1 60 91 68 68 e-mail: france@newport.com
Sales UK Tel.: +44 (0)1235 432 710 e-mail: uk@newport.com
Technical Support e-mail: tech_europe@newport.com
Service & Returns Tel.: +33 (0)2 38 40 51 55 DST-BEA-RMA-service@newport.com