OMRON ZS-HL-N Series Smart Sensors User Manual

| OK ER | Used to acquire measurement data at the shortest intervals possible.

For details, refer to “FLOWDATA Reference.”

• Specifying the node
  • Specify @xx at the beginning of the command.
  • If the node No. is 1, specify @01. (Be sure to note double digits.)
  • If the node No. is omitted, the command operates on the node that received it.
• Format of a returned value
  • A returned value for MEASURE,M,DATAGET, CFLOGGET,CFDATGET is the right aligned 11 characters.
• Upper case and lower case characters
  • For alphabetic, only upper case characters are accepted.
• Task No.
  • Omit when issuing a command for ZS-LDC.
  • Task Nos are assigned as follows: 0: TASK1 1: TASK2 2: TASK3 3: TASK4.

List of Parameters

The following parameters can be obtained or set by DATASET or DATAGET command:

1: Regular

|
Unit No.| Data No.| Parameter| Setting range/Output range| Others
---|---|---|---|---
2| 0| LD power mode| 0: Auto

1: Auto-scale

2: Fixed

|
2| Surface to be controlled for light amount| 0: Peak

1: First surface

2: Second surface

3: Third surface

|
6| LD power when fixed| 0 to 800 (1 div: 0.1%)|
13| Lower limit of LD power| 0 to 800 (1 div: 0.1%)|
14| Upper limit of LD power| 0 to 800 (1 div: 0.1%)|
32| Incident level| 0 to 4095|
36| LD power| 0 to 800 (1 div: 0.1%)|
37| Incident level

(First surface)

| 0 to 4095|
38| Incident level

(Second surface)

| 0 to 4095|
39| Incident level

(Third surface)

| 0 to 4095|
3| 0| Measurement object| When multi-task mode is OFF. 0: STANDARD

1: PCB

2: Mirror

3: Glass surface

4: Glass thickness

|
When multi-task mode is ON. 0: STANDARD

1: PCB

2: Mirror

3: Glass surface

|
2| GLASS/GLASS

THICKNESS mode

| 0: Mode 1

1: Mode 2

|
3| Image smoothing level| 0: No filter

1: Filter size 2

2: Filter size 4

3: Filter size 8

4: Filter size 16

| When the measurement object is changed, the settings are initialized according to the selected object.
4| Background removing

level before addition

| 0 to 255 (tone)
6| Edge threshold| 0: 0%

1: 12.5%

2: 25%

3: 37.5%

4: 50%

5: 62.5%

6: 75%

7: 87.5%

prevention mode

| 0: OFF

1: ON

|
1| Mutual interference

prevention timing

| 0: Timing A

1: Timing B

|
5| 0| Gain setting| 1 to 5|
40| 0| Measurement mode| 0: OFF

1: Average

2: Peak

3: Bottom

4: Thickness

5: Gap

6: K+mX; +nY

| TASK1 settings.

The settings in Unit Number 40 are valid only for multi-task mode.

3| Parameter X| 0: None

1: TASK 1

2: TASK 2

3: TASK 3

4: TASK 4

4| Parameter Y| 0: None

1: TASK 1

2: TASK 2

3: TASK 3

4: TASK 4

5| Parameter K| -999999999 to 999999999 (nm)
8| Parameter M| -100 to 100 (1div: 0.1)
9| Parameter N| -100 to 100 (1div: 0.1)
1| Surface for measurement (Area 1)| 0: First surface

1: Second surface

2: Third surface

3: Peak

10| Surface for measurement (Area 2)| 0: First surface

1: Second surface

2: Third surface

3: Peak

11| Measurement position 1 (for thickness measurement)| 0: None

1: Average

2: Peak

3: Bottom

12| Measurement position 2 (for thickness measurement)| 0: None

1: Average

2: Peak

3: Bottom

13| Measurement area| 0: Area 1

1: Area 2

14| Width of peak bottom| 0 to 255
32| Measurement value

(First surface)

| – (nm)
33| Measurement value

(Second surface)

| – (nm)
Unit No.| Data No.| Parameter| Setting range/Output range| Others
---|---|---|---|---
40| 34| Measurement value (Third surface)| – (nm)| TASK1 settings.

The settings in Unit Number 40 are valid only for multi-task mode.

41| 0| Scaling mode| 0: OFF

1: ON

1| Span value| -20000 to 20000 (1 div: 0.0001)
2| Offset value| -999999999 to 999999999 (nm)
42| 2| Smooth| 0: OFF

1: ON

43| 2| Average| 0: 1 time

1: 2 times

2: 4 times

3: 8 times

4: 16 times

5: 32 times

6: 64 times

7: 128 times

8: 256 times

9: 512 times

10: 1024 times

11: 2048 times

12: 4096 times

44| 2| Differential type| 0: OFF

1: ON

3| Differentiation cycles| 1 to 5000 (ms)
45| 2| Hold type| 0: Through

1: Peak

2: Bottom

3: Peak to peak 4: Average

5: Sampling

3| Trigger method| 0: External input

1: Self up

2: Self down

4| Trigger level| -999999999 to 999999999 (nm)
5| Trigger hysteresis| 0 to 999999999 (nm)
6| Trigger delay (ms)| 0 to 5000 (ms)
7| Sampling period (ms)| 1 to 5000 (ms)
8| Trigger delay mode| 0: OFF

1: ON

46| 5| Offset at zero reset| -999999999 to 999999999 (nm)
7| Zero reset mode| 0: REAL

1: HOLD

64| Status| 0: OFF

1: ON

• If GLASS/MODE 2 or GLASS THICKNESS/MODE 2 is selected, a process using multiple tasks will be performed, as in the multi-task mode.

The following processes are assigned to the respective tasks:

GLASS THICKNESS: Calculates the difference value between TASK1 and TASK2.
TASK 4| Unused

The measurement conditions can be set for each task in this mode.

• Configuration of Task
  • The ZS-HLDC-N performs task processing.
  • The processing units for each task are grouped into 20 units.
  • To refer to the processing unit of TASK N, therefore, add 20×(N-1) to the above processing unit No.

Example: To change the averaging process of TASK2, refer to or set to a parameter with:

• Process unit No.=43+20×(2-1)=63 and
• Data No.=2

1: OFF-Delay

2: ON-Delay

3: One shot

2| Delay time| 1 to 5000 (ms)
3| Judgment output TASK| 0: TASK 1

1: TASK 2

2: TASK 3

3: TASK 4

121| 0| Non-measurement

settings

| 0: Keep

1: Clamp

|
122| 2| Monitor focus mode| 0: OFF

1: ON

|
3| Monitor focus distance

value 1

| -999999999 to 999999999 (nm)|
4| Monitor focus distance

value 2

| -999999999 to 999999999 (nm)|
5| Monitor focus current

value 1

| 4 to 20 (mA)|
6| Monitor focus current

value 2

| 4 to 20 (mA)|
7| Monitor focus voltage

value 1

| -10 to 10 (V)|
8| Monitor focus voltage

value 2

| -10 to 10 (V)|
122| 21| Output mode TASK| When multi-task mode is OFF. 0: OFF

1: ON

|
---|---|---|---|---
When multi-task mode is ON. 0: OFF

1: TASK 1

2: TASK 2

3: TASK3

4: TASK4

|
23| Output at CLAMP| Voltage output 0: MAX

1: 10 V

2: 9 V

3: 8 V

4: 7 V

5: 6 V

6: 5 V

7: 4 V

8: 3 V

9: 2 V

10: 1 V

11: 0 V

12: -1 V

13: -2 V

14: -3 V

15: -4 V

16: -5 V

17: -6 V

18: -7 V

19: -8 V

20: -9 V

21: -10 V

22: MIN

|
Current output 0: MAX

1: 20 mA

2: 19 mA

3: 18 mA

4: 17 mA

5: 16 mA

6: 15 mA

7: 14 mA

8: 13 mA

9: 12 mA

10: 11 mA

11: 10 mA

12: 9 mA

13: 8 mA

14: 7 mA

15: 6 mA

16: 5 mA

17: 4 mA

|
123

Digital output

| 2| Monitor focus mode| 0: OFF

1: ON

|
---|---|---|---|---
3| Monitor focus distance

value 1

| -999999999 to 999999999 (nm)|
4| Monitor focus distance

value 2

| -999999999 to 999999999 (nm)|
5| Monitor focus current

value 1

| 0 to 65535|
6| Monitor focus current

value 2

| 0 to 65535|
7| Clear monitor focus| 1: Clear|
123| 8| Output at CLAMP| 0 to 65535|
10| Output TASK (When the

measurement value is output)

| 0: TASK 1

1: TASK 2

2: TASK 3

3: TASK 4

4: Consecutively

|
11| Output mode| 0: OFF

1: Measurement value

2: Judgment

|
12| Update cycle| 0 to 100|
124

Logging

| 2| Mode| 0: OFF

1: ON

|
3| Buffering period| 1 to 65535|
4| Buffer size per item of

data

| 1 to 1000|
14| TASK 1| 0: OFF

1: ON

| When multi-task mode is ON.
15| TASK 2| 0: OFF

1: ON

16| TASK 3| 0: OFF

1: ON

17| TASK 4| 0: OFF

1: ON

240

Parallel input

| 4| Input 0| 0: Low Active

1: High Active

|
5| Input 1|
6| Input 2|
7| Input 3|
8| External input mode| 0: Normal mode

1: Bank switching mode

|
9| Control TASK setting| 0: TASK1

1: TASK2

2: TASK3

3: TASK4

|

When multi-task mode is OFF

• When selecting a mode other than “GLASS/MODE 2” and “GLASS THICKNESS/ MODE 2”.

threshold

| -999999999 to 999999999 (nm)|
3| Upper limit of

threshold

| -999999999 to 999999999 (nm)|
4| Hysteresis width| 0 to 999999999 (nm)|
5| Timer mode| 0:OFF

1:OFF DELAY

2:ON DELAY

3:ONE SHOT

|
6| Delay time| 1 to 5000 (ms)|

• When selecting “GLASS/MODE 2” or “GLASS THICKNESS/MODE 2” mode.

threshold

| -999999999 to 999999999 (nm)|
3| Upper limit of

threshold

| -999999999 to 999999999 (nm)|
4| Hysteresis width| 0 to 999999999 (nm)|
5| Timer mode| 0:OFF

1:OFF DELAY

2:ON DELAY

3:ONE SHOT

|
6| Delay time| 1 to 5000 (ms)|

When multi-task mode is ON

• Can be set for each TASK.

Unit No.| Data No.| Parameter| Setting range/Output range| Others|
---|---|---|---|---|---
48| 2| Lower limit of| -999999999 to 999999999 (nm)| TASK1 settings.|
| | threshold| | For TASK2 to|
| TASK4, the unit|
3| Upper limit of| -999999999 to 999999999 (nm)
| | threshold| | numbers are as|
| follows:|
4| Hysteresis width| 0 to 999999999 (nm)
| 5| Timer mode| 0:OFF

1:OFF DELAY

| TASK2: 68|
| | | 2:ON DELAY

3:ONE SHOT

| TASK3: 88

TASK4: 108

|
| 6| Delay time| 1 to 5000 (ms)| |

FLOWDATA Reference

What is FLOWDATA?

• The ZS-HL-N series implements high speed sampling measurement up to 110us.
• Handling these measurement data with an external device requires reading in a large amount of data.
• The ZS-HL-N series are provided with a mechanism which enables to handle and acquire measurement data by a given bundle.
• This bundle of data is called a FLOWDATA.

How to acquire FLOWDATA

FLOWDATA is batch output if the controller has accepted the command for acquiring a FLOWDATA when data is accumulated for the specified buffer size (max. 1000 data). A device receiving data (such as PC) needs to issue the command before the ZS controller accumulates measurement data for the buffer size.

If the controller has not received the command when measurement data for the buffer size is accumulated in the controller, the past data is overwritten: In this case, it raises an error flag for buffer overflow. A device receiving data (such as PC) needs to check this flag to see if the commands have been issued in time.

Format

After outputting the command for acquiring FLOWDATA, the binary data is output in the following format:

• Header division (4bytes): Data division (4bytes)

Configuration of FLOWDATA

Binary data is used for response data of FLOWDATA to give the highest priority to the speed. Therefore, general purpose communication tools such as HyperTerminal may not be used to receive the data.

Buffer size and buffer intervals

The buffer size of measurement data to be accumulated in the ZS controller and its buffer intervals can be changed. Change the following parameters:

• DATAGET and DATASET commands are used to change and refer to the parameters.

1: ON

3| Buffer intervals| 1 to 65535 (pcs)
4| Buffer size| 1 to 1000 (pcs)

Logging data

Data to be accumulated in the ZS controller can be selected.

• When multi-task mode is OFF
• When GLASS/MODE 2 or GLASS THICKNESSS/MODE 2 is selected for the measurement object

• When a mode other than the above is selected for the measurement object.

• When multi-task mode is ON

Configuration of FLOWDATA Response

1 packet of FLAWDATA|
---|---
Header division| Data division
1st byte| 2nd byte| 3rd byte| 4th byte| –
A| B| C| D| E| F| G| H| I| J| K| L| Data| Meaning of data
8| 1| 1| 2| 4| 5| 1| 2| 1| 1| 1| 5| 32| Number of bits

• =Total
  • 64 bits

Details of header division

in FLOWDATA accumulation.
C| Decimal information| Normally set to 0.0: nm order, 1: mm order
D| TASK No.| TASK1 to TASK4 (1)
E| Unused| Always 0
F| Unit states (Input)| Indicates ON/OFF states of various input lines. (2)
G| FLOWDATA stop bit|

• All data are set to 1 if FLOWDATA does not flow over subsequently. (Always set to 1 for one-shot requests)
• All data are set to 0 if FLOWDATA continues to flow over. (Until FLOWDATA is stopped after requested (in succession)

H| TASK judgment result bit| Indicates the TASK judgment result of data source. (3)
I| Disabled| Reserved bit
J
K
L| Unit states (Output)| Indicates output states (states of measurement results). (4)
Data| Measurement data| Signed 32 bit data

When the decimal info division is 0, the unit of the data is nm. When the decimal info division is 1, the unit of the data is mm

• TASK No.=bit data+1

Example: bit data=10B=2 (dec) indicates TASK3 data.

The input lines are, from the lower bit, assigned to:

In case of ZS

• Input terminal 4 (Unused. Always set to 0.)
• Input terminal 3
• Input terminal 2
• Input terminal 1
• Input terminal 0 (5 inputs in total.)

Data to be received and their states are as follows:

• 00b=Not executed
• 01b=LOW
• 10b=PASS
• 11b=HIGH

The output states are, from the lower bit, assigned to:

In case of ZS

• Output terminal 4 (Busy output)
• Output terminal 3 (Enable output)
• Output terminal 2 (Low output)
• Output terminal 1 (Pass output)
• Output terminal 0 (High output)

(5 outputs in total). States in parenthesis indicate the standard states.

[FLOWDATA setting example]

• DATASET 124 2 1: FLOWDATA accumulation mode ON
• DATASET 124 3 1: 1 buffer interval
• DATASET 124 4 1: 1 buffer size
• DATASAVE: Data save

FLOWDATA

Example of Usage

To give an example, provided below is a procedure to communicate by non- procedural commands using Windows standard tool HyperTerminal.

Start up HyperTerminal

HyperTerminal is located under [Program]-[Accessory]-[Communication].

1. Enter an appropriate project name.
2. Select the COM port connected to the ZS in the Connection Method section.
3. Set the communication conditions.
4. HyperTerminal is started up.

To make the interaction with commands easier, set echo and other functions

1. Open [Property].
2. Select the setting tag, and then ASCII settings.
3. Check the following items, and press OK to complete the setting.

• Change ZS into “RUN” mode.
• Perform non-procedural communication.

1. Input a command, and then press the return key.
2. A returned value responding to the command is returned from the controller.

Revision History

A manual revision code appears as a suffix to the catalog number at the bottom of the front and back covers of this manual.

OMRON Corporation

Industrial Automation Company

• Kyoto, JAPAN
• Contact: www.ia.omron.com

Regional Headquarters

OMRON EUROPE B.V.

• Wegalaan 67-69, 2132 JD Hoofddorp The Netherlands
• Tel: (31) 2356-81-300
• Fax: (31) 2356-81-388

OMRON ASIA PACIFIC PTE. LTD.

• 438B Alexandra Road, #08-01/02 Alexandra Technopark, Singapore 119968
• Tel: (65) 6835-3011
• Fax: (65) 6835-2711

OMRON ELECTRONICS LLC

• 2895 Greenspoint Parkway, Suite 200 Hoffman Estates, IL 60169 U.S.A.
• Tel: (1) 847-843-7900
• Fax: (1) 847-843-7787

OMRON (CHINA) CO., LTD.

• Room 2211, Bank of China Tower, 200 Yin Cheng Zhong Road, PuDong New Area, Shanghai, 200120, China
• Tel: (86) 21-5037-2222
• Fax: (86) 21-5037-2200

©OMRON Corporation 2022 All Rights Reserved.
In the interest of product improvement, specifications are subject to change without notice.

Cat. No. Z472-E1-01

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