Newport HXP100-MECA 6 Axis Parallel Kinematic Positioning Systems

HXP100-MECA & HXP100HA-MECA Hexapods 6-Axis-Parallel Kinematic Positioning Systems

Warranty

• Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion.
• To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days.

Limitation of Warranty
This warranty does not apply to defects resulting from modification or misuse of any product or part.

CAUTION

• Please return equipment in the original (or equivalent) packing.
• You will be responsible for damage incurred from inadequate packaging if the original packaging is not used.

CAUTION
Warranty does not apply to damages resulting from:

• Incorrect usage:
  • Load on the Hexapod greater than maximum specified load.
  • Carriage speed higher than specified speed.
  • Improper grounding.
  • Connectors must be properly secured.
  • When the load on the Hexapod represents an electrical risk, it must be connected to ground.
  • Excessive or improper cantilever loads.
• Modification of the Hexapod or any part thereof.

This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages.

• © 2019 by Newport Corporation, Irvine, CA. All rights reserved.
• Original instructions.
• No part of this document may be reproduced or copied without the prior written approval of Newport Corporation. This document is provided for information only, and product specifications are subject to change without notice. Any change will be reflected in future publishings.

EC Declaration of Conformity

Definitions and Symbols

The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur.

General Warning or Caution

• The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible.

• The following are definitions of the Warnings, Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety, safety and preservation of the equipment, or important tips.

• WARNING
  Warning indicates a potentially dangerous situation which can result in bodily harm or death.

• CAUTION
  Caution indicates a potentially hazardous situation which can result in damage to product or equipment.

• NOTE
  Note indicates additional information that must be considered by the user or operator.

European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations.

Warnings and Cautions

ATTENTION
This stage is a Class A device. In a residential environment, this device can cause electromagnetic interference. In this case, suitable measures must be taken by the user.

Warnings

• WARNING
  The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved.

• WARNING

  • Do not use this Hexapod when struts are emitting smoke or is unusually hot to the touch or are emitting any unusual odor or noise or is in any other abnormal state.
  • Stop using the Hexapod immediately, switch off struts power and then disconnect the HXP controller from power supply.
  • After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the Hexapod yourself as this can be dangerous.

• WARNING

  • Make sure that this Hexapod is not exposed to moisture and that liquid does not get into the Hexapod.
  • Nevertheless, if any liquid has entered the Hexapod, switch off struts power and then disconnect the HXP controller from power supply.
  • Contact your Newport service facility and request repairs.

• WARNING

  • Do not insert or drop objects into this Hexapod, this may cause an electric shock, or lock the drive.
  • Do not use this Hexapod if any foreign objects have entered the Hexapod. Switch off struts power and then disconnect the HXP controller from power supply.
  • Contact your Newport service facility for repairs.

• WARNING

  • Do not place this Hexapod in unstable locations such as on a wobbly table or sloping surface, where it may fall or tip over and cause injury.
  • If this Hexapod has been dropped or the case has been damaged, switch off struts power and then disconnect the HXP controller from power supply.
  • Contact your Newport service facility and request repairs.

• WARNING
  Do not attempt to modify this Hexapod; this may cause an electric shock or downgrade its performance.

• WARNING
  Do not exceed the usable depth indicated on the mounting holes (see section “Dimensions”). Longer screws can damage the mechanics or cause a short- circuit.

Caution

• CAUTION
  Do not place this Hexapod in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment.

• CAUTION
  Do not use the top plate for handling. This may cause it to malfunction.

• CAUTION
  Do not manipulate struts. This may cause it to malfunction.

• CAUTION
  Do not use the Hexapod neither up side down nor horizontally.

• CAUTION
  Do not place this Hexapod in a location affected by dust, oil fumes, steam or high humidity. This may cause an electric shock.

• CAUTION
  Do not leave this Hexapod in places subject to extremely high temperatures or low temperatures. This may cause an electric shock.

  • Operating temperature: +10 to +35 °C
  • Storage temperature: -10 to +40 °C (in its original packaging)

• CAUTION

  • Do not move this Hexapod if struts power is on.
  • Make sure that the cable to the electronics is disconnected before moving the Hexapod. Failure to do so may damage the cable and cause an electrical shock.

• CAUTION
  Be careful that the Hexapod is not bumped when it is being carried. This may cause it to malfunction.

• CAUTION
  When handling this Hexapod, always unplug the equipment from the power source for safety.

• CAUTION
  Contact your Newport service facility to request cleaning and specification control every year.

6-Axis-Parallel Kinematic Positioning Systems HXP100-MECA & HXP100HA-MECA Hexapods

Introduction

This manual provides operating instructions for the Hexapod that you have purchased.

• CAUTION
  Please read chapters 3.3 and 5.0 carefully before operating your Hexapod.

• CAUTION
  Do not use the HXP100-MECA or HXP100HA-MECA Hexapod neither up side down nor horizontally.

Description

• The HXP100-MECA 6-Axis Hexapod is a parallel kinematic motion device that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. The HXP100-MECA has long travel capability and is an effective solution to complex motion applications that demand high load capacity and accuracy in up to six independent axes. Contrary to the image of being complex and highly priced, the HXP100-MECA hexapod is not only affordable but extremely easy to use. The HXP100-MECA design also includes two programmable pivot points, enabling more flexibility to align a sample at a particular point or points of that sample. The HXP100-MECA Series also takes advantage of the low-runout, RightPath™ trajectory capability. Available in the standard performance, higher precision and vacuum versions. Order with the corresponding HXP100-ELEC controller.
• To further ensure positioning performance, the High Accuracy (HA) HXP100HA-MECA is available with guaranteed accuracy values. This enables the use of a Newport Hexapod in positioning applications, where position accuracy is required. In addition to accuracy along an axis, the Pitch and Yaw deviations during axial motion are also monitored and guaranteed. When the HA Hexapod is used with RightPath™, this combination achieves positioning performance close to standard Newport stages.
• The HXP100-ELEC-D and HXP100HA-ELEC-D provide advanced features including instrument grade I/O’s, hardware based input triggers, event triggers, high-speed on-the-fly data acquisition, fast TCP/IP communication, and integrated TCL programming language for on-board processes. All these features improve accuracy and throughput, making the programmer’s life much easier.
• A common requirement for many Hexapod motion applications is a virtual pivot point, allowing the user to freely choose the point in space that is a pivot point for all rotations. The Newport Hexapod can not only relocate the pivot point, but through our advanced technology, the entire coordinate system can be relocated. In addition, two user-definable coordinate systems are provided, called tool (moves with the Hexapod) and work (stationary coordinate systems). Incremental displacements are possible in either one of these systems in user-friendly Cartesian coordinates, and positions can be easily calculated from one system to the other by a function call, without the need for complex external coordinate transformations.
• Each hexapod (HA and non HA versions) is delivered with a dedicated controller. It is particularly important for the HXP100HA-MECA hexapod to verify that it is connected to the appropriate HXP100HA-ELEC-D as the controller includes the calibration performed on the hexapod (the Hexapod is linked with its own controller through its S/N).

Characteristics

Mechanical Specifications

| X| Y| Z| U (Rx)| V (Ry)| W (Rz)
---|---|---|---|---|---|---
Travel range (1)| ±27.5 mm| ±25 mm| ±14 mm| ±11.5°| ±10.5°| ±19°
Minimum Incremental Motion| 0.5 µm| 0.5 µm| 0.25 µm| 0.25 mdeg| 0.25 mdeg| 0.5 mdeg
Uni-directional repeatability, typical| ±0.25 µm| ±0.25 µm| ±0.125 µm| ±0.125 mdeg| ±0.125 mdeg| ±0.25 mdeg
Bi-directional repeatability (2), typical| ±2 µm| ±2 µm| ±1 µm| ±1 mdeg| ±1 mdeg| ±2 mdeg
| (±0.5 µm)| (±0.5 µm)| (±0.25 µm)| (±0.25 mdeg)| (±0.25 mdeg)| (±0.2 mdeg)
Max. speed| 2.5 mm/s| 2 mm/s| 1 mm/s| 1.8 °/s| 1.7 °/s| 3 °/s
Rigidity| 5 N/µm| 5 N/µm| 40 N/µm| –| –| –
Centered load capacity (4)| | | | 200 N| |

1. Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
2. With standard compensation (with hysteresis compensation).
3. For allowable cantilevered loads, refer to section 3.2: “Max. Cantilever Distance of the Load“.

CAUTION
To reach specifications stated, stages must be fixed on a plane surface with a flatness of:

• 50 µm for the HXP100-MECA version.
• 10 µm for the HXP100HA-MECA version.

Guaranteed Specifications of the HXP100HA-MECA Version

| X| Y| Z
---|---|---|---
Uni-directional repeatability| ±0.25 µm| ±0.25 µm| ±0.125 µm
Bi-directional repeatability| ±3 µm| ±3 µm| ±2 µm
Absolute| ±10 µm| ±10 µm| ±5 µm
Pitch| ±75 µrad| ±75 µrad| ±75 µrad
Yaw| ±75 µrad| ±75 µrad| ±75 µrad

Max. Cantilever Distance of the Load

Weight

Connection to the HXP100-ELEC-D or HXP100HA-ELEC-D Controller

Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.

WARNING
Disconnect the power plug under the following circumstances:

• If the power cord or any attached cables are frayed or damaged in any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.

CAUTION
To protect the unit from damage, be sure to:

• Keep all air vents free of dirt and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.

WARNING

• All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized.
• Contact your electrician to check your receptacles.

WARNING

• This product is equipped with a 3-wire grounding type plug.
• Any interruption of the grounding connection can create an electric shock hazard.
• If you are unable to insert the plug into your wall plug receptacle, contact your electrician to perform the necessary alterations to ensure that the green (green-yellow) wire is attached to earth ground.

WARNING

• This product operates with voltages that can be lethal.
• Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts.

Connection

• WARNING
  • Always turn the controller’s power OFF before connecting to a strut.
  • Struts must be connected to the rear panel motor connectors labeled “Motor…” any time prior to power-up with the supplied cable assemblies.
• WARNING
  Each Hexapod strut has a label that corresponds to the axis number of the HXP100-ELEC-D or HXP100HA-ELEC-D controller. This label is also indicated on the connector of the strut.

Cables
Each Hexapod is equipped with 3-meter cables () terminated with SUB-D25M connectors and can be directly connected to the HXP100-ELEC-D or HXP100HA- ELEC-D controller.
() Length from actuators. Remove 0.35m when measuring from hexapod output.

• CAUTION
  Numbering of axes is important for strut connections. A mismatch will cause fatal errors during initialization or unexpected hexapod motions.

• WARNING
  These cables are shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).

• WARNING
  Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk.

• NOTE

  • On each strut connector, a sticker indicates the backlash, resolution and home preset.
  • These parameters have to be set into the controller for each strut. This is done at our factory when the Hexapod is ordered with its own HXP100-ELEC-D or HXP100HA-ELEC-D controller.

• WARNING
  These Hexapods must be grounded via a threaded hole to avoid electrical disturbances generated by ground loops.

Dimensions

NOTE
The +X-axis points in the direction of the cable output between struts #3 and

4.

NOTE
Top and base plates of the HXP100-MECA and HXP100HA-MECA Hexapods are made of anodized aluminum.

Maintenance

RECOMMENDATION
Please contact Technical Sales Support team for recommendations on application specific maintenance.

Maintenance
The Hexapod requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution.

• PRECAUTIONS
  The Hexapod must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.

• RECOMMENDATION

  • It is recommended to return the Hexapod to Newport for re-lubrication after 2000 hours of use.
  • If the HXP100-MECA is mounted on a workstation and cannot be easily removed, please contact Newport’s After Sales Service for further instructions.

Repair

CAUTION

• Never attempt to disassemble a component of the Hexapod that has not been covered in this manual.
• To disassemble a non specified component can cause a malfunction of the stage.
• If you observe a malfunction in your Hexapod, please contact us immediately to arrange for a repair.

CAUTION
Any attempt to disassemble or repair a Hexapod without prior authorization will void your warranty.

Service Form

• Name:__
• Company:____
• Address:_____
• Country:_____
• P.O. Number:__
• Item(s) Being Returned:___
• Model #:_____
• Return authorization #: (Please obtain prior to return of item)___
• Date:_____
• Phone Number:__
• Fax Number:____
• Serial #:___
• Description:____
• Reasons of return of goods (please list any specific problems):____

Your Local Representative Tel.:
Fax:

Visit Newport Online at : www.newport.com

• North America & Asia Newport Corporation
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  • Irvine, CA 92606, USA
• Sales
  • Tel.: 800-222-6440
  • e-mail: [email protected]
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• Europe
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  • Tel.: +33 (0)1.60.91.68.68
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