INFICON PGE050 Pirani Gauge Enhanced Instruction Manual

INFICON PGE050 Pirani Gauge Enhanced

Product Information

The Pirani Gauge Enhanced (PGE050) is a vacuum measurement device designed for accurate and reliable pressure readings. It is available in various models with different part numbers:

• 352-500 (DN 16 ISO-KF)
• 352-501 (DN 25 ISO-KF)
• 352-502 (DN 40 ISO-KF)
• 352-503 (DN 16 CF-R)
• 352-504 (DN 40 CF-R)
• 352-505 (4 VCR female)
• 352-506 (8 VCR female)
• 352-507 (1/8 NPT)

The product nameplate contains the part number (PN) which should be specified in all communications with INFICON.

Product Usage Instructions

Safety Precautions

Before using the Pirani Gauge Enhanced, it is important to adhere to the following safety precautions:

• Communicate the safety instructions to all users.
• Ensure proper equipment grounding.
• Follow the specified electrical conditions and interface control guidelines.
• Avoid overpressure and the use of hazardous gases.
• Do not use gases other than Nitrogen/air.

Installation

To install the Pirani Gauge Enhanced, follow these steps:

1. Perform mechanical installation, ensuring proper positioning and connection.
2. Complete electrical installation, including grounding.

Using the Gauge with Different Gases

The Pirani Gauge Enhanced is suitable for use with a variety of gases. However, it is recommended to consult the product specifications and guidelines for specific gas compatibility information.

Service

Regular calibration, maintenance, troubleshooting, and contamination prevention are essential for optimal performance of the Pirani Gauge Enhanced. Follow these guidelines:

• Calibrate the gauge as per the provided instructions.
• Perform routine maintenance to ensure proper functioning.
• Troubleshoot any issues that may arise using the troubleshooting guide.
• Take precautions to prevent contamination of the gauge.
• If necessary, replace the gauge with a new one.

Factory Service and Support

If additional assistance or support is required, contact INFICON’s factory service. They can provide expert guidance and address any concerns related to the Pirani Gauge Enhanced.

Returning the Product

If the product needs to be returned for any reason, follow the specified instructions provided by INFICON.

Disposal

When disposing of the Pirani Gauge Enhanced, adhere to proper disposal practices in accordance with local regulations and guidelines.

EU Declaration of Conformity

The Pirani Gauge Enhanced conforms to EU standards and regulations as stated in the EU Declaration of Conformity.

Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.

Validity
This document applies to products with part numbers:

• 352-500: (DN 16 ISO-KF)
• 352-501: (DN 25 ISO-KF)
• 352-502: (DN 40 ISO-KF)
• 352-503: (DN 16 CF-R)
• 352-504: (DN 40 CF-R)
• 352-505: (4 VCR female)
• 352-506: (8 VCR female)
• 352-507: (1/8″ NPT)

The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to the product with vacuum connection DN 25 ISO-KF. They apply to the other products by analogy. We reserve the right to make technical changes without prior notice.

Important User Information

There are operational characteristic differences between solid-state equipment and electromechanical equipment. Because of these differences, and because there are a variety of uses for solid-state equipment, all persons who apply this equipment mus take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner.
In no event will INFICON be responsible or liable for indirect or consequential damages that result from the use or application of this equipment.
Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and requirements imposed on any particular installation, INFICON cannot assume responsibility or liability for any actual use based on the examples and diagrams. No patent liability is assumed by INFICON with respect to use of information circuits, equipment, or software described in this manual.
Throughout this manual, we use notes, and notices and apply internationally recognized symbols and safety messages to make you aware of safety considerations.

WARNING
Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken, could result in death or serious injury, property damage, or economic loss.

CAUTiOn
Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken, could result in minor or moderate injury, property damage, or economic loss.

NOTICE
Identifies information that is critical for successful application and understanding of the product.

SHOCK HAZARD
Labels may be located on or inside the device to alert people that dangerous voltages may be present.

General Safety Instructions

• Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
• Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties

• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.) on the product
• use the product with accessories not listed in the product documentation.

The end-user assumes the responsibility in conjunction with the process media used.
Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. Pirani filament), are not covered by the warranty.

Introduction / General Information

Description

Thermal conductivity gauges measure pressure indirectly by sensing the loss of heat from a sensor to the surrounding gases. The higher the pressure of the surrounding gas, the more heat is conducted away from the sensor. Pirani thermal conductivity gauges maintain a sensor (usually a wire) at some constant temperature and measure the current or power required to maintain that temperature. A standard Pirani gauge has a useful measuring range of about 10-4 Torr to 10 Torr. By taking advantage of convection currents that are generated above 1 Torr, convection enhanced Pirani gauges increase the measuring range to just above the atmosphere. The INFICON PGE050 Pirani Gauge Enhanced is a convection enhanced Pirani vacuum gauge sensor that interfaces with external controllers such as the INFICON VGC031 controller. The PGE050 is also a direct drop-in replacement pin-pin compatible gauge for the MKS Instruments / Granville-Phillips® 275 Convection ® gauge. The sensor connector has the same pinouts and signal as the corresponding Convectron®. It is directly interchangeable with your existing Convectron® controllers and cables, so you don’t need to change any wiring, hardware, or process recipes.

Specifications

Measurement range

• 1.3×10-4 … 1333 bar
• 1×10-4 … 1000 Torr
• 1.3×10-2 Pa … 133 kPa
• Accuracy – N2 (typical)
• 1.3×10-4 … 1.3×10-3 mbar: 0.1 ×10-3 mbar resolution
• 1.3×10-3 … 530 mbar: ±10% of reading
• 530 …1333 mbar: ±2.5% of reading
• 1×10-4 … 1×10-3 Torr: 0.1 mTorr resolution
• 1×10-3 … 400 Torr: 1×10-3 … 400 Torr
• 400 … 1000 Torr: ±2.5% of reading
• Repeatability – N2 (typical): ±2% of reading
• Materials exposed to vacuum: gold-plated tungsten, 304 &
  • 316 stainless steel, glass,
  • nickel, Teflon®
• Internal volume: 26 cm3 (1.589 in3)
• Internal surface area: 59.7 cm2 (9.25 in2)
• Weight: 3 oz. (85 g)
• Permissible temperature
• Operating: 0 … +50 °C
• Storage: –40 … +70 °C
• Bakeout temperature: ≤150 °C (non-operating, with electronics cable detached)
• Relative humidity: 0 … 95%, non-condensing
• Use
• Operating: altitude up to 2500 m (8200 ft.)
• Storage: altitude up to 12500 m (41000 ft.).
• Mounting Orientation: horizontal recommended (orientation has no effect on measurements below 1.3 mbar (1 Torr))

Dimension

Important Safety Information

INFICON has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this manual. Please read and follow all warnings and instructions.

WARNING

To avoid serious injury or death, follow the safety information in this document. Failure to comply with these safety procedures could result in serious bodily harm, including death, and or property damage.
Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument. INFICON disclaims all liability for the customer’s failure to comply with these instructions.
Although every attempt has been made to consider the most possible installations, INFICON cannot anticipate every contingency that arises from various installations, operations, or maintenance of the module. If you have any questions about the safe installation and use of this product, please contact INFICON.

Safety Precautions – General

WARNING! There are no operator-serviceable parts or adjustments inside the gauge sensor. Do not modify this product or substitute any parts without au- authorization of qualified INFICON service-trained personnel. Return the product to an INFICON-qualified service and repair center to ensure that all safety features are maintained. Do not use this product if unauthorized modifications have been made.

Electrical Conditions
\ WARNING! When high voltage is present in any vacuum system, a life- threatening electrical shock hazard may exist un- less all exposed electrical conductors are maintained at earth-ground potential. This applies to all products that come in contact with the gas contained in vacuum chambers. An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity. A person could be seriously injured or killed by coming in contact with an exposed, ungrounded electrical conductor at high voltage potential. This condition applies to all products that may come in contact with the gas inside the vacuum chamber (vacuum/pressure containment vessel).

Proper Equipment Grounding
WARNING! Hazardous voltages that could seriously injure or cause death are present in many vacuum processes. Verify that the vacuum port on which the PGE050 vacuum gauge module is mounted is electrically grounded. Consult a qualified Electrician if you are in doubt about your equipment grounding. Proper grounding of your equipment is essential for safety as well as the intended operation of the equipment. The PGE050 mo- dule vacuum gauge must be connected directly to a good quality earth ground. Use a ground lug on the PGE050 gauge vacuum connection/flange if necessary

WARNING! In order to protect personnel from electric shock and bodily harm, shield all conductors that are subject to potential high voltage electrical discharges in or around the vacuum system.

Electrical Interface and Control
It is the user’s responsibility to ensure that the electrical signals from this product and any connections made to external devices, for example, relays and solenoids, are used in a safe manner. Always double-check the system setup before using any signals to automate your process. Perform a hazardous operation analysis of your system design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage.

Overpressure and use with hazardous gases
A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding. INFICON gauges should not be used at pressures exceeding 1000 Torr absolute pressure.
In cases where an equipment failure could cause a hazardous condition, always implement fail-safe system operation. For example, use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber.
The PGE050 vacuum gauge module is not intended for use at pressures above 20 psi (1000 Torr); DO NOT exceed 35 psi (<2½ bars) pressure inside the sensor. If your chamber goes to higher pressures, you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions. With some fittings, actual safe overpressure conditions may be lower; for example, a quick-connect, O-ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncover-reacted barometric (atmospheric) pressure.

CAUTION! If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure (atmospheric pressure side), vacuum fit- tings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment. Toxic, pyrophoric, and flammable gases are amples of hazardous gases that if allowed to leak out of the vacuum/pressure containment vessel into the atmospheric environment, could cause bodily injury and possible dam- age to equipment. Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases.

Gases other than Nitrogen/air

WARNING! Do not attempt to use gases other than nitrogen (N2) or air without referring to correction factor data tables.
INFICON gauges are calibrated for direct readout of nitrogen or air. Do not attempt to use other gases such as argon (Ar) or carbon dioxide (CO2) unless accurate conversion data for N2 to other gases is properly used. Refer to the correction factor data listed in the controller Operating Manual operating this device. The INFICON VGC031 controller Operating Manuals provide a more complete discussion of using correction factors when using the gauge on gases other than Nitrogen.

WARNING! Do not use this device in an explosive atmosphere or in the presence of flammable gases, vapors or fumes. Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures. The sensor wire in the gauge normally operates at 125 °C, but if a malfunction should occur, the wire temperature could exceed the ignition temperature of certain combustible gases and gas mixture. This could cause an explosion which could result in serious injury or death.

Installation

Mechanical Installation
Mount the PGE050 as close as possible to the pressure you want to measure. Long or restricted, small-diameter tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay in response to pressure changes.
Mounting the PGE050 too close to a gas source inlet may also cause measurement and control instability. Do not mount the PGE050 near a source of heating or cooling, such as heaters or air conditioning vents.
Mount the PGE050 with its main (long) axis horizontal (see diagram below). Pressure reading errors may occur above 1 Torr if the unit is not mounted horizontally. Below 1 Torr, the mounting position has little to no effect.
For accurate measurements above 1 Torr, mount the gauge axis horizontally as shown below:

Mount the PGE050 with port down, if possible, to help minimize the effect of any particles or condensation from collecting in the gauge.

Do not mount the PGE050 where it will be subjected to excessive vibration. Vibrations may cause unstable readings, measurement errors and possible mechanical stress to components in the PGE050. Flanges/ Fittings – follow the manufacturer’s recommendations and note the following: – NPT fittings: When connecting the device using an NPT fitting, apply a thread sealant compound or wrap the threaded portion of the tubing with one-and-a-half to two wraps of pipe thread seal tape such as PTFE (Teflon®) tape and hand tighten the gauge into the gauge port. Do not use a wrench or other tool which may damage the gauge.

Electrical Installation
Grounding

• Be sure the vacuum gauge and the rest of your vacuum system are properly grounded for safety as well as intended operation of the equipment. When using KF flanges, metal clamps must be used to ensure proper grounding. Be aware that some vacuum fittings such as NPT connections installed using Teflon tape may not allow for metal-to-metal contact between the vacuum gauge and the vacuum chamber. If such is the case, use a 12 gauge or larger copper wire to connect the vacuum gauge to a ground lug on your vacuum chamber as shown below.

Using the gauge with different gases

A thermal conductivity gauge senses heat loss which depends on the thermal conductivity of the gas surrounding the sensor. Since different gases and mixtures, have different thermal conductivities, the indicated pressure readings and outputs will also be different. INFICON convection gauges (and most other ther- mal conductivity gauges) are calibrated using nitrogen (N2). When a gas other than N/ air is used, correction must be made for the difference in thermal conductivity between nitrogen (Nz) and the gas in use. The gas correction data, charts, and tables listed in vour controller (such as the INFICON VGC031 control- ler) Operating Manual indicate how different gases affect the display and output from an INFICON convection gauge.

WARNING! Using a thermal conductivity gauge with gases other than that for which it is calibrated could result in death or serious injury. Be sure to use the correction factor data listed in the controller Operating Manual operating this device. For N the calibration shows excellent agreement between indicated and true pressure throughout the range from 1×10* to 1000 Torr. At pressures below 1 Torr, the calibration curves for the different gases are similar. The difference in readings at these low pressures is a constant, a function of the difference between the thermal conductivities of the gases.
At pressures above 1 Torr, indicated pressure readings may diverge significantly. At these higher pressures, convection currents in the gauge become the predominant cause of heat loss from the sensor and calibration depends on gauge tube geometry and mounting position as well as gas properties. Generally, air and N2 are considered the same with respect to thermal conductivity, but even Nz and air will exhibit slight differences in readings at higher pressures. For example, when venting a system to the atmosphere using N2, you may see readings change by 40 to 55 Torr after the chamber is opened and air gradually displaces the Nz in the gauge. For most other gases the effect is much more significant and may result in a hazardous condition as described below.

Other considerations when using gases other than Nz / air
Flammable or explosive gases
WARNING! INFICON convection gauges are neither intrinsically safe nor explosion-proof and are not intended for use in the presence of flammable or explosive gases or vapors. Under normal conditions, the voltages and currents in INFICON convection gauges are too low to cause ignition of flammable gases. However, under certain failure conditions, sufficient energy could be generated to cause flammable vapors or gases to ignite or explode. Thermal conductivity gauges like the INFICON convection gauges are not recommended for use with flammable or explosive gases.

Moisture/water vapor
In some processes (lyophilization, for example) the gas composition may not change significantly, except for moisture content. Water vapor can significantly change the response of a thermal gauge and correction should be made, as you would for any other gas.

Other contaminants
If your gases condense, coat, or corrode the sensor, the gauge calibration and response to different gases will change. Generally, if the gauge can be “calibrated” (“zero” and “span” settings) these changes are small enough to be ignored. If you can’t set zero and span, the gauge should be replaced or returned to the factory for evaluation and possible cleaning.

Convection Vacuum Gauge
Indicated vs. true total pressure (test gaseous N2, Ar, He)

Gas Correction Chart
The Y-axis of the above chart is actual pressure as measured by a capacitance manometer, a diaphragm gauge that measures true total pressure independent of gas composition. The X-axis is the pressure reading indicated by the convection gauge under test. This chart shows readings for an INFICON convection gauge (CVG) and Granville-Phillips® Convectron® gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable.
CAUTION! Do not assume this data applies to other convection gauges which may or may not be the same. Refer to the correc- tion factor data listed in the controller Operating Manual operating this device. The INFICON VGC031 controller Operating Manuals provide a more complete discussion of using correction factors when using the gauge on gases other than Nitrogen. Ex A: If the gas is nitrogen (N2), when the true total pressure is 500 Torr, the gauge will read 500 Torr.

Ex B: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read about 9 Torr. If you are backfilling your vacuum system with Ar, when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr. Continuing to backfill your system, attempting to increase the reading up to 760 Torr, you will over-pressurize your chamber which may present a hazard. Ex C: If the gas is helium (He), the controller will read over pressure (OP) when the pressure reaches about 10 Torr true pressure and opening the chamber to the atmosphere prematurely may present other hazards for both people and product.

CAUTION! What these examples illustrate is that using gases other than nitrogen (N2) without using accurate gas conversion data and other proper precautions could result in injury to personnel and/or damage to equipment. Suggested precautions when using gases other than nitrogen (N2):
Install a pressure relief valve or burst disk on your chamber, to protect it from overpressure. Post a warning label on your gauge readout that states “Do Not Exceed Torr Indicated Pressure” (fill in the blank for the maximum indicated pressure for the gas you use) so that an operator using the gauge will not exceed a safe pressure.

Service

Calibration
Every INFICON PGE050 gauge is calibrated prior to shipment using nitrogen (N2). However, you can calibrate the instrument by adjusting zero and span (atmosphere), using the controller which is operating the gauge. Zero and span (atmosphere) calibration affects the displayed value and the output signal. Zero calibration optimizes performance- 1.00×10 To 1 1.010 For in gor minimum operating pressure is higher than 1.00×10 Torr, it is not normally necessary to perform calibration at zero and thus span calibration should be adequate. If you are able to evacuate your system to below 1.00×10* Torr, it is always a good practice to check and set zero if necessary. This will also improve performance in cases where gauge contamination is causing higher readings than below 1. 710 Ton. Cares tout exercised when using to gases other than nitrogen (N2) / air.

Maintenance
In general, maintenance is not required for your INFICON gauge. Periodic performance checks may be done by comparing the gauge to a known reference standard.

Troubleshooting

different gas thermal conductivity. See controller Operating Manual
The module has not been calibrated or has been calibrated incorrectly| Check that zero and span are adjusted correctly. See controller Operating Manual
Readings are noisy or erratic| Loose cables or connections| Check and tighten connections
Contamination| Inspect the gauge for signs of contamination such as particles, deposits, and discoloration on the gauge inlet. Return to factory for possible cleaning
Vibration| Ensure the gauge is not mounted where excessive vibration is present
The gauge cannot be calibrated – zero and span can’t be adjusted|  | Return to factory for possible cleaning
Sensor failure for other cause| Return to factory for evaluation or replace

(continued)

The controller displayed pressure is too high and cannot be set to the correct value| Contamination| Return to factory for possible cleaning
Sensor wire damaged| Return to factory for evaluation or replace
Controller displayed pressure is too low and cannot be set to the correct value| Sensor wire damaged| Return to factory for evaluation or replace
Contamination| Return to factory for possible cleaning

Contamination

The most common cause of all vacuum gauge failures is contamination of the sensor. Noisy or erratic readings, the inability to set zero or atmosphere, and total gauge failure, are all possible indications of gauge contamination.

Contamination can be generally characterized as either:

• a reaction of process gases with sensor elements, or
• an accumulation of material on the sensor elements. Sensors that fail due to chemical reactions are generally not salvageable. Sensors that fail due to condensation, coatings, or particles may possibly be restored by cleaning.

Reactive Gases
If process gases react with the materials of construction of the sensor, the result is corrosion and disintegration of the sensor over time. The chemistry of the gases used for plasma etching and other reactive semiconductor processes are examples of where this failure mode is possible. In this case, cleaning can’t solve the problem because the sensor has been destroyed. The sensor or module must be replaced. If you experience this failure mode quickly or frequently, you should consider a different vacuum gauge for your application. Thermal vacuum gauges may be available with different sensor materials that are not as reactive with your particular process gases. The standard gold-plated tungsten sensor used in the INFICON convection gauge is offered for use with air and inert gases such as N2, argon, etc. INFICON also offers modules with platinum sensors for applications not compatible with gold-plated tungsten.
There is no material that is universally chemical resistant; your choice of vacuum gauge (as well as all other vacuum components) should take into consideration the potential reactions between your process gases and the materials of construction. Consider what effect water vapor will have when combined with your process gases because a finite amount of water will enter the chamber during venting to the atmosphere with air.

Oil, Condensation, Coatings, and Particles If the failure is due to an accumulation of material in the gauge, we may be able to restore your gauge or module by cleaning.  Contamination may be as simple as condensed water, or as difficult as solid particles. Oils and hydrocarbons: Exposure of the gauge internal surfaces to oils and hydrocarbons can result in sensor contamination. Some of these types of contamination may be removed by cleaning the gauge. If there is the possibility of oil back streaming from wet vacuum pumps, it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system.
Condensation: Some gases (such as water vapor) can condense on sensor surfaces, forming a liquid coating that changes the rate at which heat is removed from the sensor (which changes the calibration). The sensor can often be restored simply by pumping on the gauge between process cycles. A dry Nz purge will help speed up drying, or the gauge may be gently heated provided the temperature doesn’t exceed the specified limit of 40 °C, operating.
Coatings: Some gases can condense on sensor surfaces, forming a solid coating, which changes the rate at which heat is removed from the sensor. Some of these coatings may be removed by cleaning the gauge.

Particles: Particles generated by the process may enter the gauge during the process cycle or during the venting cycle. The result is interference with heat removal from the sensor. In this case, cleaning may be able to remove particles from the gauge. However, particulate contamination is the most difficult to remove as particles can become stubbornly trapped inside the gauge. In some processes, solid particles are created during the process throughout the chamber including inside the gauge. Par- ticles tend to form on cooler surfaces such as in a gauge at room temperature. You may slow down the build-up of particles in the gauge by keeping the gauge warm (within specified limits) during the process cycle.

Particles in the process chamber may be swept into the gauge during the vent cycle. The PGE050 has a screen built into the gauge port to help keep the largest particles out of the gauge. In very dirty applications, or where particles are small enough to get through the screen, an additional filter installed on the inlet may help prolong the gauge life. In some vacuum processes, desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line-of-sight transport, especially under high vacuum conditions, i.e., in the molecular flow regime. To prevent materials that may be transported via line-of- sight momentum from entering your vacuum gauge or other components, it is advisable to install some form of apparatus that will block the line-of-sight. In many cases a simple 90° elbow may help prevent or reduce the transport of particles from entering your vacuum gauge. In the event of gauge contamination please contact the factory to return the gauge for possible cleaning if the gauge has not been exposed to hazardous materials.

Gauge Replacement
If the PGE050 gauge fails for any reason, and cleaning does not resolve the issue, the PGE050 gauge should be replaced.

Factory Service and Support

If you need help setting up, operating, troubleshooting, or obtaining a return materials authorization number (RMA number) to return the module for diagnosis, please contact us during normal business hours Monday through Friday, at +423 / 388 3111. Or e-mail us at reachus@inficon.com.

Returning the Product

WARNING
WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimental to health and the environment.
Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and for-warding companies and enclose a duly completed declaration of contamination

• Form under www.inficon.com.

Products that are not clearly declared as “free of harmful substances” are decontaminated at the expense of the customer. Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

Disposal

DANGER
DANGER: contaminated parts Contaminated parts can be detrimental to health and the environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING
WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids, etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local regulations.

Separating the components
After disassembling the product, separate its components according to the following criteria:

• Contaminated components
  Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of.

• Other components Such components must be separated according to their materials and recycled.

EU Declaration of Conformity

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU.

Pirani Gauge Enhanced

• PGE050
• (operation with VGC031)

Standards
Harmonized and international/national standards and specifications:

• EN 61000-6-2: 2005 (EMC: generic immunity standard)
• EN 61000-6-4: 2007 + A1:2011 (EMC: generic emission standard)
• EN 61010-1: 2010 (Safety requirements for electrical equipment for measurement, control and laboratory use)
• EN 61326-1: 2013; Group 1, Class A (EMC requirements for electrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures

INFICON AG, Alte Landstraße 6, LI-9496 Balzers 3 August 2016 3 August 2016

• Dr. Bernhard Andreaus
• Director Product Evolution
• Marco Kern
• Product Manager
• LI–9496 Balzers
• Liechtenstein
• Tel +423 / 388 3111
• Fax +423 / 388 3700
• reachus@inficon.com.
• www.inficon.com.

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