HORIBASTEC GR-511(F)-EPV Auto Pressure Regulator

FAQs

• Q: What is the maximum operating pressure of the GR-511F-EPV?
  • A: The maximum operating pressure is 450 kPa(A) or 1000 kPa(G).
• Q: How can I control the pressure using this device?
  • A: You can control the pressure by inputting both the external pressure sensor signal and pressure setting signal into the D-subminiature15 contact pin connector.
• Q: What is the weight of the GR-511F-EPV?
  • A: The weight of the device is approximately 1.35kg.

SPECIFICATIONS

± 0.25 %F.S. (Flow rate ≤ 25 %F.S.)

Flow rate output signal| 0 ~ 5 VDC (0 ~ 100 %F.S.)
Mounting orientation 9| Free
Weight 10| 1.35kg

1. F: With flow monitor function type
2. (A): Absolute Pressure, (G): Gauge Pressure
3. Please consult about other specifications.
4. Analog signal reading accuracy is 10V±7mV towards calibrated analog voltage 10V.
5. Pressure signals introduced from connected external pressure sensors can be monitored.
6. SCCM denotes gas flow rate in ml/mi under 0 deg.C, 101.3 kPa(A), respectively
7. Flow accuracy complies with SEMI E56-0309. Guaranteed for calibration gas (N2), full scale, and pressure condition.
8. A flow rate exceeding 100% F.S. cannot be guaranteed for accuracy.
9. Please make a zero-point adjustment for the flow rate in an actual-use environment to eliminate the mounting operation effect.
10. Reference value with standard fitting

PRODUCT OVERVIEW

This device uses an external pressure gauge to control the pressure. There is an external pressure sensor signal pin and pressure setting signal pin on the D-subminiature15 contact pin connector, and pressure control is possible by inputting both signals.

ELECTRICAL CONNECTION

Connector to be used D-subminiature 15 contact pin in the connector with

4-40UNC screw type.

1. To activate, connect to signal common (Pin 11, 12). Please make resistance to be less than 50Ω. Please set N.C. (non-connection) when deactivating
2. To prevent the common voltage change by valve drive current, Power common (Pin 5) and Signal common (Pin 11, 12) have the necessity of connecting by the GND side of a power supply. Power common (Pin 5) and Signal common (Pin 11, 12) are not connected inside the product, please wire separately and connect to become common by the power supply side.
3. Open Collector NPN-Type. When connecting the inductive loads such as solenoid, electromagnetic valve, etc., connect the counter-electromotive force preventing diode. Rated current is 10mA@30VDC or 250mA@1V.

To minimize the effect of electrical noise, please be sure to use a shielded cable (less than 30m) with both ends properly grounded If you use other kinds of cable on the market selling, it may not connect depending on the shape of a plug and hood.

HOW TO OPERATE

1. Connection to Gas System
   • The product case is labeled with a flow direction arrow. Please make sure that the product is mounted in the correct direction for flow.
   • The gas inlet and outlet of the product fittings are 1/4 inch VCR or equivalent with male screw fitting as standard.
   • This product can be mounted in any orientation, in most applications, without degradation of performance.
   • Please make sure that process connections are as leak-tight as possible.
   • Confirm leak integrity of the installed product at the gas system connections using a helium mass spectrometer leak detector with sufficient sensitivity.
2. Connection to Electrical System
   • The electrical connection is per the electrical pin assignments table.
   • Failure to make a proper connection oｆ the cable will cause damage to the product.
   • Power requirements for direct current are:
   • more than +15V±5% 250mA
   • more than -15V±5% 250mA
3. Warming Up Operation
   • The power is to be supplied for more than five minutes without gas flowing, as a warming-up operation. It is recommended to maintain 30 minutes as warming-up operation.
   • Without the warming-up operation, accuracy may have variations.
   • It is recommended to use the Zero-Adjust function after power is supplied for more than one hour.

Names at each part, and LED indication

1. Status LED (“GR”)
   • Status LED indicates the product’s status. Green solid in normal condition. If an error or irregular condition occurs, the Status LED turns to be red solid.
2. Trip point LED (“TPA” / “TPB”)
   • This product provides two independent open collector outputs. When one or both are active (detected pressure value exceeds the threshold), the corresponding Trip point LED turns to green solid. Otherwise, LEDs turn to be off.
   • An application software is available for setting the threshold for each open collector. Please contact our company for the details.
3. PID gain switch (“P” / “I”)
   • The product can change over the response time in 8 steps by a rotary dip switch. The rotary dip switch is set at 7 as a default value. If the pressure control is not stabilized, change the response time with this.

Zero adjustment

1. Pressure signal reading adjustment
   • After warming up sufficiently under the operating environment conditions, short “external pressure sensor signal input” (Pin 10) and “signal common” (Pin 11, 12), and press and hold the “Pressure reading adjustment button” for more than 1 second, “Pressure signal reading adjustment” to be completed.
2. Flow zero adjustment
   • Stop the supply of gas and verify the flow rate output fluctuation is less than +/- 0.2% of full scale as a guide, after fully warming up with the product kept under usage environment. Keep the flow zero adjustment switch (arranged on the panel) pressed for over one second thereafter, to complete the zero adjustment.

CAUTION AND REMINDERS

1. Please make sure that the process piping system is as leak-tight as possible. It is important to purge the entire gas line. If the purge is not sufficient, it might cause troubles such as particle generation, clogging, decrease in throughput, etc.
2. Please install a gas filter on the inlet side of the product to eliminate particles and impurities that flow from upstream of the gas line.
3. Please make sure that the process piping system is made of metal and grounded electrically for electromagnetic compatibility performance.
4. The preservation temperature of the product is 0 to 80 deg.C. Please avoid the temperature out of range for preservation. Please do not dew it or make it to failure.
5. Never remove the product case, since there is a high voltage portion built inside the product. Removing the case might invite to receive an electric shock, or result in the failure of the product.
6. Analog external pressure output signal, Flow rate output signal, and Valve voltage monitor signal may be output transitionally within the range of the power supply voltage. When either one or both signals are used, please take care of the input voltage resistance of the system.
7. Please do not turn on and off the power repeatedly in a short period. More than three(3) seconds should be kept before turning on the power again. Each ±15V power source should be turned on / off simultaneously. Partial power supply or signal input, and plugging/unplugging while power is supplied, may cause trouble.
8. Please make sure of sufficient capacity of power supply source.
9. Please do not apply any excessive force or gas pressure on the product body and the cable.
10. The flow rate of the product at shipment is calibrated at 25 deg.C under 1013hPa(1atm) or 0 deg.C under 1013hPa(1atm). The following notations are used for gas flow rate units for convenience;
    • CCM, LM: ml/min, l/min at 25 deg.C under 1013hPa(1atm)
    • SCCM, SLM: ml/min, l/min at 0 deg.C under 1013hPa(1atm)
11. Please keep in mind that the control valve used in the product cannot provide positive shut-off capability. Where positive shut-off is required, a separate isolation valve should be installed for this purpose.
12. When using the pneumatic valve in front or behind the product to shut off the gas, abnormal movement such as overshoots might occur depending on the open or shut timing of the pneumatic valve. please open the pneumatic valve before inputting the pressure setpoint to the product.
13. When the control valve in the product is fully open or when it’s out of control, the pressure rate of flow or the pressure rate of gas may exceed the indicated full-scale value.
14. This is a product for industrial environments. In a domestic environment, this product may cause radio interference in which case the user may be required to take adequate measures.

This instruction manual is subject to alteration without notice.

PRODUCT WARRANTY

1. Period:
   • This product is warranted for one (1) year (parts and labor) from the date of shipment.
   • Repair will be provided free of charge during this period if the product is returned to HORIBA STEC or an authorized service representative with a description of the problem.
   • HORIBA STEC is not responsible for damage due to customer neglect or improper operation of this product.
2. Scope:
   • Warranty coverage is restricted to this product only. HORIBA STEC is not responsible for damage to other components due to improper operation of this product.
3. Warranty:
   • Replacement parts are warranted for ninety (90) days or the remainder of the warranty period (whichever is longer).
4. HORIBA STEC is not responsible for damage due to:
   • a) Natural disasters
   • b) Miss-operation or abuse of this product
   • c) Operation or storage in an unsuitable environment
   • d) Operation outside of the rated specifications
   • e) Unauthorized alterations or retrofits to this product
   • Examples for out of scope of responsibility by HORIBA STEC;
   • In case of use of high reaction gas, clogging due to incomplete purge or leakage, etc. in the gas line.
   • Contamination or clogging by dust or mist, etc.
   • Repair expense with/without charge is to be determined as examination and/or disassembly of the returned products.

Name and amount of hazardous substance used in a product

(PBDE)

Printed board| ×| ○| ○| ○| ○| ○
Case| ○| ○| ○| ○| ○| ○
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This form is prepared following SJ / T 11364. Denotes that the amount of the hazardous substance contained in all of the homogeneous materials used in the component is below the limit on the acceptable amount stipulated in the GB/T 26572. Denotes that the amount of the hazardous substance contained in any of the homogeneous materials used in the component is above the limit on the acceptable amount stipulated in the GB/T 26572.
Meaning of Marking

CODE: I031424700 © 2024 HORIBA STEC, CO., Ltd.

References

• 半導体 - HORIBA
• 半導体 - HORIBA

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