COSMOS XPS-7 Semiconductor Plant Gas Detector Instruction Manual

COSMOS XPS-7 Semiconductor Plant Gas Detector

Specifications

• Product Name: XPS-7 Semiconductor Plant Gas Detector
• Model: XPS-7
• Instruction Manual No.: XPS-7T11
• Designed for: Gas leak detection in semiconductor manufacturing plants
• Sensor Units: Sold separately, can be switched to detect various gases
• Sensor Unit Shelf Life: 6 months

Product Usage Instructions:

Introduction
Thank you for purchasing the XPS-7 Semiconductor Plant Gas Detector. It is crucial to read and understand this manual thoroughly for correct operation.

Safety Symbols and Precautions
The manual uses specific symbols to indicate different levels of warnings and instructions. It is essential to follow these symbols for safe operation of the Gas Detector.

• DANGER: Indicates an impending hazardous situation that could result in serious injury or death.
• WARNING: Indicates a potentially hazardous situation that could result in serious injury or death.
• CAUTION: Indicates a potentially hazardous situation that could result in minor injury or physical damage.
• Note: Provides operational advice and instructions.

Operating Precautions
Follow these precautions to ensure safe operation of the Gas Detector:

• Location: Use the Gas Detector only in a non-hazardous location.
• Environment: Operate the Gas Detector in a clean-air environment to maintain its performance.
• Maintenance: Check the sensor unit’s shelf life (6 months) before each use to ensure proper detection.

Storage Guidelines
Properly store the Gas Detector following these guidelines:

• Temperature and Humidity: Avoid storing the detector in high-temperature or high-humidity locations.
• Temperature Changes: Prevent sudden temperature or humidity changes, which could affect performance.
• Long-Term Storage: If not using the Gas Detector for an extended period, remove the batteries before storage.

Frequently Asked Questions (FAQ)

• Q: Can the Gas Detector be used in hazardous locations?
  A: No, the Gas Detector is not explosion-proof and should only be used in non-hazardous areas.

• Q: How often should I check the sensor unit’s shelf life?
  A: It is recommended to check the sensor unit before each use as its shelf life is six months.

Semiconductor Plant Gas Detector
XPS-7

Instruction Manual

• Store this Instruction manual in a convenient location, and consult it whenever necessary.
• Operate the product only after reading and fully understanding the content of this manual.

Introduction

• Thank you for purchasing the XPS-7 Semiconductor Plant Gas Detector. To ensure correct operation, please read this operation manual carefully.
• This product is designed to detect gas leaks in semiconductor manufacturing plants. Sensor units (purchased separately) can be switched to detect a variety of gases.
• Read and be sure you fully understand this manual even if you have used a Gas Detector before.
• Do not use the Gas Detector for any purpose other than that for which it was intended. Do not attempt to use the product in a way other than that described in this manual.

Explanation of Symbols
This manual uses the following symbols. Their meanings must be understood and observed to ensure safe operation of the Gas Detector.

DANGER| Indicates an impending hazardous situation that, if not avoided, could result in serious injury or death.
---|---
WARNING| Indicates a potentially hazardous situation that, if not avoided, could result in serious injury or death.
CAUTION| Indicates a potentially hazardous situation that, if not avoided, could result in minor injury or physical damage.
Note| Indicates operational advice and/or instructions.

Observe the following precautions to ensure safe operation of the Detector.

• WARNING The Gas Detector is not explosion-proof and must be used in a non-hazardous location.
• CAUTION The Gas Detector is not drip-proof and must be used in a location free from splashing water.
• CAUTION Do not allow the Gas Detector to be subjected to mechanical shock by being dropped or struck.
• CAUTION The Gas Detector must be turned ON in a clean-air environment. Otherwise, the performance of the Detector may be impaired and normal detection may not be possible.
• CAUTION The shelf life of the sensor unit is six months. Always check the sensor unit to be sure its life has not expired prior to use. Normal detection may not be possible if an expired sensor unit is installed.

Observe the following precautions for the storage environment and method of storing the Gas Detector.

WARNING Do not store the Gas Detector for long periods in locations with high temperatures or high humidity. Otherwise, the performance of the Detector may be impaired.
CAUTION Do not subject the Gas Detector to sudden changes in temperature or humidity. Otherwise, the performance of the Detector may be impaired.
CAUTION If the Gas Detector is not to be used for a long time, remove the batteries before storing it.

Contents of This Package

The following components are included with the Gas Detector. Ensure that all components are present before attempting to use the Detector.

• Gas Detector …………………………… 1
• Shoulder strap ………………………… 1
• Gas inlet tube…………………………… 1
• Instruction manual……………………… 1
• Filters …………………………………… 2
• AA alkaline batteries…………………… 4
• Inspection results……………………… 1

Sensor Units

Contact an authorized representative of New Cosmos regarding other detectable gases not listed in the table.

Component Names and Functions

Main Unit

turned ON and remains lit during operation.
②| Trouble lamp (yellow)| Flashes when an error occurs.
③| Alarm lamp (red)| Flashes when the detected gas concentration reaches the alarm point.
④| LCD display| Indicates gas concentration and other information.
⑤| Key switch cover| Lightly pull the cover toward you to open it and access the key switches.
⑥| Buzzer speaker|
⑦| Gas inlet| Sampled gas aspiration inlet. (6 dia.) Attaches to the gas inlet tube.
⑧| Gas outlet| Exhaust outlet for sampled gas (6 dia.)
⑨| Adapter connector| Connects to the 100-VAC/6-VDC adapter plug.
⑩| Battery cover| Lift the snap lock and open the cover to insert batteries.
⑪| Sensor cover| Lift the snap lock and open the cover to insert the sensor unit.
⑫| Sensor window| Used to check the sensor unit that is installed.
⑬| LED (red) (Battery check)| Lit if the key switch cover is open with the Gas Detector turned OFF, when batteries are inserted, or when batteries are low.

Key Switches

switch repeatedly to display the first level alarm setting, second level alarm setting, and gas concentration.
③| Buzzer stop switch|
④| Zero calibration switch| Press and hold to adjust the zero point automatically.
⑤| CN jack| Connects to the plug of a CA-7 Communications Adapter (option) used for log data collection.
⑥| Special command switch| Used with the logger function.
⑦| UP/DOWN switches| Used to set the start time and other logger function settings.

LCD Display

Gas Inlet Tube

Note

Attaching and Removing the Gas Inlet Tube

• Attaching
  Insert the tube into the coupling on the Gas Detector inlet and secure it in place with the locking tab to seal the edge of the tube. After the tube is attached, make sure that it will not pull out.

• Removing
  Press in the release ring on the coupling and simultaneously pull out the gas inlet tube.

Operating Procedure

Inspect the Gas Detector daily before using it. (Refer to page 13.) If the Detector is used without first performing the inspection, normal detection may not be possible and leaks may not be detected.

CAUTION
The Gas Detector must be turned ON in a clean-air environment. Otherwise, the performance of the Detector may be impaired and normal detection may not be possible.

Inserting Batteries

1. Lift the snap lock on the battery cover and pull the cover toward you to open it.
2. Insert the four AA alkaline batteries provided and make sure they are inserted according to the polarity indicated in the battery compartment.
3. Close the battery cover.

WARNING : Replace all four batteries at the same time with fresh, new batteries. Also make sure that the replacement batteries are all the same brand and type.

CAUTION： Always replace the batteries in the following situations.

1. The battery indicator shows a flashing box (□) when the Gas Detector is ON. (Refer to LCD display on page 5.)
2. Nothing operates when the Gas Detector is ON.
3. The battery check LED (red) is glowing very brightly (as bright as ? above) when the Gas Detector is OFF. (Refer to item ? on page 4.)

Installing the Sensor Unit

1. Lift the snap lock on the sensor cover and pull the cover toward you to open it.
2. Note the position of the connector and the mounting slot as you push the sensor unit into place.
3. When the sensor unit is securely in place, close the sensor cover.

CAUTION

• If the Gas Detector is used without a properly seated sensor unit, the Gas Detector will not be air-tight and normal detection may not be possible. Make sure the unit is properly seated.
• Use the sensor stocker model EC-7 (purchased separately) to supply power to the sensor unit. A sensor unit that does not have power to it cannot detect gases and may cause the sensor trouble indicator to light. A sensor unit installed in the Gas Detector is powered even if the Gas Detector is turned OFF, as long as the batteries are charged.
• When a sensor unit is replaced (shipped from the plant), install it in the Gas Detector or connect it to the sensor stocker model EC-7 to supply a sufficient amount of power to the new unit before turning ON the Gas Detector and using it for the 昀椀rst time.
• This Gas Detector uses XDS-7 sensor units and is not compatible with CDS-7, COS-7, CHS-7 or any other sensor units.

Turning the Gas Detector ON

1. Press and hold the power switch. The buzzer sounds, the green power lamp flashes, and self-diagnosis begins. The diagnostic procedure lasts about 30 seconds.
2. When self-diagnosis is completed, zero adjustments is performed automatically, the green power lamp lights, and the unit is ready to detect gas.

CAUTION
The Gas Detector must be turned ON in a clean-air environment. Do not allow the Detector to draw in gas while it is warming up. Otherwise, zero adjustment will not be performed properly and normal detection will not be possible.
Wait at least 1 s before turning the Gas Detector back ON after a power failure.

Detection
Place the gas sampling pipe near the target detection area. When the unit detects gas, the concentration of the detected gas is displayed. If the detected gas concentration level reaches the alarm point, the alarm lamp lights and the buzzer sounds as shown in the table below.

CAUTION
Do not allow water or other liquids to enter the Gas Detector. Any liquid will cause the Gas Detector to fail.

Ending Detection
When detection is completed, place the Gas Detector in a clean-air environment and allow it to draw in clean air until the concentration indicator reads zero. Press and hold the power switch until the Detector turns OFF.

CAUTION
After an adsorbent gas has been detected, replace the filter with a new one before attempting to detect another gas. Normal detection is not possible with a contaminated filter.

Logger Function

The Gas Detector can record up to 22 hours of detection data. The recorded data can be written to a personal computer using optional components that can be purchased separately. (See 10. Consumable Parts and Options.)

Note

• Maximum gas concentration is recorded every 10 s after logging begins.
• New log data is stored in the Gas Detector by overwriting old data.
• The logger function terminates when the Gas Detector is turned OFF.
• Date settings are not supported.
• Refer to the XPS-7 Log Data Download Software in the XPS-7L Instruction Manual for the procedure used to write log data to a personal computer.
  

Note
Pressing the UP (▲) or DOWN (▼) switch repeatedly in RUN mode changes the display on the bottom right corner of the LCD display as shown below. These are factory adjustments that are not available for user application

Replacing the Filter

1. Twist the filter holder with detection probe to open it.
2. Use a pair of tweezers to remove the O ring and filter.
3. Insert a new filter and the O ring.
4. Reassemble the filter case.

Daily and Periodic Inspections

• Daily Inspections
  Checking the Gas Inlet Tube Is the tube damaged? If so, replace it with a new one.

• Checking the Filter
  If the filter is dirty and discolored, replace it with a new one.

Periodic Inspections

• To maintain accuracy, it is recommended that the Gas Detector be given periodic inspections and adjustments at least once a year by an authorized representative of New Cosmos.
• Replace the sensor unit every six months.

Note
Clean the Gas Detector by gently wiping it with a cloth dampened with water.

Troubleshooting

Consumable Parts and Options

regarding gases that can be detected.
Filters (10 per set)| FE-112|
AC adapter＊| | Special adapter for 100-240V AC/6V DC.
Sensor Stocker| EC-7| Provides power for up to six sensor units at one time.
Log data download software＊| XPS7L| **** Required to write log data to a personal computer.
Communications adapter＊| CA-7
Serial crossover cable＊| KRS-L09-2K

＊Not available for the XPS-7 with CE marking.

Warranty

• New Cosmos Electric Company Limited (New Cosmos) offers the following as the sole and exclusive limited warranty available to Customer.

• This warranty is in lieu of, and customer waives, all other warranties of any kind or nature, expressed or implied, including without limitation, any warranty for merchantability or fitness for a
  particular purpose. The remedies set forth herein are exclusive.

• New Cosmos warrants to the original purchaser and no other person or entity (customer) that gas detection product supplied by New Cosmos shall be free from defects in materials and workmanship for a period of one (1) year from the date of purchase. This warranty does not include consumables, such as fuses, fiters, etc. Certain other accessories not specifically listed here may have different warranty periods.

• After examination of allegedly defective product return to New Cosmos, with freight prepaid, should the product fail to conform to this warranty, customer’s only remedy and New Cosmos’s only obligation shall be, at New Cosmos’s sole option, replacement or repair of such non-conforming product or refund of the original purchase price of the non-conforming product. In no event will New Cosmos be liable for any other special, incidental or consequential damages or losses of any kind whatsoever, including but not limited to, loss of anticipated profits and any other loss caused by
  reason of non-operation of the product.

• This warranty is valid only if the product is maintained and used in accordance with New Cosmos’s instructions and for recommendations. New Cosmos shall be released from all obligations under
  this warranty in the event repairs or modifications are made by persons other than its own or authorized service personnel or if the warranty claim results from physical abuse or misuse of the product.

Specifications

(at 20℃ with alkaline batteries and no alarms)
Operating temperature range| 0 to 40℃
Dimensions| W 62 x H 150 x D 128 mm (projected portions excluded)
Mass| Approx. 1.3 kg
Approval (See note 3.)| CE (EMC Directive, 2014/30/EU)

Note 1 : The detection accuracy and response time were measured under identical detection conditions.
Note 2: The operating time of the batteries depends on factors such as environmental conditions, operating conditions, the storage time, and the manufacturer .
Note 3 : AC Adapter and Data Logger Software (optional items) are exempt from CE marking. (see on page 11)

Distributor:

Manufacturer:
New Cosmos Electric Co., Ltd. 2-5-4 Mitsuya-naka Yodogawa-ku Osaka 532-0036, Japan URL: http://www.newcosmos-global.com

References

• New Cosmos Electric Co., Ltd.

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