TERRA UNIVERSAL Vibration Isolation Workstations Instructions
- June 9, 2024
- TERRA UNIVERSAL
Table of Contents
Vibration Isolation Workstations
Instructions
Vibration Isolation Workstations
Enhanced Performance Through Vibration Isolation
- High Resolution Microscopes
- Scanning Electron Microscopes
- Scanning Probe Microscopes—such as AFM’s and STM’s
- Transmission Electron Microscopes
- Commercial Interferometers
- Surface Pro filometers
- Photolithography Exposure Illuminators
- Metrology Inspection Systems
- Ion Implanters
- Probe Stations
Boosting Yield Through Vibration Control
In an age of rapidly shrinking component geometries, your investment in
vibration control today will be even more important tomorrow.
As manufacturers involved in lithography, surface profibrnetry, metrobgy,
botechnobgy, andother critical operations have found vibratbns are a
potentially dsastrous threat to precisbn and throughput. Vibrations are
generated by traffic, footfall, air handling equipment, and other conditions
that exist in the vicinity of virtually every manufacturing facility.
Specifically, there are three types of vibration that can disturb a paybad:
ground vibration, acoustic noise and direct force disturbances.
Groundor seismic vibrations exist in every environment on earth. These
vibrations can be natural, emanating from tectonic shifts, waves crashing and
tvind bbwing, or rnanmack, originating in vehicular or even foot traffic and
even the whirring of 1-(VAC equipment.
Acoustic noise comes from the same basic sources but is transmitted through
air pressure waves. Even air currents coming from nearby ventilatbn systems
can cause these waves, which can disturb a paybad by acting as a differential
pressure on the claphragns of pneumatic isolators. Acoustic encbsures provide
a nearly airtight, heavy, energy-absorbing cone over the process to combat
this source of vibration. The final type of vibration, called drect force, is
generated by the paybad operatbn itself, such as vibration being transmitted
to the payload through a hose or a laser water cooling line. It can also come
from the paybad itself. This is the case in semiconductor inspection
equipment, where moving stages are used to position silicon wafers The force
used to accelerate the stage is also applied to the static portion of the
paybad in the form of a reaction force. Moving stages can also shift the
p3ybad’s center of mass (COM).
Thus, there are invariably sources of vibration that can compromise your
operations that require you to take steps to control the effects of seismic
events, acoustic noise and drect forte disturbances.
Disturbing Consequences!
In the most severe cases of environmental disturbance, hill-precision
operations become impossible. Without the ability to zero in on precise
bcations on a sample surface, an operator cannot complete critical
functionality tests, obtain required resolution, or perform microinjectbns and
other celicate procedures.
In other cases, momentary cfsturbances can compromise operations without the
operator’s knowledge. For example, a brief set of vibrations caused by
unusually heavy street traffic can have.
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