MSP VPG-A6 IN-LINE Process Gas Filter User Guide
- June 7, 2024
- MSP
Table of Contents
VPG-A6 IN-LINE PROCESS
GAS FILTER
ULTRA-HIGH EFFICIENCY FILTRATION
DOWN TO 2nm AND BELOW
The industry-leading VPG-A6 Vapor Process Gas filter is an ultralow pressure drop, ultra-high efficiency in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter is chemical- and thermally- resistant and provides up to 99.9999999999% (twelve 9s) of efficiency 2.5nm – an estimated particle penetration of less than one part per trillion (ppt). The extremely low-pressure drop of this filter makes it easier to work in ultra-low pressure environments and reduces the risk of gas-phase reactions occurring in the filter.
Conventional high-purity, point-of-use gas filters are used in a compressed gas line for particle removal. The VPG-A6 filter is also used downstream of a vaporizer under vacuum flow conditions to prevent particles, which could potentially be in the gas/vapor mixture, from entering the Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD) process chamber. Due to its unique design, the VPG-A6 filter has more thermal mass than competitive offerings, making it particularly well suited for use downstream of a vaporizer in a heated line – acting as almost a second-stage heat exchanger.
Applications
- Vapor process gas
- Ultra-high purity gas
- High temperature
- Inert or reactive gases
- High and ultra-high vacuum
- Semiconductor manufacturing
Features and Benefits
- 316 Stainless Steel
- The ultra-high particle removal efficiency
- Ultra-low pressure drop
- Solid core – more thermal mass
- ½” VCR fittings
SPECIFICATIONS
VPG-A6 IN-LINE PROCESS GAS FILTER
Efficiency* @ 1 SLPM| 2.Snm
10 nm
50 nm| 99.9999999999% (twelve 9s) 99.99999999% (ten 9s) 99.999997% (seven 9s)
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Filter Media| Sintered 316L SS Fiber
Wetted Materials| Stainless Steel 316L
Temperature Range (°C)| <400 (inert gases)
Max Operating Pressure (psis)| 2500
Max. Differential Pressure (psid)| 500
Flow Rate Range (SLPM)| 0-30
Weight (kg/lb)| 0.45/1
Fittings**| 1/2″ male VCR with 7/8-14 thread
Filtration efficiency at atmospheric pressure
Alternative fitting options available by request
VPG-A6 Pressure Drop vs Flow Rate
Industry Leading, Patent-protected Design
Cross-flow construction and short fiber 316L stainless steel media provide
ultra-high efficiency with ultra-low pressure drop. Solid core provides more
thermal mass for better performance downstream of a vaporizer.
Specifications are subject to change without notice.
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TSI and the TSI logo are registered trademarks of TSI Incorporated.
UNDERSTANDING, ACCELERATED
TSI Incorporated – Visit our website www.tsi.com for more information.
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