EMERSON TESCOM High Purity Regulators User Guide

TESCOM High Purity Regulators
User Guide 

TESCOM ™ High Purity Regulator Selection Guide

Four-Step Product Selection Process
The simple four-step process outlined below will help you use this guide to find the product that meets your specific application requirements.

1. Semiconductor Application: Choose from one of the five semiconductor application tables that follow on pages 1-5. Specific applications, e.g., gas trays, gas jungles, and valve manifold boxes are listed at the very top of each table. As an example, a regulator that is located at the process tool and used to deliver a specialty gas is likely a 1/4″ Point-of-Use Regulator. Gas Cabinet Regulators are used to deliver compressed or liquefied cylinder gases.
2. Pressures & Flow Rates: Narrow your search by referencing your required source pressure, outlet pressure, and flow rate. Leak rate and body materials are provided in the tables as a further reference point.
3. Features: Check the bullet points under the regulator model name for a short list of key features.
4. Poppet Types: Free poppet regulators are recommended for inert gases and point-of-use process gases. Tied diaphragm regulators offer a mechanically assisted shutoff to prevent leakage across the seat. The tied diaphragm regulators are recommended for high-pressure toxic, corrosive, and flammable gases.

To place an order: Once you have selected a product, you may call the number below for your local distributor or go to www.emerson.com/tescom and click on Sales Office Locator.
Need assistance or further specifications?
A. Visit us online at www.emerson.com/TESCOM. Click on VIEW PRODUCTS to begin your search and download a PDF file of the relevant catalog sheet.
B. Refer to Regulator Recommendations for Semiconductor Gases in our catalog or on our website.
C. Call the number below for a factory application specialist or the number of a TESCOM distributor near you: 800-447-1250 or 877-483-7266.
D. Learn more about Emerson’s Semiconductor solutions at www.emerson.com/semiconductor

Product selection guide contents

1/4″ Point of use pressure regulators… 1
1/2″ Point of use pressure regulators… 2| Gas cabinet pressure regulators………. 2 & 3
Facility pressure regulators………………….. 4| µ•Stik™ Miniature Pressure Controls .. 4
About TESCOM…………………………………… 5
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1/4″ Point of use pressure regulators

For process tools, gas trays, gas jungles, valve manifold boxes & tool hook- ups

|
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PRODUCT SERIES & FEATURES| SOURCE PRESSURE| DELIVERY PRESSURE| **CERTIFIED INBOARD LEAK RATE*| FLOW RANGE| BODY MATERIAL
---|---|---|---|---|---
64-2600 Single Stage, Ultra-High Purity
• 10 Ra microinch finish
• Internal electropolish
• Free poppet design
• Hastelloy® trim available
• Cv = .15| 600 PSIG [41 bar]| 30, 60, 100, 250 PSIG
[2, 4, 7, 17 bar]| <1 x 10-9| 0-100
SLPM| 316L SST or
316L SST VAR
64-2800 Single Stage, Ultra-High Purity, Tied Diaphragm
• Tied diaphragm design
• Internal electropolish
• 10 Ra microinch finish
• Cv = .15| 1000 PSIG
[70 bar]| 30, 60, 100, 150 PSIG
2, 4, 7, 10 bar]| <1 x 10-9| 0-100|
SLPM| 316L SST or
316L SST VAR
64-3600 Single Stage, Ultra-High Purity, Low Droop
• 10 Ra microinch finishes
• Internal electropolish
• Free poppet design
•  Hastelloy® trim available
• Cv = .15| 600 PSIG
[41 bar]| 30, 60, 100, 150 PSIG
2, 4, 7, 10 bar]| <1 x 10-9| 0-100
SLPM| 316L SST or
316L SST VAR
64-5000 Single Stage, Ultra-High Purity, Absolute Pressure
•  Subatmospheric to positive pressures
• 10 Ra microinch finish
•  Internal electropolish
•  Cv = .24| 120 PSIG [8 bar]| 28″ Hg-15, 30, 60,
100 PSIG
[28″ Hg-1, 2, 4,7 bar]| <1 x 10-9| 0-5 SLPM| 316L SST or 316L SST VAR
74-2400 Single Stage, Ultra-High Purity
•  Tied diaphragm design
•  Internally springless & threadless
•  Precision Electro-Polish
•  10 Ra microinch finish
•  Cv = .15| 600 PSIG [41 bar]| 30, 60, 100 PSIG [2, 4, 7 bar]| <1 x 10-9| 0-100 SLPM| 316L SST VAR
12 Single Stage, Ultra-High Purity, Miniature**
•  Tied diaphragm design
•  5 Ra or 10 Ra microinch finishes
• Internally springless & threadless
•  Precision Electro-Polish
• 12F Series features an integrated outlet filter
• Available with inlet & outlet filter
•  1-1/2″, 1-1/8″ “C” or “W” seal, VCR®| 150 PSIG [10 bar]| 20″ Hg-15, 30, 60, 100 PSIG [20″ Hg-1, 2, 4, 7 bar]| <1 x 10-9| 50 SLPM& 120 SLPM| 316L SST VAR

1/2″ Point of use pressure regulators

For process tools, gas trays, gas jungles, valve manifold boxes & tool hook- ups

|
---|---
  PRODUCT SERIES &  FEATURES|   SOURCE  PRESSURE| DELIVERY PRESSURE| **CERTIFIED INBOARD LEAK RATE*| FLOW RANGE| BODY MATERIAL
---|---|---|---|---|---
44-3200 Single Stage, High Flow
•10 Ra microinch finish
•Cv = 1.0 or 1.8| 500 PSIG [35 bar]| 25, 50, 100, 150, 200  SIG  [1.7, 3.5, 7, 10, 14 bar]| <2 x 10-8| 0-550, 900 SLPM (0-19, 32 SCFM)| 316L SST
64-3200 Single Stage, Ultra-High Purity, High Flow
• Tied diaphragm design
• 10 Ra microinch finish
• Hastelloy® trim available
• Cv = 1.2| 150 PSIG [10 bar]| 30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]| <1 x 10-9| 0-900 SLPM (0-32 SCFM)| 316L SST or 316L SST VAR
64-5400 Single Stage, Ultra-High Purity, High Flow
•  Free poppet design
• 10 Ra microinch finish
•  Cv = 1.0| 600 PSIG [41 bar]| 30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]| <1 x 10-9| 550 SLPM (0-19 SCFM)| 316L SST
74-3000 Single Stage, Ultra-High Purity, High Flow
• Internally threadless
• Precision Electro-Polish
• 10 Ra microinch finish
• Free poppet design
• Cv = .5| 600, 1000 PSIG [41,  70 bar]| 30, 60, 100, 150 PSIG [2, , 7, 10 bar]| <1 x 10-9| 0-500 SLPM (0- 18 SCFM)| 316L SST VAR
74-3800 Single Stage, Ultra-High Purity, High Flow
• Internally springless & threadless
• Precision Electro-Polish
• 10 Ra microinch finish
• Tied diaphragm design
•  Cv = .5| 600 PSIG [41 bar]| 30, 60, 100 PSIG [2, 4, 7 bar]| <1 x 10-9| 0-500 SLPM (0-18 SCFM)| 316L SST VAR
23 Single Stage, Ultra-High Purity, High Flow**
• Internally springless & threadless
• Precision Electro-Polish
• 10 Ra microinch finish
• Cv = 1.8| 250, 150 PSIG [17, 10 bar]| 30, 60, 100 PSIG[2, 4, 7  bar]| <1 x 10-9| 0-950 SLPM (0- 34 SCFM)| 316L SST VAR

Gas cabinet pressure regulators

PRODUCT SERIES & FEATURES| SOURCE PRESSURE| DELIVERY PRESSURE| **CERTIFIED INBOARD LEAK RATE*| FLOW RANGE| BODY MATERIAL
---|---|---|---|---|---
64-2600 Single Stage, Ultra-High Purity
• 10 Ra microinch finish
• Free poppet design
• Internal electropolish
•  Cv = .06| 3500 PSIG [241 bar]| 30, 60, 100, 250, 500 PSIG [2, 4, 7, 17, 35 bar]| <1 x 10-9| 0-100 SLPM| 316L SST or 316L SST VAR
64-2800 Single Stage, Ultra-High Purity, Tied Diaphragm
• Tied diaphragm design
• 10 Ra microinch finish
• Hastelloy® trim available
• Cv = .06 (3500 PSIG max. inlet)
•  Cv = .15 (1000 PSIG max. inlet)| 3500, 1000 PSIG  [241, 70 ar]| 30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]| <1 x 10-9| 0-100 SLPM| 316L SST or 316L SST VAR
64-3200 Single Stage, Ultra-High Purity, High Flow, BSGS**
• Tied diaphragm design
• 10 Ra microinch finish
• Hastelloy® trim available
• Cv = 1.2| 1500, 1000 PSIG [103, 70  ar]| 30, 60, 100, 150, 200 PSIG [2, 4, 7, 10, 14 bar]| <1 x 10-9| 0-900 SLPM| 316L SST or 316L SST VAR

Facility pressure regulators

| |
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PRODUCT SERIES & FEATURES| SOURCE PRESSURE| DELIVERY PRESSURE| **CERTIFIED INBOARD LEAK RATE*| FLOW RATE| BODY MATERIAL
---|---|---|---|---|---
22-2200 BA Grade
•Metal-to-metal diaphragm seals
• 25 Ra microinch finish
• Cv = .24| 250 PSIG [17 bar]| 30, 60, 100, 50 PSIG [2, 4, 7, 10 bar]| <2 x 10-8| 0-100 SLPM| 316 SST
22-5400 Single Stage, BA Grade, High Flow
• Free poppet design
• 25 Ra microinch finish
•  Cv = 1.0| 600 PSIG [41 bar]| 30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]| <1 x 10-8| 550 SLPM| 316L SST
44-2200 Single Stage, Low Flow
• Metal-to-metal diaphragm seals
• NPT porting
•  Cv = 0.15| 400 PSIG {28 bar]| 25, 50, 100, 250 PSIG [1.7, 3.5, 7, 17 bar]| ≤ 2 x 10-8| 0-100 SLPM| 316 SST or brass
44-3200 Single Stage, Ultra-High Flow
• Metal-to-metal diaphragm seals
• NPT porting
• Cv = 1.0 & 1.8| 500 PSIG [35 bar]| 25, 50, 100, 150, 200  SIG [1.7, 3.5, 7, 10, 14 bar]| <2 x 10-8| 1000 SLPM (35 SCFM)| 316 SST or brass
449-260 High Flow**
•  10 Ra microinch finish
•  Cv = 2.8| 500 PSIG [35 bar]| 25, 50, 100, 150, 200  SIG [1.7, 3.5, 7, 10, 14

bar]

| <2 x 10-8| 1700 SLPM (60 SCFM)| 316L SST
DH-16 BA Grade, Single Stage, High Flow
•  25 Ra microinch finish
•  Cv = 5.0| 300 PSIG [21 bar]| 50, 100, 150 PSIG [3.5, 7,  0 bar]| N/A| 7075 SLPM (250 SCFM)| 316 SST
15 Series High Purity, Ultra-High Flow
•  Internally threadless
•  10 Ra microinch finish
•  Spring load: Cv = 8
•  Bellows dome load: Cv = 20| 300 PSIG [21 bar]| 130 PSIG [9 bar]| <1 x 10-9| 11,300 SLPM  400 SCFM) 28,300 SLPM (1000 SCFM)| 316L SST

U.Stik miniature pressure controls

PRODUCT & FEATURES| SOURCE PRESSURE| DELIVERY PRESSURE| **CERTIFIED INBOARD LEAK RATE*| FLOW RANGE| BODY MATERIAL
---|---|---|---|---|---
M1 MicroStik Regulator & Valve Manifold
• 12 Series regulator & 14 Series valve
• 10 Ra microinch finish
• Internally springless & threadless
• Internal filter available – 12F| 150 PSIG [10 bar]| 20″ Hg-15, 30, 60, 100 SIG [20″ Hg-1, 2, 4, 7  ar]| <1 x 10-9| 50 or 120 SLPM| 316L SST VAR
M4 MicroStik Regulator & Valve Manifold with Gauge Tee Assembly**
• 12 Series regulator & 14 Series valve
• 10 Ra microinch finish
•  Internally springless & threadless
•  Internal filter available – 12F| 150 PSIG [10 bar]| 20″ Hg-15, 30, 60, 100 SIG  [20″ Hg-1, 2, 4, 7 ar]| <1 x 10-9| 50 or 120 SLPM| 316L SST VAR

Ideal for the semiconductor industry, TESCOM high purity regulators are simple and lightweight — featuring high accuracy and reliability, large flow ranges, and minimal nternal volumes to reduce media contact points. As a global organization, Emerson will help you meet your production needs with both standard and custom solutions, fast elivery, and local support.
Your local contact: Emerson.com/contactus

Visit us: Emerson.com/semiconductor

The Emerson logo is a trademark and service mark of Emerson Electric Co. Brand logotypes are registered trademarks of one of the Emerson family of companies. All other marks are the property of their respective owners. © 2022 Emerson Electric Co. All rights reserved.

www.emerson.com/semiconductor 

References

• Contact Us | Emerson US
• Semiconductor Fabrication & Manufacturing | Emerson US
• Semiconductor Fabrication & Manufacturing | Emerson US
• TESCOM | Pressure Control Regulators & Valves | Emerson US

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