TFM260 Thin Film Monitor

Specifications

• Model: Thin Film Monitor TFM260 rev 1.0
• Manufacturer: Unknown
• Website: https://manual-hub.com/

Introduction

The Thin Film Monitor TFM260 is a device designed for monitoring
thin film deposition processes. It provides real-time measurement
and analysis of various parameters.

Intended Use

The Thin Film Monitor TFM260 is intended to be used in research
and industrial settings for monitoring and controlling thin film
deposition processes.

Liabilities and Warranty

The manufacturer does not assume any liability for damages or
accidents resulting from the use of this product. A warranty period
is provided, details of which can be found in the user manual.

Instrument Safety

It is important to follow safety guidelines when operating the
Thin Film Monitor TFM260. Please refer to the user manual for
detailed instructions.

Definition of Notes, Cautions, and Warnings

The user manual contains important information highlighted
through notes, cautions, and warnings. It is essential to read and
understand these before operating the device.

Personnel Qualifications

Qualified personnel should be responsible for the installation,
operation, and maintenance of the Thin Film Monitor TFM260. They
should be trained in handling similar equipment and have knowledge
of safe operating procedures.

General Safety Instructions

General safety instructions include precautions such as wearing
appropriate protective gear, keeping the device away from moisture
and heat sources, and ensuring proper grounding.

Technical Data

The technical specifications of the Thin Film Monitor TFM260 are
as follows:

• Rack Mounting Options: Yes

• External Dimensions: Refer to user manual for detailed
  dimensions

• Initial Power-On Verification: Refer to user manual for
  detailed instructions

Rack Mounting Options

The Thin Film Monitor TFM260 can be mounted in a rack using the
provided rack mounting options. Please refer to the user manual for
instructions on rack mounting.

External Dimensions

The external dimensions of the Thin Film Monitor TFM260 can be
found in the user manual. These dimensions provide information on
the physical size and shape of the device.

Initial Power-On Verification

Prior to using the Thin Film Monitor TFM260, it is important to
perform an initial power-on verification. This ensures that the
device is functioning correctly and ready for operation. Detailed
instructions for this verification process can be found in the user
manual.

Installation

Unpacking

When unpacking the Thin Film Monitor TFM260, ensure that all
components are present and undamaged. Refer to the package contents
section of the user manual for a detailed list of what should be
included.

Package Contents

The package should include the following items:

• Thin Film Monitor TFM260
• Power cable
• User manual
• Other accessories (if applicable)

Installation Requirements

Prior to installing the Thin Film Monitor TFM260, ensure that
you have met all the necessary requirements. These requirements may
include a stable power supply, proper grounding, and suitable
environmental conditions. Refer to the user manual for detailed
installation requirements.

Front Panel

The front panel of the Thin Film Monitor TFM260 contains various
buttons, indicators, and displays. These components provide access
to the device’s functions and status information. Refer to the user
manual for a detailed description of the front panel.

Rear Panel

The rear panel of the Thin Film Monitor TFM260 features several
connectors and ports. These connections allow for external devices
to be connected to the monitor. Detailed information on the rear
panel and its components can be found in the user manual.

Sensor 1-6 [1]

The Sensor 1-6 connectors on the rear panel are used for
connecting thin film sensors to the monitor. These sensors provide
measurements of various parameters during the deposition
process.

RS-232 [2]

The RS-232 connector enables communication between the Thin Film
Monitor TFM260 and external devices using the RS-232 protocol. This
allows for remote control and data transfer.

Power Connector and Fuse and On/Off Switch [4]

The power connector, fuse, and on/off switch provide power
control for the Thin Film Monitor TFM260. The power connector is
used to connect the monitor to a stable power source.

Analogue Outputs 1-6 [5]

The analogue output connectors allow for the connection of
external devices to receive analogue output signals from the Thin
Film Monitor TFM260. These signals can be used for further analysis
or monitoring purposes.

QM Modules [6]

The QM Modules connectors are used for connecting additional
modules to the Thin Film Monitor TFM260. These modules provide
additional functionalities and expand the capabilities of the
monitor.

Relay I/O [7]

The Relay I/O connectors allow for the connection of external
devices that require relay control. These connectors enable the
Thin Film Monitor TFM260 to control external equipment during the
deposition process.

System Connections

The Thin Film Monitor TFM260 requires various system connections
to function properly. These connections include power, sensor
inputs, communication interfaces, and optional external devices.
Refer to the user manual for detailed instructions on making these
connections.

External Oscillator

The Thin Film Monitor TFM260 supports the use of an external
oscillator for precise timing in certain applications. Refer to the
user manual for information on how to connect and configure an
external oscillator.

Operation

Edit Values

The Edit Values function allows users to modify and adjust
various parameters and settings of the Thin Film Monitor TFM260.
This function provides flexibility in customizing the monitor’s
behavior to suit specific requirements. Detailed instructions on
using the Edit Values function can be found in the user manual.

Main Screen

The Main Screen of the Thin Film Monitor TFM260 provides an
overview of key information and measurements. It displays real-time
data and allows users to access different functions and screens.
Refer to the user manual for a detailed description of the Main
Screen and its components.

Home Window

The Home Window is the default screen displayed on the Main
Screen. It provides quick access to commonly used features and
functions of the Thin Film Monitor TFM260. Detailed information on
the Home Window can be found in the user manual.

Setup Menu

The Setup Menu allows users to configure various settings and
parameters of the Thin Film Monitor TFM260. It provides options for
customizing the monitor’s behavior and adjusting measurement
parameters. Refer to the user manual for detailed instructions on
navigating and using the Setup Menu.

Sensor Tooling Factor

The Sensor Tooling Factor setting in the Setup Menu allows users
to calibrate the thin film sensors connected to the monitor. This
calibration ensures accurate measurements and compensates for any
variations in sensor performance. Detailed instructions on using
the Sensor Tooling Factor can be found in the user manual.

FIFO Filter

The FIFO Filter setting in the Setup Menu enables the use of a
First-In-First-Out filter for incoming data. This filter helps
smooth out variations in measurements and provides a more stable
output. Refer to the user manual for instructions on configuring
and using the FIFO Filter.

Rate Filter Alpha

The Rate Filter Alpha setting in the Setup Menu adjusts the rate
at which measurements are updated. This parameter affects the
responsiveness of the monitor to changes in the deposition process.
Detailed information on configuring and using the Rate Filter Alpha
can be found in the user manual.

Measurement Period

The Measurement Period setting in the Setup Menu defines the
time interval over which measurements are averaged. This parameter
allows users to control the level of smoothing applied to the
output data. Refer to the user manual for instructions on
configuring and adjusting the Measurement Period.

Crystal Frequency Min/Max

The Crystal Frequency Min/Max setting in the Setup Menu defines
the acceptable range of crystal frequencies. This parameter ensures
that only valid signals are processed and used for measurements.
Detailed instructions on configuring and adjusting the Crystal
Frequency Min/Max can be found in the user manual.

Communications

The Communications setting in the Setup Menu allows users to
configure the communication interfaces of the Thin Film Monitor
TFM260. This includes settings for RS-232, Ethernet, and other
communication options. Refer to the user manual for detailed
instructions on configuring and using the Communications
settings.

Operation – Remote Control

RS232 Communication

The Thin Film Monitor TFM260 supports remote control and
communication via the RS232 interface. This allows for external
devices to send commands and receive data from the monitor.
Detailed information on using RS232 communication can be found in
the user manual.

Ethernet Port

The Thin Film Monitor TFM260 features an Ethernet port for
remote control and communication over a network. This enables users
to access and control the monitor from a remote location. Refer to
the user manual for instructions on configuring and using the
Ethernet port.

FAQ

Q: What is the warranty period for the Thin Film Monitor

TFM260?

A: Please refer to the user manual for information on the
warranty period provided by the manufacturer.

Q: Can I mount the Thin Film

USER MANUAL
Thin Film Monitor TFM260 rev 1.0

Search

Search

Contents

1 INTRODUCTION

9

1.1 INTENDED TO USE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.2 LIABILITIES AND WARRANTY . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.3 INSTRUMENT SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.3.1 DEFINITION OF NOTES, CAUTIONS AND WARNINGS . . . . . . . . . 9

1.3.2 PERSONNEL QUALIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . 10

1.3.3 GENERAL SAFETY INSTRUCTIONS . . . . . . . . . . . . . . . . . . . . 11

2 TECHNICAL DATA

13

2.1 Rack Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

2.2 EXTERNAL DIMENSIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

2.3 INITIAL POWER-ON VERIFICATION . . . . . . . . . . . . . . . . . . . . . . . . 17

3 INSTALLATION

18

3.1 UNPACKING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

3.1.1 PACKAGE CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

3.2 INSTALLATION REQUIREMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . 19

3.3 FRONT PANEL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.4 REAR PANEL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.4.1 SENSOR 1-6 [1] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.4.2 RS-232 [2] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.4.3 POWER CONNECTOR AND FUSE AND ON/OFF SWITCH [4] . . . . . . 22

3.4.4 ANALOGUE OUTPUTS 1-6 [5] . . . . . . . . . . . . . . . . . . . . . . . . 22

3.4.5 QM MODULES [6] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

3.4.6 Relay I/O [7] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

3.5 SYSTEM CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

3.6 EXTERNAL OSCILLATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

4 OPERATION

30

4.1 EDIT VALUES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

4.2 MAIN SCREEN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

4.2.1 HOME WINDOW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

4.3 SETUP MENU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

4.3.1 SENSOR TOOLING FACTOR . . . . . . . . . . . . . . . . . . . . . . . . 32

4.3.2 FIFO FILTER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

4.3.3 RATE FILTER ALPHA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

4.3.4 MEASURMENT PERIOD . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

4.3.5 CRYSTAL FREQUENCY MIN/MAX . . . . . . . . . . . . . . . . . . . . . 35

4.3.6 COMMUNICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

3

Search

4.3.7 ANALOGUE OUTPUTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37 4.3.8 RELAY OUTPUTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 4.3.9 ASSIGNING INPUTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 4.3.10 ADVANCED SETTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 4.3.11 EXTERNAL CHANNEL . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 4.3.12 INFORMATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.4 MATERIAL LIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.4.1 ADD MATERIAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.4.2 EDIT MATERIAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 4.4.3 DELETE MATERIAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 4.5 FILM MENU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 4.5.1 RATE SAMPLING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 4.6 SENSOR INFO MENU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

5 OPERATION – REMOTE CONTROL

47

5.1 RS232 COMMUNICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

5.2 ETHERNET PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

5.3 COMMUNICATIONS PROTOCOL . . . . . . . . . . . . . . . . . . . . . . . . . . 48

5.4 COMMAND PACKET . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

5.5 RESPONSE PACKET . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

5.6 CALCULATING THE CRC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

5.7 COMMANDS LIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

6 TROUBLESHOOTING

52

7 CALIBRATION PROCEDURES

57

7.1 IMPORTANCE OF DENSITY, TOOLING AND Z-RATIO . . . . . . . . . . . . . . 57

7.2 DETERMINING DENSITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57

7.3 DETERMINING TOOLING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . 58

8 Measurement and Theory

60

8.1 TOLLING FACTOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

8.2 MATERIAL LIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62

9 MAINTANCE AND SERVICE

72

9.1 MAINTANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

9.2 CLEANING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

9.3 CHECK FOR CORRECT OPERATION – TEST QUARTZ . . . . . . . . . . . . . 72

9.4 FIRMWARE UPDATE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

9.4.1 DOWNLOAD FIRMWARE FILE . . . . . . . . . . . . . . . . . . . . . . . . 72

9.4.2 DEVICE BOOT-LOADER MODE . . . . . . . . . . . . . . . . . . . . . . . 73

9.4.3 FIRMWARE UPDATE PROCEDURE . . . . . . . . . . . . . . . . . . . . . 73

4

Search

10 STORAGE AND DISPOSAL

74

10.1 PACKING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

10.2 STORAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

10.3 DISPOSAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

10.3.1 Waste Electrical and Electronic Equipment (WEEE) . . . . . . . . . . . . 74

11 WARRANTY CONDITIONS

76

5

Search

List of Tables
2.1 Technical specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 2.2 IO Interface Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 2.3 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 2.4 Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 2.5 Dimensions & Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 2.6 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 3.1 Package set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 3.2 RS232 connector – Pin functions and descriptions . . . . . . . . . . . . . . . . . 21 3.3 RJ-45 Connector Pinout(Data & Power) . . . . . . . . . . . . . . . . . . . . . . . 22 3.4 Relay I/O – Pin functions and descriptions . . . . . . . . . . . . . . . . . . . . . . 26 4.1 Analogue outputs functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 4.2 Relay outputs function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 4.3 Digital inputs function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 5.1 Command packet – field descriptions . . . . . . . . . . . . . . . . . . . . . . . . . 48 5.2 Response packet – field descriptions . . . . . . . . . . . . . . . . . . . . . . . . . 49 5.3 TFM260 commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 6.1 Write device address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 8.1 Material table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71 10.1 Storage parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
6

Search

List of Figures
2.1 TFM260 external dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 2.2 External dimensions External oscillator(EO) . . . . . . . . . . . . . . . . . . . . . 17 2.3 Main screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.1 TFM260 front panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 3.2 TFM260 external dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 3.3 RS232 connector (D-sub female 9 pin ) . . . . . . . . . . . . . . . . . . . . . . . 21 3.4 Power connector module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 3.5 Power connector module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 3.6 External QMB6 module – RS232 . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 3.7 External QMB6 module – RS485 . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 3.8 RS232 connector (D-sub male 15 pin ) . . . . . . . . . . . . . . . . . . . . . . . 25 3.9 System connection – example diagram . . . . . . . . . . . . . . . . . . . . . . . . 26 3.10 QMB6-EO connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
4.1 Edit Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 4.2 Main Screen Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 4.3 TFM260 Home Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 4.4 Unit change example screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 4.5 Setup menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 4.6 Toolng Factor submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 4.7 FIFO filter submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4.8 Alpha filter submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4.9 Alpha filtering diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4.10 Measurment peroid submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35 4.11 Crystal Min/Max submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35 4.12 Serial interface and Ethernet parameters . . . . . . . . . . . . . . . . . . . . . . 36 4.13 Analogue Outputs Submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 4.14 Relay Outputs Submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 4.15 Digital Inputs Submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 4.16 Configuration Submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 4.17 External channel configuration Submenu . . . . . . . . . . . . . . . . . . . . . . 41 4.18 External channels avalible on Sensor List . . . . . . . . . . . . . . . . . . . . . . 42 4.19 External channels avalible on Setup menu(example) . . . . . . . . . . . . . . . . 42 4.20 Material Menu Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.21 Material Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.22 Add Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 4.23 Edit Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 4.24 Film menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
7

Search

TFM260 Thin Film Monitor

8

4.25 Sensor Info . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
8.1 Tooling factor over 100% . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61 8.2 Tooling factor under 100% . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
10.1 Waste Electrical and Electronic Equipment (WEEE) Symbol . . . . . . . . . . . . 75

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany

Search

9

TFM260 Thin Film Monitor

1 INTRODUCTION
Please read this manual carefully to ensure optimum operating conditions right from the start. This user manual handbook contains important information about the functionality, installation, start-up and operation of the Thin Film Monitor TFM260 .
1.1 INTENDED TO USE
TFM260 uses quartz crystal sensor technology to measure rate and thickness in a thin film deposition process. Two sensor inputs are standard and four additional sensor inputs are optional. Six recorder outputs provide both analog rate, thickness or frequency signals. Sensor inputs are assigned to different materials, averaged for accurate deposition control in large systems or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.01 Å/s. In addition, frequency or mass displays can be selected. Four relay outputs allow TFM260 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings. TFM260 comes with an RS-232 and Ethernet port. The implemented protocol is compatible with Inficon SQM-160 and you can use the same software to operate the TFM260 . The software can be used to set and store all parameters, operate TFM260 and save process data in a .txt file that can be imported into Excel.
1.2 LIABILITIES AND WARRANTY
BeamTec company is not liable for damages resulting from improper use of the device and the guarantee expires, if the user, or third party:
· ignores information contained in this manual, · utilizes the product in a manner inconsistent with intended purpose, · makes any modification or alteration of the product, · unit should not be used with unauthorized accessories (compatible accessories, types
and models can be found in the product documentation)
BeamTec company reserves the right to make changes without prior notice. Illustrations may vary depending on the version of the device.
1.3 INSTRUMENT SAFETY
1.3.1 DEFINITION OF NOTES, CAUTIONS AND WARNINGS
When using this manual, please pay attention to the notes, cautions and warnings found throughout. For the purposes of this manual they are defined as follows: NOTE: Pertinent information that is useful in achieving maximum TFM260 efficiency when followed.

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

10

CAUTION

Indicates particularly important, but not safety-relevant information. Failure to heed these messages could result in damage to TFM260 or the loss of data.
WARNING

Failure to heed these messages could result in personal injury. Information on correct handling or use. Disregarding safety notes can lead to malfunctions.

1.3.2 PERSONNEL QUALIFICATIONS
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end user of the product.

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

11

TFM260 Thin Film Monitor

WARNING

Risk Of Electric Shock Dangerous voltages are present, which could result in personal injury.
1.3.3 GENERAL SAFETY INSTRUCTIONS
CAUTION

TFM260 contains delicate circuitry, susceptible to transient power line voltages. Disconnect the power cord whenever making any sensor connections
CAUTION

TFM260 may not be suitable for use with RF sputtering systems or other electrically noisy environments.
For all work you are going to do, adhere to the applicable safety regulations. Also observe all safety notes given in this document and forward the information to all other users of the product.

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

12

CAUTION
Do not open the instrument case! There are no user-serviceable components within instrument case Do not open the TFM260 case. Refer all maintenance to qualified personnel. There are no user-serviceable components within the TFM260 case. Dangerous voltages may be present whenever the power cable or external input/relay connectors are present.

CAUTION
TFM260 contains delicate circuitry TFM260 contains delicate circuitry, susceptible to transient power line voltages. Disconnect the power cable whenever making any interface connections. Refer all maintenance to qualified personnel.

WARNING
Risk Of Electric Shock TFM260 must be connected to earth ground through a sealed three-conductor power cable plugged into a socket outlet with protective ground terminal. Extension cables must have three conductors including a protective earth ground.
WARNING
Failure to operate TFM260 in the manner intended by BeamTec can circumvent the safety protection provided by the instrument and may result in personal injury.

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

13

TFM260 Thin Film Monitor

2 TECHNICAL DATA

PARAMETER Frequency Resolution Measurement Interval Quartz oscillator type Reference frequency stability Sensor inputs External sensor inputs
Input type Protocol Thickness and Rate Resolution/Measurement

VALUE 0.01 Hz at 10 readings/s 0.1s to 2s (adjustable in 0.1s step) 6 MHz 0.5 ppm
2(standard), up to 6(optional) 1 inputs RS232/RS485 (up to 3 devices working with RS485 interface) female BNC Compatible with INFICON SQM160 ASCII Protocol ±0.012 A @ tooling/density/z-ratio = 100/1/1, fundamental frequency = 6 MHz, 0.1s measurement interval

Table 2.1: Technical specifications

2.1 Rack Mounting Options
Rack mount kits allow one or two TFM260 instruments to be installed in a standard 48.3 cm (19 in.) rack. TFM260 is designed to mount in a standard 48.3 cm (19 in.) rack using optional rack mount kits or can be used on a benchtop. Two rack mount kits are available:
· Full Rack Extender · Rack Adapter
For detail information please contact the sales department of BeamTec .

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

14

PARAMETER Digital inputs Functions Input rating Relay outputs Functions Relay rating Analogue outputs Functions
Output rating

VALUE 4 User-selected see chapter 4.3.9 0-5V, non-isolated, active low(0 volts) 4 User-selected see chapter 4.3.8 30V(rms) or 30V (dc), 2A maximum 6 Frequency, rate, thickness. User-selected see chapter 4.3.7 for detail information 0-10V

Table 2.2: IO Interface Parameters

PARAMETER Mains Power Supply Power Consumption Fuse Installation (Overvoltage)

VALUE 100 to 240V (ac), ±10% nominal, 50/60 Hz, autodetect 45W 250 V, 500 mA, Type T, 5 x 20 mm, time lag Class 1 Equipment (grounded type).

Table 2.3: Power

PARAMETER Usage Storage temperature Operation temperature Relative humidity
Altitude Pollution Degree Warm Up Period

VALUE Use indoors only -20…50°C 15…40°C 0 to 80 % RH non-condensing. Ordinary protection (not protected against harmful ingress of moisture). Up to 2000 meters 2 (per EN 61010) None required. For maximum stability allow 5 minutes.

Table 2.4: Operating Environment

PARAMETER Case Dimensions H x W x D Weight

88 x 252.6 x 264 mm 1.7 kg

VALUE

Table 2.5: Dimensions & Weight

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

15

TFM260 Thin Film Monitor

PARAMETER Stored Films Density Tooling Acoustic impedance Final Thickness Time Setpoint Sample/Hold. Sensor Average

VALUE 99 0.50 to 99.99 g/cm3 10 to 399% 0.10 to 10.00 0.000 to 9999 kÅ 0:00 to 99:59 mm:ss 0 to 5999 s 1 to 6, depending on sensors installed
Table 2.6: Film Parameters

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

16

2.2 EXTERNAL DIMENSIONS

Figure 2.1: TFM260 external dimensions
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

17

TFM260 Thin Film Monitor

TFM260 cooperating with QMB6-EO is the external oscillator and the dimensions shown below.

Figure 2.2: External dimensions External oscillator(EO)
2.3 INITIAL POWER-ON VERIFICATION
A preliminary functional check of TFM260 can be made before formal installation. It is not necessary to have sensors, source controls, inputs, or relays connected to do this. For more complete installation see chapter 3.
1. Confirm that the proper AC line mains voltage is supplied to TFM260 . 2. Confirm that the rear panel (main) AC switch is in the ON Position. 3. After the initial boot-up screen, TFM260 will display the main screen. This screen will be
similar to the screen displayed in figure 2.3.
Figure 2.3: Main screen
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

18

3 INSTALLATION
This chapter describes the procedures for unpacking, mechanical installation and electrical installation.
3.1 UNPACKING
1. If the TFM260 has not been removed from its packaging, do so now. 2. Carefully examine TFM260 for damage that may have occurred during shipping. It is
especially important to note obvious rough handling on the outside of the container. Immediately report any damage to the carrier and to BeamTec .
NOTE: Do not discard the packaging material until inventory has been taken and installation is successful. 3. Refer to the invoice and take inventory. 4. To install TFM260 , see next sections in this Chapter. 5. For additional information or technical assistance, contact BeamTec .

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

19

TFM260 Thin Film Monitor

3.1.1 PACKAGE CONTENTS

Compare the contents of the package with the list below appropriate for your version of the hardware device.

TFM260 Power cord 1.8m User Manual

Description

Quantity 1 pcs. 1 pcs. 1 pcs.

Table 3.1: Package set

3.2 INSTALLATION REQUIREMENTS
· TFM260 Monitor · Crystal sensor with feedthrough · Oscillator kit for the crystal sensor · Quartz crystals appropriate for the application

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

20

3.3 FRONT PANEL

Figure 3.1: TFM260 front panel
1. Screen TFT screen 480×272 dpi. With integrated resistive touchscreen.
2. Control Knob Used to adjust values and select menu items. The functions of the knob change to adapt to different operations and are displayed on the the screen.
3. USB socket USB type A socket. Allows to update the device by inserting a pendrive with firmware files. Allows to read/write device configuration and transfer it to another the same type device.
3.4 REAR PANEL

Figure 3.2: TFM260 external dimensions
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

21

TFM260 Thin Film Monitor

3.4.1 SENSOR 1-6 [1] BNC connection to the oscillators for sensors 1 to 6 (depending of device configuration, available version 2CH, 4CH and 6CH)

3.4.2 RS-232 [2] Connection to computer for programming and data acquisition 9 pin female d-sub type connector.

Figure 3.3: RS232 connector (D-sub female 9 pin )

PIN NUMBER Pin 2 Pin 3 Pin 5

FUNCTION Rx Tx GND

DESCRIPTION Data input(receive line) Data output(transmit line) Reference signal for data lines

Table 3.2: RS232 connector – Pin functions and descriptions

Ethernet port [3] Connection to computer for programming and data acquisition. Detail information about port configuration see section 4.3.6.

Figure 3.4: Power connector module

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

22

PIN NUMBER Pin 1: Pin 2: Pin 3: Pin 4 Pin 5 Pin 6 Pin 7 Pin 8

FUNCTION RX+ RXTX+ n.c n.c TXn.c n.c

DESCRIPTION Data receive(+) Data receive(-) Data transmit(+) not connected not connected Data transmit(-) not connected not connected

Table 3.3: RJ-45 Connector Pinout(Data & Power)

3.4.3 POWER CONNECTOR AND FUSE AND ON/OFF SWITCH [4] Receptacle for mains power. TFM260 contains a universal power supply capable of accepting 100 to 240 V (ac) input at 50/60 Hz. Fuse is 5 x 20 mm, 500 mA, 250 V time

Figure 3.5: Power connector module
1. The ON/OFF Switch Turns the TFM260 power ON(I) or OFF(O). 2. Fuse sockets 3. Receptacle for mains power.
3.4.4 ANALOGUE OUTPUTS 1-6 [5] Provides 0 to 10 V (DC) analogue outputs for rate, thickness and frequency readings. Value provide to each output is configurable by SETUP MENU. The assignment of the value type(rate, thickness, freq) and value range to each output is configurable in setup menu see section 4.3.7.
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

23

TFM260 Thin Film Monitor

3.4.5 QM MODULES [6] The device has been equipped with a connector enabling direct connection of the QM module. It is possible to connect up to 3 modules depends on TFM260 hardware configuration and QMB6 interface kind. The device can support up to 6 channels at the same time. At the purchase stage, the number of internal channels of the device (2, 4 or 6 channels) is defined. In the case of the number of channels smaller than 6, it is possible to connect an external QMB6 module. Each external QMB6 module uses two measuring channel of the TFM260 . For example, a device equipped with 2 internal channels can be connected with a maximum of 2 (using 4 measuring channels) external modules.
The connection cable should be made in the standard 1 to 1. To make the cable, use a wire with a minimum wire diameter of 0.5mm2 see picture 3.6.
The configuration of the attached module is done from the user interface level, see section: 4.3.11

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

24

3.4.5.1 EXTERNAL RS232 MODULE
Only one QMB6 module can be connected with the RS232 interface. Example wiring diagram see picture 3.6.

Figure 3.6: External QMB6 module – RS232

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

25

TFM260 Thin Film Monitor

3.4.5.2 EXTERNAL RS485 MODULE
Up to 3 QMB6 module can be connected with the RS485 interface. Maximum module count depends on hardware configuration. The modules are connected in parallel. Example wiring diagram see picture 3.7.

Figure 3.7: External QMB6 module – RS485
3.4.6 Relay I/O [7] Connects 4 relays and 4 digital inputs to external devices. Each of the inputs and outputs can be assigned one of several functions. Is configurable in setup menu, see section 4.3.8.
Figure 3.8: RS232 connector (D-sub male 15 pin )
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

26

PIN NUMBER Pins 1,2

FUNCTION Relay 1

Pins 3,4

Relay 2

Pins 5,6

Relay 3

Pins 7,8

Relay 4

Pin 9

Input 1

Pin 10

Input 2

Pin 11

Input 3

Pin 12

Input 4

Pins 13, 14, 15

Ground

DESCRIPTION
Normal open contact, activating dependent on user setting
Normal open contact, activating dependent on user setting
Normal open contact, activating dependent on user setting
Normal open contact, activating dependent on user setting
Digital input pin, active low, action dependent on user settings
Digital input pin, active low, action dependent on user settings
Digital input pin, active low, action dependent on user settings
Digital input pin, active low, action dependent on user settings

Table 3.4: Relay I/O – Pin functions and descriptions

3.5 SYSTEM CONNECTIONS

A maximum of 6 sensors can be connected to the device (depending on the device’s hardware version).

Figure 3.9: System connection – example diagram
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

27

TFM260 Thin Film Monitor

CAUTION

The inputs are not isolated. The inputs are not isolated. The voltage level applied must be limited between 0 and +5 V (dc), with respect to ground.
CAUTION

Output relays Output relays are rated for 30 V (rms) or 30 V (dc), at 2 A maximum. Provide proper fusing and adequate wiring insulation and separation in case the limits are exceeded.

· Sensor Holds the quartz crystal used to measure rate and thickness. Crystals must routinely be replaced. Refer to the appropriate sensor operating manual for installation and maintenance instructions particular to that sensor.
· In-Vacuum Cable Connects the sensor to the feedthrough.
· Feedthrough Provides isolation between vacuum and atmosphere for electrical connections, water, air, and/or purge gas tubes.
· BNC Cable – 15cm Provides a flexible connection from the feedthrough to the oscillator.
· Oscillator Contains the electronics to operate the quartz crystal. The length from the oscillator to the crystal should be under 10 m.
· BNC Cable – 3m Connects the oscillator to TFM260 . Lengths up to 10m are acceptable.
An external oscillator QMB6-EO need be used for each channel separately. Connecting to the TFM260 :
1. Connect one end of the oscillator cable(coaxial cable) to selected TFM260 sensor connector.

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

28

WARNING

Maintain adequate insulation and physical separation of sensor and I/O wiring from hazardous voltages.
2. Connect the other end of the oscillator cable(coaxial cable) to BNC connector on the external oscillator(QMB6-EO ) labelled INSTRUMENT
3. Connect one end of the 15cm BNC cable to the BNC connector on the external oscillator(QMB6EO ) labelled SENSOR.
4. Connect the other end of the 15cm BNC cable to the BNC connector on the feedthrough
CAUTION

Proper TFM260 performance
· To maintain proper TFM260 performance, use only the provided 15 cm BNC cable to connect TFM260 or the oscillator to the crystal sensor. The length of the in-vacuum cable (Front Load and Sputtering sensors) or electrical conduit tube (Cool Drawer and Bakeable sensors) must not exceed 75cm.
· The maximum BNC cable length between external oscillator TFM260 -EO and TFM260 is 10m.

3.6 EXTERNAL OSCILLATOR
An external oscillator QMB6-EO need be used for each internal channel separately. In order to connect QMB6-EO to the TFM260 :
1. Connect one end of the oscillator cable(coaxial cable) to selected TFM260 sensor connector.
2. Connect the other end of the oscillator cable(coaxial cable) to BNC connector on the external oscillator(QMB6-EO ) labelled INSTRUMENT
3. Connect one end of the 10cm BNC cable to the BNC connector on the external oscillator(QMB6EO ) labelled SENSOR.
4. Connect the other end of the 10cm BNC cable to the BNC connector on the feedthrough,

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

29

TFM260 Thin Film Monitor

Figure 3.10: QMB6-EO connectors
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

4 OPERATION
This chapter details the operation of the TFM260 menus and front panel controls.
4.1 EDIT VALUES
Editing the values that appear on the screen when using the device is done using the knob or buttons on the left side of the screen. Editing the value by turning the knob: turning to the right increases the edited value, while to the left it decreases. Editing the value using the buttons: By means of the “+” and “-” buttons, the edited value is increased and decreased accordingly.
Figure 4.1: Edit Values
4.2 MAIN SCREEN
On the left side of the screen there are buttons for selecting individual views available in the device:
1. HOME – display Home Window with main sensor parameters. 2. FILM MENU – displays the configuration window of individual films defined in the device. 3. SENSORS INFO – summarized in Table displays detailed information on the current status
of measuring inputs.
30

Search

31

TFM260 Thin Film Monitor

Figure 4.2: Main Screen Buttons
4. GRAPH – draws a graph based on the parameters defined in Setup Menu. 5. SETUP MENU – opens a menu with options enabling advanced configuration of device
operation parameters, input and output settings, etc.
4.2.1 HOME WINDOW

Figure 4.3: TFM260 Home Screen
1. Sensor select list – selection of the sensor. all parameters below are directly related to the sensor selected from the list.
2. Film select list – assigning selected film to the selected sensor. In order to modify the settings of a given module, go to the FILM MENU, see section 4.5.
3. Crystal life indicator – show crystal life status for selected sensor. The indications depend on the settings in the menu 4.3.5. Pressing this field displays the Crystal Min/Max configuration menu.
4. Rate value – show current rate value for selected sensor 5. Rate unit – Pressing this field displays unit change list see figure 4.4 6. Thickness value – show current thickness value for selected sensor, 7. Thickness unit – Pressing this field displays unit change list see figure 4.4
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

32

8. Time value – show current time value, when shutter is opened then value is increment, for selected sensor
9. Setpoint mode – indicate current setpoint mode for select film. Pressing this field displays the FILM MENU.
10. Shutter button pressing button open shutter(if configured) and reset Time
11. Zero button – pressing button reset thickness value for selected sensor

Figure 4.4: Unit change example screen
4.3 SETUP MENU

Figure 4.5: Setup menu
1. “Go Back” button – Depending on the menu level you are currently in, it causes various actions: return to the level menu above or return to the main screen.
2. “UP” button – move swipe list Up 3. “DOWN” button – move swipe list Down 4. “MATERIAL EDIT” – displays the material editing menu 5. Items list – selecting and pressing the item will take you to the next menu level,
4.3.1 SENSOR TOOLING FACTOR
Sensor Tooling adjusts for the difference in deposition rate between the sensor and the substrate being coated. It is an empirically determined value that aligns the sensor readings to the vacuum system.
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

33

TFM260 Thin Film Monitor

Figure 4.6: Toolng Factor submenu
1. Sensor Item, 2. Tooling factor value for sensor,
· 100% tooling indicates that the sensor and substrate receive the same amount of material during deposition.
· Tooling values over 100% indicate that the sensor receives less material than the substrate (see section 8.1).
· Tooling values under 100% indicate that the sensor receives more material than the substrate (see section 8.1).
Tooling is set in the System menu. It adjusts the tooling for each individual sensor before it is averaged. Sensor Tooling for a sensor applies to all films. If the Sensor Tooling parameters are set properly, a sensor failure will not cause a jump in the average Rate and Thickness reading. The value can be set in the range from 10% to 400% Also check: “Film Tooling Factor” section 4.5.
4.3.2 FIFO FILTER
The number of readings averaged for the frequency, thickness and rate display. Values of 1 to 63 are valid. A value of 0 indicates no averaging. The parameter value is set for each channel separately.
1. Sensor Item, 2. Fifo Filter value for sensor, NOTE: The number of readings averaged per second is dependent on the Measurement period settings see 4.3.4.
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

34

Figure 4.7: FIFO filter submenu
4.3.3 RATE FILTER ALPHA
Selects the amount of filtering used to display rate data. An Alpha of 1 is no filtering. An Alpha of 0.1 is heavy filtering. The parameter value is set for each channel separately.

Figure 4.8: Alpha filter submenu 1. Sensor Item, 2. Alpha Filter value for sensor, NOTE: Low alpha values give a very stable display, but will lag actual rate readings and can hide noise problems.
Figure 4.9: Alpha filtering diagram
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

35

TFM260 Thin Film Monitor

4.3.4 MEASURMENT PERIOD
Sets the measurement interval between 0.1 second (10 readings per second) and 2 second. The parameter value is common to all internal measurement channels. For external channels(if available), the value can be set individually. A longer period gives higher reading accuracy, especially in low rate and low density applications. Time required for a measurement. Longer times yield higher accuracy.

Figure 4.10: Measurment peroid submenu
1. Sensor Item, 2. Measurement period for internal channels, 3. (*) Measurement period for connected external modules,
4.3.5 CRYSTAL FREQUENCY MIN/MAX
Sensor Minimum and Maximum frequencies establish the operating range for the sensing quartz crystals. Both values are used to determine the % life that is displayed in Xtal Life mode. When the sensor frequency reads below the minimum or above the maximum, TFM260 indicates a sensor failure (crystal fail) with a red color Crystal Status indicator.

Figure 4.11: Crystal Min/Max submenu
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

36

Figure 4.11 description:
1. Sensor Item,
2. Crystal frequency minimum, if the value is smaller then the device displays the status “XTAL FAIL”,
3. Crystal frequency maxiumum, if the value is bigger then the device displays the status “XTAL FAIL”
Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts (mode hopping) before total failure. Depending on the material, crystals may fail well before the typical 5 MHz minimum. If the crystals consistently fail early, set FREQ MIN to a value higher than 5 MHz to provide a Crystal Life warning that is consistent with actual failure. A sensor crystal with an initial value that exceeds the maximum frequency will also cause a flashing Crystal Status indicator. The maximum frequency can be set slightly above the nominal values with no effect on accuracy.
TFM260 calculates the crystal life value based on the current frequency compared to the / values set in the System menu. A new crystal should indicate between 95 and 100% crystal life.
CAUTION

Crystal life status Usable crystal life depends on the material being evaporated and other process characteristics. Rate noise and other failure modes may be observed before the crystal life value reaches 0%.

4.3.6 COMMUNICATIONS

Figure 4.12: Serial interface and Ethernet parameters
1. Baudrate select list 2. DHCP checkbox – if checked then DHCP is enabled
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

37

TFM260 Thin Film Monitor

3. Cable status – display information about ethernet cable, in order to easily diagnose basic connection problems.
· Cable disconnected – when cable is not plug to the RJ45 socket · Cable connected – when cable is plug correctly and TFM260 communicates correctly
with another network device (router, switch, computer)
4. Internet protocol address – the value is editable when DHCP is disabled, otherwise the value is greyed out and can not be edited.
5. Net mask – the value is editable when DHCP is disabled, otherwise the value is greyed out and can not be edited.
6. Gateway address – the value is editable when DHCP is disabled, otherwise the value is greyed out and can not be edited.

4.3.6.1 RS232
RS-232 serial communications are accomplished through an industry standard 9-pin female connector found on the TFM260 rear panel (refer to 3.4.2). A mating male connector is required to attach a host interface. The host and TFM260 can be separated by up to 15 m using a multiconductor shielded data cable. For successful communications, the baud rate of the host computer and TFM260 must match. Available baud rate options are: 19200, 38400, 57600, and 115200 bps. NOTE: Unpredictable RS-232 hardware/software combinations may occasionally cause a command to not be recognized by TFM260 . Consequently, all communications should include an automatic retry procedure. If a command sent using RS-232 does not produce a response from TFM260 within three seconds, it should be sent again.
4.3.6.2 Ethernet
For Ethernet communications, TFM260 uses the static Internet Protocol (IP) (default address 192.168.0.100) The optional TCP/IP interface supports only the Standard Ethernet TCP/IP protocol. TFM260 will communicate using TCP/IP on TCP port number 2101. DHCP is also supported.
4.3.7 ANALOGUE OUTPUTS
TFM260 features analog outputs that will produce a 0 to 10 V (dc) representative of the current rate, thickness or frequency. Analogue outputs connectors are available on rear panel see section 3.4.4 You can assign any type of signal from any sensor to any analogue output. It is also possible to assign the same signal several times to several analogue outputs.
1. Analogue output Item,
2. Parameter selection list
3. Sensor selection list
4. Minimum value for selected parameter – corresponds with 0V on analogue output

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

38

Figure 4.13: Analogue Outputs Submenu

5. Maxiumum value for selected parameter – corresponds with 10V on analogue output

Analogue outputs must be set to match the device that will be attached to the Rate, Thickness or Frequency output. The value of the analogue output is constantly updated 10 times per second.

PARAMETER Frequency Rate Thickness

MIN VALUE 4500000Hz -100 A/s 0

Table 4.1: Analogue outputs functions

MAX VALUE 6500000Hz 100 A/s 9999kA

4.3.8 RELAY OUTPUTS
The Relay outputs menus of the System Parameters menu allow the operator to display and edit relays function. Allows to assign relay functions to physical relay output.

Figure 4.14: Relay Outputs Submenu
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

39

TFM260 Thin Film Monitor

PARAMETER Thickness setpoint Crystal Failure
Shutter Dual sensor Forced ON Forced OFF

VALUE
Relay is activate when thickness value reached setpoint
Relay is activate when the sensor frequency reads below the minimum or above the maximum
Relay is connected with button on main screen, and is activated when button is pressed
Relay is connected with button on main screen, and is activated when button is
Selected relay is switched ON permanently
Selected relay is switched OFF permanently

Table 4.2: Relay outputs function

4.3.9 ASSIGNING INPUTS
The options allow you to configure the behavior of the device in relation to the input signals.

Figure 4.15: Digital Inputs Submenu

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

40

PARAMETER Zero Time Zero Thickness Open/Close shutter
None

VALUE The time of the assigned sensor is reset The thickness of the assigned sensor is reset The shutter open/close signal is provided to assigned sensor input inactive

Table 4.3: Digital inputs function

4.3.10 ADVANCED SETTINGS
The options available in this submenu allow advanced configuration of device parameters.

Figure 4.16: Configuration Submenu
1. BEEP SIGNAL – turns on / off the sound signal when using the device 2. ETCHING MODE – Sets the rate and thickness to negative values for etching applications. 3. CONFIGURATION – Allows you to save / load the device configuration. To do this, connect
a USB stick to the device and select the: · “SAVE FILE” for export device configuration to USB stick, · “LOAD FILE” for load device configuration from USB stick,
Configuration is save as a text file that can be previewed and edited using any text editor. 4. USB STATUS – display current USB status:
· DISCONECTED – usb media not connected to the device or not recognized correctly, · CONNECTED – usb carrier correctly recognized and ready to read / write, 5. LOAD DEFAULT SETTINGS – Set all device parameters to default · Setup menu settings, · Material menu parameters(Remove user define parameters),
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

41

TFM260 Thin Film Monitor

· Film menu settings(all films are set to default parameters), 6. SERVICE MENU – Menu available only for the device manufacturer, is used for calibration
and testing of the device at the production stage.
4.3.11 EXTERNAL CHANNEL

Figure 4.17: External channel configuration Submenu
External channel submenu is used to configure the operating parameters with the external measuring module. Default, the support of external modules is disabled: parameter Number of modules is set to 0. Selecting from the list a value other than 0 activates the operation of external modules. The module is visible in the device as two consecutive measurement channels, with the extension “ext” added, example main screen and setup menu see pictures 4.18, 4.19.

BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

42

Figure 4.18: External channels avalible on Sensor List
Figure 4.19: External channels avalible on Setup menu(example)
1. Interface type of the included QM module, available options: · RS232 · RS485
2. The number of modules connected to the device, for the RS232 interface, the option is not active and always equal to 1. For RS485, up to three modules can be selected.
3. This option is used when connecting a module with an RS485 interface. It allows you to choose the address under which you should look for the first module. For example, for two connected modules and the starting address 5, the device assumes that the second module has the address 6.
4. Module status items, return information about current status of connected external modules · “CONNECTION ESTABLISHED” – the external module is connected and the communication has been correctly established, · “NO DEVICE” – module is enabled for communication but is not connected · “DISABLED” – module disabled for communication,
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

43

TFM260 Thin Film Monitor

4.3.12 INFORMATION
Contains information about the software version on the device and the modules attached to it.

4.4 MATERIAL LIST
The device has factory defined over 80 materials and additionally allows you to define up to 10 of your materials. The list consists of three columns: material name, acoustic impedance value and A Z-Factor value. The materials are displayed in alphabetical order. The material defined by the user may have an individual name and parameters.

Figure 4.20: Material Menu Buttons

Figure 4.21: Material Menu
4.4.1 ADD MATERIAL
The material is added by pressing the ADD MATERIAL button. Default parameters for each added material item.
· Name: UserDef(n), · Acoustic Impedance: 1.00, · Z-Factor: 1.00,
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

44

4.4.2 EDIT MATERIAL

Figure 4.22: Add Material

Figure 4.23: Edit Material Acoustic Impedance value and Z-Factor value for all items on the material list can be modified by the user. In addition, for material defined by the user, the name of the material can be modified at any time. The modified material will appear in the material list in alphabetical order. it is possible to restore the list of materials to the factory state (default values). To do this, use the option “Load default parameters”. See the section: 4.3.10
4.4.3 DELETE MATERIAL
if for any reason you want to delete the material, you can do it using the DELETE MATERIAL button. It is possible to remove only those materials that we previously defined ourselves. It is not possible to delete factory-defined materials.
4.5 FILM MENU
The Film menu aids in programming TFM260 for the materials that will be deposited. Ninetynine films can be stored, but only one film for each sensor is active at any time.
1. Film select list – selection of film to edit 2. Material select list – assigning the selected material to the selected sensor. Material list
and edit material parameters see section 4.4 3. Setpoint selection:
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

45

TFM260 Thin Film Monitor

Figure 4.24: Film menu
· Thickness – The desired final thickness of this layer. The deposition phase of this layer will end when this thickness is reached.
· Time Setpoint – Sets a time, after shutter open, when the shutter is automatic closed. · Manual – Allows manual shutter control
4. Film Tooling- Compensates for sensor sensitivity to the selected material. Use Crystal Tooling in the System menu to compensate for each sensor individually.
5. Sensor 1-6 – Activates/Deactivates each quartz crystal sensor to be used for the selected film. If multiple sensors are assigned to a film, their readings are averaged. If multiple sensors are assigned to a film, and one fails, it is excluded from measurements. Sensors 3, 4, 5 and 6 will not be displayed unless the optional sensor board is installed in TFM260 .
6. Material Parameters: Material: Selects a material assigned to this film. As materials change, their density and Z-Ratio is updated. Density: Material density has a significant impact on deposition calculations. Z-Factor: an empirically determined measure of the effect a material has on quartz crystal frequency change. Common materials, densities, and Z-Ratios are listed in Appendix A.
4.5.1 RATE SAMPLING
Rate sampling can extend the life of crystals. With rate sampling, the deposition rate is sampled for a period of time, then the sensor shutter is closed. Sample The time for the sensor shutter to remain open when Sampling is enabled in the System menu. Not available when Sampling is disabled in System menu. Hold The time for the sensor shutter to remain closed when Sampling is enabled in the System menu. Not available when Sampling is disabled in System menu.
4.6 SENSOR INFO MENU
The screen combines information about the individual sensors attached to the device. The data is constantly updated and refreshed. Between channels switch to using the buttons “2” – “NEXT SENS” and “3”- “PREV SENS”.
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

TFM260 Thin Film Monitor

46

Figure 4.25: Sensor Info
BeamTec Wolfgang-Paul-Str. 4, 89081 Ulm, Germany www.beamtec.de ; e-mail: info@beamtec.de tel.: +49 731 146620 0

Search

5 OPERATION – REMOTE CONTROL
TFM260 offers the following types of data communications hardware ports.
· Serial RS-232 port · Ethernet port
Both the host and server must have the same form of communications equipment and complementary setup. For serial communications, the baud rates and data word format must match. The word format for bit serial lines (RS-232) is comprised of ten signal bits: eight data bits, one start bit, one stop bit, and no parity. The eight data bits contain a byte of information or character whose ASCII value ranges from 0 to 255.
5.1 RS232 COMMUNICATION
RS-232 serial communications are accomplished through an industry standard 9-pin female connector found on the TFM260 rear panel (3.4.2). A mating male connector is required to attach a host interface. The host and TFM260 can be separated by up to 15.2 m (50 ft.) using multiconductor shielded data cable. For successful communications, the baud rate of the host and SQM-160 must match. Available baud rate options are: 2,400, 4,800, 9,600, 19,200, 38,400, 57,600, and 115,200 bps. TFM260 is configured as DCE (Data Communication Equipment).
CAUTION
Unpredictable RS-232 Unpredictable RS-232 hardware/software combinations may occasionally cause a command to not be recognized by TFM260 . Consequently, all communications should include an automatic retry procedure. If a command sent via RS-232 does not produce a response from TFM260 within three seconds, it should be sent again.
5.2 ETHERNET PORT
For Ethernet communications, TFM260 uses the static IP address 192.168.1.200. The optional Ethernet port supports only the Standard Ethernet TCP/IP protocol. TFM260 will communicate using TCP/IP on TCP port number 2101. The interface supports static and DHCP addressing. Ethernet parameters allow the IP address and the net mask to be set. A standard Ethernet cable is required to connect TFM260 through a network or hub connection.
47

Search

TFM260 Thin Film Monitor

48

5.3 COMMUNICATIONS PROTOCOL
TFM260 communicates with a host computer using an ASCII based protocol. TFM260 defaults to 19,200 baud, 8 data bits, and no parity. The baud rate can be changed in the TFM260 System menu, but is always 8 data bits with no parity.

5.4 COMMAND PACKET