ZYGO OMP-0463AQ Laser Interferometer Accessory Guide User Guide

Laser Interferometer
Accessory Guide
OMP-0463AQ

Introduction

ZYGO is the world leader in laser interferometers, launching the industry over 40 years ago. We provide flexible and versatile interferometer accessories and options to meet your unique metrology requirements. This guide provides the information you need to help you configure and specify your accessories. For accessory user instructions refer to Laser Interferometer Accessory Instructions, OMP-0634.

About ZYGO Optical Elements

This section provides background information for the optical elements listed in this guide. This includes: transmission flats (TF), reference flats (RF), transmission spheres (TS), reference spheres (RS), and  attenuation filters.
Standard optical elements accommodate surfaces with 0.1% to 40% reflectivity. For surface reflectivity greater than 40%, either an attenuation filter or a Dynaflect coated transmission element may be used to reduce the intensity of the beam returning to the interferometer.
DynaflectTM is a proprietary coating developed by ZYGO to increase the dynamic reflectivity range; these optics accommodate surfaces with 4% to 99% reflectivity.
UltraflatTM is the name of our best transmission flats; these feature premium quality components and consistent wavefront in both horizontal and vertical orientation. These elements are recommended for use with our ultra-high resolution interferometers.
Ultrasphere TMis the name of our best transmission spheres; these feature premium quality components.
These elements are also recommended for use with our ultra-high resolution interferometers.
Quality is specified using the PVr parameter over the clear aperture with the interferometer in a horizontal configuration. PVr is defined as the 36 term Zernike fit plus 3 times the rms residual of the Zernike fit.
The general operational environment specifications are temperature from 15 to 30°C with the rate of change not exceeding 1°C per 15 minutes, and relative humidity from 5 to 95%, non-condensing.
Performance of optical elements qualified with stable temperature set point between 20-23°C.
Information in this document is subject to change without notice. No liability is assumed with respect to the use of the information contained in this documentation or software, or for damages in connection with this information.

Transmission Flats (TF)

Transmission flats measure surface quality or transmitted wavefront of flat surfaces or optics. The 4 and 6-inch flats mount directly onto the corresponding size interferometer or mount.
A storage case is included with the 33 mm, 4 in. and 6 in. elements. A quality certificate is included with all elements.

ZYGO Number| Description| Clear Aperture| Quality| Operating Wavelength
---|---|---|---|---
6024-0312-01| 33 mm, 4%| 32.5 mm| λ/20 PVr| Dual-band 633 nm & 1.55 µm
6024-0420-01| 33 mm, Dynaflect| 32.5 mm| λ/20 PVr| 633 nm
6024-0314-11| 4 inch, 4%| 100 mm| λ/20 PVr| Dual-band 633 nm & 1.55 µm
6024-0385-11| 4 inch, Dynaflect| 100 mm| λ/20 PVr| 633 nm
6024-0485-11| 4 inch, 4%, Ultraflat| 100 mm| λ/50 PVr| Dual-band 633 nm & 1.053/1.064 µm
6024-0485-14| 4 inch, Dynaflect, Ultraflat| 100 mm| λ/50 PVr| 633 nm
6024-0341-11| 4 inch, long radius| 100 mm| λ/20 PVr| 633 nm
6024-0317-11| 6 inch, 4%| 150 mm| λ/20 PVr| Dual-band 633 nm & 1.55 µm
6024-0419-11| 6 inch, Dynaflect| 150 mm| λ/20 PVr| 633 nm
6024-0488-11| 6 inch, 4%, Ultraflat| 150 mm| λ/40 PVr| Dual-band 633 nm & 1.053/1.064 µm
6024-0488-14| 6 inch, Dynaflect, Ultraflat| 150 mm| λ/40 PVr| 633 nm
6068-0452-01| 12 inch, 4%| 300 mm| λ/15 PVr| Any – uncoated back surface
6068-0452-11| 12 inch, 4%| 300 mm| λ/25 PVr| Any – uncoated back surface
6068-0453-01| 12 inch, Dynaflect| 300 mm| λ/15 PVr| 633 nm
6068-0453-04| 12 inch, Dynaflect| 300 mm| λ/25 PVr| 633 nm
6068-0456-01| 18 inch, 4%| 450 mm| λ/15 PVr| Any – uncoated back surface
6068-0456-11| 18 inch, 4%| 450 mm| λ/25 PVr| Any – uncoated back surface
6068-0457-01| 18 inch, Dynaflect| 450 mm| λ/15 PVr| 633 nm
6068-0457-04| 18 inch, Dynaflect| 450 mm| λ/25 PVr| 633 nm

Reference Flats (RF)

Use an RF with a TF when measuring the transmitted wavefront of flat optics. The 4 and 6-inch flats mount onto the corresponding size interferometer or mount. A storage case is included with the 33 mm, 4 in. and 6 in. elements. A quality certificate is included with all elements.

Reference Spheres (RS)

• The 25 mm RS has λ/20 PVr surface quality in the central f/0.65 subaperture. Use an RS with a TS when measuring the transmitted wavefront of spherical optics. Spheres mount onto the Adjustable Mount with a Self Centering Element Holder. A storage case and quality certificate are included with each element.

Transmission Spheres (TS)

Transmission spheres measure surface quality or transmitted wavefront of concave or convex surfaces or optics. The spheres mount directly on the corresponding interferometer or mount. The 6 inch spheres have integral lift handles. A storage case and quality certificate are included with each element.
Transmission spheres are specified at an operational wavelength of 633 nm. For UV and IR transmission elements, contact ZYGO.

TS Part Coverage

TS Diameter| f/#| R1 (mm)| D1 (mm)| D0 (mm)| R2 (mm)
---|---|---|---|---|---
4 inch| f/0.65| f/0.65| 59.5| 62.0| 36
4 inch| f/0.75| 48.2| 64.3| 65.5| 45
4 inch| f/1.5| 121.2| 80.8| 93.7| 115
4 inch| f/3.3| 298| 90.3| 89.2| 282
4 inch| f/7.1| 681.7| 96| 98.1| 674
4 inch| f/10.7| 1039.2| 97.1| 100.4| 1030
6 inch| f/0.8| 80| 100| 104.9| 77
6 inch| f/1.1| 123.3| 112.1| 128.4| 118
6 inch|  f/2.2| 290.0| 131.8| 164.1|  274
6 inch| f/3.5| 475.8| 135.9| 164.1| 458
6 inch| f/5.4| 776.4| 143.8| 164.1|  761
6 inch| f/7.2| 1045| 145.1| 164.1| 1022

R1 is the radius of the TS reference optic.
D1 is the TS clear aperture (R1÷f/#).
D0 is the housing opening diameter.
R2 is the maximum measurable convex part radius when part diameter is larger than D0.
For best concave test part coverage use a TS with f/# faster (smaller) than part R/# (radius of curvature ÷ diameter).
For best convex test part coverage use a TS with f/# faster than part R/#; coverage is limited if the part diameter is larger than the TS clear aperture; if using an attenuation filter, the measurable part radius is reduced.
To calculate test part coverage, use the ZYGO
Transmission Sphere Selector Tool, OMP-0495.
For part coverage questions, contact ZYGO.

Converger TS and Diverger TS

ZYGO Number| Type| f/#| Quality (PVr)| Max. Radius or Shorter (mm)| Min. Radius or Longer (mm)
---|---|---|---|---|---
6024-0283-01| Diverger| f/15| λ/10| + 1500| -1500
6024-0284-01| Converger| f/15| λ/10
6024-0285-01| Diverger| f/25| λ/10| + 2500| -2500
6024-0286-01| Converger| f/25| λ/10
6024-0287-01| Diverger| f/35| λ/10| + 3500| -3500
6024-0288-01| Converger| f/35| λ/10
6024-0289-01| Diverger| f/45| λ/10| + 4500| -4500
6024-0290-01| Converger| f/45| λ/10
6024-0291-01| Diverger| f/80| λ/10| + 8000| -8000
6024-0292-01| Converger| f/80| λ/10

The Converger TS is used for testing midrange convex spherical surfaces. The test surface radius must be less than or equal to the Converger radius. The Diverger TS is used for testing midrange concave spherical surfaces.
The test surface radius must be greater than or equal to the Diverger radius, so the center of curvature is coincident with focus. A negative radius denotes a concave surface; a positive value denotes a convex surface.
The Converger TS and Converger TS mount to a 4 inch bayonet interface. A storage case and quality certificate are included with each element.

Mounts

ZYGO Number| Description|
---|---|---
6500-0105-13| 4 in. Accessory Receptacle
Mounts to output of interferometer or Phase Measuring Receptacle (PMR). Features a 4 inch bayonet interface. Provides 4.25 in. (108 mm) beam centerline height and delivers ±2° tip and tilt adjustment.|
6500-0111-13| 6 in. Accessory Receptacle
Mounts to output of interferometer or Phase Measuring Receptacle (PMR). Features a 6 inch bayonet interface. Provides 4.25 in. (108 mm) beam centerline height and delivers ±2° tip and tilt adjustment.|
6500-0104-53| 4 in. Adjustable Mount
Holds 4 inch diameter test parts or optics. Provides 4.25 in. (108 mm) beam centerline height and delivers ±2° tip and tilt adjustment. Accepts matching accessories.|
6500-0106-53| 6 in. Adjustable Mount
Holds 6 inch diameter test parts or optics. Provides 4.25 in. (108 mm) beam centerline height and delivers ±2° tip and tilt adjustment. Accepts matching accessories.|
6500-0475-01| 5-Axis Mount
Holds 4 inch diameter accessories and provides 13 mm X and Y adjustment, 50 mm Z adjustment, and ±2° tip and tilt adjustment. The beam centerline height is 4.25 in. (108 mm).
Add-ons: 6 in. Adapter (6500-0469-01) for use with 6 inch accessories Mount Guide (6500-0479-01) for use with rail kit|
6500-0110-03| X-Y Stage
Attaches to Accessory Receptacle or Adjustable Mount. Provides 13 mm X and Y adjustment. Accepts 6 inch diameter accessories.|
6500-0656-50| 2-Axis Motorized Mount Kit
Attaches to 4 or 6 inch 2-Axis Adjustable Mount (not included). Provides automated tip/tilt and/or auto null capability. IncludeJoystick and Electronic Enclosure (not shown). Requires CAN based mainframe; and MetroPro 9.0 or later, or Mx software.|
6024-0161-01| 4 in. Self Centering Element Holder (SCEH)
Mounts to 4 inch bayonet interface. Holds elements of various sizes from 5 mm to 100 mm diameter. The posts touching the test part are fixed.|
6500-0107-01| 6 in. Self Centering Element Holder (SCEH)
Mounts to 6 inch bayonet interface and provides part rotation. Holds elements of various sizes from 5 mm to 200 mm diameter. Includes stackable V-block posts and straight posts.|
6500-0130-01| Universal Element Holder
Mounts to 6 inch bayonet interface and provides a solid surface for holding non-round and odd shaped test parts. Features 1/420 UNC threaded holes.
Includes adjustable hardware to hold test parts
(as shown).|
6500-0137-01| PVC Platform
Mounts to 6 inch bayonet interface and serves as part platform or custom fixture base for the downward interferometer configuration.|
6500-0132-01| Accessory Adapter (6 in. – 4 in. Bayonet)
Mounts to 6 inch bayonet interface and enables use of 4 in. accessories.|
6500-0469-01| 6 in. Adapter Plate
Enables the 4 inch 5-Axis Rail Mount to accept 6 in. accessories.
Attaches to front face of 5-Axis Rail Mount or the standard 5-Axis Mount.|
6024-0517-01| 25 mm/33 mm Adapter (4 in. – 25 mm/33 mm)
Mounts to 4 in. Accessory Receptacle or Adjustable Mount.
Enables use of 25 mm/33 mm accessories with bayonet
interface.|
6024-0456-11| 4 in. Retroreflector Assembly
Mounts to 4 in. Adjustable Mount. Used when fine alignment of the transmission flat is required. Recommended for Dynaflect Transmission Flats, interferometers with Ring of Fire or CARS options, and IR interferometers.|

Output Accessories

ZYGO Number| Description|
---|---|---
6024-0322-01| 4 in. Attenuation Filter
An attenuation filter is used to optimize measurement of highly
reflective parts and helps produce good fringe contrast. The
filter is positioned between the test part and a standard TF.
Specifications
Quality: ≤λ/10 transmitted wavefront (PVr)
Transmittance (4 in. filter): 20 ±4% @ 10⁰ angle of incidence
@ λ = 632.8 nm thru the pellicle|
6024-0323-01| 6 in. Attenuation Filter
A 6 inch version of the filter.|
6024-0380-03| 4 in. to 6 in. Aperture Converter (vertical)
Mounts to 4 inch bayonet interface and converts 4 in. aperture
to 6 in. for interferometers used in an upward or downward
orientation.|
6024-0380-02| 4 in. to 6 in. Aperture Converter (horizontal)
Mounts to 4 inch bayonet interface and converts 4 in. aperture
to 6 in. for interferometers used in a horizontal orientation.
Includes a mounting stand to provide rigidity.|
6024-0429-01| 4 in. to 25 mm Aperture Converter
Mounts to 4 inch bayonet interface and converts 4 in. aperture
to 25 mm. The converter has a focus range from +75 mm
to -275 mm.|
6500-0147-13| PMR Assembly
The Phase Modulation Receptacle assembly enables piezo
driven mechanical phase shifting. The assembly mounts to
interferometer mainframe.|
1115-801-070| PMR Extension Cable
10 ft (300 cm) long cable used when remotely mounting the
PMR.|
6506-0592-03| IR Alignment Accessory
Provides rough alignment of parts when using an infrared
interferometer. Mounts to the mainframe’s Accessory
Receptacle 4 inch bayonet interface.|

Remotes

ZYGO Number| Description|
---|---|---
6500-0559-14| Wired Remote
Add to or replace your existing wired remote with this industrialstrength
remote. Features Align/View, Measure, Focus, Zoom, and Source buttons.|
6500-0559-13| Wireless Remote Kit
Adds a wireless remote to a system. This kit includes a wired remote
plus a wireless remote. The wireless remote has approximately a 100
ft range. The wired remote serves as the antenna. Compatible with
CAN based mainframes.
1115-800-345| Remote Extension Cable
This 10-meter cable enables you to use your wired remote at greater
distances from the mainframe.

Vibration Isolation and Tables

ZYGO Number| Description|
---|---|---
6090-0152-01| Granite Top
Horizontal granite top only; no isolators.
Measures 96 x 30 x 6 in.|
6068-0405-01 (1/4-20 holes)
6068-0405-01M (M6 holes)6068-0405-01N (no holes)| Stainless Steel Optical Table, 8 ft
An 8 ft horizontal stainless-steel table with four 28 in. isolator posts with casters. Isolates the interferometer from external vibration. Available
with or without holes.
Measures 96 x 36 x 8 in.|
6068-0405-02 (1/4-20 holes)
6068-0405-02M (M6 holes)
6068-0405-02N (no holes)| Stainless Steel Optical Table, 10 ft
An 8 ft horizontal stainless-steel table with four 24 in. isolator posts with casters. Isolates the interferometer from external vibration. Available
with or without holes.
Measures 120 x 48 x 12 in.|
1840-700-104| Isolation System & Workstation
Isolation system with work surface next to an interferometer in a vertical configuration. Isolates the interferometer from external vibration. Counterweighted for optimum performance.
For use with 1 m and 1.5 m Vertical Flat Kits only.
Measures 48 x 36 x 30 in.|
1840-700-015| Stainless Steel Table with Isolation
Isolation system with a stainless-steel table to accommodate an interferometer in a vertical configuration. Isolates the interferometer from
external vibration. Counterweighted for optimum performance.
Measures 24 x 24 x 20 in.|
1840-700-118| Stainless Steel Table with Isolation
Isolation system with a stainless-steel table to accommodate an interferometer in a vertical configuration. Isolates the interferometer from
external vibration. Counterweighted for optimum performance.
For use with 2 m Vertical Kit only.
Measures 30 x 30 x 20 in.|
6300-2130-01| Worktable
Small work-height standalone table for a computer. Provides a work surface near instrument. Includes one shelf to hold components.
Measures 34 x 28 x 35 in.|
6500-0179-02| Optical Table Mounting Kit
Mounting hardware for horizontal tables with threaded holes. Secures the interferometer mainframe to the optical table. Accommodates
both English 1 inch and metric 25 mm hole spacing.|

Horizontal Radius of Curvature

Description
Horizontal radius metrology requires a Rail and a corresponding 5-Axis Rail Mount. Decide between the encoded or interferometric solutions and then select the desired rail length and whether the mount is manual or motorized.
The Encoded solution provides precise (1 µm) z-axis position feedback directly to the software via an encoder.
The Interferometric solution provides ultra-precise (80 nm) z-axis position feedback directly to the software via a displacement measuring interferometer (dmi).
The manual mount encoded radius configuration is compatible with either MetroPro (9.0 or later) or Mx software and displays position data on a digital readout. This is the only configuration that does not require a CAN based interferometer.
The manual mount interferometric radius configuration requires a CAN based interferometer and can operate with either MetroPro (9.0 or later) or Mx software.
All motorized radius configurations require a CAN based interferometer and Mx software. The motorized version provides autonull capability.
Rails
Rails are made of high-grade extruded aluminum. The rail attaches and aligns to the mainframe with a ball mount interface or it can be mounted directly to the optical table.
The interferometric rail has a 1 mm graduated ruler scale. The encoded rail has an encoder strip and is calibrated for linearity to less than 50 µm over the length of the rail.
Zygo numbers for rails are listed with the radius configurations.
Picking an Optical Table
A 10 ft optical table is recommended for most horizontal radius of curvature solutions using a 1.5 m or 2 m rail.
A 12 ft table is required when using a longer 6 in mainframe with a 2 m rail.
An 8 ft table can be used with a 4 in. mainframe and the 1 m rail or 1.5 m encoded rail if an optional side rail foot kit (6500-0340-01) is used. For assistance in choosing radius of curvature components and corresponding transmission spheres, contact ZYGO.
Rails 5-Axis Mount
The 5-Axis Rail Mount provides a convenient 4.25 in.
(108 mm) beam height and accepts 4 in. accessories. The manual mount slides on pads. The motorized mount features motorized axes in XYZ and is on rollers.
All mounts provide for easy translation between catseye and confocal positions and feature a quick-release clamp that assures alignment to the rail and the optical axis.
Mount Add-ons:
4 in. Self Centering Element Holder 6024-0161-01
6 in. Adapter Plate 6500-0469-01
6 in. Self Centering Element Holder 6500-0107-01

Radius of Curvature Configurations

| Manual 5-Axis Radius Kit| Motorized 5-Axis Radius Kit
---|---|---
Encoded| Kit 6500-0478-11 includes a manual 5-axis rail mount
with an integrated encoder sensor
Add encoded rail:
1 m Rail 6500-0450-12
1.5 m Rail 6500-0450-02
2 m Rail 6500-0450-22| Kit 6500-0478-13 includes a motorized XYZ (manual tip/tilt) rail mount with an integrated encoder sensor
Add encoded rail:
1.5 m Rail 6500-0450-04
2 m Rail 6500-0450-24
Interferometric| Kit 6500-0478-21 includes a manual 5-axis rail mount
with an integral retroreflector
Add interferometric rail:
1 m Rail 6500-0450-11
1.5 m Rail 6500-0450-01
2 m Rail 6500-0450-21| Kit 6500-0478-23 includes a motorized XYZ (manual tip/tilt) rail mount with an integral retroreflector
Add interferometric rail:
1.5 m Rail 6500-0450-03
2 m Rail 6500-0450-23

Horizontal Radius of Curvature Mount Accessory

ZYGO Number| Description|
---|---|---
6500-0448-01| Adjustable Clamp Mount
Add-on clamp for a basic 2-Axis Adjustable Mount. The
mount attaches to the side of the mount (not included).
Provides a simple non-encoded rail clamp interface. Use
for quick alignment of test parts. Not intended for radius
metrology.|

Vertical Kits

ZYGO Number| Description|
---|---|---
6500-0166-15| Vertical Workstation Kit, 1.5 m for 4 in. Mainframe
This kit features 1.5 m rods and part stage with a 4 in. accessory
receptacle. The part stage is made up of a manual x-y stage, tip/tilt
accessory receptacle, and a manual z-axis.
Includes: three 1.5 rods, baseplate, safety baseplate (not shown), two
mounting arms, and part stage. Interferometer not included.|
6500-0166-16| Vertical Workstation Kit, 1.5 m for 6 in. Mainframe
This kit features 1.5 m rods and part stage with a 6 in. accessory
receptacle. The part stage is made up of a manual x-y stage, tip/tilt
accessory receptacle, and a manual z-axis.
Includes: three 1.5 m rods, baseplate, safety baseplate, two mounting
arms, and part stage. Interferometer not included.
6500-0166-17| Vertical Workstation Kit, 2 m for 6 in. Mainframe
This kit features 2 m rods and part stage with a 6 in. accessory
receptacle. The part stage is made up of a manual x-y stage, tip/tilt
accessory receptacle, and a manual z-axis.
Includes: three 2 m rods, baseplate, safety baseplate, two mounting
arms, and part stage. Interferometer not included.
6500-0164-13| Vertical Flat Only Kit, 1 m for 4 in. Mainframe
This kit is designed to measure flat optics in a downward configuration
with a 4 inch mainframe.
Includes: three 1 m rods, baseplate, safety baseplate, two mounting
arms, 6 in. accessory receptacle, and a PVC platform. Interferometer
not included.|
6500-0164-14| Vertical Flat Only Kit, 1.5 m for 6 in. Mainframe
This kit is designed to measure flat optics in a downward configuration
with a 6 inch mainframe.
Includes: three 1.5 m rods, baseplate, safety baseplate, two mounting
arms, 6 in. accessory receptacle, and a PVC platform. Interferometer
not included.
6500-0165-03| Short Radius Kit, for 4 in. Mainframe
This kit features 1.5 m rods and a small optics workstation; it is
designed for a 4 inch mainframe. The small optics workstation is made
up of manual x-y stage and a manual or motorized encoded z-axis.
Includes: three rods, baseplate, safety baseplate, two mounting arms,
and a small optics workstation. Interferometer not included.
Add-ons:
Motorized Z-Axis 6500-0651-01
6500-1065-03| Mainframe Mounting Bracket
These brackets are used to secure the interferometer to the rods. Also
known as L bracket or mounting arm.
A third bracket is required to convert a downward to an upward
looking configuration.

Information subject to change without notice.

ZYGO CORPORATION
LAUREL BROOK ROAD • MIDDLEFIELD, CT 06455
PHONE: 860 347-8506 •WWW.ZYGO.COM
OMP-0463AQ 04/23 © 2023 Zygo Corporation
All rights reserved.

Documents / Resources

| ZYGO OMP-0463AQ Laser Interferometer Accessory Guide [pdf] User Guide
OMP-0463AQ, OMP-0634, OMP-0463AQ Laser Interferometer Accessory Guide, Laser Interferometer Accessory Guide, Interferometer Accessory Guide, Accessory Guide
---|---

References

• ZYGO | Precision Optical Metrology | Optical Components

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